FR3089261B1 - Groupe de pompage - Google Patents
Groupe de pompage Download PDFInfo
- Publication number
- FR3089261B1 FR3089261B1 FR1872247A FR1872247A FR3089261B1 FR 3089261 B1 FR3089261 B1 FR 3089261B1 FR 1872247 A FR1872247 A FR 1872247A FR 1872247 A FR1872247 A FR 1872247A FR 3089261 B1 FR3089261 B1 FR 3089261B1
- Authority
- FR
- France
- Prior art keywords
- vacuum pump
- outlet
- rotors
- roots
- inlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000005086 pumping Methods 0.000 title abstract 4
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
- F04C23/003—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle having complementary function
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/04—Heating; Cooling; Heat insulation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/04—Heating; Cooling; Heat insulation
- F04C29/042—Heating; Cooling; Heat insulation by injecting a fluid
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/10—Vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/10—Stators
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/20—Rotors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/80—Other components
- F04C2240/806—Pipes for fluids; Fittings therefor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2250/00—Geometry
- F04C2250/10—Geometry of the inlet or outlet
- F04C2250/102—Geometry of the inlet or outlet of the outlet
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2280/00—Arrangements for preventing or removing deposits or corrosion
- F04C2280/02—Preventing solid deposits in pumps, e.g. in vacuum pumps with chemical vapour deposition [CVD] processes
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Abstract
Groupe de pompage L’invention concerne un groupe de pompage comportant : une pompe à vide primaire, une pompe à vide de type Roots (3) comprenant un étage de pompage (7) ayant un stator (9) à l’intérieur duquel deux rotors (5) Roots sont configurés pour tourner de façon synchronisée en sens inverse pour entrainer un gaz à pomper entre un orifice d’entrée (10) et un orifice de sortie (11), une canalisation (13) reliant l’orifice de sortie (11) à une aspiration (12) de la pompe à vide primaire (2), caractérisé en ce que la plus petite distance (d) entre une bordure de l’orifice de sortie (11) et chacun des rotors (5) dans l’étage de pompage (7) est au moins inférieure à trois centimètres. FIGURE : 2
Priority Applications (9)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1872247A FR3089261B1 (fr) | 2018-12-03 | 2018-12-03 | Groupe de pompage |
EP19801587.7A EP3891399A1 (fr) | 2018-12-03 | 2019-11-15 | Groupe de pompage |
PCT/EP2019/081556 WO2020114754A1 (fr) | 2018-12-03 | 2019-11-15 | Groupe de pompage |
CN201980077269.0A CN113167277A (zh) | 2018-12-03 | 2019-11-15 | 泵送单元 |
JP2021531570A JP2022514461A (ja) | 2018-12-03 | 2019-11-15 | ポンプユニット |
SG11202103583SA SG11202103583SA (en) | 2018-12-03 | 2019-11-15 | Pumping unit |
US17/292,263 US11493042B2 (en) | 2018-12-03 | 2019-11-15 | Pumping unit including a rough vacuum pump and a roots vacuum pump |
TW108141543A TW202024482A (zh) | 2018-12-03 | 2019-11-15 | 泵送單元 |
KR1020217020815A KR20210095702A (ko) | 2018-12-03 | 2019-11-15 | 펌핑 유닛 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1872247A FR3089261B1 (fr) | 2018-12-03 | 2018-12-03 | Groupe de pompage |
Publications (2)
Publication Number | Publication Date |
---|---|
FR3089261A1 FR3089261A1 (fr) | 2020-06-05 |
FR3089261B1 true FR3089261B1 (fr) | 2022-05-13 |
Family
ID=66530146
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR1872247A Active FR3089261B1 (fr) | 2018-12-03 | 2018-12-03 | Groupe de pompage |
Country Status (9)
Country | Link |
---|---|
US (1) | US11493042B2 (fr) |
EP (1) | EP3891399A1 (fr) |
JP (1) | JP2022514461A (fr) |
KR (1) | KR20210095702A (fr) |
CN (1) | CN113167277A (fr) |
FR (1) | FR3089261B1 (fr) |
SG (1) | SG11202103583SA (fr) |
TW (1) | TW202024482A (fr) |
WO (1) | WO2020114754A1 (fr) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI815068B (zh) * | 2020-12-25 | 2023-09-11 | 大陸商上海伊萊茨真空技術有限公司 | 基於冷凝器及羅茨真空泵的真空系統 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE59308641D1 (de) * | 1992-10-28 | 1998-07-09 | Maag Pump Systems Ag | Verfahren und Stufe zur Behandlung einer Thermoplastschmelze mit einer Zahnradpumpe |
JP2004251291A (ja) * | 2003-02-17 | 2004-09-09 | Sankei Giken:Kk | 制振継手 |
DE102006004525A1 (de) * | 2006-02-01 | 2007-08-02 | Leybold Vacuum Gmbh | Wälzkolben-Vakuumpumpe |
JP2007321655A (ja) * | 2006-06-01 | 2007-12-13 | Anlet Co Ltd | ルーツ式真空ポンプ |
JP2011163150A (ja) * | 2010-02-05 | 2011-08-25 | Toyota Industries Corp | 水素ガスの排気方法及び真空ポンプ装置 |
WO2012066782A1 (fr) * | 2010-11-17 | 2012-05-24 | 株式会社アルバック | Structure d'accouplement d'un dispositif pour réaliser le vide et système pour réaliser le vide |
CN102121475A (zh) * | 2010-12-14 | 2011-07-13 | 辽宁立天环保工程有限公司 | 三叶形水冷罗茨真空泵 |
CN202001304U (zh) * | 2011-01-06 | 2011-10-05 | 浙江真空设备集团有限公司 | 中压差罗茨真空泵 |
DE102011000732B3 (de) * | 2011-02-15 | 2012-08-09 | Roediger Vacuum Gmbh | Drehkolbenpumpe |
GB2500603A (en) * | 2012-03-26 | 2013-10-02 | Edwards Ltd | Vacuum pump stators and vacuum pumps |
CN203867830U (zh) * | 2014-05-13 | 2014-10-08 | 南通市威士真空设备有限公司 | 新型闭路循环真空机组 |
FR3065040B1 (fr) * | 2017-04-07 | 2019-06-21 | Pfeiffer Vacuum | Groupe de pompage et utilisation |
-
2018
- 2018-12-03 FR FR1872247A patent/FR3089261B1/fr active Active
-
2019
- 2019-11-15 EP EP19801587.7A patent/EP3891399A1/fr not_active Withdrawn
- 2019-11-15 CN CN201980077269.0A patent/CN113167277A/zh active Pending
- 2019-11-15 WO PCT/EP2019/081556 patent/WO2020114754A1/fr unknown
- 2019-11-15 TW TW108141543A patent/TW202024482A/zh unknown
- 2019-11-15 KR KR1020217020815A patent/KR20210095702A/ko not_active Application Discontinuation
- 2019-11-15 US US17/292,263 patent/US11493042B2/en active Active
- 2019-11-15 JP JP2021531570A patent/JP2022514461A/ja active Pending
- 2019-11-15 SG SG11202103583SA patent/SG11202103583SA/en unknown
Also Published As
Publication number | Publication date |
---|---|
SG11202103583SA (en) | 2021-05-28 |
US20210381509A1 (en) | 2021-12-09 |
US11493042B2 (en) | 2022-11-08 |
KR20210095702A (ko) | 2021-08-02 |
CN113167277A (zh) | 2021-07-23 |
TW202024482A (zh) | 2020-07-01 |
EP3891399A1 (fr) | 2021-10-13 |
FR3089261A1 (fr) | 2020-06-05 |
JP2022514461A (ja) | 2022-02-14 |
WO2020114754A1 (fr) | 2020-06-11 |
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Year of fee payment: 2 |
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Effective date: 20200605 |
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