KR102348093B1 - 시약 전달 시스템 동결 방지 열 교환기 - Google Patents

시약 전달 시스템 동결 방지 열 교환기 Download PDF

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Publication number
KR102348093B1
KR102348093B1 KR1020177000122A KR20177000122A KR102348093B1 KR 102348093 B1 KR102348093 B1 KR 102348093B1 KR 1020177000122 A KR1020177000122 A KR 1020177000122A KR 20177000122 A KR20177000122 A KR 20177000122A KR 102348093 B1 KR102348093 B1 KR 102348093B1
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South Korea
Prior art keywords
reagent
heat exchanger
water tank
liquid
delivery system
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KR1020177000122A
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Korean (ko)
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KR20170010057A (ko
Inventor
콜린 존 디킨스
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어플라이드 머티어리얼스, 인코포레이티드
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
    • H01J37/32816—Pressure
    • H01J37/32834—Exhausting
    • H01J37/32844—Treating effluent gases
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32458—Vessel
    • H01J37/32522—Temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32357—Generation remote from the workpiece, e.g. down-stream
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Chemical Vapour Deposition (AREA)
KR1020177000122A 2014-06-04 2015-04-30 시약 전달 시스템 동결 방지 열 교환기 Active KR102348093B1 (ko)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US201462007513P 2014-06-04 2014-06-04
US62/007,513 2014-06-04
US201462065155P 2014-10-17 2014-10-17
US62/065,155 2014-10-17
US14/696,955 2015-04-27
US14/696,955 US10115571B2 (en) 2014-06-04 2015-04-27 Reagent delivery system freeze prevention heat exchanger
PCT/US2015/028398 WO2015187268A1 (en) 2014-06-04 2015-04-30 Reagent delivery system freeze prevention heat exchanger

Publications (2)

Publication Number Publication Date
KR20170010057A KR20170010057A (ko) 2017-01-25
KR102348093B1 true KR102348093B1 (ko) 2022-01-05

Family

ID=54767148

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KR1020177000122A Active KR102348093B1 (ko) 2014-06-04 2015-04-30 시약 전달 시스템 동결 방지 열 교환기

Country Status (6)

Country Link
US (1) US10115571B2 (enExample)
JP (1) JP6527533B6 (enExample)
KR (1) KR102348093B1 (enExample)
CN (1) CN106461357B (enExample)
TW (1) TWI669412B (enExample)
WO (1) WO2015187268A1 (enExample)

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US10115571B2 (en) * 2014-06-04 2018-10-30 Applied Materials, Inc. Reagent delivery system freeze prevention heat exchanger
US10535506B2 (en) 2016-01-13 2020-01-14 Mks Instruments, Inc. Method and apparatus for deposition cleaning in a pumping line
WO2017177398A1 (en) * 2016-04-13 2017-10-19 Applied Materials, Inc. Apparatus for exhaust cooling
US10435787B2 (en) 2016-11-14 2019-10-08 Applied Materials, Inc. Hydrogen partial pressure control in a vacuum process chamber
US10777394B2 (en) 2016-12-09 2020-09-15 Applied Materials, Inc. Virtual sensor for chamber cleaning endpoint
CN110709974B (zh) 2017-05-19 2023-08-01 应用材料公司 用于将液体和固体流出物收集并随后反应成气体流出物的设备
GB2587393A (en) * 2019-09-26 2021-03-31 Edwards Ltd Optimising operating conditions in an abatement apparatus
US11745229B2 (en) 2020-08-11 2023-09-05 Mks Instruments, Inc. Endpoint detection of deposition cleaning in a pumping line and a processing chamber
US11664197B2 (en) 2021-08-02 2023-05-30 Mks Instruments, Inc. Method and apparatus for plasma generation
US12159765B2 (en) 2022-09-02 2024-12-03 Mks Instruments, Inc. Method and apparatus for plasma generation

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US20110107512A1 (en) 2008-02-12 2011-05-12 Patrick Gilbert Heat exchange devices

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US4326499A (en) 1979-12-26 1982-04-27 Koskela Marvin O Solar water heating system and heat exchanger therefor
CH666198A5 (it) * 1985-09-13 1988-07-15 Ammonia Casale Sa Reattore per sintesi catalitiche dell'ammoniaca, metanolo ed alcoli superiori.
JP2811905B2 (ja) * 1990-04-19 1998-10-15 富士電機株式会社 燃料電池発電システムの水蒸気発生器
CN2086863U (zh) 1991-01-11 1991-10-16 清华大学 家用淋浴热水器
US6888040B1 (en) 1996-06-28 2005-05-03 Lam Research Corporation Method and apparatus for abatement of reaction products from a vacuum processing chamber
US6059567A (en) * 1998-02-10 2000-05-09 Silicon Valley Group, Inc. Semiconductor thermal processor with recirculating heater exhaust cooling system
US7128136B2 (en) * 1998-08-10 2006-10-31 Gregory Christian T Radial flow heat exchanger
JP2002042847A (ja) * 2000-07-26 2002-02-08 Toshiba Corp 固体高分子型燃料電池システム
JP4070698B2 (ja) * 2003-10-01 2008-04-02 カンケンテクノ株式会社 排ガス供給方法とその逆火防止装置
US20060011324A1 (en) * 2004-07-13 2006-01-19 Rogers C J Wound, louvered fin heat sink device
CA2601817A1 (en) * 2005-02-09 2007-08-09 Giraffe Liquid Management Systems, Inc. Adjustable height inlet/outlet liquid level management tools and systems
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US8165726B2 (en) * 2006-01-30 2012-04-24 Honeywell International Inc. Water heater energy savings algorithm for reducing cold water complaints
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KR200427888Y1 (ko) 2006-07-05 2006-10-02 엄재규 스파이럴 구조의 연소실을 가진 스팀보일러
US8327810B2 (en) * 2007-03-16 2012-12-11 Armstrong Hot Water Inc. High efficiency water heater
JP2009101333A (ja) * 2007-10-25 2009-05-14 O-Den Co Ltd 排ガス処理装置に組み込まれて用いられる加熱装置、該加熱装置を備えた排ガス処理装置及び排ガス処理方法
CN201200884Y (zh) 2008-05-30 2009-03-04 吕仲明 轴向流板壳式等温反应器
JP2010119935A (ja) * 2008-11-18 2010-06-03 Seiko Epson Corp 排ガス処理装置及び半導体装置の製造方法
CN101625148A (zh) 2009-07-06 2010-01-13 宁波市万泓电器科技有限公司 一种液体加热单元
US8747762B2 (en) 2009-12-03 2014-06-10 Applied Materials, Inc. Methods and apparatus for treating exhaust gas in a processing system
KR101160891B1 (ko) 2011-10-27 2012-06-28 주식회사 알티엑스 전자빔을 이용한, 반도체 제조공정의 폐가스 처리장치 및 처리방법
JP2013137940A (ja) * 2011-12-28 2013-07-11 Panasonic Corp 直接メタノール型燃料電池システム
US10115571B2 (en) * 2014-06-04 2018-10-30 Applied Materials, Inc. Reagent delivery system freeze prevention heat exchanger

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005111433A (ja) * 2003-10-10 2005-04-28 Kanken Techno Co Ltd フッ素化合物含有排ガスの処理方法およびその装置
US20110107512A1 (en) 2008-02-12 2011-05-12 Patrick Gilbert Heat exchange devices

Also Published As

Publication number Publication date
US10115571B2 (en) 2018-10-30
WO2015187268A1 (en) 2015-12-10
US20150357168A1 (en) 2015-12-10
CN106461357A (zh) 2017-02-22
JP6527533B6 (ja) 2019-06-26
JP6527533B2 (ja) 2019-06-05
TWI669412B (zh) 2019-08-21
JP2017526163A (ja) 2017-09-07
TW201604320A (zh) 2016-02-01
CN106461357B (zh) 2019-06-11
KR20170010057A (ko) 2017-01-25

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