KR102347711B1 - 폴리싱 패드 및 시스템과 이의 제조 및 사용 방법 - Google Patents

폴리싱 패드 및 시스템과 이의 제조 및 사용 방법 Download PDF

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Publication number
KR102347711B1
KR102347711B1 KR1020167030479A KR20167030479A KR102347711B1 KR 102347711 B1 KR102347711 B1 KR 102347711B1 KR 1020167030479 A KR1020167030479 A KR 1020167030479A KR 20167030479 A KR20167030479 A KR 20167030479A KR 102347711 B1 KR102347711 B1 KR 102347711B1
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Prior art keywords
polishing
precisely shaped
less
layer
delete delete
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KR20160142346A (ko
Inventor
듀이 케이 리휴
케네스 에이 피 메이어
모제스 엠 데이비드
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쓰리엠 이노베이티브 프로퍼티즈 컴파니
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/22—Lapping pads for working plane surfaces characterised by a multi-layered structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • B24B37/245—Pads with fixed abrasives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/24—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass
    • B24B7/241—Methods

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
KR1020167030479A 2014-04-03 2015-03-31 폴리싱 패드 및 시스템과 이의 제조 및 사용 방법 Active KR102347711B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201461974848P 2014-04-03 2014-04-03
US61/974,848 2014-04-03
US201462052729P 2014-09-19 2014-09-19
US62/052,729 2014-09-19
PCT/US2015/023572 WO2015153597A1 (en) 2014-04-03 2015-03-31 Polishing pads and systems and methods of making and using the same

Publications (2)

Publication Number Publication Date
KR20160142346A KR20160142346A (ko) 2016-12-12
KR102347711B1 true KR102347711B1 (ko) 2022-01-06

Family

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Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020167030479A Active KR102347711B1 (ko) 2014-04-03 2015-03-31 폴리싱 패드 및 시스템과 이의 제조 및 사용 방법
KR1020167030482A Active KR102350350B1 (ko) 2014-04-03 2015-03-31 폴리싱 패드 및 시스템과 이의 제조 및 사용 방법

Family Applications After (1)

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KR1020167030482A Active KR102350350B1 (ko) 2014-04-03 2015-03-31 폴리싱 패드 및 시스템과 이의 제조 및 사용 방법

Country Status (8)

Country Link
US (2) US10071461B2 (enExample)
EP (2) EP3126093B1 (enExample)
JP (2) JP6656162B2 (enExample)
KR (2) KR102347711B1 (enExample)
CN (2) CN106163740B (enExample)
SG (2) SG11201608219WA (enExample)
TW (2) TWI652142B (enExample)
WO (2) WO2015153597A1 (enExample)

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