CN106461357B - 反应物输送系统防冻热交换器 - Google Patents

反应物输送系统防冻热交换器 Download PDF

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Publication number
CN106461357B
CN106461357B CN201580026714.2A CN201580026714A CN106461357B CN 106461357 B CN106461357 B CN 106461357B CN 201580026714 A CN201580026714 A CN 201580026714A CN 106461357 B CN106461357 B CN 106461357B
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China
Prior art keywords
reactant
heat exchanger
delivery system
liquid
reactant liquid
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CN201580026714.2A
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Chinese (zh)
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CN106461357A (zh
Inventor
科林·约翰·迪金森
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Applied Materials Inc
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Applied Materials Inc
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
    • H01J37/32816—Pressure
    • H01J37/32834—Exhausting
    • H01J37/32844—Treating effluent gases
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32357—Generation remote from the workpiece, e.g. down-stream
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32458—Vessel
    • H01J37/32522—Temperature
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Chemical Vapour Deposition (AREA)
CN201580026714.2A 2014-06-04 2015-04-30 反应物输送系统防冻热交换器 Active CN106461357B (zh)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US201462007513P 2014-06-04 2014-06-04
US62/007,513 2014-06-04
US201462065155P 2014-10-17 2014-10-17
US62/065,155 2014-10-17
US14/696,955 2015-04-27
US14/696,955 US10115571B2 (en) 2014-06-04 2015-04-27 Reagent delivery system freeze prevention heat exchanger
PCT/US2015/028398 WO2015187268A1 (en) 2014-06-04 2015-04-30 Reagent delivery system freeze prevention heat exchanger

Publications (2)

Publication Number Publication Date
CN106461357A CN106461357A (zh) 2017-02-22
CN106461357B true CN106461357B (zh) 2019-06-11

Family

ID=54767148

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201580026714.2A Active CN106461357B (zh) 2014-06-04 2015-04-30 反应物输送系统防冻热交换器

Country Status (6)

Country Link
US (1) US10115571B2 (enExample)
JP (1) JP6527533B6 (enExample)
KR (1) KR102348093B1 (enExample)
CN (1) CN106461357B (enExample)
TW (1) TWI669412B (enExample)
WO (1) WO2015187268A1 (enExample)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10115571B2 (en) * 2014-06-04 2018-10-30 Applied Materials, Inc. Reagent delivery system freeze prevention heat exchanger
US10535506B2 (en) 2016-01-13 2020-01-14 Mks Instruments, Inc. Method and apparatus for deposition cleaning in a pumping line
CN108701583B (zh) * 2016-04-13 2023-12-01 应用材料公司 用于排气冷却的设备
US10435787B2 (en) 2016-11-14 2019-10-08 Applied Materials, Inc. Hydrogen partial pressure control in a vacuum process chamber
US10777394B2 (en) 2016-12-09 2020-09-15 Applied Materials, Inc. Virtual sensor for chamber cleaning endpoint
JP6918146B2 (ja) 2017-05-19 2021-08-11 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 液体および固体の排出物を収集して後に反応させて気体の排出物にする装置
GB2587393A (en) * 2019-09-26 2021-03-31 Edwards Ltd Optimising operating conditions in an abatement apparatus
US11745229B2 (en) 2020-08-11 2023-09-05 Mks Instruments, Inc. Endpoint detection of deposition cleaning in a pumping line and a processing chamber
US11664197B2 (en) 2021-08-02 2023-05-30 Mks Instruments, Inc. Method and apparatus for plasma generation
US12159765B2 (en) 2022-09-02 2024-12-03 Mks Instruments, Inc. Method and apparatus for plasma generation

Citations (7)

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CN2086863U (zh) * 1991-01-11 1991-10-16 清华大学 家用淋浴热水器
CN1722416A (zh) * 2004-07-13 2006-01-18 穆丹制造公司 盘绕散热片的散热器装置
KR200427888Y1 (ko) * 2006-07-05 2006-10-02 엄재규 스파이럴 구조의 연소실을 가진 스팀보일러
CN201200884Y (zh) * 2008-05-30 2009-03-04 吕仲明 轴向流板壳式等温反应器
CN101473131A (zh) * 2006-02-16 2009-07-01 先进能源工业公司 输送蒸汽的系统和方法
CN101625148A (zh) * 2009-07-06 2010-01-13 宁波市万泓电器科技有限公司 一种液体加热单元
CN102640255A (zh) * 2009-12-03 2012-08-15 应用材料公司 用于对处理系统中的排放气体进行处理的方法和设备

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US4138996A (en) * 1977-07-28 1979-02-13 Rheem Manufacturing Company Solar heater freeze protection system
US4326499A (en) 1979-12-26 1982-04-27 Koskela Marvin O Solar water heating system and heat exchanger therefor
CH666198A5 (it) * 1985-09-13 1988-07-15 Ammonia Casale Sa Reattore per sintesi catalitiche dell'ammoniaca, metanolo ed alcoli superiori.
JP2811905B2 (ja) * 1990-04-19 1998-10-15 富士電機株式会社 燃料電池発電システムの水蒸気発生器
US6888040B1 (en) 1996-06-28 2005-05-03 Lam Research Corporation Method and apparatus for abatement of reaction products from a vacuum processing chamber
US6059567A (en) * 1998-02-10 2000-05-09 Silicon Valley Group, Inc. Semiconductor thermal processor with recirculating heater exhaust cooling system
US7128136B2 (en) * 1998-08-10 2006-10-31 Gregory Christian T Radial flow heat exchanger
JP2002042847A (ja) * 2000-07-26 2002-02-08 Toshiba Corp 固体高分子型燃料電池システム
JP4070698B2 (ja) * 2003-10-01 2008-04-02 カンケンテクノ株式会社 排ガス供給方法とその逆火防止装置
JP2005111433A (ja) 2003-10-10 2005-04-28 Kanken Techno Co Ltd フッ素化合物含有排ガスの処理方法およびその装置
CA2601817A1 (en) * 2005-02-09 2007-08-09 Giraffe Liquid Management Systems, Inc. Adjustable height inlet/outlet liquid level management tools and systems
US20090142720A1 (en) * 2005-09-16 2009-06-04 Patrick Pussell Water Heater and a Method of Operating Same
US8165726B2 (en) * 2006-01-30 2012-04-24 Honeywell International Inc. Water heater energy savings algorithm for reducing cold water complaints
US8327810B2 (en) * 2007-03-16 2012-12-11 Armstrong Hot Water Inc. High efficiency water heater
JP2009101333A (ja) * 2007-10-25 2009-05-14 O-Den Co Ltd 排ガス処理装置に組み込まれて用いられる加熱装置、該加熱装置を備えた排ガス処理装置及び排ガス処理方法
GB0802486D0 (en) * 2008-02-12 2008-03-19 Gilbert Patrick C Warm water economy device
JP2010119935A (ja) * 2008-11-18 2010-06-03 Seiko Epson Corp 排ガス処理装置及び半導体装置の製造方法
KR101160891B1 (ko) 2011-10-27 2012-06-28 주식회사 알티엑스 전자빔을 이용한, 반도체 제조공정의 폐가스 처리장치 및 처리방법
JP2013137940A (ja) * 2011-12-28 2013-07-11 Panasonic Corp 直接メタノール型燃料電池システム
US10115571B2 (en) * 2014-06-04 2018-10-30 Applied Materials, Inc. Reagent delivery system freeze prevention heat exchanger

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2086863U (zh) * 1991-01-11 1991-10-16 清华大学 家用淋浴热水器
CN1722416A (zh) * 2004-07-13 2006-01-18 穆丹制造公司 盘绕散热片的散热器装置
CN101473131A (zh) * 2006-02-16 2009-07-01 先进能源工业公司 输送蒸汽的系统和方法
KR200427888Y1 (ko) * 2006-07-05 2006-10-02 엄재규 스파이럴 구조의 연소실을 가진 스팀보일러
CN201200884Y (zh) * 2008-05-30 2009-03-04 吕仲明 轴向流板壳式等温反应器
CN101625148A (zh) * 2009-07-06 2010-01-13 宁波市万泓电器科技有限公司 一种液体加热单元
CN102640255A (zh) * 2009-12-03 2012-08-15 应用材料公司 用于对处理系统中的排放气体进行处理的方法和设备

Also Published As

Publication number Publication date
US10115571B2 (en) 2018-10-30
KR20170010057A (ko) 2017-01-25
JP2017526163A (ja) 2017-09-07
CN106461357A (zh) 2017-02-22
WO2015187268A1 (en) 2015-12-10
JP6527533B6 (ja) 2019-06-26
KR102348093B1 (ko) 2022-01-05
JP6527533B2 (ja) 2019-06-05
US20150357168A1 (en) 2015-12-10
TW201604320A (zh) 2016-02-01
TWI669412B (zh) 2019-08-21

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