JP6527533B6 - 試薬供給システムの凍結防止用の熱交換器 - Google Patents

試薬供給システムの凍結防止用の熱交換器 Download PDF

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JP6527533B6
JP6527533B6 JP2016571282A JP2016571282A JP6527533B6 JP 6527533 B6 JP6527533 B6 JP 6527533B6 JP 2016571282 A JP2016571282 A JP 2016571282A JP 2016571282 A JP2016571282 A JP 2016571282A JP 6527533 B6 JP6527533 B6 JP 6527533B6
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heat exchanger
reagent
supply system
foreline
reagent supply
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Japanese (ja)
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JP2017526163A (ja
JP6527533B2 (ja
JP2017526163A5 (enExample
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コリン ジョン ディッキンソン
コリン ジョン ディッキンソン
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Applied Materials Inc
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Applied Materials Inc
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
    • H01J37/32816—Pressure
    • H01J37/32834—Exhausting
    • H01J37/32844—Treating effluent gases
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32357—Generation remote from the workpiece, e.g. down-stream
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32458—Vessel
    • H01J37/32522—Temperature
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Chemical Vapour Deposition (AREA)
JP2016571282A 2014-06-04 2015-04-30 試薬供給システムの凍結防止用の熱交換器 Active JP6527533B6 (ja)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US201462007513P 2014-06-04 2014-06-04
US62/007,513 2014-06-04
US201462065155P 2014-10-17 2014-10-17
US62/065,155 2014-10-17
US14/696,955 US10115571B2 (en) 2014-06-04 2015-04-27 Reagent delivery system freeze prevention heat exchanger
US14/696,955 2015-04-27
PCT/US2015/028398 WO2015187268A1 (en) 2014-06-04 2015-04-30 Reagent delivery system freeze prevention heat exchanger

Publications (4)

Publication Number Publication Date
JP2017526163A JP2017526163A (ja) 2017-09-07
JP2017526163A5 JP2017526163A5 (enExample) 2018-04-19
JP6527533B2 JP6527533B2 (ja) 2019-06-05
JP6527533B6 true JP6527533B6 (ja) 2019-06-26

Family

ID=54767148

Family Applications (1)

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JP2016571282A Active JP6527533B6 (ja) 2014-06-04 2015-04-30 試薬供給システムの凍結防止用の熱交換器

Country Status (6)

Country Link
US (1) US10115571B2 (enExample)
JP (1) JP6527533B6 (enExample)
KR (1) KR102348093B1 (enExample)
CN (1) CN106461357B (enExample)
TW (1) TWI669412B (enExample)
WO (1) WO2015187268A1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10115571B2 (en) * 2014-06-04 2018-10-30 Applied Materials, Inc. Reagent delivery system freeze prevention heat exchanger
US10535506B2 (en) 2016-01-13 2020-01-14 Mks Instruments, Inc. Method and apparatus for deposition cleaning in a pumping line
WO2017177398A1 (en) 2016-04-13 2017-10-19 Applied Materials, Inc. Apparatus for exhaust cooling
US10435787B2 (en) 2016-11-14 2019-10-08 Applied Materials, Inc. Hydrogen partial pressure control in a vacuum process chamber
US10777394B2 (en) 2016-12-09 2020-09-15 Applied Materials, Inc. Virtual sensor for chamber cleaning endpoint
CN110709974B (zh) 2017-05-19 2023-08-01 应用材料公司 用于将液体和固体流出物收集并随后反应成气体流出物的设备
GB2587393A (en) * 2019-09-26 2021-03-31 Edwards Ltd Optimising operating conditions in an abatement apparatus
US11745229B2 (en) 2020-08-11 2023-09-05 Mks Instruments, Inc. Endpoint detection of deposition cleaning in a pumping line and a processing chamber
US11664197B2 (en) 2021-08-02 2023-05-30 Mks Instruments, Inc. Method and apparatus for plasma generation
US12159765B2 (en) 2022-09-02 2024-12-03 Mks Instruments, Inc. Method and apparatus for plasma generation

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US4138996A (en) * 1977-07-28 1979-02-13 Rheem Manufacturing Company Solar heater freeze protection system
US4326499A (en) 1979-12-26 1982-04-27 Koskela Marvin O Solar water heating system and heat exchanger therefor
CH666198A5 (it) * 1985-09-13 1988-07-15 Ammonia Casale Sa Reattore per sintesi catalitiche dell'ammoniaca, metanolo ed alcoli superiori.
JP2811905B2 (ja) * 1990-04-19 1998-10-15 富士電機株式会社 燃料電池発電システムの水蒸気発生器
CN2086863U (zh) 1991-01-11 1991-10-16 清华大学 家用淋浴热水器
US6888040B1 (en) 1996-06-28 2005-05-03 Lam Research Corporation Method and apparatus for abatement of reaction products from a vacuum processing chamber
US6059567A (en) * 1998-02-10 2000-05-09 Silicon Valley Group, Inc. Semiconductor thermal processor with recirculating heater exhaust cooling system
US7128136B2 (en) * 1998-08-10 2006-10-31 Gregory Christian T Radial flow heat exchanger
JP2002042847A (ja) * 2000-07-26 2002-02-08 Toshiba Corp 固体高分子型燃料電池システム
JP4070698B2 (ja) * 2003-10-01 2008-04-02 カンケンテクノ株式会社 排ガス供給方法とその逆火防止装置
JP2005111433A (ja) 2003-10-10 2005-04-28 Kanken Techno Co Ltd フッ素化合物含有排ガスの処理方法およびその装置
US20060011324A1 (en) 2004-07-13 2006-01-19 Rogers C J Wound, louvered fin heat sink device
CA2601817A1 (en) * 2005-02-09 2007-08-09 Giraffe Liquid Management Systems, Inc. Adjustable height inlet/outlet liquid level management tools and systems
CN101263347B (zh) * 2005-09-16 2010-10-13 达克斯制造有限公司 水加热器以及操作该水加热器的方法
US8165726B2 (en) * 2006-01-30 2012-04-24 Honeywell International Inc. Water heater energy savings algorithm for reducing cold water complaints
US7547005B2 (en) * 2006-02-16 2009-06-16 Advanced Energy Industries, Inc. System and method for delivering vapor
KR200427888Y1 (ko) 2006-07-05 2006-10-02 엄재규 스파이럴 구조의 연소실을 가진 스팀보일러
US8327810B2 (en) * 2007-03-16 2012-12-11 Armstrong Hot Water Inc. High efficiency water heater
JP2009101333A (ja) * 2007-10-25 2009-05-14 O-Den Co Ltd 排ガス処理装置に組み込まれて用いられる加熱装置、該加熱装置を備えた排ガス処理装置及び排ガス処理方法
GB0802486D0 (en) * 2008-02-12 2008-03-19 Gilbert Patrick C Warm water economy device
CN201200884Y (zh) 2008-05-30 2009-03-04 吕仲明 轴向流板壳式等温反应器
JP2010119935A (ja) * 2008-11-18 2010-06-03 Seiko Epson Corp 排ガス処理装置及び半導体装置の製造方法
CN101625148A (zh) 2009-07-06 2010-01-13 宁波市万泓电器科技有限公司 一种液体加热单元
US8747762B2 (en) * 2009-12-03 2014-06-10 Applied Materials, Inc. Methods and apparatus for treating exhaust gas in a processing system
KR101160891B1 (ko) 2011-10-27 2012-06-28 주식회사 알티엑스 전자빔을 이용한, 반도체 제조공정의 폐가스 처리장치 및 처리방법
JP2013137940A (ja) * 2011-12-28 2013-07-11 Panasonic Corp 直接メタノール型燃料電池システム
US10115571B2 (en) * 2014-06-04 2018-10-30 Applied Materials, Inc. Reagent delivery system freeze prevention heat exchanger

Also Published As

Publication number Publication date
CN106461357A (zh) 2017-02-22
JP2017526163A (ja) 2017-09-07
KR20170010057A (ko) 2017-01-25
JP6527533B2 (ja) 2019-06-05
WO2015187268A1 (en) 2015-12-10
CN106461357B (zh) 2019-06-11
TWI669412B (zh) 2019-08-21
TW201604320A (zh) 2016-02-01
US10115571B2 (en) 2018-10-30
KR102348093B1 (ko) 2022-01-05
US20150357168A1 (en) 2015-12-10

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