KR20220043822A - Degreasing furnace and degreasing method - Google Patents

Abstract

The present invention provides a degreasing furnace and a degreasing method capable of performing degreasing at a proper time. The degreasing furnace (10) comprises: a furnace body (14) which accommodates a degreased object (12); a gas source (16) of inert gas which is supplied to the furnace body (14); a heating device (30) which heats the inert gas; and a gas monitor (18) which detects gas generated from the degreased object (12). The degreasing method comprises: a step of storing the degreased object (12) in the furnace body (14); a step of increasing a temperature of the inert gas; a step of degreasing the degreased object (12) with the heated inert gas; and a step of detecting the gas generated from the degreased object (12) with a gas monitor (18).

Description

DEGREASING FUNACE AND DEGREASING METHOD

The present invention relates to a degreasing furnace and a degreasing method.

Conventionally, an object to be degreased containing ceramics is degreased in a degreasing furnace. For example, the degreasing method of Patent Document 1 described below includes a furnace main body for housing an object to be degreased, and a heating means for heating the object to be degreased. The gas generated by the degreasing is heated, decomposed, and converted into a gas such as carbon dioxide. In Patent Document 1, a part of the decomposed gas is guided back to the furnace body. Patent Document 1 describes that the oxygen gas concentration is maintained at a low concentration and cracks in the degreased material are prevented.

International Publication No. WO2005/047207

In order to obtain an appropriate degreasing condition, it is necessary to degrease under various conditions. Since the degreasing conditions are different when the material, shape, etc. of the object to be degreased are different, it is necessary to newly obtain degreasing conditions. In order to obtain suitable degreasing conditions, an enormous amount of labor is required. Even if the degreasing condition is obtained, in order not to fail degreasing, degreasing may be performed for a longer time than the requested condition. It takes time to degrease, and work efficiency worsens. It is desirable to degrease at an appropriate time. In addition, patent document 1 does not demonstrate about calculating|requiring degreasing conditions.

Therefore, an object of the present invention is to provide a degreasing furnace and a degreasing method capable of degreasing in an appropriate time.

In order to solve the above problems, the degreasing method according to the present invention has a configuration as described below.

According to the degreasing apparatus of the present invention, a furnace body for accommodating an object to be degreased, a gas source for an inert gas supplied to the furnace body, a heating device for heating the inert gas, and a gas monitor for detecting a gas generated from the object to be degreased includes A saturated steam generating device for generating saturated steam, a liquid source of liquid or both, and a superheater for generating superheated steam supplied to the furnace body from saturated steam or liquid may be included.

The degreasing method of the present invention includes a step of storing an object to be degreased in a furnace body, a step of raising a temperature of an inert gas, a step of degreasing the object to be degreased with the elevated temperature inert gas, and a gas generated from the degreased object using a gas monitor. It includes the process of detecting. A step of generating superheated steam from saturated steam or liquid and a step of degreasing an object to be degreased with the superheated steam may be included.

According to the present invention, the present application can determine whether degreasing has started or has been completed by detecting a gas generated when degreasing with a gas monitor. It is not necessary to obtain conditions for degreasing, and anyone can perform degreasing in the same way. The quality of the degreased product can be kept constant. When gas is no longer detected or after the detection amount has decreased, it is possible to prevent unnecessary long-term degreasing by repeatedly raising the temperature to a set (or prescribed) temperature, and finally terminating degreasing when no gas is detected. can

BRIEF DESCRIPTION OF THE DRAWINGS It is a figure which shows the structure of the degreaser of this invention.
2 is a graph showing a gas detected by FTIR.
It is a graph which shows the atmospheric temperature of the furnace main body at the time of degreasing, detecting a some gas.
4 is a view showing the configuration of a degreasing furnace equipped with a superheater.
5 is a view showing the configuration of a degreasing furnace equipped with a gas source and a superheater.
Fig. 6 is a diagram showing the configuration of a skim paper equipped with a communication device.
7 is a diagram showing the configuration of a degreasing furnace in which a gas monitor and a thermometer are disposed in an exhaust passage.

A degreasing furnace and a degreasing method of the present invention will be described with reference to the drawings. Although some embodiment is described, even if it is another embodiment, the same code|symbol is attached|subjected to the same means, and description may be abbreviate|omitted.

[Embodiment 1]

The degreasing furnace 10 of the present application shown in FIG. 1 includes a furnace body 14 in which an object to be degreased 12 is accommodated, a gas source 16 of an inert gas, and a gas monitor that detects gas generated from the object 12 to be degreased. (18) is provided.

[Remove material]

The degreased material 12 includes a ceramic molded body. Ceramics include nitride-based ceramics (aluminum nitride, silicon nitride, etc.), alumina, zirconium, and the like. A binder is included in the degreased material 12 . The binder is to be mixed with the ceramics when forming the degreased material 12 . As the temperature of the degreased material 12 is raised, the binder is decomposed and released as a gas. Examples of the binder include polybutyl methacrylate, polyvinyl alcohol, methyl cellulose, vinyl acetate, and polyethylene glycol.

[oar body]

The furnace body 14 is made of a heat-resistant material such as SUS310S or SUS316L. The furnace body 14 has a container shape, and the degreasing material 12 is accommodated in its inner space 20 . In the inner space 20 of the furnace body 14, a shelf 22 for arranging the material to be removed 12 may be provided. The furnace body 14 is provided with a supply port 24 and an exhaust port 26 . An inert gas is supplied to the inner space 20 of the furnace body 14 from the supply port 24 . Gas generated when the object 12 to be degreased is degreased is exhausted from the exhaust port 26 .

[Gas source]

The gas source 16 is a device for storing, generating, or both of an inert gas. The inert gas is nitrogen, argon, helium, or the like. The heated inert gas is supplied to the furnace body 14 . The furnace body 14 and the gas source 16 are connected by a pipe 28 .

A heating device 30 for increasing the temperature of the gas is disposed in the middle of the pipe 28 . Alternatively, the gas source 16 and the heating device 30 may be integrated. The heating device 30 is an electric heater, a gas burner, a heavy oil burner, or the like. The temperature of the elevated inert gas is 500°C or higher, preferably 600 to 1200°C. The temperature of the degreased material 12 is raised by the high-temperature inert gas and is degreased. The portion of the piping 28 between the furnace body 14 and the heating device 30 is preferably made of a heat-resistant material. In addition, the heating device 30 may be provided in the internal space 20 of the furnace main body 14, and you may raise the temperature of gas in the internal space 20. As shown in FIG.

[Gas Monitor]

A gas monitor 18 for detecting gas generated from the degreased material 12 is provided. The above-described binder is heated to become a gas, and the gas is detected by the gas monitor 18 . The place where the gas monitor 18 is installed is not limited as long as the gas can be detected. For example, the gas monitor 18 is provided so that gas in the vicinity of the exhaust port 26 of the furnace body 14 can be detected. The gas monitor 18 is FTIR (Fourier transform infrared spectrometer), GC (gas chromatograph), FID (hydrogen salt ionization detector), TOC system (all organic carbon system), or the like. When the gas monitor 18 detects the presence or absence of gas, the progress of degreasing can be calculated|required. When gas is detected, degreasing is performed, and when no gas is detected thereafter, degreasing is terminated.

The gas monitor 18 provided in one degreasing furnace 10 is not limited to one, and a plurality of gas monitors 18 may be provided.

[thermometer]

The thermometer 32 for measuring the atmospheric temperature of the internal space 20 of the furnace main body 14 is provided. The thermometer 32 uses a thermocouple thermometer.

[controller]

and a control device (34) for controlling the gas source (16) and the heating device (30) in response to the gas detected by the gas monitor (18). The value detected by the gas monitor 18 is input to the control device 34 . In addition, the temperature measured by the thermometer 32 is input to the control device 34 . The control device 34 is configured such that when a gas is detected, an inert gas is supplied to the furnace body 14 until the gas is no longer detected, and the ambient temperature of the furnace body 14 is maintained at a predetermined temperature; The gas source 16 and the heating device 30 are controlled. The control device 34 includes an arithmetic unit such as a central processing unit (CPU) or a programmable logic controller (PLC).

[Exhaust gas combustion furnace]

An exhaust gas combustion furnace 36 is connected to an exhaust port 26 of the furnace body 14 . The exhaust gas combustion furnace 36 is provided with the exhaust passage 40 formed by making the heat insulating body 38 into a cylindrical shape, and a heating device (not shown). The heating device is an electric heater, a gas burner, or a heavy oil burner. The exhaust gas combustion furnace 36 heats the gas emitted from the object 12 to be degreased by degreasing, decomposes, and converts it into a gas such as carbon dioxide for exhaust.

[Other]

In the present application, a fan for sucking an inert gas into the internal space 20 of the furnace body 14 and a fan for exhausting a gas generated by degreasing from the internal space 20 of the furnace body 14 may be provided.

[How to degrease]

Next, a degreasing method using the degreasing furnace 10 will be described. (1) The material to be removed 12 is accommodated in the inner space 20 of the furnace body 14 . For example, the degreased material 12 is a molded product including ceramics and a binder.

(2) An inert gas is supplied from the gas source 16 to the inner space 20 of the furnace body 14 . For example, the inert gas is nitrogen. The inert gas is heated by the heating device 30 , the atmospheric temperature of the furnace body 14 rises, and the degreased material 12 accommodated in the furnace body 14 rises. For example, the atmospheric temperature of the internal space 20 of the furnace main body 14 is 500 degreeC or more, Preferably it heats up to 600-1200 degreeC.

(3) When the atmospheric temperature of the internal space 20 of the furnace body 14 rises, the degreased material 12 is degreased. Upon degreasing, the degreased material 12 releases the binder as a gas. The gas is detected by the gas monitor 18 . For example, FIG. 2 shows a detection result when the gas monitor 18 is a Fourier transform infrared spectrometer (FTIR), and ethyl methacrylate is contained in gas. Since the wave number is determined by the functional group contained in the gas, it can be seen that whether gas is generated is detected by the intensity of the set wave number. When the degreasing is complete, no gas is detected. In the present application, an inert gas is supplied to the interior space 20 of the furnace body 14 while the gas is detected by the gas monitor 18 . The object 12 to be degreased is degreased by making the temperature of the supplied inert gas constant. After that, when no gas is detected, it stops.

The gas generated when the degreasing object 12 is degreased is supplied from the exhaust port 26 to the exhaust gas combustion furnace 36 . In the exhaust passage 40 of the exhaust gas combustion furnace 36, the gas is heated up and decomposed to become carbon dioxide or the like, and exhausted.

(4) The gas source 16 and the heating device 30 are stopped, and the supply of the inert gas to the furnace body 14 is stopped. The atmospheric temperature of the internal space 20 of the furnace main body 14 falls, and the temperature of the to-be-removed material 12 falls. When the temperature of the degreased material 12 decreases, the degreased material 12 is taken out from the furnace body 14 . After that, the degreased material 12 may be put into an arbitrary sintering furnace and sintered.

As described above, in the present application, it is possible to determine whether or not the degreasing is completed by detecting the gas generated when the degreasing is performed with the gas monitor 18 . There is no need to ask for degreasing conditions. By terminating the degreasing when the gas is no longer detected, it is possible to complete the degreasing in an optimal time.

[Embodiment 2]

The gas emitted from the degreased material 12 is not limited to one type. A plurality of gases may be generated depending on the binder contained in the degreased material 12 . The gas monitor 18 may detect a plurality of gases.

For example, it is assumed that the gas monitor 18 detects three types of gases A, B and C. The atmospheric temperature of the furnace body 14 when the first gas A is detected is TA, the atmospheric temperature of the furnace body 14 when the second gas B is detected is TB, and the third gas C is detected. Let the atmospheric temperature of the furnace main body 14 at the time be TC. The atmospheric temperature shall be TA<TB<TC. As shown in Fig. 3, in the state in which the first gas A is detected, the atmospheric temperature is maintained at TA to degrease. When the first gas A is not detected (or the detection amount decreases), the ambient temperature is raised. When the atmospheric temperature becomes TB, the second gas B is detected. Degrease by maintaining the ambient temperature at TB. When the second gas B is not detected (or the detection amount decreases), the ambient temperature of the furnace body 14 is raised. When the atmospheric temperature becomes TC, the third gas C is detected. Degrease by maintaining the ambient temperature at TC. When the third gas C is not detected (or the detected amount decreases), the supply of the inert gas is stopped to complete degreasing.

As described above, the ambient temperature of the furnace body 14 is maintained whenever gas is detected, and when gas is not detected, the ambient temperature of the furnace body 14 is raised. The control device 34 controls the gas source 16 and the heating device 30 whenever gas is detected by the gas monitor 18 , so that the temperature measured by the thermometer 32 becomes constant. When the gas is not detected (or the detected amount is decreased), the gas source 16 and the heating device 30 are controlled so that the temperature measured by the thermometer 32 is gradually increased. When degreasing, the gases released from the degreased material 12 are sequentially released. It is possible to prevent the object 12 from being degreased from being incompletely degreased, so that all binders can be degreased.

[Embodiment 3]

You may degrease using superheated steam instead of an inert gas. As shown in the degreasing furnace 42 of FIG. 4 , a saturated steam generating device 44 for generating saturated steam and a superheater 46 for generating superheated steam are provided. The furnace body 14 and the saturated steam forming apparatus 44 are connected in a pipe 28 , and a superheater 46 is provided in the middle of the pipe 28 .

Saturated steam generator 44 supplies saturated steam to superheater 46 . The saturated steam generating device 44 includes a boiler that boils a liquid such as pure water to generate saturated steam.

Superheater 46 is a device for generating superheated steam from saturated steam. Examples of the superheater 46 include a contact superheater, a radiant superheater, a hanging superheater, a plate superheater, and a transverse superheater. The superheater 46 has a long tube through which saturated steam flows. The saturated steam flowing through the intestinal tract is heated and becomes superheated steam. The produced superheated steam is supplied to the furnace body 14 . At this time, the superheated steam is a gas containing colorless and transparent water (H ₂ O) obtained by heating saturated steam at 100° C. to a higher temperature at normal pressure. The temperature of the superheated steam is 500°C or higher, preferably 600 to 1200°C. The portion of the piping 28 between the furnace body 14 and the superheater 46 is preferably made of a heat-resistant material. Since the superheated steam has a large heat capacity and high thermal conductivity, it is possible to increase the temperature of the degreased material 12 in a short time to degrease it.

Saturated steam is generated in the saturated steam generating device 44 , and the saturated steam is supplied to the superheater 46 . Superheater 46 generates superheated steam from saturated steam and supplies it to furnace body 14 . The atmospheric temperature of the furnace body 14 rises, and the material to be degreased 12 is degreased.

The saturated steam generating device 44 and the superheater 46 are controlled by a control device 34 . The value detected by the gas monitor 18 and the value of the thermometer 32 are input to the control apparatus 34 similarly to the said embodiment. When gas is detected by the gas monitor 18 , the control device 34 controls the saturated steam generator 44 and the superheater 46 so that the ambient temperature of the furnace body 14 is maintained. The internal space 20 of the furnace body 14 maintains the temperature at the time of degreasing, and the degreasing object 12 is degreased. When no gas is detected by the gas monitor 18, the control device 34 stops the saturated steam generator 44 and the superheater 46 to complete the degreasing.

Also in Embodiment 2, you may use superheated steam instead of an inert gas. The temperature increase rate is faster than that of an inert gas, and the time required for degreasing can be shortened. When one gas is detected, the control device 34 controls the saturated steam generating device 44 and the superheater 46 so that the ambient temperature of the furnace body 14 is maintained, and when one gas is not detected, the other gas The ambient temperature of the furnace body 14 is raised by increasing the temperature of the superheated steam until it is detected.

Although saturated steam is supplied to the superheater 46 to generate superheated steam, a liquid such as pure water may be supplied to the superheater 46 . A liquid source for supplying liquid to the superheater 46 may be provided instead of the saturated vapor generating device 44 . The liquid source includes a device for generating a liquid, a tank containing the liquid, or both. Superheater 46 generates superheated vapor from the liquid.

[Embodiment 4]

Like the degreasing furnace 48 shown in FIG. 5 , a gas source 16 , a heating device 30 , a saturated steam generating device 44 , and a superheater 46 may be provided. The degreased material 12 is heated up by inert gas, superheated steam or both to degrease.

[Embodiment 5]

The operator of the degreasing furnace (10, 42, 48) checks the detection status of the gas with the gas monitor (18), and manually checks the gas source (16) and the superheater (46), the saturated steam generator (44) and the superheater (46) ), or both of them. The operator can determine the degreasing status by checking the detected value with the gas monitor 18 .

[Embodiment 6]

Like the degreasing furnace 50 in FIG. 6 , the communication device 52 may be connected to the control device 34 . The communication device 52 is a device for connecting to the network 54 by wire or wireless. The network 54 may include a network using a communication facility of a mobile phone such as a local area network (LAN) or long term evolution (LTE), or both. A server 56 is connected to a network 54 . The value detected by the gas monitor 18 , the value measured by the thermometer 32 , or both are transmitted to the server 56 via the network 54 . The server 56 stores the received value in a storage device. Another computer may access the server 56 via the network 54 and check the stored value. You can check the degreasing status remotely.

[Embodiment 7]

Like the degreasing furnace 60 in FIG. 7 , a gas monitor 62 may be attached to the exhaust passage 40 so that thermal decomposition of gas can be confirmed. It can be checked whether the gas exhausted from the inner space 20 of the furnace body 14 is completely converted into a gas such as carbon dioxide. The gas monitor 62 may use the same gas monitor 18 used to detect gas in the inner space 20 of the furnace body 14 .

In addition, a thermometer 64 may be disposed in the exhaust passage 40 to measure the temperature of the exhausted gas. The values of the gas monitor 62 and the thermometer 64 are input to the control device 34 . The control device 34 controls the temperature by a heating device (not shown) provided in the exhaust passage 40 so that the gas can be decomposed by heating reliably.

If necessary, an air supply port may be provided in the exhaust passage 40 so that the air supply amount can be adjusted. The combustion of gas is controlled by the amount of air introduced.

(Item 1) A degreasing method according to one embodiment includes a furnace body for accommodating an object to be degreased, a gas source for an inert gas supplied to the furnace body, a heating device for heating the inert gas, and a furnace generated from the object to be degreased. and a gas monitor for detecting gas.

According to the degreasing furnace according to claim 1, the progress of the degreasing can be confirmed by the gas detected by the gas monitor. The end of the degreasing can be known, so that the degreasing can be completed at an appropriate time.

(Item 2) In the degreasing method according to one aspect, a furnace body for accommodating an object to be degreased, a saturated steam generating device or liquid source for generating saturated steam, and superheated steam supplied to the furnace body with saturated steam or and a superheater generated from the liquid, and a gas monitor for detecting gas generated from the degreased material.

According to the degreasing furnace according to claim 2, the degreasing time can be shortened by saturated steam. At that time, by detecting the gas at the time of degreasing with the gas monitor, it is possible to complete degreasing in an optimal time.

(Item 3) A degreasing method according to one embodiment includes a furnace body for accommodating an object to be degreased, a gas source for an inert gas supplied to the furnace body, a heating device for heating the inert gas, and generating saturated steam. a saturated vapor generating device or liquid source of liquid; a superheater generating superheated vapor supplied to the furnace body from saturated vapor or liquid; and a gas monitor detecting a gas generated from the degreasing object.

According to the degreasing method according to claim 3, even if degreasing is performed with either an inert gas or saturated steam, the degreasing can be finished in an optimal time by detecting the gas with a gas monitor.

(Item 4) and a control device for controlling the gas source and the heating device, the saturated steam generating device or the liquid source and the superheater or both in response to the gas detected by the gas monitor.

According to the degreasing furnace according to claim 4, when the control device controls the gas source or the like, degreasing can be performed automatically. At that time, by using the value detected by the gas monitor, it is possible to degrease in an optimal time.

(Item 5) There are a plurality of types of gases detected by the gas monitor, and the control device uses a gas source and a heating device, a saturated steam generator, or a liquid source and a superheater so that the atmospheric temperature of the internal space of the furnace body is different for each gas. control both of them.

According to the degreasing furnace according to claim 5, incomplete degreasing can be prevented by degreasing each gas at a predetermined temperature.

(Item 6) The gas monitor includes a Fourier transform infrared spectrophotometer.

According to the degreasing method of Claim 6, the gas at the time of degreasing can be detected by using a Fourier transform infrared spectrophotometer as a gas monitor.

(Item 7) A gas monitor for detecting the gas exhausted from the furnace body and a thermometer for measuring the gas exhausted from the furnace body are provided.

According to the degreasing furnace according to claim 7, by detecting the exhausted gas or measuring the temperature, the heating temperature of the exhausted gas and the supplied air can be controlled, and the decomposition can be reliably controlled.

(Item 8) A degreasing method according to one aspect includes a step of storing an object to be degreased in a furnace body, a step of raising the temperature of an inert gas, a step of degreasing the object with the heated inert gas, and and detecting the generated gas with a gas monitor.

According to the degreasing method according to claim 8, there is no need to obtain degreasing conditions by detecting a gas generated during degreasing with a gas monitor. By detecting the gas, it is possible to confirm the completion of degreasing.

(Item 9) A degreasing method according to one aspect includes a step of storing an object to be degreased in a furnace body; a step of generating superheated steam from saturated steam or liquid; and a step of degreasing the degreasing material with the superheated steam; and detecting a gas generated from the degreasing object with a gas monitor.

According to the degreasing method according to claim 9, the internal space of the furnace body can be heated up in a short time by the superheated steam, and the degreasing can be performed in a short time. By detecting the gas with the gas monitor, it is possible to confirm the completion of the degreasing. Unnecessarily prolonged degreasing can be prevented.

(Item 10) A degreasing method according to one aspect includes a step of accommodating an object to be degreased in a furnace body, a step of raising a temperature of an inert gas, a step of generating superheated steam from saturated steam or liquid, and the heated inert gas , a step of degreasing an object to be degreased with superheated steam or both, and a step of detecting a gas generated from the degreased material with a gas monitor.

According to the degreasing method according to claim 10, even when degreasing using either an inert gas or superheated steam, it is possible to degrease in an optimal time by detecting the gas. It is not necessary to seek conditions for degreasing.

(Item 11) and controlling supply of an inert gas, superheated steam, or both to the furnace body in response to the gas detected by the gas monitor.

According to the degreasing method according to claim 11, degreasing can be controlled by controlling the inert gas or the like supplied to the furnace body in response to the detected gas.

(Item 12) There are a plurality of types of gases detected by the gas monitor, and the temperature of the inert gas, the temperature of the superheated steam, or both are controlled so that the atmospheric temperature of the internal space of the furnace body is different for each detected gas.

According to the degreasing method according to claim 12, it is possible to prevent incomplete degreasing by controlling an inert gas or the like so that degreasing is completed for each detected gas.

(Item 13) The gas monitor includes a Fourier transform infrared spectrometer.

According to the degreasing method according to claim 13, the gas can be detected by a Fourier transform infrared spectrophotometer.

(Item 14) A step of detecting the gas exhausted from the furnace body with a gas monitor; and a step of measuring a temperature of the gas exhausted from the furnace body with a thermometer.

According to the degreasing method according to claim 14, by detecting the gas exhausted from the furnace body or measuring the temperature, the heating temperature of the exhausted gas and the air supply amount can be adjusted, and the gas can be reliably decomposed. .

In addition, this invention can be implemented in the aspect which added various improvement, correction, and change based on the knowledge of those skilled in the art within the range which does not deviate from the main point. Each of the described embodiments is not independent, and can be implemented in appropriate combination based on the knowledge of those skilled in the art.

10, 42, 48, 50, 60: by skim
12: fading
14: furnace body
16: gas source
18, 62: gas monitor
20: the inner space of the furnace body
22: shelf
24: supply port
26: exhaust port
28: plumbing
30: heating device
32, 64: thermometer
34: control device
36: exhaust gas combustion furnace
38: insulation
40: exhaust passage
44: saturated steam generating device
46: superheater
52: communication device
54: network
56: server

Claims (14)

a furnace body for accommodating a waste material;
a gas source for supplying an inert gas to the furnace body;
a heating device for heating the inert gas;
Gas monitor for detecting gas generated from the degreasing object
With a skim containing. a furnace body for accommodating a waste material;
a saturated vapor generating device or liquid source of liquid for generating saturated vapor;
a superheater for generating superheated steam supplied to the furnace body from saturated steam or liquid;
Gas monitor for detecting gas generated from the degreasing object
With a skim containing. a furnace body for accommodating a waste material;
a gas source for supplying an inert gas to the furnace body;
a heating device for heating the inert gas;
a saturated vapor generating device or liquid source of liquid for generating saturated vapor;
a superheater for generating superheated steam supplied to the furnace body from saturated steam or liquid;
Gas monitor for detecting gas generated from the degreasing object
With a skim containing. 4. The method according to any one of claims 1 to 3,
and a control device for controlling a gas source and a heating device, a saturated steam generating device or a liquid source and a superheater, or both in response to the gas detected by the gas monitor. 5. The method of claim 4,
There are a plurality of types of gases detected by the gas monitor, and the control device controls a gas source and a heating device, a saturated steam generating device, or a liquid source and a superheater or both so that the atmospheric temperature of the internal space of the furnace body is different for each gas. by skim. 4. The method according to any one of claims 1 to 3,
wherein the gas monitor comprises a Fourier transform infrared spectrometer. 4. The method according to any one of claims 1 to 3,
a gas monitor for detecting the gas exhausted from the furnace body;
A thermometer that measures the gas exhausted from the furnace body
with a cotton swab equipped with A step of accommodating the waste matter in the furnace body;
raising the temperature of the inert gas;
a step of degreasing the object to be degreased with the elevated temperature inert gas;
A process of detecting gas generated from the degreasing object with a gas monitor
A degreasing method comprising a. A step of accommodating the waste matter in the furnace body;
generating superheated vapor from saturated vapor or liquid;
a step of degreasing the object to be degreased with the superheated steam;
A process of detecting gas generated from the degreasing object with a gas monitor
A degreasing method comprising a. A step of accommodating the waste matter in the furnace body;
raising the temperature of the inert gas;
generating superheated vapor from saturated vapor or liquid;
a step of degreasing the object to be degreased with the elevated temperature inert gas, superheated steam, or both;
A process of detecting gas generated from the degreasing object with a gas monitor
A degreasing method comprising a. 11. The method according to any one of claims 8 to 10,
and controlling supply of an inert gas, superheated steam or both to the degreasing furnace in response to the gas detected by the gas monitor. 11. The method according to any one of claims 8 to 10,
A degreasing furnace for controlling the temperature of the inert gas, the temperature of the superheated steam, or both so that there are a plurality of types of gases detected by the gas monitor, and the atmospheric temperature of the internal space of the furnace body is different for each detected gas. 11. The method according to any one of claims 8 to 10,
wherein the gas monitor comprises a Fourier transform infrared spectrometer. 11. The method according to any one of claims 8 to 10,
detecting the gas exhausted from the furnace body with a gas monitor;
A process of measuring the temperature of the gas exhausted from the furnace body with a thermometer
A degreasing method comprising a.

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