JP2021191989A - Defatting furnace and defatting method - Google Patents

Abstract

To provide a defatting furnace and a defatting method capable of defatting in short time.SOLUTION: A defatting furnace 10 includes a furnace body 14 storing a defatting object 12 containing ceramics, an inert gas source 16 supplying inert gas to the furnace body 14, a heating device heating the inert gas, a saturated steam generation device 18 generating saturated steam or a liquid source 48, and a superheater 20 generating superheated steam from the liquid or the saturated steam after supplying the inert gas to the furnace body 14 and supplying the superheated steam to the furnace body 14.SELECTED DRAWING: Figure 1

Description

The present invention relates to a degreasing furnace and a degreasing method.

Conventionally, a degreased material made of ceramics has been degreased in a degreasing furnace. For example, the furnace of Patent Document 1 below includes a furnace body for storing the degreased material and a heating means for heating the degreased material. The furnace of Patent Document 1 heats the degreasing gas to remove the organic matter decomposition gas. A part of the degreasing gas from which the organic matter decomposition gas has been removed is led to the furnace body again. Patent Document 1 describes that the oxygen gas concentration is maintained at a low concentration and cracks in the degreased material are prevented.

International release number WO2005 / 047207

When nitrogen or the like is introduced into the furnace body to degreas it, a heating element is installed on the furnace wall, so it takes time to raise the temperature of the ceramics. The furnace of Patent Document 1 may take a long time to degreas.

Therefore, an object of the present invention is to provide a degreasing furnace and a degreasing method capable of degreasing treatment in a short time.

In order to solve the above problems, the degreasing furnace according to the present invention has the following configuration.

The degreasing furnace of the present invention is a degreasing furnace for degreasing a degreased substance containing ceramics, and is a first of a furnace body accommodating the degreased substance and a first gas which is an inert gas supplied to the furnace body. A gas source, a heating device that raises the temperature of the first gas, a saturated steam generator or a liquid source of a liquid that generates saturated steam, and superheated steam is generated from the liquid or saturated steam, and the superheated steam is sent to the furnace body. A superheater to be supplied and a control device for controlling to supply superheated steam from the superheater to the furnace body after raising the temperature of the degreased material by supplying the first gas to the furnace body. include. Further, instead of the first gas source, a second gas source of the second gas, which is the atmosphere supplied to the furnace body, may be provided. Further, both a first gas source and a second gas source may be provided.

The degreasing method of the present invention includes a step of storing the degreased material containing ceramics in the furnace body, a step of raising the temperature of the inert gas which is the first gas of the first gas source, and the step of raising the temperature of the first gas. A step of introducing the first gas into the furnace main body and raising the temperature of the degreased material in advance, and a step of generating superheated steam from saturated steam or liquid with the superheater. It includes a step of supplying the superheated steam to the furnace main body and a step of completing the degreasing of the degreased material by the superheated steam. Further, instead of the first gas source, the temperature of the atmosphere, which is the second gas, may be raised and supplied to the furnace body. Further, both the first gas and the second gas may be supplied to the furnace body.

According to the present invention, by using superheated steam, the heat capacity is large and the heat conduction is high, so that it is easy to raise the temperature of the degreased material. Degreasing is completed in a short time. Further, the temperature of the object to be treated is raised with an inert gas before being degreased with superheated steam. It is possible to prevent the superheated steam from dew condensation or becoming saturated steam and coming into contact with the object to be treated. The reaction between the object to be treated and water is unlikely to occur, and deterioration of the object to be processed can be suppressed.

It is a figure which shows the structure of the degreasing furnace of this invention. It is a graph which shows the atmospheric temperature of a furnace body. It is a figure which shows the structure of the other degreasing furnace of this invention. It is a figure which shows the structure of the other degreasing furnace of this invention. It is a figure which shows the structure of the degreasing furnace provided with the 2nd gas source. It is a figure which shows the structure of the degreasing furnace provided with the 1st gas source and the 2nd gas source. It is a graph which shows the atmospheric temperature of a furnace body. It is a figure which shows the structure of the other degreasing furnace provided with the 1st gas source and the 2nd gas source. It is a figure which shows the structure of the other degreasing furnace provided with the 1st gas source and the 2nd gas source.

The degreasing furnace and the degreasing method of the present invention will be described with reference to the drawings. Although a plurality of embodiments will be described, the same means may be designated by the same reference numerals and description thereof may be omitted even in different embodiments.

[Embodiment 1]
The degreasing furnace 10 of the present application shown in FIG. 1 includes a furnace body 14 in which a degreased material 12 is housed, a first gas source 16 for an inert gas, a saturated steam generator 18 for saturated steam, and a superheater 20 for generating superheated steam. To prepare for.

[Solvent degreased material]
The material to be degreased 12 includes a ceramic molded body. Ceramics include nitride-based ceramics (aluminum nitride, silicon nitride, etc.), carbide-based ceramics (silicon carbide, boron carbide, etc.), oxide-based ceramics (alumina, zirconium, etc.). include. The degreased material 12 contains a binder. The binder is mixed with the ceramics when the degreased material 12 is formed. When the temperature of the degreased material 12 is raised, the binder is released as a gas from the degreased material 12. As the binder, polybutyl methacrylate, polyvinyl alcohol, methyl cellulose, vinyl acetate, polyethylene glycol and the like are used, and other lubricants, plasticizers and dispersants are used.

[Fire pot body]
The furnace body 14 is made of a heat resistant material such as SUS310S or SUS316L. The furnace body 14 has a container shape, and the degreased material 12 is housed in the internal space 22 thereof. A door is provided at an arbitrary position of the furnace main body 14, and the door is opened and closed when the degreased material 12 is taken in and out. A shelf 24 for arranging the degreased material 12 may be provided in the internal space 22 of the furnace main body 14. The furnace body 14 is formed with a supply port 26 and an exhaust port 28. The inert gas and superheated steam are supplied from the supply port 26 to the internal space 22 of the furnace body 14. The gas generated when the degreased material 12 is degreased is exhausted from the exhaust port 28.

[First gas source]
The first gas source 16 is a device for storing, producing, or both of the inert gas (first gas). The inert gas is nitrogen, argon, helium, neon and the like. The heated inert gas is supplied to the furnace body 14. The superheater 20 functions as a heating device for the inert gas without a special heating device for raising the temperature of the inert gas. The gas flow rate value of the first gas source 16 is preferably 250 L / min or more, and more preferably 300 L / min or more. In this case, the heating rate is improved, the heating efficiency in the superheater 20 is optimized, and the time for heating the degreased material 12 before the degreasing step is shortened and uniform heating is realized.

[Saturated steam generator]
A saturated steam generator 18 for supplying saturated steam to the superheater 20 is provided. The saturated steam generator 18 includes a boiler that produces saturated steam by boiling a liquid such as pure water.

[Superheater]
The superheater 20 is a device for generating superheated steam from saturated steam. Examples of the superheater 20 include a contact superheater, a radiant superheater, a suspended superheater, a plate-shaped superheater, and a horizontal superheater. The superheater 20 includes a long tube through which saturated steam flows. Saturated steam flowing through the long pipe is heated and becomes superheated steam. The generated superheated steam is supplied to the furnace body 14. Superheated steam at this time is a gas consisting of a transparent and colorless water to a higher temperature to 100 ° C. in saturated steam at atmospheric pressure (H 2 _O). The temperature of the superheated steam is 500 ° C. or higher, preferably 600 to 1200 ° C.

Further, as described above, the superheater 20 also functions as a heating device for the inert gas. The inert gas is supplied to the superheater 20 to raise the temperature. The temperature of the inert gas is 130 ° C. or higher, preferably 150 to 300 ° C. The heated inert gas is supplied to the furnace body 14.

[Plumbing]
The furnace body 14 and the superheater 20 are connected by a first pipe 30. The heated inert gas and superheated steam are supplied from the superheater 20 to the furnace body 14 through the first pipe 30. Since the high-temperature inert gas and superheated steam flow through the first pipe 30, it is preferable that the first pipe 30 is made of a heat-resistant material. The second pipe 32 is attached to the first gas source 16, and the third pipe 34 is attached to the saturated steam generator 18. The second pipe 32 and the third pipe 34 merge and are connected to the superheater 20. A valve may be attached to each of the pipes 32 and 34, and the flow rate of the inert gas, saturated steam and superheated steam may be controlled by opening and closing the valve.

[thermometer]
The present application includes a thermometer 36 for measuring the atmospheric temperature of the internal space 22 of the furnace body 14. The thermometer 36 utilizes a thermocouple thermometer. The measured temperature controls the supply of the inert gas and superheated steam to the furnace body 14. Therefore, the present application includes a first gas source 16, a superheater 20, and a control device 38 for controlling the saturated steam generator 18.

[Control device]
The control device 38 includes an arithmetic unit such as a CPU (Central Processing Unit) or a PLC (Programmable Logic Controller). The control device 38 controls the first gas source 16, the superheater 20, or the saturated steam generator 18 so that the ambient temperature of the internal space 22 of the furnace body 14 becomes a predetermined temperature. In the present application, under the control of the control device 38, the inert gas is first supplied to the furnace body 14, and the temperature of the degreased material 12 is raised in advance. After that, superheated steam is supplied from the superheater 20 to the furnace body 14, and the degreased material 12 is degreased.

[Exhaust gas combustion furnace]
The exhaust gas combustion furnace 40 is connected to the exhaust port 28 of the furnace body 14. The exhaust gas combustion furnace 40 includes an exhaust passage 44 formed of a heat insulating body 42 and a heating device (not shown). The heating device may be an electric heater, a gas burner or a heavy oil burner. The gas released from the degreased material 12 passes through the exhaust passage 44. A heating device heats the gas and decomposes it or converts it into a gas such as carbon dioxide.

The internal space 22 of the furnace body 14 is provided with a fan for sucking inert gas and superheated steam (not shown), and a fan for exhausting the gas generated by degreasing from the internal space 22 of the furnace body 14 (not shown). May be done.

[Degreasing method]
Next, a degreasing method using the degreasing furnace 10 will be described. (1) The degreased material 12 is housed in the internal space 22 of the furnace body 14. For example, the material to be degreased 12 is a molded product made of nitride-based ceramics.

(2) The inert gas is supplied from the first gas source 16 to the superheater 20. For example, the inert gas is nitrogen. The superheater 20 raises the temperature of the inert gas and supplies it to the furnace body 14. The atmospheric temperature of the furnace body 14 rises (time T0 to T1 in FIG. 2), and the temperature of the degreased material 12 contained in the furnace body 14 rises. In this temperature raising step, the temperature is such that dew condensation does not occur due to the temperature difference between the degreased material 12 and the superheated steam, for example, the atmospheric temperature of the internal space 22 of the furnace body 14 is 130 ° C. or higher, preferably 150 to 150, due to the inert gas. The temperature is raised to 300 ° C.

(3) As shown in time T1 to T2 in FIG. 2, a high-temperature inert gas is supplied to the furnace body 14 so that the atmospheric temperature of the furnace body 14 is maintained. The temperature on the surface and inside of the object to be degreased 12 is also raised to a predetermined temperature. The degreased material 12 is also heated before the degreasing step by raising the temperature with the inert gas. Conventionally, it is known that the degreased material 12 has a type that is vulnerable to moisture. However, until now, since the superheated steam is a high-temperature gas, there is no water in a liquid state, and it has been considered that the degreased material 12 which is vulnerable to water can be degreased by the superheated steam. However, as a result of diligent research by the inventor of the present application, in the conventional technique without a preheating step as in the present application, the degreased material 12 at room temperature is exposed to the superheated steam, so that the temperature of the degreased material 12 and the superheated steam is increased. It was discovered that the difference causes dew condensation on the degreased material 12 and worsens the degreasing result. According to the present invention, by preheating the degreased material 12 before the degreasing step, high degreasing performance can be realized by using superheated steam even for the degreased material 12 of a type weak to water. It should be noted that degreasing may be started at the stage of the preheating step.

(4) After the temperature of the degreased material 12 is raised in advance by the inert gas, the degreased material 12 is degreased by superheated steam. Therefore, the supply of the inert gas from the first gas source 16 to the superheater 20 is stopped. The saturated steam generator 18 heats the liquid to generate saturated steam, and the saturated steam is supplied to the superheater 20. The superheater 20 produces superheated steam from saturated steam. The superheated steam is supplied to the furnace body 14.

The atmospheric temperature of the internal space 22 of the furnace body 14 is increased by superheated steam (time T2 to T3 in FIG. 2). The atmospheric temperature of the internal space 22 of the furnace body 14 at that time is higher than the atmospheric temperature when the inert gas is supplied. For example, the atmospheric temperature is raised to 500 ° C. or higher, preferably 600 to 1200 ° C. The degreased material 12 is degreased in a state where the atmospheric temperature of the furnace body 14 is increased (time T3 to T4 in FIG. 2). The degreased material 12 is degreased by superheated steam.

In the present application, after heating with an inert gas, degreasing is performed with superheated steam. The object to be degreased 12 is heated by the inert gas before being degreased by superheated steam. When the degreased material 12 is at a low temperature without being preheated, when the superheated steam comes into contact with the degreased material 12, the superheated steam cools and becomes dew condensation or saturated steam. When the water droplets come into contact with the degreased material 12, the degreased material 12 reacts with water and deteriorates. In the present application, since the degreased material 12 is heated by the inert gas, it is possible to prevent dew condensation of the superheated steam and suppress the reaction of the degreased material 12 with water. In particular, when the degreased material 12 is a nitride ceramic, the hydrolysis of the degreased material 12 can be suppressed, and the deterioration of the degreased material 12 can be suppressed. For example, when aluminum nitride is hydrolyzed, it becomes aluminum hydroxide and ammonia, and the present application can suppress such hydrolysis. Since superheated steam has a large heat capacity and high thermal conductivity, the degreased material 12 can be heated in a short time to be degreased. Further, if the binder of the degreased material 12 contains a water-soluble binder such as methyl cellulose or polyvinyl alcohol, the degreased material 12 may be deteriorated by moisture. Deterioration of the degreased material 12 can be prevented.

The gas generated when the degreased material 12 is degreased is supplied to the exhaust gas combustion furnace 40 from the exhaust port 28, and is burned to become carbon dioxide or the like and is exhausted.

(5) When the degreasing of the degreased material 12 by the superheated steam is completed, the generation and supply of the superheated steam are stopped. The atmospheric temperature of the internal space 22 of the furnace body 14 decreases (time T4 to T5 in FIG. 2), and the temperature of the degreased material 12 also decreases. When the temperature of the degreased material 12 drops, the degreased material 12 is taken out from the furnace body 14. After that, the degreased material 12 may be placed in a sintering furnace and sintered.

The graph in FIG. 2 differs depending on the shape and size of the furnace body 14, the amount of inert gas supplied to the furnace body 14 per unit time, and the amount of superheated steam supplied to the furnace body 14 per unit time. ..

As described above, the present application can suppress the hydrolysis of the degreased material 12 and prevent the deterioration of the degreased material 12. When degreasing is performed with an inert gas, it takes time to degreas the degreased material 12, but in the present application, after raising the temperature of the degreased material 12 with an inert gas, degreasing is performed using superheated steam, so that the degreasing time is required. Can be shortened.

[Embodiment 2]
A liquid such as pure water may be supplied to the superheater 20. Like the degreasing furnace 46 shown in FIG. 3, the superheater 20 and the liquid source 48 are connected by the third pipe 34. The liquid source 48 includes a device for producing a liquid, a tank for storing the liquid, or both. A liquid is supplied from the liquid source 48 to the superheater 20, and the superheater 20 heats the liquid to generate superheated steam. The temperature of the liquid supplied to the superheater 20 is not limited. In this case, the first gas source 16 and the superheater 20 are connected by the second pipe 32, and the inert gas is supplied from the first gas source 16 to the superheater 20 via the second pipe 32. The inert gas is heated by the superheater 20 and supplied to the furnace body 14.

[Embodiment 3]
As in the degreasing furnace 50 shown in FIG. 4, a heating device 52 for raising the temperature of the inert gas may be provided. The heating device 52 is provided in the middle of the second pipe 32. The second pipe 32 connects the furnace body 14 and the first gas source 16. The inert gas emitted from the first gas source 16 is heated by the heating device 52 and then supplied to the furnace body 14. The first pipe 30 and the second pipe 32 may be connected to the furnace main body 14 as they are separately, or may be merged into one and connected to the furnace main body 14.

The heating device 52 may be integrated with the first gas source 16. The temperature of the inert gas is raised in the first gas source 16 and supplied to the furnace body 14 through the second pipe 32.

[Embodiment 4]
The heating device 52 for raising the temperature of the inert gas may be provided in the internal space 22 of the furnace body 14. The inert gas is supplied from the first gas source 16 to the furnace body 14 without being heated, and is heated in the internal space 22 of the furnace body 14.

[Embodiment 5]
The degreasing furnace 54 of FIG. 5 includes a second gas source 56 instead of the first gas source 16. Other configurations are the same as those of the degreasing furnace 10 of FIG. The second gas source 56 is a gas source for supplying a gas other than the inert gas (second gas), for example, compressed air. The type of gas to be compressed is not limited, and the atmosphere may be composed mainly of nitrogen, oxygen, argon and carbon dioxide. Since the atmosphere is used and no special gas is used, the degreasing furnace 54 is highly versatile. The second gas may be dry air having a dew point temperature of −15 ° C. or lower. This is to prevent dew condensation on the degreased material 12 due to the second gas. It is preferable that fine dust and oil are removed from the second gas. The second gas source 56 may include a compressor for compressing the gas. The pressure of the second gas is about 1 Mpa or less. The second gas source 56 and the superheater 20 are connected by a fourth pipe 58. The fourth pipe 58 may be provided with a valve for adjusting the flow rate of the second gas. The flow rate of the second gas supplied to the furnace main body 14 is preferably 250 L / min or more, more preferably 300 L / min or more. This is to raise the temperature of the degreased material 12 in a short time as in the case of the first gas of the above embodiment.

The degreased material 12 to be degreased in the degreasing furnace 54 of FIG. 5 is preferably ceramics other than nitride-based ceramics. For example, examples of the degreased material 12 to be degreased in the degreasing furnace 54 include oxide-based ceramics such as alumina and zirconium. The binder contained in the degreased product 12 preferably does not contain a water-soluble binder such as methyl cellulose, which is sensitive to moisture. This is to prevent the degreased material 12 from deteriorating when the temperature of the degreased material 12 is raised by the second gas.

Similar to the first embodiment, the second gas of the second gas source 56 is heated by the superheater 20 and supplied to the furnace main body 14. Before the superheated steam is supplied to the furnace body 14, the temperature of the degreased material 12 is raised in advance by the second gas.

In the degreasing furnace 46 of FIG. 3 and the degreasing furnace 50 of FIG. 4, the first gas source 16 may be replaced with the second gas source 56. Also in the degreasing furnace 46 and the degreasing furnace 50, the temperature of the degreased material 12 is raised before degreasing by using a second gas instead of the first gas.

By using the second gas (atmosphere) without using the first gas (inert gas), the cost of the gas used for preheating before degreasing can be suppressed. The cost of degreasing can be suppressed, and the price of the degreased material 12 after degreasing can be lowered.

[Embodiment 6]
The gas source of the degreasing furnace 60 of FIG. 6 includes both a first gas source 16 and a second gas source 56. One end of the fourth pipe 58 is connected to the second gas source 56, and the other end of the fourth pipe 58 is connected to the second pipe 32 or the superheater 20. Other configurations are the same as those of the degreasing furnace 10 of FIG.

The control device 38 supplies the first gas source 16, the second gas source, the saturated steam generator 18, the superheater 20, and each pipe so that the second gas, the first gas, and the superheated steam are supplied to the furnace body 14 in this order. It controls the valves provided in 32, 34 and 58. Before supplying the first gas to the furnace main body 14, the temperature of the degreased material 12 is raised by the second gas. For example, the second gas is supplied to the furnace body 14 from the time T0 in FIG. 7. After reaching a predetermined temperature at time T1', the temperature of the furnace body 14 is maintained from time T1'to T1'. When the time T1'' is reached, the first gas is supplied to the furnace body 14. The time from time T1'to T1'" is arbitrary. The temperature of the first gas is higher than the temperature of the second gas, and the temperature of the saturated steam is higher than the temperature of the first gas.

The temperature of the second gas is a temperature at which dew condensation, oxidation, or both do not occur on the degreased material 12 when the first gas is supplied to the furnace body 14. For example, the second gas is a compressed atmosphere or the like, and moisture, oxygen, or both due to dew condensation may deteriorate the degreased material 12. Set the temperature of the second gas so that condensation, oxidation, or both do not occur. The second gas is cheaper than the first gas, and by raising the temperature of the degreased material 12 using the second gas, the amount of the first gas used can be reduced, and the degreased material 12 can be degreased. Such costs can be suppressed. The temperature when the temperature of the degreased material 12 is raised by the second gas is appropriately selected according to the type of the degreased material 12, the content of degreasing, and the like so that the degreased material 12 does not deteriorate. For example, the temperature of the second gas is about 100-250 ° C.

[Embodiment 7]
The degreasing furnace 62 of FIG. 8 includes both a first gas source 16 and a second gas source 56. Other configurations of the degreasing furnace 62 are the same as those of the degreasing furnace 46 of FIG. Before supplying the first gas to the furnace body 14, the temperature of the second gas is raised by the superheater 20 and supplied to the furnace body 14. Similar to the sixth embodiment, under the control of the control device 38, the temperature of the degreased material 12 is raised by the second gas, the temperature of the degreased material 12 is raised by the first gas, and finally the degreased material 12 is heated by superheated steam. Degreasing.

[Embodiment 8]
The degreasing furnace 64 of FIG. 9 includes both a first gas source 16 and a second gas source 56. Other configurations of the degreasing furnace 64 are the same as those of the degreasing furnace 50 of FIG. Before supplying the first gas to the furnace main body 14, the temperature of the second gas is raised by the heating device 52 and supplied to the furnace main body 14. Similar to the sixth embodiment, under the control of the control device 38, the temperature of the degreased material 12 is raised by the second gas, the temperature of the degreased material 12 is raised by the first gas, and finally the degreased material 12 is heated by superheated steam. Degreasing. Although the degreasing furnace 64 has one heating device 52, the degreasing furnace 64 may be provided with a heating device 52 separately for the first gas source 16 and the second gas source.

[Embodiment 9]
Although the first gas source 16 and the second gas source 56 are provided in the sixth to eighth embodiments, it is also possible to use only one of the gas sources 16 and 56 and perform the degreasing described in the first to fifth embodiments. ..

(Clause 1) The degreasing furnace according to one aspect is a degreasing furnace for degreasing a degreased substance containing ceramics, and is a furnace body containing the degreased substance and an inert gas supplied to the furnace body. A first gas source of the first gas, a heating device for raising the temperature of the first gas, a saturated steam generator or a liquid source of a liquid for generating saturated steam, and a superheated steam are generated from the liquid or the saturated steam. A superheater that supplies superheated steam to the furnace body and a superheater that heats the degreased material by supplying the first gas to the furnace body, and then supplies the superheated steam from the superheater to the furnace body. Includes a control device to control.

According to the degreasing furnace according to the first item, the degreased material is heated with an inert gas and then degreased with superheated steam. The superheated steam cools to become dew condensation or saturated steam, and it is possible to prevent water droplets from coming into contact with the degreased material. It is possible to prevent the degreased material from being hydrolyzed and deteriorated. The degreasing time can be shortened by using superheated steam.

(Clause 2) The degreasing furnace according to one aspect is a degreasing furnace for degreasing a degreased substance containing ceramics, and is a steam body containing the degreased substance and an air supplied to the furnace body. A second gas source of gas, a heating device for raising the temperature of the second gas, a saturated steam generator or a liquid source of liquid for generating saturated steam, and a furnace main body for generating superheated steam from the liquid or saturated steam. The superheater that supplies the superheated steam to the furnace body and the second gas are supplied to the furnace body to raise the temperature of the degreased material, and then the superheater is controlled to supply the superheated steam to the furnace body. Including control device.

According to the degreasing furnace described in Section 2, the degreased material is heated in the atmosphere and then degreased by superheated steam. The temperature of the degreased material can be raised at a low price.

(Clause 3) The degreasing furnace according to one embodiment is a degreasing furnace for degreasing a degreased substance containing ceramics, and is a furnace body containing the degreased substance and an inert gas supplied to the furnace body. A first gas source of the first gas, a second gas source of the second gas which is the atmosphere supplied to the furnace body, a heating device for raising the temperature of the first gas and the second gas, and saturated steam are generated. A saturated steam generator or a liquid source of liquid, a superheater that generates superheated steam from the liquid or saturated steam and supplies the superheated steam to the furnace body, and supplies the second gas and the first gas to the furnace body. This includes a control device that controls to supply superheated steam from the superheater to the furnace body after the temperature of the degreased material is raised.

According to the degreasing furnace described in Section 3, the degreased material is heated to a temperature using the atmosphere and an inert gas, and then degreased with superheated steam. By using the atmosphere, the amount of inert gas used can be reduced and the manufacturing cost can be suppressed.

(Item 4) The first gas source and the second gas source are controlled so that the control device supplies the second gas to the furnace body and then supplies the first gas.

According to the degreasing furnace according to the fourth item, the temperature of the degreased material is raised in advance with the second gas, and then the temperature of the degreased material is raised with the first gas. The second gas can make it difficult for the degreased material to deteriorate.

(Item 5) The heating device includes a superheater.

According to the degreasing furnace according to the fifth item, a superheater is used to raise the temperature of the inert gas or the atmosphere, and no special heating device is used for the inert gas or the atmosphere.

(Item 6) The temperature of the superheated steam supplied to the furnace body is higher than the temperature of the first gas and the second gas.

According to the degreasing furnace according to the sixth item, the degreased material can be heated with the first gas and the second gas, and then degreased with superheated steam.

(Item 7) The degreased material contains nitride-based ceramics.

According to the degreasing furnace according to the seventh item, hydrolysis can be suppressed as described above, so that the present application is suitable for degreasing nitride-based ceramics.

(Item 8) The degreased material contains a water-soluble binder.

According to the degreasing furnace described in Item 8, deterioration of the degreased material due to moisture can be suppressed by using an inert gas or using the atmosphere to suppress dew condensation.

(Item 9) The first gas source and the second gas source are characterized in that the first gas and the second gas are supplied at 300 L / min or more.

According to the degreasing furnace described in Item 9, by supplying the first gas and the second gas to the furnace main body at 300 L / min or more, the rate of temperature rise of the degreased material is increased and the temperature is uniformly raised. ..

(Item 10) The degreasing method according to one aspect includes a step of storing a degreased material containing ceramics in a furnace body, a step of raising the temperature of an inert gas which is the first gas of the first gas source, and the above-mentioned rise. A step of supplying the heated first gas to the furnace body, a step of introducing the first gas into the furnace body and raising the temperature of the degreased material in advance, and a step of superheating steam from saturated steam or liquid in the superheater. A step of supplying the superheated steam to the furnace main body, and a step of completing the degreasing of the degreased material by the superheated steam.

According to the degreasing method described in Item 10, the temperature of the degreased material is raised with an inert gas, and then degreasing is performed with superheated steam. It is possible to prevent the superheated steam from cooling to become dew condensation or saturated steam, causing water droplets to come into contact with the degreased material and causing hydrolysis of the degreased material. The degreasing time can be shortened by using superheated steam.

(Item 11) The degreasing method according to one embodiment includes a step of storing a degreased material containing ceramics in a furnace body, a step of raising the temperature of the atmosphere which is the second gas of the second gas source, and the above-mentioned temperature raising. A step of supplying the second gas to the furnace body, a step of introducing the second gas into the furnace body and raising the temperature of the degreased material in advance, and a step of generating superheated steam from saturated steam or liquid by the superheater. A step of supplying the superheated steam to the furnace body, and a step of completing the degreasing of the degreased material by the superheated steam are included.

According to the degreasing method according to the eleventh item, the degreased material is heated in the atmosphere and then degreased by superheated steam. The temperature of the degreased material can be raised at a low price.

(Item 12) The degreasing method according to one embodiment includes a step of storing a degreased substance containing ceramics in a furnace body, a step of raising the temperature of the atmosphere which is the second gas of the second gas source, and the above-mentioned temperature raising. A step of supplying the second gas to the furnace body, a step of introducing the second gas into the furnace body and raising the temperature of the degreased material in advance, and an inert gas which is the first gas of the first gas source. A step of raising the temperature, a step of supplying the heated first gas to the furnace body, a step of introducing the first gas into the furnace body and raising the temperature of the degreased material in advance, and a superheater. It includes a step of generating superheated steam from saturated steam or liquid, a step of supplying the superheated steam to the furnace main body, and a step of completing degreasing of the degreased material by the superheated steam.

According to the degreasing method described in Item 12, the degreased material is heated to a temperature using the atmosphere and an inert gas, and then degreased with superheated steam. By using the atmosphere, the amount of inert gas used can be reduced and the manufacturing cost can be suppressed.

(Item 13) Before introducing the first gas into the furnace body, the second gas is introduced into the furnace body to raise the temperature of the degreased material in advance.

According to the degreasing method described in Item 13, the temperature of the degreased material is raised in advance with the second gas, and then the temperature of the degreased material is raised with the first gas. It is possible to prevent the degreased material from being deteriorated by the second gas.

(Item 14) The temperature of the first gas and the second gas is raised by a superheater.

According to the degreasing method described in paragraph 14, it is not necessary to separately prepare a heating device for raising the temperature of the first gas and the second gas.

(Item 15) The temperature of the superheated steam is higher than the temperature of the first gas and the second gas.

According to the degreasing method according to Item 15, the degreased material can be first heated with the first gas and the second gas, and then the degreased material can be degreased with superheated steam.

(Item 16) The degreased material contains nitride-based ceramics.

According to the degreasing method described in Item 16, the hydrolysis of the degreased material can be suppressed as described above, and therefore, the present application is suitable for nitride-based ceramics.

(Item 17) The degreased material contains a water-soluble binder.

According to the degreasing method described in Item 17, deterioration of the degreased material due to moisture can be suppressed by using an inert gas or using the atmosphere so as to suppress dew condensation.

(Item 18) The first gas source and the second gas source are characterized in that the first gas and the second gas are supplied at 300 L / min or more.

According to the degreasing method described in Item 18, by supplying the first gas and the second gas to the furnace main body at 300 L / min or more, the rate of temperature rise of the degreased material is increased and the temperature is uniformly raised. ..

In addition, the present invention can be carried out in a mode in which various improvements, modifications and changes are made based on the knowledge of those skilled in the art without departing from the gist thereof. Each of the described embodiments is not independent and can be appropriately combined and implemented based on the knowledge of those skilled in the art.

10, 46, 50, 54, 60, 62, 64: Degreasing furnace 12: Degreased material 14: Furnace body 16: First gas source 18: Saturated steam generator 20: Superheater 22: Internal space of the furnace body 24: Shelf 26: Supply port 28: Exhaust port 30, 32, 34, 58: Piping 36: Thermometer 38: Control device 40: Exhaust gas combustion furnace 42: Insulation body 44: Exhaust passage 48: Liquid source 52: Heating device 56: Second gas source

Claims (18)

A degreasing furnace for degreasing degreased materials containing ceramics.
The furnace body that houses the degreased material and
The first gas source of the first gas, which is the inert gas supplied to the furnace body,
A heating device that raises the temperature of the first gas, and
A saturated steam generator or a liquid source of a liquid that generates saturated steam, and a superheater that generates superheated steam from the liquid or saturated steam and supplies the superheated steam to the furnace body.
A control device that controls to supply superheated steam from the superheater to the furnace body after raising the temperature of the degreased material by supplying the first gas to the furnace body.
Degreasing furnace including. A degreasing furnace for degreasing degreased materials containing ceramics.
The furnace body that houses the degreased material and
The second gas source of the second gas, which is the atmosphere supplied to the furnace body, and
A heating device that raises the temperature of the second gas, and
A saturated steam generator or a liquid source of a liquid that generates saturated steam, and a superheater that generates superheated steam from the liquid or saturated steam and supplies the superheated steam to the furnace body.
A control device that controls to supply superheated steam from the superheater to the furnace body after raising the temperature of the degreased material by supplying the second gas to the furnace body.
Degreasing furnace including. A degreasing furnace for degreasing degreased materials containing ceramics.
The furnace body that houses the degreased material and
The first gas source of the first gas, which is the inert gas supplied to the furnace body,
The second gas source of the second gas, which is the atmosphere supplied to the furnace body, and
A heating device that raises the temperature of the first gas and the second gas,
A saturated steam generator or a liquid source of a liquid that generates saturated steam, and a superheater that generates superheated steam from the liquid or saturated steam and supplies the superheated steam to the furnace body.
A control device that controls to supply superheated steam from the superheater to the furnace body after raising the temperature of the degreased material by supplying the second gas and the first gas to the furnace body.
Degreasing furnace including. The degreasing furnace according to claim 3, wherein the control device controls the first gas source and the second gas source so that the second gas is supplied to the furnace body and then the first gas is supplied. The degreasing furnace according to any one of claims 1 to 4, wherein the heating device includes a superheater. The degreasing furnace according to any one of claims 1 to 5, wherein the temperature of the superheated steam supplied to the furnace body is higher than the temperature of the first gas and the second gas. The degreasing furnace according to any one of claims 1 to 6, wherein the degreased material contains nitride-based ceramics. The degreasing furnace according to any one of claims 1 to 7, wherein the degreased material contains a water-soluble binder. The degreasing furnace according to any one of claims 1 to 8, wherein the first gas source and the second gas source supply the first gas and the second gas at 300 L / min or more. The process of storing the degreased material containing ceramics in the furnace body,
The process of raising the temperature of the inert gas, which is the first gas of the first gas source,
The step of supplying the heated first gas to the furnace body and
A step of introducing the first gas into the furnace body and raising the temperature of the degreased material in advance,
The step of generating superheated steam from saturated steam or liquid with the superheater, and
The process of supplying the superheated steam to the furnace body and
The step of completing the degreasing of the degreased material by the superheated steam, and
Degreasing method including. The process of storing the degreased material containing ceramics in the furnace body,
The process of raising the temperature of the atmosphere, which is the second gas of the second gas source,
The step of supplying the heated second gas to the furnace body and
A step of introducing the second gas into the furnace body and raising the temperature of the degreased material in advance, and
The step of generating superheated steam from saturated steam or liquid with the superheater, and
The process of supplying the superheated steam to the furnace body and
The step of completing the degreasing of the degreased material by the superheated steam, and
Degreasing method including. The process of storing the degreased material containing ceramics in the furnace body,
The process of raising the temperature of the atmosphere, which is the second gas of the second gas source,
The step of supplying the heated second gas to the furnace body and
A step of introducing the second gas into the furnace body and raising the temperature of the degreased material in advance, and
The process of raising the temperature of the inert gas, which is the first gas of the first gas source,
The step of supplying the heated first gas to the furnace body and
A step of introducing the first gas into the furnace body and raising the temperature of the degreased material in advance,
The step of generating superheated steam from saturated steam or liquid with the superheater, and
The process of supplying the superheated steam to the furnace body and
The step of completing the degreasing of the degreased material by the superheated steam, and
Degreasing method including. The degreasing method according to claim 12, wherein the second gas is introduced into the furnace body before the first gas is introduced into the furnace body, and the temperature of the degreased material is raised in advance. The degreasing method according to any one of claims 10 to 13, wherein the temperature of the first gas and the second gas is raised by a superheater. The degreasing method according to any one of claims 10 to 14, wherein the temperature of the superheated steam is higher than the temperature of the first gas and the second gas. The degreasing method according to any one of claims 10 to 15, wherein the degreased material contains nitride-based ceramics. The degreasing method according to any one of claims 10 to 16, wherein the degreased material contains a water-soluble binder. The degreasing method according to any one of claims 10 to 17, wherein the first gas source and the second gas source supply the first gas and the second gas at 300 L / min or more.

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