KR102561996B1 - 펌핑 유닛 및 용도 - Google Patents

펌핑 유닛 및 용도 Download PDF

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Publication number
KR102561996B1
KR102561996B1 KR1020197032270A KR20197032270A KR102561996B1 KR 102561996 B1 KR102561996 B1 KR 102561996B1 KR 1020197032270 A KR1020197032270 A KR 1020197032270A KR 20197032270 A KR20197032270 A KR 20197032270A KR 102561996 B1 KR102561996 B1 KR 102561996B1
Authority
KR
South Korea
Prior art keywords
pumping
stage
vacuum pump
exhaust volume
primary
Prior art date
Application number
KR1020197032270A
Other languages
English (en)
Korean (ko)
Other versions
KR20190132483A (ko
Inventor
필립페 드하르볼레
Original Assignee
파이퍼 배큠
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 파이퍼 배큠 filed Critical 파이퍼 배큠
Publication of KR20190132483A publication Critical patent/KR20190132483A/ko
Application granted granted Critical
Publication of KR102561996B1 publication Critical patent/KR102561996B1/ko

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/30—Use in a chemical vapor deposition [CVD] process or in a similar process
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/18—Pressure
    • F04C2270/185—Controlled or regulated
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/21—Pressure difference
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2210/00—Working fluid
    • F05B2210/10—Kind or type
    • F05B2210/12—Kind or type gaseous, i.e. compressible

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
KR1020197032270A 2017-04-07 2018-03-21 펌핑 유닛 및 용도 KR102561996B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR1753029A FR3065040B1 (fr) 2017-04-07 2017-04-07 Groupe de pompage et utilisation
FR1753029 2017-04-07
PCT/EP2018/057211 WO2018184853A1 (fr) 2017-04-07 2018-03-21 Groupe de pompage et utilisation

Publications (2)

Publication Number Publication Date
KR20190132483A KR20190132483A (ko) 2019-11-27
KR102561996B1 true KR102561996B1 (ko) 2023-07-31

Family

ID=59409437

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020197032270A KR102561996B1 (ko) 2017-04-07 2018-03-21 펌핑 유닛 및 용도

Country Status (8)

Country Link
US (1) US11078910B2 (fr)
EP (1) EP3607204B1 (fr)
JP (1) JP2020513088A (fr)
KR (1) KR102561996B1 (fr)
CN (1) CN110506163B (fr)
FR (1) FR3065040B1 (fr)
TW (1) TWI735764B (fr)
WO (1) WO2018184853A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3089261B1 (fr) * 2018-12-03 2022-05-13 Pfeiffer Vacuum Groupe de pompage
BR112021017117A2 (pt) * 2019-03-14 2021-11-03 Ateliers Busch Sa Bomba a seco para gases e conjunto de uma pluralidade de bombas a seco para gases
FR3098869B1 (fr) * 2019-07-17 2021-07-16 Pfeiffer Vacuum Groupe de pompage
KR20220107211A (ko) * 2019-12-04 2022-08-02 아뜰리에 부쉬 에스.아. 중복 펌핑 시스템과 이 펌핑 시스템에 의한 펌핑 방법
FR3118650B1 (fr) * 2021-01-05 2023-03-24 Pfeiffer Vacuum Etage de pompage et pompe à vide sèche

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000064975A (ja) * 1998-06-17 2000-03-03 Boc Group Plc:The 真空ポンプの改良
JP2003343469A (ja) * 2002-03-20 2003-12-03 Toyota Industries Corp 真空ポンプ
JP2006520873A (ja) * 2003-03-19 2006-09-14 株式会社荏原製作所 容積型真空ポンプ
JP2011163150A (ja) * 2010-02-05 2011-08-25 Toyota Industries Corp 水素ガスの排気方法及び真空ポンプ装置
JP2015010510A (ja) * 2013-06-27 2015-01-19 株式会社荏原製作所 真空ポンプシステム、真空ポンプの異常予兆の報知方法

Family Cites Families (21)

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Publication number Priority date Publication date Assignee Title
JPS5030654Y1 (fr) * 1970-10-31 1975-09-08
KR0133154B1 (ko) * 1994-08-22 1998-04-20 이종대 무단 압축형 스크류식 진공펌프
JP3490029B2 (ja) * 1999-07-15 2004-01-26 株式会社宇野澤組鐵工所 ロータリ形多段真空ポンプ
WO2003023229A1 (fr) * 2001-09-06 2003-03-20 Ulvac, Inc. Systeme de pompe a vide et procede de fonctionnement d'un systeme de pompe a vide
JP3673743B2 (ja) * 2001-09-27 2005-07-20 大晃機械工業株式会社 スクリュー式真空ポンプ
JP2003278680A (ja) * 2002-03-26 2003-10-02 Aisin Seiki Co Ltd 多段式真空ポンプ装置
FR2883934B1 (fr) * 2005-04-05 2010-08-20 Cit Alcatel Pompage rapide d'enceinte avec limitation d'energie
GB0524649D0 (en) * 2005-12-02 2006-01-11 Boc Group Plc Multi-stage roots vacuum pump
US8662869B2 (en) * 2007-11-14 2014-03-04 Ulvac, Inc. Multi-stage dry pump
US8328542B2 (en) * 2008-12-31 2012-12-11 General Electric Company Positive displacement rotary components having main and gate rotors with axial flow inlets and outlets
WO2011039812A1 (fr) * 2009-09-30 2011-04-07 樫山工業株式会社 Pompe à vide volumétrique sèche
JP5284940B2 (ja) 2009-12-24 2013-09-11 アネスト岩田株式会社 多段真空ポンプ
GB0922564D0 (en) * 2009-12-24 2010-02-10 Edwards Ltd Pump
TWI518245B (zh) * 2010-04-19 2016-01-21 荏原製作所股份有限公司 乾真空泵裝置、排氣單元，以及消音器
EP2710267B1 (fr) * 2011-05-20 2017-07-12 BP Exploration Operating Company Limited Pompe
JP5677202B2 (ja) * 2011-06-02 2015-02-25 株式会社荏原製作所 真空ポンプ
GB2497957B (en) * 2011-12-23 2018-06-27 Edwards Ltd Vacuum pumping
GB2498807A (en) * 2012-01-30 2013-07-31 Edwards Ltd Multi-stage vacuum pump with solid stator
CN204572459U (zh) * 2015-02-28 2015-08-19 淄博沃德气体设备有限公司 爪泵转子罗茨泵转子组合的复合泵
JP2017031892A (ja) * 2015-08-03 2017-02-09 アルバック機工株式会社 真空排気装置及びその運転方法
WO2017031807A1 (fr) * 2015-08-27 2017-03-02 上海伊莱茨真空技术有限公司 Pompe à vide non coaxiale à multiples chambres d'entraînement

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000064975A (ja) * 1998-06-17 2000-03-03 Boc Group Plc:The 真空ポンプの改良
JP2003343469A (ja) * 2002-03-20 2003-12-03 Toyota Industries Corp 真空ポンプ
JP2006520873A (ja) * 2003-03-19 2006-09-14 株式会社荏原製作所 容積型真空ポンプ
JP2011163150A (ja) * 2010-02-05 2011-08-25 Toyota Industries Corp 水素ガスの排気方法及び真空ポンプ装置
JP2015010510A (ja) * 2013-06-27 2015-01-19 株式会社荏原製作所 真空ポンプシステム、真空ポンプの異常予兆の報知方法

Also Published As

Publication number Publication date
US20200191147A1 (en) 2020-06-18
CN110506163B (zh) 2021-09-24
FR3065040A1 (fr) 2018-10-12
EP3607204B1 (fr) 2021-03-10
CN110506163A (zh) 2019-11-26
JP2020513088A (ja) 2020-04-30
FR3065040B1 (fr) 2019-06-21
EP3607204A1 (fr) 2020-02-12
KR20190132483A (ko) 2019-11-27
TWI735764B (zh) 2021-08-11
US11078910B2 (en) 2021-08-03
TW201837310A (zh) 2018-10-16
WO2018184853A1 (fr) 2018-10-11

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