KR102514377B1 - Degreasing furnace and degreasing method - Google Patents

Abstract

Provided is a degreasing and degreasing method capable of degreasing in an appropriate time. The degreasing furnace 10 includes a furnace body 14 accommodating the object to be degreased 12, a gas source 16 of an inert gas supplied to the furnace body 14, and a heating device for heating the inert gas ( 30) and a gas monitor 18 for detecting gas generated from the object to be degreased 12. The degreasing method includes a step of accommodating the object to be degreased 12 in the furnace body 14, a step of raising the temperature of an inert gas, a step of degreasing the object to be degreased 12 with the heated inert gas, and the step of degreasing the object to be degreased ( A step of detecting the gas generated from 12) with the gas monitor 18 is included.

Description

Degreasing and degreasing method {DEGREASING FURNACE AND DEGREASING METHOD}

The present invention relates to degreasing and a degreasing method.

Conventionally, degreasing objects containing ceramics are degreased by degreasing. For example, in the degreasing of Patent Document 1 described below, a furnace body for accommodating the degreasing object and a heating means for heating the degreasing object are provided. The gas generated by degreasing is heated, decomposed, and converted into a gas such as carbon dioxide. Patent Literature 1 guides a part of the decomposed gas back to the furnace body. Patent Literature 1 describes that the oxygen gas concentration is maintained at a low concentration and cracks of the object to be degreased are prevented.

International Publication No. WO2005/047207

In order to obtain appropriate degreasing conditions, it is necessary to degrease under various conditions. Since the degreasing conditions are different when the material and shape of the object to be degreased are different, it is necessary to newly obtain the degreasing conditions. In order to obtain suitable degreasing conditions, an enormous amount of labor is required. Even if degreasing conditions are obtained, in order to avoid degreasing failure, degreasing may be performed for a longer period of time than the required conditions. Degreasing takes time and work efficiency deteriorates. It is desirable to degrease at an appropriate time. In addition, Patent Literature 1 does not explain obtaining degreasing conditions.

Therefore, an object of the present invention is to provide a degreasing method and a degreasing method capable of degreasing in an appropriate time.

In order to solve the above problems, the degreasing according to the present invention has a structure as described below.

In the degreasing of the present invention, a furnace body accommodating objects to be degreased, a gas source for inert gas supplied to the furnace body, a heating device for heating the inert gas, and a gas monitor for detecting gas generated from the objects to be degreased includes A saturated steam generating device for generating saturated steam, a liquid source for liquid, or both, and a superheater for generating superheated steam supplied to the furnace body from the saturated steam or liquid may be included.

The degreasing method of the present invention includes a step of housing an object to be degreased in a furnace body, a step of raising the temperature of an inert gas, a step of degreasing the object to be degreased with the heated inert gas, and a gas generated from the object to be degreased using a gas monitor. including the detection process. A process of generating superheated steam from saturated steam or liquid, and a process of degreasing an object to be degreased with the superheated steam may also be included.

According to the present invention, by detecting the gas generated during degreasing with a gas monitor, it is possible to determine whether degreasing has started or has been completed. There is no need to obtain degreasing conditions, and anyone can perform degreasing in the same way. The quality of the degreased product can be kept constant. When gas is no longer detected or after the detected amount has decreased, raising the temperature again to the set (or prescribed) temperature is repeated, and degreasing is terminated when no gas is finally detected, thereby preventing unnecessary long-term degreasing. can

1 is a diagram showing the configuration of the degreasing process of the present invention.
2 is a graph showing gases detected by FTIR.
Fig. 3 is a graph showing the atmospheric temperature of the furnace body during degreasing while detecting a plurality of gases.
Fig. 4 is a diagram showing the configuration of a degreasing unit equipped with a superheater.
Fig. 5 is a diagram showing the configuration of a degreasing unit equipped with a gas source and a superheater.
Fig. 6 is a diagram showing the configuration of a depapering machine equipped with a communication device.
Fig. 7 is a diagram showing the configuration of a degreasing apparatus in which a gas monitor and a thermometer are disposed in an exhaust passage.

The degreasing and degreasing method of the present invention will be described with reference to the drawings. Although a plurality of embodiments are described, the same reference numerals are assigned to the same means even in different embodiments, and descriptions may be omitted.

[Embodiment 1]

In the degreasing furnace 10 of the present application shown in FIG. 1, a furnace body 14 in which the degreasing object 12 is accommodated, a gas source 16 of an inert gas, and a gas monitor that detects gas generated from the degreasing object 12 (18) is provided.

[Leaving Matter]

The object to be degreased 12 includes a ceramic molded body. Ceramics include nitride-based ceramics (aluminum nitride, silicon nitride, etc.), alumina, zirconium, and the like. A binder is included in the object to be degreased 12 . The binder is mixed with ceramics when forming the object to be degreased 12 . When the temperature of the object to be degreased 12 is raised, the binder is decomposed and released as a gas. Examples of the binder include polybutyl methacrylate, polyvinyl alcohol, methyl cellulose, vinyl acetate, and polyethylene glycol.

[no body]

The furnace body 14 is made of a heat-resistant material such as SUS310S or SUS316L. The furnace body 14 is shaped like a container, and the object to be degreased 12 is accommodated in its internal space 20 . The internal space 20 of the furnace body 14 may be provided with a shelf 22 for arranging the object 12 to be detached. The furnace body 14 is provided with a supply port 24 and an exhaust port 26. An inert gas is supplied from the supply port 24 to the interior space 20 of the furnace body 14 . Gas generated when the object to be degreased 12 is degreased is exhausted from the exhaust port 26 .

[Gas source]

The gas source 16 is a device for storing, generating, or both of inert gas. Inert gas is nitrogen, argon, helium, etc. The heated inert gas is supplied to the furnace body 14 . The furnace body 14 and the gas source 16 are connected by a pipe 28.

A heating device 30 that raises the temperature of the gas is disposed in the middle of the pipe 28 . Alternatively, the gas source 16 and the heating device 30 may be integrated. The heating device 30 is an electric heater, a gas burner or a heavy oil burner or the like. The temperature of the heated inert gas is 500°C or higher, preferably 600 to 1200°C. The object to be degreased 12 is heated up by the high-temperature inert gas and degreased. The portion of the pipe 28 between the furnace body 14 and the heating device 30 is preferably made of a heat-resistant material. Further, the heating device 30 may be provided in the inner space 20 of the furnace body 14 to heat up the gas in the inner space 20 .

[Gas Monitor]

A gas monitor 18 for detecting gas generated from the object to be degreased 12 is provided. The above-described binder is heated to become a gas, and the gas is detected by the gas monitor 18. The place where the gas monitor 18 is installed is not limited as long as it can detect gas. For example, a gas monitor 18 is installed so that the gas in the vicinity of the exhaust port 26 of the furnace body 14 can be detected. The gas monitor 18 is FTIR (Fourier transform infrared spectrometer), GC (gas chromatograph), FID (hydrogen ionization detector), TOC system (total organic carbon system), or the like. When the gas monitor 18 detects the presence or absence of gas, the progress of degreasing can be obtained. When gas is detected, degreasing is carried out, and when no gas is detected thereafter, degreasing is ended.

The gas monitor 18 provided in one degreasing 10 is not limited to one, and a plurality of gas monitors 18 may be provided.

[thermometer]

A thermometer 32 for measuring the ambient temperature of the interior space 20 of the furnace body 14 is provided. The thermometer 32 uses a thermocouple thermometer.

[controller]

A control device 34 for controlling the gas source 16 and the heating device 30 in response to the gas detected by the gas monitor 18 is provided. A value detected by the gas monitor 18 is input to the control device 34 . In addition, the temperature measured by the thermometer 32 is input to the control device 34 . When gas is detected, the control device 34 supplies an inert gas to the furnace body 14 until the gas is no longer detected, and further maintains the ambient temperature of the furnace body 14 at a predetermined temperature. The gas source 16 and the heating device 30 are controlled. The control device 34 includes an arithmetic device such as a CPU (Central Processing Unit) or a PLC (Programmable Logic Controller).

[Exhaust Gas Combustion Furnace]

An exhaust gas combustion furnace 36 is connected to the exhaust port 26 of the furnace body 14 . The exhaust gas combustion path 36 includes an exhaust passage 40 formed by using an insulator 38 as a cylinder and a heating device (not shown). The heating device is an electric heater, a gas burner, or a heavy oil burner. The exhaust gas combustion furnace 36 heats and decomposes the gas released from the object to be degreased 12 by degreasing, converts it into a gas such as carbon dioxide, and exhausts it.

[etc]

In the present application, a fan for drawing an inert gas into the interior space 20 of the furnace body 14 and a fan for exhausting gas generated by degreasing from the interior space 20 of the furnace body 14 may be provided.

[Degreasing method]

Next, a degreasing method using the degreasing 10 will be described. (1) The object to be degreased 12 is accommodated in the inner space 20 of the furnace body 14. For example, the object to be degreased 12 is a molded article containing ceramics and a binder.

(2) An inert gas is supplied from the gas source 16 to the interior space 20 of the furnace body 14. For example, an inert gas is nitrogen. The temperature of the inert gas is raised by the heating device 30, the ambient temperature of the furnace body 14 is raised, and the temperature of the object to be degreased 12 accommodated in the furnace body 14 is raised. For example, the ambient temperature of the inner space 20 of the furnace body 14 is raised to 500°C or higher, preferably 600 to 1200°C.

(3) As the atmospheric temperature of the interior space 20 of the furnace body 14 rises, the object to be degreased 12 is degreased. During degreasing, the object to be degreased 12 releases the binder as a gas. The gas monitor 18 detects the gas. For example, FIG. 2 is a detection result when the gas monitor 18 is a Fourier transform infrared spectrometer (FTIR) and ethyl methacrylate is contained in the gas. Since the wave number is determined by the functional group included in the gas, it can be seen that whether or not gas is generated is detected by the strength of the set wave number. When the degreasing is completed, the gas is not detected. In the present application, an inert gas is supplied to the interior space 20 of the furnace body 14 while the gas is detected by the gas monitor 18 . The object to be degreased 12 is degreased by keeping the temperature of the supplied inert gas constant. After that, when no gas is detected, it stops.

The gas generated when the object to be degreased 12 is degreased is supplied to the exhaust gas combustion path 36 from the exhaust port 26 . In the exhaust passage 40 of the exhaust gas combustion furnace 36, the gas is heated and decomposed into carbon dioxide or the like, which is exhausted.

(4) The gas source 16 and the heating device 30 are stopped to stop the supply of inert gas to the furnace body 14. The atmospheric temperature of the interior space 20 of the furnace body 14 is lowered, and the temperature of the object to be degreased 12 is lowered. When the temperature of the object to be degreased 12 is lowered, the object to be degreased 12 is taken out from the furnace body 14 . After that, the object to be degreased 12 may be put into an arbitrary sintering furnace and sintered.

As described above, in the present application, it is possible to determine whether or not degreasing has been completed by detecting the gas generated during degreasing with the gas monitor 18. It is not necessary to obtain degreasing conditions. By ending degreasing when gas is no longer detected, degreasing can be ended at an optimal time.

[Embodiment 2]

The gas emitted from the object to be degreased 12 is not limited to one type. Depending on the binder contained in the object to be degreased 12, a plurality of gases may be generated. The gas monitor 18 may detect a plurality of gases.

For example, it is assumed that the gas monitor 18 detects three types of gases A, B and C. The ambient temperature of the furnace body 14 when detecting the first gas A is TA, the ambient temperature of the furnace body 14 when detecting the second gas B is TB, and the ambient temperature of the furnace body 14 when the third gas C is detected. It is assumed that the atmospheric temperature of the furnace main body 14 at the time is TC. The ambient temperature is assumed to be TA<TB<TC. As shown in Fig. 3, in the state where the first gas A is detected, the atmospheric temperature is maintained at TA to degrease. When the first gas A is not detected (or the detected amount decreases), the ambient temperature is raised. When the ambient temperature reaches TB, the second gas B is detected. The atmospheric temperature is maintained at TB to degrease. When the second gas B is not detected (or when the detected amount decreases), the ambient temperature of the furnace body 14 is raised. When the ambient temperature reaches TC, the third gas C is detected. The atmospheric temperature is maintained at TC to degrease. When the third gas C is not detected (or when the detected amount decreases), supply of the inert gas is stopped, and degreasing is completed.

As described above, the ambient temperature of the furnace body 14 is maintained whenever gas is detected, and the ambient temperature of the furnace body 14 is raised when no gas is detected. The control device 34 controls the gas source 16 and the heating device 30 whenever gas is detected by the gas monitor 18, so that the temperature measured by the thermometer 32 becomes constant. When no gas is detected (or when the detected amount decreases), the gas source 16 and the heating device 30 are controlled so that the temperature measured by the thermometer 32 gradually increases. Gas released from the object to be degreased 12 at the time of degreasing is released sequentially. Incomplete degreasing of the object 12 to be degreased can be prevented, and all binders can be degreased.

[Embodiment 3]

You may degrease using superheated steam instead of an inert gas. As shown in the degreasing 42 of FIG. 4, a saturated steam generating device 44 for generating saturated steam and a superheater 46 (superheater) for generating superheated steam are provided. The furnace body 14 and the saturated steam generator 44 are connected by a pipe 28, and a superheater 46 is provided in the middle of the pipe 28.

Saturated steam generator 44 supplies saturated steam to superheater 46 . The saturated steam generating device 44 includes a boiler that generates saturated steam by boiling a liquid such as pure water.

Superheater 46 is a device for generating superheated steam from saturated steam. As the superheater 46, a contact superheater, a radiation superheater, a hanging superheater, a plate superheater, a horizontal superheater, and the like are exemplified. The superheater 46 has a long tube, through which saturated steam flows. Saturated steam flowing through the intestinal tract is heated and becomes superheated steam. The generated superheated steam is supplied to the furnace body 14 . The superheated steam at this time is a colorless and transparent water (H ₂ O) containing saturated steam at a higher temperature of 100 ° C. at normal pressure. The temperature of the superheated steam is 500°C or higher, preferably 600 to 1200°C. The portion of the pipe 28 between the furnace body 14 and the superheater 46 is preferably made of a heat-resistant material. Since superheated steam has a large heat capacity and high thermal conductivity, the object to be degreased 12 can be degreased by raising the temperature in a short time.

Saturated steam is generated in the saturated steam generating device 44, and the saturated steam is supplied to the superheater 46. The superheater 46 generates superheated steam from saturated steam and supplies it to the furnace body 14 . The atmospheric temperature of the furnace main body 14 rises, and the object 12 to be degreased is degreased.

The saturated steam generating device 44 and the superheater 46 are controlled by a control device 34 . As in the above embodiment, the value detected by the gas monitor 18 and the value of the thermometer 32 are input to the control device 34 . When gas is detected by the gas monitor 18, the control device 34 controls the saturated steam generating device 44 and the superheater 46 so that the ambient temperature of the furnace body 14 is maintained. The internal space 20 of the furnace body 14 is maintained at a temperature during degreasing, and the object 12 to be degreased is degreased. When no gas is detected by the gas monitor 18, the control device 34 stops the saturated steam generating device 44 and the superheater 46 to end degreasing.

Also in Embodiment 2, you may use superheated steam instead of an inert gas. The temperature increase rate is faster than that of inert gas, and the time required for degreasing can be shortened. When one gas is detected, the control device 34 controls the saturated steam generating device 44 and the superheater 46 so that the ambient temperature of the furnace body 14 is maintained, and when one gas is not detected, the other gas The ambient temperature of the furnace body 14 is raised by raising the temperature of the superheated steam until is detected.

Although saturated steam is supplied to the superheater 46 to generate superheated steam, liquid such as pure water may be supplied to the superheater 46 . Instead of the saturated steam generating device 44, a liquid source for supplying liquid to the superheater 46 may be provided. The liquid source includes a device for generating the liquid, a tank for containing the liquid, or both. Superheater 46 produces superheated steam from the liquid.

[Embodiment 4]

Like the degreasing 48 shown in FIG. 5 , a gas source 16 , a heating device 30 , a saturated steam generating device 44 and a superheater 46 may be provided. The object to be degreased 12 is degreased by raising the temperature with inert gas, superheated steam or both thereof.

[Embodiment 5]

The operators of the degreasing furnaces 10, 42, and 48 check the gas detection status with the gas monitor 18, and manually use the gas source 16, the superheater 46, the saturated steam generator 44, and the superheater 46. ), or all of them. The operator can judge the degreasing condition by checking the value detected by the gas monitor 18.

[Embodiment 6]

A communication device 52 may be connected to the control device 34 as in the degreasing 50 of FIG. 6 . The communication device 52 is a device for connecting to the network 54 by wire or wirelessly. The network 54 may include a network using communication facilities of a mobile phone, such as LAN (Local Area Network) and LTE (Long Term Evolution), or both of them. A server 56 is connected to a network 54. The value detected by the gas monitor 18, the value measured by the thermometer 32, or both are transmitted to the server 56 via the network 54. The server 56 stores the received values in a storage device. Another computer may access the server 56 via the network 54 and check the stored value. The degreasing status can be checked remotely.

[Embodiment 7]

As in the degreasing 60 of FIG. 7 , a gas monitor 62 may be attached to the exhaust passage 40 so that thermal decomposition of the gas can be confirmed. It can be confirmed whether or not the gas exhausted from the inner space 20 of the furnace body 14 is completely converted into gas such as carbon dioxide. As the gas monitor 62, the same gas monitor 18 used to detect the gas in the inner space 20 of the furnace body 14 may be used.

Alternatively, a thermometer 64 may be disposed in the exhaust passage 40 to measure the temperature of the gas exhausted. The values of the gas monitor 62 and the thermometer 64 are input to the control device 34 . The control device 34 controls the temperature by a heating device (not shown) provided in the exhaust passage 40 to reliably heat and decompose the gas.

If necessary, an air supply port may be provided in the exhaust passage 40 so that the air supply amount can be adjusted. Combustion of gas is controlled by the introduction amount of air.

(Claim 1) Degreasing according to one embodiment includes a furnace body accommodating objects to be degreased, a gas source of an inert gas supplied to the furnace body, a heating device for heating the inert gas, and a gas generated from the objects to be degreased. It includes a gas monitor that detects gas.

According to the degreasing described in claim 1, the progress of degreasing can be confirmed by the gas detected by the gas monitor. The completion of degreasing can be known, and degreasing can be completed in an appropriate time.

(Claim 2) In a degreasing method according to one embodiment, a furnace body accommodating objects to be degreased, a saturated steam generating device or a liquid source for generating saturated steam, and superheated steam supplied to the furnace body are saturated steam or It includes a superheater generated from a liquid and a gas monitor that detects a gas generated from the object to be degreased.

According to the degreasing described in claim 2, the degreasing time can be shortened by saturated steam. At that time, degreasing can be completed in an optimal time by detecting the gas at the time of degreasing with a gas monitor.

(Claim 3) In one embodiment, degreasing includes a furnace body accommodating objects to be degreased, a gas source of an inert gas supplied to the furnace body, a heating device for heating the inert gas, and generating saturated steam. It includes a saturated steam generating device or a liquid source of liquid, a superheater for generating superheated steam supplied to the furnace body from the saturated steam or liquid, and a gas monitor for detecting gas generated from the object to be degreased.

According to the degreasing described in claim 3, even if degreasing is performed with either an inert gas or saturated steam, the degreasing can be completed in an optimal time by detecting the gas with the gas monitor.

(Claim 4) A control device for controlling a gas source, a heating device, a saturated steam generating device, or a liquid source and a superheater or both in response to the gas detected by the gas monitor.

According to the degreasing described in claim 4, when the controller controls the gas source or the like, the degreasing can be performed automatically. At that time, by using the value detected by the gas monitor, degreasing can be performed in an optimal time.

(Claim 5) A gas source and a heating device, a saturated steam generating device, or a liquid source and a superheater or Control both sides of it.

According to the degreasing described in claim 5, incomplete degreasing can be prevented by degreasing at a predetermined temperature for each gas.

(Item 6) The gas monitor includes a Fourier transform infrared spectrometer.

According to the degreasing described in claim 6, the gas at the time of degreasing can be detected by using a Fourier transform infrared spectrometer as a gas monitor.

(Item 7) A gas monitor for detecting gas exhausted from the furnace body and a thermometer for measuring gas exhausted from the furnace body are provided.

According to the dewaxing described in claim 7, the heating temperature of the exhausted gas and the supplied air can be controlled by detecting or measuring the temperature of the exhausted gas, so that decomposition can be controlled reliably.

(Claim 8) A degreasing method according to one embodiment includes a step of storing an object to be degreased in a furnace body, a step of raising the temperature of an inert gas, a step of degreasing the object to be degreased with the heated inert gas, and removing the object to be degreased from the object to be degreased. and detecting the generated gas with a gas monitor.

According to the degreasing method according to claim 8, it is not necessary to obtain degreasing conditions by detecting the gas generated during degreasing with a gas monitor. The completion of degreasing can be confirmed by detecting the gas.

(Claim 9) A degreasing method according to one embodiment includes a step of accommodating an object to be degreased in a furnace body, a step of generating superheated steam from saturated steam or liquid, and a step of degreasing the object to be degreased with the superheated steam; and a step of detecting gas generated from the object to be degreased with a gas monitor.

According to the degreasing method according to claim 9, the temperature inside the furnace body can be raised in a short time by superheated steam, and degreasing can be performed in a short time. The completion of degreasing can be confirmed by detecting gas with a gas monitor. Unnecessarily prolonged degreasing can be prevented.

(Claim 10) A degreasing method according to one embodiment includes a step of accommodating an object to be degreased in a furnace body, a step of raising the temperature of an inert gas, a step of generating superheated steam from saturated steam or liquid, and the step of raising the temperature of the inert gas , a step of degreasing an object to be degreased with superheated steam or both, and a step of detecting a gas generated from the object to be degreased with a gas monitor.

According to the degreasing method according to claim 10, even if it is degreased using either an inert gas or superheated steam, it can be degreased in an optimal time by detecting the gas. It is not necessary to obtain conditions for degreasing.

(Item 11) A step of controlling the supply of inert gas, superheated steam, or both to the furnace body in response to the gas detected by the gas monitor.

According to the degreasing method according to claim 11, degreasing can be controlled by controlling the inert gas or the like supplied to the furnace body in response to the detected gas.

(Item 12) There are a plurality of types of gases detected by the gas monitor, and the temperature of the inert gas, the temperature of the superheated steam, or both are controlled so that the atmospheric temperature of the internal space of the furnace body is different for each detected gas.

According to the degreasing method according to claim 12, incomplete degreasing can be prevented by controlling an inert gas or the like so that degreasing is completed for each detected gas.

(Item 13) The gas monitor includes a Fourier transform infrared spectrometer.

According to the degreasing method according to claim 13, gas can be detected by a Fourier transform infrared spectrometer.

(Item 14) A step of detecting gas exhausted from the furnace body with a gas monitor and a step of measuring the temperature of the gas exhausted from the furnace body with a thermometer are provided.

According to the degreasing method according to claim 14, by detecting or measuring the temperature of the gas exhausted from the furnace body, the heating temperature of the exhausted gas and the supply amount of air can be adjusted, and control is possible so that the gas can be decomposed reliably. .

In addition, the present invention can be implemented in an aspect to which various improvements, corrections, and changes are added based on the knowledge of those skilled in the art without departing from the general idea. Each embodiment described is not independent, but can be implemented in an appropriate combination based on the knowledge of those skilled in the art.

10, 42, 48, 50, 60: degreasing
12: degreased substances
14: furnace body
16: gas source
18, 62: gas monitor
20: inner space of the furnace body
22: shelf
24: supply port
26: exhaust vent
28: plumbing
30: heating device
32, 64: thermometer
34: control device
36: Exhaust gas combustion furnace
38: insulator
40: exhaust passage
44: saturated steam generator
46: Superheater
52: communication device
54: Network
56: server

Claims (14)

A furnace body accommodating the object to be degreased;
a gas source of inert gas supplied to the furnace body;
a heating device for heating the inert gas;
a gas monitor for detecting gas generated from the object to be degreased;
A control device for controlling a gas source and the heating device in response to the gas detected by the gas monitor;
The control device degreases the degreasing when the gas is no longer detected. A furnace body accommodating the object to be degreased;
a liquid source of liquid or a saturated steam generating device for generating saturated steam;
a superheater for generating superheated steam supplied to the furnace body from saturated steam or liquid;
a gas monitor for detecting gas generated from the object to be degreased;
A control device for controlling the saturated steam generating device or the liquid source and the superheater in response to the gas detected by the gas monitor;
The control device degreases the degreasing when the gas is no longer detected. A furnace body accommodating the object to be degreased;
a gas source of inert gas supplied to the furnace body;
a heating device for heating the inert gas;
a liquid source of liquid or a saturated steam generating device for generating saturated steam;
a superheater for generating superheated steam supplied to the furnace body from saturated steam or liquid;
a gas monitor for detecting gas generated from the object to be degreased;
In response to the gas detected by the gas monitor, a control device for controlling the gas source, the heating device, the saturated steam generating device, or the liquid source and the superheater, or both,
The control device degreases the degreasing when the gas is no longer detected. delete According to any one of claims 1 to 3,
There are a plurality of types of gas detected by the gas monitor, and the control device controls a gas source, a heating device, a saturated steam generating device, or a liquid source and a superheater, or both, so that the atmospheric temperature of the internal space of the furnace body is different for each gas. skim. According to any one of claims 1 to 3,
A degreasing furnace in which the gas monitor includes a Fourier transform infrared spectrometer. According to any one of claims 1 to 3,
a gas monitor for detecting gas exhausted from the furnace body;
Thermometer for measuring the gas exhausted from the furnace body
Degreasing with a. A step of storing the degreased material in the furnace body;
A step of raising the temperature of an inert gas;
a step of degreasing an object to be degreased with the heated inert gas;
a step of detecting a gas generated from the object to be degreased with a gas monitor;
a step of controlling the supply of an inert gas to the furnace body in response to the gas detected by the gas monitor;
A degreasing method in which the step of controlling the supply of the inert gas ends degreasing when the gas is no longer detected. A step of storing the degreased material in the furnace body;
generating superheated steam from saturated steam or liquid;
a step of degreasing an object to be degreased with the superheated steam;
a step of detecting a gas generated from the object to be degreased with a gas monitor;
Controlling the supply of superheated steam to the furnace body in response to the gas detected by the gas monitor;
A degreasing method in which the step of controlling the supply of the superheated steam ends the degreasing when the gas is no longer detected. A step of storing the degreased material in the furnace body;
A step of raising the temperature of an inert gas;
generating superheated steam from saturated steam or liquid;
A step of degreasing the object to be degreased with the heated inert gas, superheated steam, or both;
a step of detecting a gas generated from the object to be degreased with a gas monitor;
Controlling the supply of inert gas, superheated steam, or both to the furnace body in response to the gas detected by the gas monitor;
The step of controlling the supply of the inert gas, the superheated steam, or both of them ends the degreasing when the gas is no longer detected. delete According to any one of claims 8 to 10,
A degreasing method in which there are a plurality of types of gases detected by the gas monitor, and the temperature of the inert gas, the temperature of the superheated steam, or both are controlled so that the atmospheric temperature of the internal space of the furnace body is different for each detected gas. According to any one of claims 8 to 10,
The degreasing method of claim 1, wherein the gas monitor comprises a Fourier transform infrared spectrometer. According to any one of claims 8 to 10,
a step of detecting gas exhausted from the furnace body with a gas monitor;
Step of measuring the temperature of the gas exhausted from the furnace body with a thermometer
A degreasing method having a.

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