WO2020114754A1 - Groupe de pompage - Google Patents
Groupe de pompage Download PDFInfo
- Publication number
- WO2020114754A1 WO2020114754A1 PCT/EP2019/081556 EP2019081556W WO2020114754A1 WO 2020114754 A1 WO2020114754 A1 WO 2020114754A1 EP 2019081556 W EP2019081556 W EP 2019081556W WO 2020114754 A1 WO2020114754 A1 WO 2020114754A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- outlet
- pumping unit
- pipe
- pumping
- vacuum pump
- Prior art date
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
- F04C23/003—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle having complementary function
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/04—Heating; Cooling; Heat insulation
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/04—Heating; Cooling; Heat insulation
- F04C29/042—Heating; Cooling; Heat insulation by injecting a fluid
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/10—Vacuum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/10—Stators
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/20—Rotors
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/80—Other components
- F04C2240/806—Pipes for fluids; Fittings therefor
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2250/00—Geometry
- F04C2250/10—Geometry of the inlet or outlet
- F04C2250/102—Geometry of the inlet or outlet of the outlet
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2280/00—Arrangements for preventing or removing deposits or corrosion
- F04C2280/02—Preventing solid deposits in pumps, e.g. in vacuum pumps with chemical vapour deposition [CVD] processes
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
Definitions
- the present invention relates to a pumping unit comprising a primary vacuum pump and a Roots type vacuum pump mounted in series and upstream of the primary vacuum pump in the direction of flow of the gases to be pumped.
- Certain pumping groups are used in so-called “powder” processes because they use gases generating large quantities of solid by-products. This is the case, for example, of certain semiconductor manufacturing processes. These solid compounds can be deposited on the internal surfaces of vacuum pumps and form agglomerates which can end up restricting the gas passage dimensions and thus lead to losses in pumping capacity.
- An object of the present invention is to provide an improved pumping unit at least partially solving one of the drawbacks of the state of the art. To this end, the invention relates to a pumping unit comprising:
- Roots type vacuum pump comprising a pumping stage having a stator inside which two Roots rotors are configured to rotate synchronously in opposite directions to cause a gas to be pumped between an inlet orifice and an outlet,
- the smallest distance between an edge of the outlet orifice and each of the rotors in the pumping stage is for example at least less than three
- the pumping unit can include one or more of the characteristics described below, taken alone or in combination.
- the smallest distance is, for example, less than two centimeters, such that it is less than one centimeter, such that it is less than 0.5 cm, such that it is greater than 0.1 cm.
- This distance is the smallest when, in operation, the rotors are brought closer, each in turn, to the maximum of the outlet orifice.
- the outlet is generally located at an equal distance from the axes of the rotors. The distance is therefore the same between each of the two rotors and the outlet.
- the outlet port of the Roots type vacuum pump is thus brought closer to the area swept by the rotors. This has the effect that, during their rotation, the rotors can sweep the powders accumulated on the edges of the outlet. Any accumulation of powder protruding from the outlet orifice can therefore be automatically scraped off mechanically and entrained with the gases pumped out of the pumping stage.
- the edge of the outlet orifice can thus be cleaned by the rotors at least as soon as the accumulation of powders exceeds the value of the distance between the edge of the outlet orifice and the area delimited by the scanning of the rotors.
- the outlet orifice has for example a circular shape the diameter of which is less than five centimeters, as between two and five centimeters.
- An orifice outlet having such dimensions forms a restriction with respect to the general dimensions of an outlet of a Roots type vacuum pump. This restriction makes it possible to accelerate the gases as soon as they exit the rotors, which facilitates the entrainment of the powders with the pumped gases.
- the pressure drop provided by this restriction in the flow of pumped gases is negligible compared to the general performance of the pumping unit.
- the pipeline can be straight. It is thus possible to limit the accumulation of powders in the pipeline, these then being entrained by the pumped gases as well as by gravity.
- the outlet orifice is located at the end of a tube upstream of the pipe entering the pumping stage.
- the upstream tube entering the stator allows the outlet of the rotors to be brought closer in a simple manner, by an extension of the pipe in the stator.
- the upstream tube can project from an outlet receptacle of the pumping stage.
- the outlet receptacle makes it possible to form a reservoir for storing part of the powders discharged from the outlet orifice by the rotation of the rotors. Part of the powders can thus accumulate in the dead zone of the outlet receptacle without blocking the outlet port of the Roots type vacuum pump while another part of the powders is carried in the pipeline with the gases pumped.
- the outlet receptacle is filled, the accumulated powders protruding from the outlet receptacle can also be swept away by the rotors and sent into the pipeline with the gases pumped.
- the pumping unit further comprises a cooling circuit configured to cool at least partially the tube upstream of the pipe, for example by circulation of a heat transfer fluid such as water at room temperature.
- a heat transfer fluid such as water at room temperature.
- the cooling circuit comprises for example an envelope surrounding a base of the upstream tube, an inlet and an outlet of the envelope allowing the circulation of a heat transfer fluid in the double wall formed by the envelope and the upstream tube.
- the inlet is for example located at the end of an inlet pipe of the cooling circuit and the outlet is located at the end of an outlet pipe of the cooling circuit, the inlet and outlet pipes protruding in the volume of the double wall.
- the inlet and outlet pipes protrude from the bottom, for example, vertically, parallel to the upstream tube.
- the inlet and outlet pipes are for example diametrically opposed in the volume of the double wall.
- the length of the outlet pipe may be greater than the length of the inlet pipe. This arrangement ensures minimum filling in the double wall and allows the heat transfer fluid to also sweep over the height of the envelope.
- the cooling circuit comprises a coil surrounding a base of the upstream tube and passing through the bottom to connect an inlet and an outlet of the coil to an external circuit of heat transfer fluid.
- At least one bottom of the outlet receptacle can be removable. The powders can then be extracted in the pumping stage without having to dismantle the vacuum pumps.
- the outlet receptacle comprises on the one hand, a circumferential portion formed in the stator of the pumping stage and on the other hand, a bottom fixed to the tube upstream of the pipeline.
- the pipe can also include a removable downstream portion of the upstream tube.
- the removable downstream portion allows it to be removed without requiring disassembly of the upstream pipe.
- the upstream tube can remain in place, fixed to the stator of the pumping stage, the Roots type vacuum pump being supported by the frame. We can then clean the upstream tube, or even the inside of the outlet receptacle from the outside, for example using a brush. Partial disassembly of the pipeline thus allows simplified, faster maintenance, not requiring disassembly of the pumps.
- the downstream portion of the pipe may include a bellows.
- the outlet orifice of the pumping stage is formed in the stator of the pumping stage.
- the outlet is formed in a flat portion of the stator of oblong cross section.
- the stator has a re-entrant wall in which the outlet orifice is formed.
- the re-entrant wall may be formed by a raised raised wall, the raised part taking the shape of the trajectory of the rotors. The smallest distance between the outlet orifice and the area delimited by the scanning of the rotors in the pumping stage can thus be reduced more significantly.
- FIG. 1 represents a schematic view of a pumping unit according to a first embodiment.
- FIG. 2 shows a view of a Roots type vacuum pump in cross section and a pipe of the pumping unit of Figure 1.
- FIG. 3 shows a sectional view of elements of the Roots type vacuum pump and the pipe of Figure 2.
- FIG. 4 shows an enlarged sectional view of a detail of the elements of Figure 3.
- FIG. 5 shows a perspective view of the pipe of the pumping unit of Figure 2 fixed to a bottom of an outlet receptacle.
- FIG. 6 shows a view similar to Figure 5 for a second embodiment of the pumping unit.
- FIG. 7 is a view similar to FIG. 6 in which an envelope of a dotted cooler circuit has been shown.
- FIG. 8 is an inverted view of the elements of Figure 6.
- FIG. 9 shows a view similar to Figure 1 for a third embodiment of the pumping unit.
- FIG. 10 shows a schematic sectional view of a Roots type vacuum pump in cross section and of a pipe of the pumping group for a fourth embodiment of the pumping group.
- FIG. 1 1 shows a view similar to Figure 10 for a fifth embodiment of the pumping unit.
- FIG. 12 shows a view similar to Figure 10 for a sixth embodiment of the pumping unit.
- FIG. 13 shows a schematic perspective view of a stator of a Roots type vacuum pump of a pumping unit according to the sixth embodiment.
- a primary vacuum pump is defined as a volumetric vacuum pump, which is configured to, using two rotors, aspirate, transfer, and then discharge the gas to be pumped at atmospheric pressure.
- the rotors are carried by two shafts rotated by a motor of the primary vacuum pump.
- a Roots type vacuum pump (also called “Roots Blower” in English) is defined as a volumetric vacuum pump configured to, using Roots type rotors, aspirate, transfer and then discharge the gas to be pumped.
- the Roots type vacuum pump is mounted upstream and in series with a primary vacuum pump.
- the rotors are carried by two shafts driven in rotation by a motor of the Roots type vacuum pump.
- Upstream means an element which is placed before another relative to the direction of gas flow. Conversely, by “downstream” is meant an element placed after another with respect to the direction of circulation of the gas to be pumped.
- Figure 1 shows a pumping unit 1 intended to be connected to a process chamber for pumping gases (the direction of circulation of the pumped gases is illustrated by the arrows in Figure 1). It can be a chamber in which deposition and etching processes used in the manufacture of microelectronic devices on silicon wafers take place.
- the pumping unit 1 comprises a primary vacuum pump 2 and a Roots type vacuum pump 3.
- the primary vacuum pump 2 is for example a multi-stage vacuum pump of the "Roots", “Claw” type or of the spiral or screw type or of another similar principle of a volumetric vacuum pump.
- the discharge pressure of the primary vacuum pump 2 is atmospheric pressure.
- the Roots type 3 vacuum pump is mounted in series and upstream of the primary vacuum pump 2 in the direction of flow of the pumped gases.
- the Roots type vacuum pump 3 is for example located spatially above the primary vacuum pump 2 in a frame 4 of the pumping unit 1.
- the Roots type vacuum pump 3 is, like the primary vacuum pump 2, a volumetric vacuum pump, which, using rotors 5 driven in rotation by a motor 6, sucks, transfers and then discharges the gas to be pumped .
- the Roots type vacuum pump 3 comprises a pumping stage 7 having a stator 9 inside which two Roots rotors 5 are angularly offset and configured to rotate in synchronization in the opposite direction to entrain a gas to be pumped between an inlet orifice 10 and an outlet orifice 1 1 of the pumping stage 7.
- the stator 9 delimits the housing of the pumping stage 7 receiving the rotors 5. It is generally made of cast iron.
- Roots type vacuum pump 3 is said to be “dry” because in operation, the rotors 5 rotate inside the stator 9 without any mechanical contact with the stator 9, which makes it possible not to use oil in the pumping stage 7.
- the Roots type vacuum pump 3 may include an additional pumping stage in series and upstream of the pumping stage 7. The rotors 5 of the two pumping stages are then driven simultaneously in rotation by the same motor 6 of the pump. Roots type vacuum 3.
- the outlet 1 1 is the orifice of the pumping stage 7 through which the pumped gases exit. It is connected to a suction 12 of the primary vacuum pump 2 by a pipe 13 of the pumping unit 1 for example made at least partially of stainless steel.
- the smallest distance d between an edge of the outlet orifice 11 and each of the rotors 5 in the pumping stage 7 is for example at least less than three centimeters, such as less than two centimeters, such as less than one centimeter, such as less than 0.5 cm, such as greater than 0.1 cm ( Figure 4).
- This distance d is the smallest when, in operation, the rotors 5 are brought together, each in turn, at the maximum from the outlet orifice 1 1.
- the outlet orifice 1 1 is generally located equidistant from the axes of the rotors 5. The distance d is therefore the same between each of the two rotors 5 and the outlet orifice 1 1.
- the outlet orifice 1 1 of the Roots type vacuum pump 3 is thus brought closer to the area swept by the rotors 5. This has the effect that, during their rotation, the rotors 5 can sweep the powders accumulated on the edges of the outlet orifice 11.
- any accumulation of powder protruding from the outlet orifice 11 can therefore be automatically scraped by mechanical effect and entrained with the gases pumped out of the pumping stage 7.
- the edge of the orifice of outlet 11 can thus be cleaned by the rotors 5 at least as soon as the accumulation of powders exceeds the value of the distance d between the edge of the outlet orifice 11 and the area delimited by the scanning of the rotors 5.
- This geometry allows reduce clogging by powders in pumping stage 7 by maintaining a permanent passage for the gases and powders transported to the primary vacuum pump 2 without allowing the powders to accumulate at the discharge of the vacuum pump of the type Roots 3. So we can reduce losses of pumping capacity at the outlet of pumping stage 7 of the Roots type vacuum pump 3.
- the outlet 11 (its border) has for example a circular shape whose diameter D is less than five centimeters, as between two and five centimeters.
- An outlet 11 having such dimensions forms a restriction with respect to the general dimensions of an outlet of a Roots type vacuum pump. This restriction makes it possible to accelerate the gases as soon as they exit the rotors 5, which facilitates the entrainment of the powders with the pumped gases.
- the pressure drop provided by this restriction in the flow of pumped gases is negligible compared to the general performance of pumping unit 1.
- the outlet 11 is located at the end of an upstream tube 14 of the pipe 13 entering the pumping stage 7.
- the upstream tube 14 can project from an outlet receptacle 15 of the pumping stage 7.
- the upstream tube 14 is for example a straight cylinder extending vertically from the bottom 16 of the outlet receptacle 15.
- the upstream tube 14 measures for example between 70 and 100mm.
- the outlet receptacle 15 makes it possible to form a reservoir for storing part of the powders discharged from the outlet orifice 1 1 by the rotation of the rotors 5. A part of the powders can thus accumulate in the dead zone of the outlet receptacle 15 without blocking the outlet orifice 1 1 of the Roots type vacuum pump 3 while another part of the powders is carried in line 13 with the gases pumped.
- the powders accumulated in the outlet receptacle 15 do not interfere with the pumping performance of the Roots type 3 vacuum pump.
- the outlet receptacle 15 can also be swept by the rotors 5 and be sent into the pipeline 13 with the pumped gases.
- the bottom 16 at least of the outlet receptacle 15 is for example removable, which makes it possible to easily empty the powders from the receptacle 15 for possible cleaning. The powders can then be extracted in the pumping stage 7 without having to dismantle the vacuum pumps 2, 3.
- the outlet receptacle 15 comprises on the one hand, a circumferential portion 17 formed in the stator 9 of the pumping stage 7 and on the other hand, a bottom 16 fixed to the upstream tube 14 of the pipe 13.
- the circumferential portion 17 has for example a generally conical or cylindrical shape.
- a seal can be placed between the circumferential portion 17 and the bottom 16.
- An annular groove 18 can be made in the bottom 16 to receive the seal.
- the bottom 16 can be fixed to the circumferential portion 17 by first conventional fixing means, such as screws inserted in the stator 9, passing through holes 19 of an annular flange of the bottom 16 ( Figure 5).
- the upstream tube 14 penetrating the stator 9 makes it possible to bring the outlet orifice 1 1 closer to the rotors 5.
- This approximation of the outlet orifice 11 can be achieved simply, by an extension of the pipe 13 and here, by fixing a bottom 16 to the upstream tube 14, the bottom 16 having fixing means compatible with the stator 9 of the pumping stage 7.
- the pumping unit 1 further comprises a cooling circuit 30 configured to at least partially cool the upstream tube 14 of the pipe 13.
- a cooling circuit 30 configured to at least partially cool the upstream tube 14 of the pipe 13.
- the cooling circuit 30 comprises for example an envelope 31 surrounding a base of the upstream tube 14 ( Figures 6 and 7).
- the envelope 31 has for example a cylindrical shape coaxial with the upstream tube 14.
- the envelope 31 extends from the bottom 16 of the outlet receptacle 15 to a height less than the height of the upstream tube 14, such as at a height greater than three-quarters, such as at a distance between one and two centimeters from the outlet orifice 11 so as not to hinder the rotation of the rotors 5.
- the height of the casing 31 is for example between 60 and 80mm.
- the casing 31 has an inlet 32 and an outlet 33, allowing the circulation of a heat transfer fluid in the volume of the double wall formed by the casing 31 and the upstream tube 14 (Figure 7).
- the heat transfer fluid is for example water at room temperature.
- the inlet 32 is located at the end of an inlet pipe 34 of the cooling circuit 30 projecting into the volume of the double wall and the outlet 33 is located at the end of an outlet pipe 35 of the cooling circuit 30 projecting into the volume of the double wall.
- the inlet 34 and outlet 35 pipes are for example straight cylinders. They project from the bottom 16 vertically, parallel to the upstream tube 14.
- the inlet pipes 34 and outlet 35 are for example diametrically opposite in the volume of the double wall.
- the length of the outlet pipe 35 can be greater than the length of the inlet pipe 34.
- the length of the outlet pipe 35 is, for example, more than four times the length of the inlet pipe.
- the inlet pipe 34 measures 1cm and the outlet pipe 35 measures 6cm, the diameters being equal and for example 6mm.
- exit 33 is higher than the inlet 32. This arrangement makes it possible to ensure minimum filling in the double wall and allows the heat transfer fluid also to be swept over the height of the casing 31.
- the inlet 34 and outlet 35 pipes pass through the bottom 16 and carry connections 36 of the cooler circuit 30 located outside the stator 9 to connect the cooler circuit 30 to an external coolant circuit ( Figure 8).
- the cooling circuit comprises a coil surrounding a base of the upstream tube 14 (not shown) and passing through the bottom 16 to connect an inlet and an outlet of the coil to an external circuit of heat transfer fluid.
- the frame 4 is configured to support the vacuum pump of the Roots type 5.
- a downstream portion 20 of the pipe 21 is removable from the upstream tube 14.
- the downstream portion 20 comprises for example second fixing means 22 adapted to detachably fix, for example using screws, the downstream portion 20 at the bottom 16 of the outlet receptacle 15.
- the removable downstream portion 20 allows the latter to be able to be removed without requiring disassembly of the upstream tube 14 of the pipe 21.
- the upstream tube 14 can remain in place, fixed to the stator 9 of the pumping stage 7, the pump Vacuum type Roots 3 being supported by the frame 4. It is then possible to clean the upstream tube 14, or even inside the outlet receptacle 15 from the outside, for example using a brush.
- the partial disassembly of the pipe 21 thus allows simplified, faster maintenance, not requiring the disassembly of the pumps 2, 3.
- the downstream portion 20 may also include a bellows 23 to facilitate the connection between the pumps 2, 3.
- outlet 1 1 is then formed directly in the stator 24 of the pumping stage 7 ( Figure 1 1).
- the pipe 27 has for example on the one hand, a portion formed in the cast iron of the pumping stage 7 and on the other hand, a tube, bent or not, for example made of stainless steel, connecting the cast iron at the suction 12 of the primary vacuum pump 2.
- the outlet 1 1 is for example formed in a flat portion of a bottom of a stator 24 of oblong cross section.
- the stator 25 of the pumping stage 7 has a reentrant wall 28 in which is formed the outlet orifice 1 1.
- This re-entrant wall 28 is for example formed by a planar wall raised relative to the bottom of the stator, the raised wall conforming, for example, to the shape of the trajectory of the rotors 5, that is to say for example the cross section in eight of the rotors 5.
- the re-entrant wall 28 thus makes it possible to bring the outlet orifice 1 1 closer to the rotors 5.
- the smallest distance d between the outlet orifice 11 and the area delimited by the scanning of the rotors 5 in the pumping stage 7 can thus be reduced more significantly.
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Abstract
Description
Claims
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2021531570A JP2022514461A (ja) | 2018-12-03 | 2019-11-15 | ポンプユニット |
US17/292,263 US11493042B2 (en) | 2018-12-03 | 2019-11-15 | Pumping unit including a rough vacuum pump and a roots vacuum pump |
KR1020217020815A KR20210095702A (ko) | 2018-12-03 | 2019-11-15 | 펌핑 유닛 |
SG11202103583SA SG11202103583SA (en) | 2018-12-03 | 2019-11-15 | Pumping unit |
EP19801587.7A EP3891399A1 (fr) | 2018-12-03 | 2019-11-15 | Groupe de pompage |
CN201980077269.0A CN113167277A (zh) | 2018-12-03 | 2019-11-15 | 泵送单元 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1872247A FR3089261B1 (fr) | 2018-12-03 | 2018-12-03 | Groupe de pompage |
FRFR1872247 | 2018-12-03 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2020114754A1 true WO2020114754A1 (fr) | 2020-06-11 |
Family
ID=66530146
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2019/081556 WO2020114754A1 (fr) | 2018-12-03 | 2019-11-15 | Groupe de pompage |
Country Status (9)
Country | Link |
---|---|
US (1) | US11493042B2 (fr) |
EP (1) | EP3891399A1 (fr) |
JP (1) | JP2022514461A (fr) |
KR (1) | KR20210095702A (fr) |
CN (1) | CN113167277A (fr) |
FR (1) | FR3089261B1 (fr) |
SG (1) | SG11202103583SA (fr) |
TW (1) | TW202024482A (fr) |
WO (1) | WO2020114754A1 (fr) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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TWI815068B (zh) * | 2020-12-25 | 2023-09-11 | 大陸商上海伊萊茨真空技術有限公司 | 基於冷凝器及羅茨真空泵的真空系統 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102006004525A1 (de) * | 2006-02-01 | 2007-08-02 | Leybold Vacuum Gmbh | Wälzkolben-Vakuumpumpe |
JP2011163150A (ja) * | 2010-02-05 | 2011-08-25 | Toyota Industries Corp | 水素ガスの排気方法及び真空ポンプ装置 |
DE102011000732B3 (de) * | 2011-02-15 | 2012-08-09 | Roediger Vacuum Gmbh | Drehkolbenpumpe |
US20130280062A1 (en) * | 2010-11-17 | 2013-10-24 | Ulvac, Inc. | Coupling structure for vacuum exhaust device and vacuum exhaust system |
CN203867830U (zh) * | 2014-05-13 | 2014-10-08 | 南通市威士真空设备有限公司 | 新型闭路循环真空机组 |
WO2018184853A1 (fr) * | 2017-04-07 | 2018-10-11 | Pfeiffer Vacuum | Groupe de pompage et utilisation |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0597271B1 (fr) * | 1992-10-28 | 1998-06-03 | Maag Pump Systems Textron AG | Procédé pour le traitement de fonte thermoplastique avec une pompe à engrenages |
JP2004251291A (ja) * | 2003-02-17 | 2004-09-09 | Sankei Giken:Kk | 制振継手 |
JP2007321655A (ja) * | 2006-06-01 | 2007-12-13 | Anlet Co Ltd | ルーツ式真空ポンプ |
CN102121475A (zh) * | 2010-12-14 | 2011-07-13 | 辽宁立天环保工程有限公司 | 三叶形水冷罗茨真空泵 |
CN202001304U (zh) * | 2011-01-06 | 2011-10-05 | 浙江真空设备集团有限公司 | 中压差罗茨真空泵 |
GB2500603A (en) * | 2012-03-26 | 2013-10-02 | Edwards Ltd | Vacuum pump stators and vacuum pumps |
-
2018
- 2018-12-03 FR FR1872247A patent/FR3089261B1/fr active Active
-
2019
- 2019-11-15 EP EP19801587.7A patent/EP3891399A1/fr not_active Withdrawn
- 2019-11-15 KR KR1020217020815A patent/KR20210095702A/ko not_active Application Discontinuation
- 2019-11-15 US US17/292,263 patent/US11493042B2/en active Active
- 2019-11-15 SG SG11202103583SA patent/SG11202103583SA/en unknown
- 2019-11-15 WO PCT/EP2019/081556 patent/WO2020114754A1/fr unknown
- 2019-11-15 CN CN201980077269.0A patent/CN113167277A/zh active Pending
- 2019-11-15 TW TW108141543A patent/TW202024482A/zh unknown
- 2019-11-15 JP JP2021531570A patent/JP2022514461A/ja active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102006004525A1 (de) * | 2006-02-01 | 2007-08-02 | Leybold Vacuum Gmbh | Wälzkolben-Vakuumpumpe |
JP2011163150A (ja) * | 2010-02-05 | 2011-08-25 | Toyota Industries Corp | 水素ガスの排気方法及び真空ポンプ装置 |
US20130280062A1 (en) * | 2010-11-17 | 2013-10-24 | Ulvac, Inc. | Coupling structure for vacuum exhaust device and vacuum exhaust system |
DE102011000732B3 (de) * | 2011-02-15 | 2012-08-09 | Roediger Vacuum Gmbh | Drehkolbenpumpe |
CN203867830U (zh) * | 2014-05-13 | 2014-10-08 | 南通市威士真空设备有限公司 | 新型闭路循环真空机组 |
WO2018184853A1 (fr) * | 2017-04-07 | 2018-10-11 | Pfeiffer Vacuum | Groupe de pompage et utilisation |
Also Published As
Publication number | Publication date |
---|---|
FR3089261A1 (fr) | 2020-06-05 |
KR20210095702A (ko) | 2021-08-02 |
JP2022514461A (ja) | 2022-02-14 |
US11493042B2 (en) | 2022-11-08 |
TW202024482A (zh) | 2020-07-01 |
EP3891399A1 (fr) | 2021-10-13 |
SG11202103583SA (en) | 2021-05-28 |
CN113167277A (zh) | 2021-07-23 |
US20210381509A1 (en) | 2021-12-09 |
FR3089261B1 (fr) | 2022-05-13 |
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