KR102481078B1 - 평가장치, 평가방법, 및 표시장치 - Google Patents

평가장치, 평가방법, 및 표시장치 Download PDF

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Publication number
KR102481078B1
KR102481078B1 KR1020180173336A KR20180173336A KR102481078B1 KR 102481078 B1 KR102481078 B1 KR 102481078B1 KR 1020180173336 A KR1020180173336 A KR 1020180173336A KR 20180173336 A KR20180173336 A KR 20180173336A KR 102481078 B1 KR102481078 B1 KR 102481078B1
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KR
South Korea
Prior art keywords
laser
time
pulse
build
pulse energy
Prior art date
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KR1020180173336A
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English (en)
Korean (ko)
Other versions
KR20190092258A (ko
Inventor
야스히로 오카다
마사후미 요로즈
켄타 타나카
조이치 카와무라
Original Assignee
스미도모쥬기가이고교 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 스미도모쥬기가이고교 가부시키가이샤 filed Critical 스미도모쥬기가이고교 가부시키가이샤
Publication of KR20190092258A publication Critical patent/KR20190092258A/ko
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Publication of KR102481078B1 publication Critical patent/KR102481078B1/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/0014—Monitoring arrangements not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Electromagnetism (AREA)
  • Lasers (AREA)
  • Laser Beam Processing (AREA)
KR1020180173336A 2018-01-29 2018-12-31 평가장치, 평가방법, 및 표시장치 KR102481078B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2018-012661 2018-01-29
JP2018012661A JP6987453B2 (ja) 2018-01-29 2018-01-29 評価装置、及び評価方法

Publications (2)

Publication Number Publication Date
KR20190092258A KR20190092258A (ko) 2019-08-07
KR102481078B1 true KR102481078B1 (ko) 2022-12-23

Family

ID=67443733

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020180173336A KR102481078B1 (ko) 2018-01-29 2018-12-31 평가장치, 평가방법, 및 표시장치

Country Status (4)

Country Link
JP (1) JP6987453B2 (zh)
KR (1) KR102481078B1 (zh)
CN (1) CN110091052B (zh)
TW (1) TWI682154B (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2023002620A1 (zh) * 2021-07-21 2023-01-26
CN115319318A (zh) * 2022-08-02 2022-11-11 大族激光科技产业集团股份有限公司 激光加工质量监测方法、监测组件、加工设备及存储介质

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009188031A (ja) * 2008-02-04 2009-08-20 Gigaphoton Inc レーザ装置の故障診断システム

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60111487A (ja) * 1983-11-22 1985-06-17 Mitsubishi Electric Corp ガスレ−ザ発振器の露点検出方法
JPH03189082A (ja) * 1989-12-18 1991-08-19 Mitsubishi Heavy Ind Ltd レーザー加工監視方法
US5163063A (en) * 1990-02-07 1992-11-10 Copal Co., Ltd. Semiconductor laser driving circuit
JPH1126853A (ja) * 1997-07-04 1999-01-29 Toshiba Corp レーザ加工装置
JPH11156570A (ja) 1997-11-21 1999-06-15 Daihen Corp レーザ加工装置
TWI255961B (en) * 2003-05-26 2006-06-01 Mitsubishi Electric Corp Wavelength conversion method, wavelength conversion laser, and laser processing apparatus
CN100432875C (zh) * 2006-08-02 2008-11-12 北京金奔腾汽车科技有限公司 汽车解码器的数据超范围警告色显示方法
JP4514767B2 (ja) * 2007-03-28 2010-07-28 日立ビアメカニクス株式会社 レーザエネルギ測定装置とレーザ加工装置
JP2009117595A (ja) * 2007-11-06 2009-05-28 Fanuc Ltd ガスレーザ発振器の異常検出方法およびその検出方法を実施するガスレーザ発振器
KR101233506B1 (ko) * 2007-11-20 2013-02-14 미쓰비시덴키 가부시키가이샤 레이저 발진기 내 출사미러의 열화상태 측정방법 및 레이저 가공장치
JP5216534B2 (ja) * 2008-10-30 2013-06-19 パナソニック デバイスＳｕｎｘ株式会社 レーザ発振器およびこれを用いたレーザ加工機
JP5995767B2 (ja) * 2013-03-28 2016-09-21 住友重機械工業株式会社 レーザ加工装置及びレーザ加工方法
TW201544222A (zh) * 2014-02-21 2015-12-01 Panasonic Ip Man Co Ltd 雷射加工裝置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009188031A (ja) * 2008-02-04 2009-08-20 Gigaphoton Inc レーザ装置の故障診断システム

Also Published As

Publication number Publication date
JP6987453B2 (ja) 2022-01-05
JP2019133986A (ja) 2019-08-08
TW201932811A (zh) 2019-08-16
TWI682154B (zh) 2020-01-11
CN110091052B (zh) 2021-09-14
KR20190092258A (ko) 2019-08-07
CN110091052A (zh) 2019-08-06

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