KR102462877B1 - 감방사선성 수지 조성물, 적외선 차폐막, 그의 형성 방법, 및 고체 촬상 소자, 조도 센서 - Google Patents

감방사선성 수지 조성물, 적외선 차폐막, 그의 형성 방법, 및 고체 촬상 소자, 조도 센서 Download PDF

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KR102462877B1
KR102462877B1 KR1020160049861A KR20160049861A KR102462877B1 KR 102462877 B1 KR102462877 B1 KR 102462877B1 KR 1020160049861 A KR1020160049861 A KR 1020160049861A KR 20160049861 A KR20160049861 A KR 20160049861A KR 102462877 B1 KR102462877 B1 KR 102462877B1
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South Korea
Prior art keywords
radiation
compound
resin composition
mass
sensitive resin
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KR1020160049861A
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English (en)
Korean (ko)
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KR20160127663A (ko
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다이고 이치노헤
타카히로 가와이
코우지 하타케야마
타카노리 야나기
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제이에스알 가부시끼가이샤
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Publication of KR20160127663A publication Critical patent/KR20160127663A/ko
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/039Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/208Filters for use with infrared or ultraviolet radiation, e.g. for separating visible light from infrared and/or ultraviolet radiation
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/28Interference filters
    • G02B5/281Interference filters designed for the infrared light
    • G02B5/282Interference filters designed for the infrared light reflecting for infrared and transparent for visible light, e.g. heat reflectors, laser protection
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/008Azides
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/022Quinonediazides

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Materials For Photolithography (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
KR1020160049861A 2015-04-27 2016-04-25 감방사선성 수지 조성물, 적외선 차폐막, 그의 형성 방법, 및 고체 촬상 소자, 조도 센서 KR102462877B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2015-090891 2015-04-27
JP2015090891A JP6524786B2 (ja) 2015-04-27 2015-04-27 ポジ型感放射線性樹脂組成物、赤外線遮蔽膜、その形成方法、及び固体撮像素子、照度センサー

Publications (2)

Publication Number Publication Date
KR20160127663A KR20160127663A (ko) 2016-11-04
KR102462877B1 true KR102462877B1 (ko) 2022-11-02

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Country Status (4)

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JP (1) JP6524786B2 (zh)
KR (1) KR102462877B1 (zh)
CN (1) CN106094437B (zh)
TW (1) TWI682245B (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019026675A1 (ja) * 2017-07-31 2019-02-07 Jsr株式会社 光電変換素子および接着剤

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001272801A (ja) * 2000-03-28 2001-10-05 Fuji Photo Film Co Ltd 平版印刷版の製版方法
JP2002052855A (ja) * 2000-08-10 2002-02-19 Nippon Kayaku Co Ltd レーザー直描型平板印刷版
JP2003295417A (ja) * 2002-03-29 2003-10-15 Fuji Photo Film Co Ltd 平版印刷版の製版方法
JP2004145320A (ja) * 2002-10-01 2004-05-20 Toray Ind Inc ポジ型感光性樹脂組成物
JP2011123498A (ja) * 2010-12-17 2011-06-23 Hitachi Ltd 映像処理装置
WO2011118171A1 (ja) * 2010-03-26 2011-09-29 住友ベークライト株式会社 感光性樹脂組成物及び受光装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004318360A (ja) * 2003-04-15 2004-11-11 Hitachi Maxell Ltd 手書き入力システムと、ペン型入力装置と、手書き入力システムに使用する用紙
JP5198394B2 (ja) 2009-09-04 2013-05-15 シャープ株式会社 近接照度センサおよびその製造方法
JP5676171B2 (ja) 2010-07-26 2015-02-25 シャープ株式会社 固体撮像装置およびその製造方法、並びに電子機器
JP5417364B2 (ja) 2011-03-08 2014-02-12 富士フイルム株式会社 固体撮像素子用硬化性組成物、並びに、これを用いた感光層、永久パターン、ウエハレベルレンズ、固体撮像素子、及び、パターン形成方法
KR20150097618A (ko) * 2013-02-19 2015-08-26 후지필름 가부시키가이샤 근적외선 흡수성 조성물, 및 이를 이용한 근적외선 차단 필터, 및 카메라 모듈과 그 제조 방법

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001272801A (ja) * 2000-03-28 2001-10-05 Fuji Photo Film Co Ltd 平版印刷版の製版方法
JP2002052855A (ja) * 2000-08-10 2002-02-19 Nippon Kayaku Co Ltd レーザー直描型平板印刷版
JP2003295417A (ja) * 2002-03-29 2003-10-15 Fuji Photo Film Co Ltd 平版印刷版の製版方法
JP2004145320A (ja) * 2002-10-01 2004-05-20 Toray Ind Inc ポジ型感光性樹脂組成物
WO2011118171A1 (ja) * 2010-03-26 2011-09-29 住友ベークライト株式会社 感光性樹脂組成物及び受光装置
JP2011123498A (ja) * 2010-12-17 2011-06-23 Hitachi Ltd 映像処理装置

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Publication number Publication date
CN106094437A (zh) 2016-11-09
CN106094437B (zh) 2020-08-04
JP6524786B2 (ja) 2019-06-05
KR20160127663A (ko) 2016-11-04
JP2016206558A (ja) 2016-12-08
TWI682245B (zh) 2020-01-11
TW201638666A (zh) 2016-11-01

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