FR3118650B1 - Etage de pompage et pompe à vide sèche - Google Patents

Etage de pompage et pompe à vide sèche Download PDF

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Publication number
FR3118650B1
FR3118650B1 FR2100053A FR2100053A FR3118650B1 FR 3118650 B1 FR3118650 B1 FR 3118650B1 FR 2100053 A FR2100053 A FR 2100053A FR 2100053 A FR2100053 A FR 2100053A FR 3118650 B1 FR3118650 B1 FR 3118650B1
Authority
FR
France
Prior art keywords
vacuum pump
dry vacuum
pumping stage
compression chamber
rotors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR2100053A
Other languages
English (en)
Other versions
FR3118650A1 (fr
Inventor
Lucas Rey
Laurent Bizet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum SAS
Original Assignee
Pfeiffer Vacuum SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum SAS filed Critical Pfeiffer Vacuum SAS
Priority to FR2100053A priority Critical patent/FR3118650B1/fr
Priority to KR1020237026608A priority patent/KR20230125075A/ko
Priority to PCT/EP2021/087466 priority patent/WO2022148670A1/fr
Publication of FR3118650A1 publication Critical patent/FR3118650A1/fr
Application granted granted Critical
Publication of FR3118650B1 publication Critical patent/FR3118650B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/10—Outer members for co-operation with rotary pistons; Casings
    • F01C21/104—Stators; Members defining the outer boundaries of the working chamber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/10—Stators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/20—Rotors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2250/00—Geometry
    • F04C2250/10—Geometry of the inlet or outlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2250/00—Geometry
    • F04C2250/30—Geometry of the stator

Abstract

Etage de pompage (1) d’une pompe à vide (100) sèche comportant deux rotors (3, 4) présentant respectivement au moins deux lobes présentant une torsion hélicoïdale (α) autour d’un axe longitudinal (I-I), l’entrée (7) et la sortie (8) sont ménagées dans des surfaces périphériques cylindriques de la chambre de compression (5) au niveau des chevauchements des cavités cylindriques (5a, 5b), dans des côtés opposés d’un plan transversal médian (P) de la chambre de compression (5) et de part et d’autre d’un plan longitudinal (L) de la chambre de compression (5) défini par les axes (I-I) des rotors (3, 4). Figure d’abrégé : Figure 1
FR2100053A 2021-01-05 2021-01-05 Etage de pompage et pompe à vide sèche Active FR3118650B1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR2100053A FR3118650B1 (fr) 2021-01-05 2021-01-05 Etage de pompage et pompe à vide sèche
KR1020237026608A KR20230125075A (ko) 2021-01-05 2021-12-23 펌핑 스테이지 및 건식 진공 펌프
PCT/EP2021/087466 WO2022148670A1 (fr) 2021-01-05 2021-12-23 Étage de pompage et pompe à vide sèche

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2100053 2021-01-05
FR2100053A FR3118650B1 (fr) 2021-01-05 2021-01-05 Etage de pompage et pompe à vide sèche

Publications (2)

Publication Number Publication Date
FR3118650A1 FR3118650A1 (fr) 2022-07-08
FR3118650B1 true FR3118650B1 (fr) 2023-03-24

Family

ID=74860187

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2100053A Active FR3118650B1 (fr) 2021-01-05 2021-01-05 Etage de pompage et pompe à vide sèche

Country Status (3)

Country Link
KR (1) KR20230125075A (fr)
FR (1) FR3118650B1 (fr)
WO (1) WO2022148670A1 (fr)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1119888A (fr) * 1954-02-27 1956-06-26 Heraeus Gmbh W C Pompe mécanique à vide poussé du type roots
JP3991918B2 (ja) * 2003-05-19 2007-10-17 株式会社豊田自動織機 ルーツポンプ
KR20080028173A (ko) * 2006-09-26 2008-03-31 한라공조주식회사 공기 압축기
FR2921444A1 (fr) 2007-09-26 2009-03-27 Alcatel Lucent Sas Pompe a vide a deux rotors helicoidaux.
EP2180188B1 (fr) * 2008-10-24 2016-09-07 Edwards Limited Améliorations dans et concernant des pompes à racines
FR3065040B1 (fr) * 2017-04-07 2019-06-21 Pfeiffer Vacuum Groupe de pompage et utilisation

Also Published As

Publication number Publication date
FR3118650A1 (fr) 2022-07-08
KR20230125075A (ko) 2023-08-28
WO2022148670A1 (fr) 2022-07-14

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