JP6685392B2 - 付加製造プロセスを用いて高機能研磨パッドを形成する方法及び装置 - Google Patents

付加製造プロセスを用いて高機能研磨パッドを形成する方法及び装置 Download PDF

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Publication number
JP6685392B2
JP6685392B2 JP2018519328A JP2018519328A JP6685392B2 JP 6685392 B2 JP6685392 B2 JP 6685392B2 JP 2018519328 A JP2018519328 A JP 2018519328A JP 2018519328 A JP2018519328 A JP 2018519328A JP 6685392 B2 JP6685392 B2 JP 6685392B2
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Japan
Prior art keywords
polishing
layer
polishing pad
pad
composition
Prior art date
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JP2018519328A
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English (en)
Japanese (ja)
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JP2018533487A5 (enExample
JP2018533487A (ja
Inventor
シヴァパキア ガナパティアッパン，
シヴァパキア ガナパティアッパン，
ボイ フー，
ボイ フー，
アシュウィン チョカリンガム，
アシュウィン チョカリンガム，
ダニエル レッドフィールド，
ダニエル レッドフィールド，
ラジーブ バジャージ，
ラジーブ バジャージ，
マヘンドラ シー． オリラル，
マヘンドラ シー． オリラル，
ホウ ティ−． ウン，
ホウ ティ−． ウン，
ジェーソン ジー． ファン，
ジェーソン ジー． ファン，
マユ ヤマムラ，
マユ ヤマムラ，
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Applied Materials Inc
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Applied Materials Inc
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Publication date
Priority claimed from US14/885,950 external-priority patent/US10384330B2/en
Priority claimed from US14/887,240 external-priority patent/US10821573B2/en
Priority claimed from US14/920,801 external-priority patent/US10875145B2/en
Priority claimed from US15/002,384 external-priority patent/US10875153B2/en
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of JP2018533487A publication Critical patent/JP2018533487A/ja
Publication of JP2018533487A5 publication Critical patent/JP2018533487A5/ja
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B24D18/0045—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for by stacking sheets of abrasive material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/22—Lapping pads for working plane surfaces characterised by a multi-layered structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/001—Manufacture of flexible abrasive materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/04—Zonally-graded surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B24D18/009—Tools not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28—Resins or natural or synthetic macromolecular compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/10—Processes of additive manufacturing
    • B29C64/106—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material
    • B29C64/112—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using individual droplets, e.g. from jetting heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y10/00—Processes of additive manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y80/00—Products made by additive manufacturing

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
JP2018519328A 2015-10-16 2016-10-06 付加製造プロセスを用いて高機能研磨パッドを形成する方法及び装置 Active JP6685392B2 (ja)

Applications Claiming Priority (23)

Application Number Priority Date Filing Date Title
US14/885,950 US10384330B2 (en) 2014-10-17 2015-10-16 Polishing pads produced by an additive manufacturing process
US14/885,950 2015-10-16
US14/887,240 2015-10-19
US14/887,240 US10821573B2 (en) 2014-10-17 2015-10-19 Polishing pads produced by an additive manufacturing process
US14/920,801 US10875145B2 (en) 2014-10-17 2015-10-22 Polishing pads produced by an additive manufacturing process
US14/920,801 2015-10-22
US201662280537P 2016-01-19 2016-01-19
US62/280,537 2016-01-19
US15/002,384 2016-01-20
US15/002,384 US10875153B2 (en) 2014-10-17 2016-01-20 Advanced polishing pad materials and formulations
US201662304134P 2016-03-04 2016-03-04
US62/304,134 2016-03-04
US201662323599P 2016-04-15 2016-04-15
US62/323,599 2016-04-15
US201662331234P 2016-05-03 2016-05-03
US62/331,234 2016-05-03
US201662339807P 2016-05-21 2016-05-21
US62/339,807 2016-05-21
US201662380334P 2016-08-26 2016-08-26
US201662380015P 2016-08-26 2016-08-26
US62/380,334 2016-08-26
US62/380,015 2016-08-26
PCT/US2016/055793 WO2017066077A1 (en) 2015-10-16 2016-10-06 Method and apparatus for forming advanced polishing pads using an additive manufacturing process

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2020063448A Division JP7009542B2 (ja) 2015-10-16 2020-03-31 付加製造プロセスを用いて高機能研磨パッドを形成する方法及び装置

Publications (3)

Publication Number Publication Date
JP2018533487A JP2018533487A (ja) 2018-11-15
JP2018533487A5 JP2018533487A5 (enExample) 2019-11-21
JP6685392B2 true JP6685392B2 (ja) 2020-04-22

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JP2018519328A Active JP6685392B2 (ja) 2015-10-16 2016-10-06 付加製造プロセスを用いて高機能研磨パッドを形成する方法及び装置
JP2020063448A Active JP7009542B2 (ja) 2015-10-16 2020-03-31 付加製造プロセスを用いて高機能研磨パッドを形成する方法及び装置
JP2022002501A Active JP7434378B2 (ja) 2015-10-16 2022-01-11 付加製造プロセスを用いて高機能研磨パッドを形成する方法及び装置

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JP2022002501A Active JP7434378B2 (ja) 2015-10-16 2022-01-11 付加製造プロセスを用いて高機能研磨パッドを形成する方法及び装置

Country Status (7)

Country Link
EP (1) EP3362224B1 (enExample)
JP (3) JP6685392B2 (enExample)
KR (2) KR102584551B1 (enExample)
CN (6) CN112025544B (enExample)
SG (1) SG10202106436WA (enExample)
TW (4) TWI816269B (enExample)
WO (1) WO2017066077A1 (enExample)

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