CN114322558A

CN114322558A - Degreasing furnace and degreasing method

Info

Publication number: CN114322558A
Application number: CN202110375410.4A
Authority: CN
Inventors: 田中优; 吉冈尚规
Original assignee: Shimadzu Corp
Current assignee: Shimadzu Corp
Priority date: 2020-09-29
Filing date: 2021-04-08
Publication date: 2022-04-12
Also published as: KR102514377B1; JP2022056011A; JP7474413B2; KR20220043822A

Abstract

The invention provides a degreasing furnace and a degreasing method capable of degreasing in a proper time. The degreasing furnace (10) comprises: a furnace body (14) for accommodating the degreased objects (12); a gas source (16) of inert gas supplied to the furnace main body (14); a heating device (30) for heating the inert gas; and a gas monitor (18) for detecting gas generated from the degreased object (12). The degreasing method comprises the following steps: a step of storing the degreased object (12) in the furnace main body (14); a step of heating the inert gas; degreasing the degreased object (12) by using the heated inert gas; and a step of detecting the gas generated from the degreased object (12) by a gas monitor (18).

Description

Degreasing furnace and degreasing method

Technical Field

The invention relates to a degreasing furnace and a degreasing method.

Background

Conventionally, a degreasing object including ceramics is degreased in a degreasing furnace. For example, a degreasing furnace of patent document 1 includes: a furnace body for receiving degreased objects; and a heating member for heating the degreased object. The gas generated by degreasing is heated and decomposed and converted into a gas such as carbon dioxide. In patent document 1, a part of the gas after the decomposition or the like is introduced into the furnace main body again. Patent document 1 describes: the oxygen concentration is maintained at a low concentration to prevent cracking of the degreased object.

[ Prior art documents ]

[ patent document ]

[ patent document 1] International publication No. WO2005/047207

Disclosure of Invention

[ problems to be solved by the invention ]

In order to find appropriate degreasing conditions, degreasing needs to be performed under various conditions. If the material, shape, etc. of the object to be degreased are different, the degreasing conditions are also different, and therefore, it is necessary to newly search for the degreasing conditions. A great deal of effort is required to seek appropriate degreasing conditions. Even if the degreasing condition is required, the degreasing may be performed for a longer time than the required condition so as not to fail the degreasing. Degreasing takes time, and the work efficiency is deteriorated. It is preferable to carry out degreasing within an appropriate time. Patent document 1 does not describe a case where degreasing conditions are required.

Accordingly, an object of the present invention is to provide a degreasing furnace and a degreasing method capable of performing degreasing in an appropriate time.

[ means for solving problems ]

In order to solve the above problems, the degreasing furnace of the present invention has the following configuration.

The degreasing furnace of the present invention comprises: a furnace body for receiving and degreasing a degreased object; and a gas monitor for detecting gas generated from the degreased object. May also include: a gas source of inert gas supplied to the furnace main body; and a heating device for heating the inert gas. May also include: a saturated steam generating device that generates saturated steam, a liquid source of liquid, or both; and a superheater that generates superheated steam supplied to the furnace main body from saturated steam or liquid.

The degreasing method of the invention comprises the following steps: a step of receiving the degreased object in the furnace main body; a step of degreasing the degreased object; and detecting a gas generated from the degreased object by using a gas monitor. May also include: and a step of heating an inert gas, wherein the step of degreasing degreases the degreased object by using the heated inert gas. May also include: a step of generating superheated steam from saturated steam or liquid; and a step of degreasing the degreased object by using the superheated steam.

[ Effect of the invention ]

According to the present invention, whether degreasing has been started or completed can be determined by detecting gas generated during degreasing using a gas monitor. No degreasing conditions need to be sought, and anybody can perform degreasing similarly. The quality of the degreased product can be kept constant. When no gas is detected or the detected amount is decreased, the operation of raising the temperature again to the set (or predetermined) temperature is repeated, and finally, when no gas is detected, the degreasing is finished, thereby preventing an unnecessarily long time of degreasing.

Drawings

Fig. 1 is a view showing the structure of a degreasing furnace according to the present invention.

Fig. 2 is a graph showing gas detected by Fourier transform infrared spectrometer (FTIR).

Fig. 3 is a graph showing the ambient temperature of the furnace main body when degreasing is performed while detecting a plurality of gases.

Fig. 4 is a diagram showing the structure of a degreasing furnace including a superheater.

Fig. 5 is a diagram showing the structure of a degreasing furnace including a gas source and a superheater.

Fig. 6 is a diagram showing a configuration of a degreasing furnace including a communication device.

Fig. 7 is a diagram showing a configuration of a degreasing furnace in which a gas monitor and a thermometer are disposed in an exhaust passage.

[ description of symbols ]

10. 42, 48, 50, 60: degreasing furnace

12: defatted material

14: furnace body

16: gas source

18. 62: gas monitor

20: inner space of furnace main body

22: shelf board

24: supply port

26: exhaust port

28: piping

30: heating device

32. 64: temperature meter

34: control device

36: exhaust gas combustion furnace

38: heat insulator

40: exhaust passage

44: saturated steam generating device

46: superheater

52: communication device

54: network

56: server

Detailed Description

The degreasing furnace and the degreasing method according to the present invention will be described with reference to the drawings. Although a plurality of embodiments are described, the same components are denoted by the same reference numerals and description thereof may be omitted even in different embodiments.

[ embodiment 1]

The degreasing furnace 10 of the present application shown in fig. 1 includes: a furnace body 14 for accommodating the degreased objects 12; a source 16 of inert gas; the gas monitor 18 detects gas generated from the degreased object 12.

[ defatted Material ]

The degreased object 12 includes a ceramic compact. The ceramics include nitride ceramics (aluminum nitride, silicon nitride, etc.), alumina, zirconium, etc. The degreased material 12 contains a binder. The binder is mixed into the ceramic when the degreased object 12 is formed. By raising the temperature of the degreased matter 12, the binder is decomposed and released as a gas. Examples of the binder include: polybutylmethacrylate, polyvinyl alcohol, methyl cellulose, vinyl acetate, polyethylene glycol, and the like.

[ furnace body ]

The furnace main body 14 includes a heat-resistant material such as Stainless Steel (SUS) 310S or SUS 316L. The furnace main body 14 is in the form of a container, and accommodates the degreased objects 12 in an internal space 20 thereof. A shelf 22 for placing the degreased objects 12 may be disposed in the inner space 20 of the furnace main body 14. The furnace main body 14 is formed with a supply port 24 and an exhaust port 26. An inert gas is supplied from a supply port 24 to the internal space 20 of the furnace main body 14. Gas generated when the object to be degreased 12 is degreased is discharged from the gas outlet 26.

[ gas source ]

Gas source 16 is a device that performs storage, generation, or both of inert gases. The inert gas is nitrogen, argon, helium, etc. The inert gas after the temperature rise is supplied to the furnace main body 14. The furnace main body 14 and the gas source 16 are connected by a pipe 28.

The heating device 30 for raising the temperature of the gas is disposed in the middle of the pipe 28. Alternatively, the gas source 16 and the heating device 30 may be integrated. The heating device 30 is an electric heater, a gas burner, a heavy oil burner, or the like. The temperature of the inert gas after the temperature rise is 500 ℃ or more, preferably 600 to 1200 ℃. The degreased object 12 is heated by the high-temperature inert gas, and is degreased. The portion of the pipe 28 between the furnace main body 14 and the heating device 30 preferably contains a heat-resistant material. The heating device 30 may be provided in the internal space 20 of the furnace main body 14, and the temperature of the gas may be increased in the internal space 20.

[ gas monitor ]

Including a gas monitor 18 for detecting gas generated from the degreased object 12. The adhesive heats up to become a gas, which is detected by a gas monitor 18. The place where the gas monitor 18 is installed is not limited if gas is detected. For example, the gas monitor 18 is provided so as to detect gas near the exhaust port 26 of the furnace main body 14. The Gas monitor 18 is an FTIR (fourier transform infrared spectrophotometer), a Gas Chromatograph (GC), a Flame Ionization Detector (FID), a Total Organic Carbon Meter (TOC Meter), or the like. The progress of degreasing can be detected by detecting the presence or absence of gas by the gas monitor 18. If gas is detected, degreasing is performed, and thereafter, if gas is not detected, degreasing is completed.

The gas monitor 18 included in one degreasing furnace 10 is not limited to one, and a plurality of gas monitors 18 may be included.

[ thermometer ]

Including a thermometer 32 for measuring the ambient temperature of the interior space 20 of the furnace body 14. Thermometer 32 utilizes a thermocouple thermometer.

[ control device ]

A control device 34 is included for controlling the gas source 16 and the heating device 30 in response to gas detected by the gas monitor 18. The value detected by the gas monitor 18 is input to the control device 34. Further, the temperature measured by the thermometer 32 is input to the control device 34. The control device 34 controls the gas source 16 and the heating device 30 as follows: when the gas is detected, the inert gas is supplied to the furnace main body 14 until the gas is not detected, and the ambient temperature of the furnace main body 14 is maintained at a predetermined temperature. The control device 34 includes a computing device such as a Central Processing Unit (CPU) or a Programmable Logic Controller (PLC).

[ exhaust gas combustion furnace ]

The exhaust gas burner 36 is connected to the exhaust port 26 of the furnace main body 14. The exhaust gas burner 36 includes an exhaust passage 40 formed by cylindrically forming the heat insulator 38 and a heating device (not shown). The heating device is an electric heater, a gas burner or a heavy oil burner and the like. The exhaust gas burner 36 heats and decomposes the gas released from the degreased object 12 by degreasing, converts the gas into a gas such as carbon dioxide, and discharges the gas.

[ others ]

The present application may also include a fan for drawing an inert gas into the internal space 20 of the furnace main body 14, and a fan for exhausting a gas generated by degreasing from the internal space 20 of the furnace main body 14.

[ degreasing method ]

Next, a degreasing method using the degreasing furnace 10 will be described. (1) The degreased objects 12 are accommodated in the inner space 20 of the furnace main body 14. For example, the degreased object 12 is a molded article including a ceramic and a binder.

(2) An inert gas is supplied from the gas source 16 to the interior space 20 of the furnace body 14. For example, the inert gas is nitrogen. The temperature of the inert gas is raised by the heating device 30, the ambient temperature of the furnace main body 14 is raised, and the degreased objects 12 contained in the furnace main body 14 are raised. For example, the ambient temperature of the internal space 20 of the furnace main body 14 is raised to 500 ℃ or higher, preferably 600 to 1200 ℃.

(3) The degreased object 12 is degreased by raising the ambient temperature of the internal space 20 of the furnace main body 14. In degreasing, the degreased object 12 releases the binder as a gas. The gas monitor 18 detects the gas. For example, in fig. 2, the gas monitor 18 is a fourier transform infrared spectrophotometer (FTIR), and is a detection result when ethyl methacrylate is contained in the gas. Since the wave number is determined by the functional group contained in the gas, it was found that whether or not the gas was generated was detected from the intensity of the set wave number. If degreasing is finished, no gas can be detected. In the present embodiment, an inert gas is supplied to the internal space 20 of the furnace main body 14 while the gas monitor 18 detects the gas. The degreased object 12 is degreased with the temperature of the supplied inert gas set constant. Thereafter, if no gas is detected, the operation is stopped.

Gas generated when the object to be degreased 12 is degreased is supplied from the exhaust port 26 to the exhaust gas burner 36. In the exhaust passage 40 of the exhaust gas burner 36, the gas is decomposed by the temperature rise and is discharged as carbon dioxide or the like.

(4) The gas source 16 and the heating device 30 are stopped, and the supply of the inert gas to the furnace main body 14 is stopped. The ambient temperature of the internal space 20 of the furnace main body 14 decreases, and the temperature of the degreased objects 12 decreases. When the temperature of the degreased objects 12 is lowered, the degreased objects 12 are taken out from the furnace main body 14. Thereafter, the degreased material 12 may be placed in an arbitrary sintering furnace and sintered.

As described above, the present application can determine whether or not degreasing has been completed by detecting gas generated during degreasing using the gas monitor 18. Degreasing conditions need not be sought. The degreasing is finished when no gas is detected, whereby the degreasing can be finished in an optimum time.

[ embodiment 2]

The gas released from the degreased matter 12 is not limited to one. Depending on the binder contained in the degreased matter 12, a plurality of gases may be generated. The gas monitor 18 may also detect multiple gases.

For example, the gas monitor 18 detects three kinds of gas a, gas B, and gas C. Assume that the ambient temperature of the furnace main body 14 when the first gas a is detected is TA, the ambient temperature of the furnace main body 14 when the second gas B is detected is TB, and the ambient temperature of the furnace main body 14 when the third gas C is detected is TC. Assume that the ambient temperature is TA < TB < TC. As shown in fig. 3, degreasing was performed while maintaining the ambient temperature at TA in a state where the first gas a was detected. If the first gas A is not detected (or the amount detected is reduced), the ambient temperature is raised. If the ambient temperature becomes TB, the second gas B is detected. The ambient temperature was maintained at TB and degreasing was performed. If the second gas B is not detected (or the detected amount is decreased), the ambient temperature of the furnace main body 14 is raised. If the ambient temperature becomes TC, a third gas C is detected. The ambient temperature was maintained at TC and degreasing was performed. If the third gas C is not detected (or the detected amount is decreased), the supply of the inert gas is stopped, and the degreasing is finished.

As described above, the ambient temperature of the furnace main body 14 is maintained every time gas is detected, and if gas is not detected, the ambient temperature of the furnace main body 14 is increased. The control device 34 controls the gas source 16 and the heating device 30 so that the temperature measured by the thermometer 32 is constant every time gas is detected by the gas monitor 18. If no gas is detected (or the detected amount decreases), the gas source 16 and the heating device 30 are controlled so that the temperature measured by the thermometer 32 gradually increases. The gas released from the degreased object 12 during degreasing is released in sequence. The degreased matter 12 can be prevented from exhibiting incomplete degreasing, and all the binder can be degreased.

[ embodiment 3]

Degreasing may also be performed using superheated steam instead of inert gas. As shown in the degreasing furnace 42 of fig. 4, the degreasing furnace includes: a saturated steam generator 44 for generating saturated steam; a superheater 46 that generates superheated steam. The furnace main body 14 and the saturated steam generator 44 are connected by a pipe 28, and a superheater 46 is disposed in the middle of the pipe 28.

The saturated steam generator 44 supplies saturated steam to the superheater 46. The saturated steam generator 44 includes a boiler (boiler) that boils a liquid such as pure water to generate saturated steam.

The superheater 46 is a device for generating superheated steam from saturated steam. As the superheater 46, there can be mentioned: contact superheater, radiation superheater, suspension superheater, plate superheater, horizontal superheater, etc. The superheater 46 comprises a long tube in which saturated steam flows. The saturated steam flowing in the long tube is heated to become superheated steam. The generated superheated steam is supplied to the furnace main body 14. The superheated steam in this case is a gas containing colorless and transparent water (H) obtained by heating saturated steam at 100 ℃ to a higher temperature under normal pressure₂O). The temperature of the superheated steam is 500 ℃ or higher, preferably 600 to 1200 ℃. The portion of the pipe 28 between the furnace main body 14 and the superheater 46 preferably contains a heat-resistant material. Since the superheated steam has a large heat capacity and a high thermal conductivity, the degreased object 12 can be heated and degreased in a short time.

Saturated steam is generated by the saturated steam generating device 44 and supplied to the superheater 46. The superheater 46 generates superheated steam from the saturated steam, and supplies the superheated steam to the furnace main body 14. The ambient temperature of the furnace main body 14 rises, and the degreased object 12 is degreased.

The saturated steam generating device 44 and the superheater 46 are controlled by the control device 34. As in the above embodiment, the value detected by the gas monitor 18 and the value of the thermometer 32 are input to the control device 34. When the gas monitor 18 detects the gas, the control device 34 controls the saturated steam generating device 44 and the superheater 46 to maintain the ambient temperature of the furnace main body 14. The internal space 20 of the furnace main body 14 is maintained at the temperature at the time of degreasing, and the degreased object 12 is degreased. If the gas monitor 18 does not detect the gas, the controller 34 stops the saturated steam generator 44 and the superheater 46, and finishes the degreasing.

In embodiment 2, superheated steam may be used instead of the inert gas. The temperature rise rate is higher than that of the inert gas, and the time taken for degreasing can be shortened. If one gas is detected, the control device 34 controls the saturated steam generating device 44 and the superheater 46 to maintain the ambient temperature of the furnace main body 14, and if one gas is not detected, the temperature of the superheated steam is raised to raise the ambient temperature of the furnace main body 14 until another gas is detected.

Saturated steam is supplied to the superheater 46 to generate superheated steam, but a liquid such as pure water may be supplied to the superheater 46. A liquid source for supplying liquid to the superheater 46 may also be included in place of the saturated steam generating device 44. The liquid source includes a device that generates liquid, a tank (tank) that traps liquid, or both. In the superheater 46, superheated steam is generated from the liquid.

[ embodiment 4]

The degreasing furnace 48 shown in fig. 5 may include a gas source 16, a heating device 30, a saturated steam generating device 44, and a superheater 46. The degreased object 12 is heated and degreased by using inert gas, superheated steam or both.

[ embodiment 5]

The operator of the degreasing furnace 10, the degreasing furnace 42, or the degreasing furnace 48 may manually operate the gas source 16 and the superheater 46, the saturated steam generator 44 and the superheater 46, or all of them by checking the detection status of the gas using the gas monitor 18. The operator can determine the degreasing condition by checking the value detected by the gas monitor 18.

[ embodiment 6]

As in the degreasing furnace 50 of fig. 6, the communication device 52 may be connected to the control device 34. The communication device 52 is a device for connecting with the network 54 by wire or wireless. The Network 54 may be a Network of a communication device using a mobile phone, such as a Local Area Network (LAN), a Long Term Evolution (LTE), or a Network including both. Server 56 is connected to network 54. The values detected by the gas monitor 18, the values measured by the thermometer 32, or both are sent to the server 56 via the network 54. The server 56 stores the received values in a storage device. Other computers may access the server 56 via the network 54 to validate the stored values. The degreasing condition can be remotely confirmed.

[ embodiment 7]

As in the degreasing furnace 60 of fig. 7, a gas monitor 62 may be attached to the exhaust passage 40 so as to be able to check the thermal decomposition of the gas. It is possible to confirm whether or not the gas discharged from the internal space 20 of the furnace main body 14 is completely converted into a gas such as carbon dioxide. The gas monitor 62 may be the same gas monitor as the gas monitor 18 for detecting gas in the internal space 20 of the furnace main body 14.

In addition, the temperature meter 64 may be disposed in the exhaust passage 40 to measure the temperature of the exhaust gas. The values of the gas monitor 62 and the thermometer 64 are input to the control device 34. The controller 34 controls the temperature exhibited by a heating device (not shown) disposed in the exhaust passage 40 so as to reliably decompose the gas by heating.

The exhaust passage 40 may be provided with an air supply port as needed so that the amount of air supplied can be adjusted. The combustion of the gas is controlled according to the amount of air introduced.

The degreasing furnace according to the first aspect of (item 1) includes: a furnace body for accommodating degreased objects; a gas source of inert gas supplied to the furnace main body; a heating device for heating the inert gas; and a gas monitor for detecting gas generated from the degreased object.

The degreasing furnace according to claim 1, wherein the progress of degreasing can be confirmed by gas detected by a gas monitor. The completion of degreasing can be known and the degreasing can be completed at an appropriate time.

The degreasing furnace according to the first aspect of (item 2) includes: a furnace body for accommodating degreased objects; a saturated steam generating device that generates saturated steam or a liquid source of liquid; a superheater that generates superheated steam supplied to the furnace main body from saturated steam or liquid; and a gas monitor for detecting gas generated from the degreased object.

The degreasing furnace according to claim 2, wherein the degreasing time can be shortened by saturated steam. In this case, the gas monitor detects the gas during degreasing, whereby the degreasing can be completed at an optimum time.

The degreasing furnace according to the first aspect of (item 3) includes: a furnace body for accommodating degreased objects; a gas source of inert gas supplied to the furnace main body; a heating device for heating the inert gas; a saturated steam generating device that generates saturated steam or a liquid source of liquid; a superheater that generates superheated steam supplied to the furnace main body from saturated steam or liquid; and a gas monitor for detecting gas generated from the degreased object.

According to the degreasing furnace described in item 3, even if degreasing is performed using either an inert gas or saturated steam, the degreasing can be finished at an optimum time by detecting the gas using a gas monitor.

(item 4) includes: a control device that controls the gas source and the heating device, the saturated steam generating device or the liquid source and the superheater, or both, in accordance with the gas detected by the gas monitor.

The degreasing furnace according to claim 4, wherein the gas source is controlled by the control device, thereby automatically performing degreasing. At this time, by using the value detected by the gas monitor, degreasing can be performed in an optimum time.

(item 5) there are a plurality of kinds of gases detected by the gas monitor, and the control means controls the gas source and the heating means, the saturated steam generating means or the liquid source and the superheater, or both of them, in such a manner that the ambient temperature of the internal space of the furnace main body differs for each gas.

The degreasing furnace according to claim 5, wherein the degreasing is performed at a predetermined temperature for each gas, thereby preventing incomplete degreasing.

(item 6) the gas monitor comprises a fourier transform infrared spectrophotometer.

The degreasing furnace according to claim 6, wherein the gas during degreasing is detected by using a Fourier transform infrared spectrophotometer as a gas monitor.

(item 7) includes: a gas monitor for detecting gas discharged from the furnace main body; and a thermometer for measuring gas exhausted from the furnace main body.

According to the degreasing furnace of claim 7, the heating temperature of the discharged gas and the supplied air can be controlled by detecting or measuring the temperature of the discharged gas, and the decomposition can be performed reliably.

The method of degreasing as described in (item 8) above, comprising: a step of receiving the degreased object in the furnace main body; a step of heating the inert gas; degreasing the degreased object by using the heated inert gas; and detecting a gas generated from the degreased object by using a gas monitor.

According to the degreasing method of claim 8, it is not necessary to search for degreasing conditions by detecting gas generated during degreasing using a gas monitor. By detecting the gas, the degreasing completion timing can be confirmed.

The method of degreasing as described in (9) above, comprising: a step of receiving the degreased object in the furnace main body; a step of generating superheated steam from saturated steam or liquid; degreasing the degreased object by using the superheated steam; and detecting a gas generated from the degreased object by using a gas monitor.

According to the degreasing method of claim 9, the temperature of the internal space of the furnace main body can be raised in a short time by the superheated steam, and the degreasing can be performed in a short time. The completion of degreasing can be confirmed by detecting gas with a gas monitor. The degreasing time can be prevented from becoming unnecessary.

The method of degreasing according to the first aspect of the invention (item 10) comprises: a step of receiving the degreased object in the furnace main body; a step of heating the inert gas; a step of generating superheated steam from saturated steam or liquid; degreasing the degreased object by using the heated inert gas, superheated steam or both of the inert gas and the superheated steam; and detecting a gas generated from the degreased object by using a gas monitor.

According to the degreasing method of claim 10, even when degreasing is performed using either an inert gas or superheated steam, degreasing can be performed in an optimum time by detecting the gas. No conditions for degreasing need to be sought.

(item 11) includes a step of controlling supply of the inert gas, the superheated steam, or both to the furnace main body in accordance with the gas detected by the gas monitor.

The degreasing method according to claim 11, wherein the degreasing is controlled by controlling the supply of an inert gas or the like to the furnace body based on the detected gas.

(item 12) there are a plurality of kinds of gases detected by the gas monitor, and the temperature of the inert gas, the temperature of the superheated steam, or both of them are controlled in such a manner that the ambient temperature of the internal space of the furnace main body differs for each of the detected gases.

According to the degreasing method described in the item 12, by controlling the inert gas or the like so that degreasing is completed for each of the detected gases, incomplete degreasing can be prevented.

(item 13) the gas monitor comprises a fourier transform infrared spectrophotometer.

The degreasing method according to item 13, wherein the gas is detected by a Fourier transform infrared spectrophotometer.

(item 14) includes: detecting gas discharged from the furnace main body by using a gas monitor; and measuring the temperature of the gas discharged from the furnace main body by a thermometer.

According to the degreasing method as described in the item 14, by detecting or measuring the temperature of the gas discharged from the furnace main body, the heating temperature of the discharged gas and the supply amount of air can be adjusted, and the gas can be controlled so as to be decomposed reliably.

The present invention may be implemented in various forms of improvement, modification, and alteration based on knowledge of those skilled in the art without departing from the spirit and scope of the present invention. The embodiments described are not independent and can be implemented in appropriate combinations based on the knowledge of those skilled in the art.

Claims

1. A degreasing furnace comprising:

a furnace body for receiving and degreasing a degreased object; and

and a gas monitor for detecting gas generated from the degreased object.

2. The degreasing furnace of claim 1, further comprising:

a gas source of inert gas supplied to the furnace main body; and

and a heating device for heating the inert gas.

3. The degreasing furnace of claim 2, further comprising a control device that controls the gas source and/or the heating device based on the gas detected by the gas monitor.

4. The degreasing furnace of claim 1, further comprising:

a saturated steam generating device that generates saturated steam or a liquid source of liquid; and

and a superheater that generates superheated steam from saturated steam or liquid, the superheated steam being supplied to the furnace main body.

5. The degreasing furnace of claim 4, further comprising a control device that controls the saturated vapor generation device or the liquid source, and/or the superheater according to the gas detected by the gas monitor.

6. The degreasing furnace of claim 1, further comprising:

a gas source of inert gas supplied to the furnace main body;

a heating device for heating the inert gas;

7. The degreasing furnace of claim 6, further comprising a control device that controls the gas source, the heating device, the saturated steam generating device or the liquid source, and/or the superheater according to the gas detected by the gas monitor.

8. The degreasing furnace according to any one of claims 3, 5 and 7, wherein a plurality of gases are detected by the gas monitor, and the control means performs control so that an ambient temperature of the internal space of the furnace main body is different for each gas.

9. The degreasing furnace of any one of claims 1-7, wherein the gas monitor comprises a Fourier transform infrared spectrophotometer.

10. The degreasing furnace of any one of claims 1 to 7, comprising:

the gas monitor detects gas exhausted from the furnace main body; and

a thermometer for measuring gas discharged from the furnace main body.

11. A degreasing method comprising:

a step of receiving the degreased object in the furnace main body;

degreasing the degreased object; and

and detecting a gas generated from the degreased object by using a gas monitor.

12. The degreasing method of claim 11, further comprising:

a step of raising the temperature of the inert gas,

the degreasing step degreases the object to be degreased with the inert gas heated.

13. The degreasing method of claim 11, further comprising:

a step of generating superheated steam from saturated steam or liquid,

the degreasing step degreases the object to be degreased with the superheated steam.

14. The degreasing method of claim 11, further comprising:

a step of heating the inert gas; and

a step of generating superheated steam from saturated steam or liquid,

the degreasing step degreases the object to be degreased with the inert gas, the superheated steam, or both of the inert gas and the superheated steam after the temperature is raised.

15. The degreasing method according to any one of claims 12 to 14, comprising a step of controlling supply of an inert gas, superheated steam, or both to the degreasing furnace according to the gas detected by the gas monitor.

16. The degreasing method according to any one of claims 12 to 14, wherein the gas detected by the gas monitor is plural in number, and the temperature of the inert gas, the temperature of the superheated steam, or both thereof is controlled in such a manner that an ambient temperature of the inner space of the furnace main body is different for each of the detected gases.

17. The degreasing method of claim 11, wherein the gas monitor comprises a fourier transform infrared spectrophotometer.

18. The degreasing method of claim 11, comprising:

detecting gas exhausted from the furnace main body by using the gas monitor; and

and measuring the temperature of the gas discharged from the furnace main body by a thermometer.