KR102273981B1 - 갈바노 미러, 갈바노 미러를 이용한 갈바노 스캐너, 갈바노 미러를 이용한 레이저 가공기 및 갈바노 미러의 제조 방법 - Google Patents

갈바노 미러, 갈바노 미러를 이용한 갈바노 스캐너, 갈바노 미러를 이용한 레이저 가공기 및 갈바노 미러의 제조 방법 Download PDF

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KR102273981B1
KR102273981B1 KR1020197029144A KR20197029144A KR102273981B1 KR 102273981 B1 KR102273981 B1 KR 102273981B1 KR 1020197029144 A KR1020197029144 A KR 1020197029144A KR 20197029144 A KR20197029144 A KR 20197029144A KR 102273981 B1 KR102273981 B1 KR 102273981B1
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South Korea
Prior art keywords
mirror
galvanometer
galvanometer mirror
mirror surface
sic
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KR1020197029144A
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English (en)
Korean (ko)
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KR20190126364A (ko
Inventor
마사미 구메
데루히코 구마다
요헤이 이토
히로키 고바야시
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미쓰비시덴키 가부시키가이샤
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Publication of KR20190126364A publication Critical patent/KR20190126364A/ko
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/435—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material
    • B41J2/47—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material using the combination of scanning and modulation of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/04—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
    • H04N1/113—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using oscillating or rotating mirrors

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Laser Beam Processing (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Elements Other Than Lenses (AREA)
KR1020197029144A 2017-04-12 2017-04-12 갈바노 미러, 갈바노 미러를 이용한 갈바노 스캐너, 갈바노 미러를 이용한 레이저 가공기 및 갈바노 미러의 제조 방법 KR102273981B1 (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2017/014986 WO2018189828A1 (ja) 2017-04-12 2017-04-12 ガルバノミラー、ガルバノミラーを用いたガルバノスキャナ、ガルバノミラーを用いたレーザ加工機及びガルバノミラーの製造方法

Publications (2)

Publication Number Publication Date
KR20190126364A KR20190126364A (ko) 2019-11-11
KR102273981B1 true KR102273981B1 (ko) 2021-07-06

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KR1020197029144A KR102273981B1 (ko) 2017-04-12 2017-04-12 갈바노 미러, 갈바노 미러를 이용한 갈바노 스캐너, 갈바노 미러를 이용한 레이저 가공기 및 갈바노 미러의 제조 방법

Country Status (5)

Country Link
JP (1) JP6272587B1 (zh)
KR (1) KR102273981B1 (zh)
CN (1) CN110494789B (zh)
TW (1) TWI654461B (zh)
WO (1) WO2018189828A1 (zh)

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* Cited by examiner, † Cited by third party
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DE102018205786A1 (de) * 2018-04-17 2019-10-17 Trumpf Laser Gmbh Scannerspiegel, Scannereinrichtung und Bestrahlungseinrichtung
DE102020200270A1 (de) * 2020-01-10 2021-07-15 AM App GmbH Spiegel mit Spiegelhalter und Spiegelrotor in Leichtbauweise und Bauteil oder Körper in Leichtbauweise mit interner Versteifungsrippenstruktur
CN112269261A (zh) * 2020-09-30 2021-01-26 广州新可激光设备有限公司 一种高速往复转动振镜的制造工艺
CN116165797B (zh) * 2022-12-08 2023-12-08 江苏泽景汽车电子股份有限公司 反射镜传动系统及抬头显示设备
CN116579183B (zh) * 2023-06-27 2024-04-05 季华实验室 反射镜加工分析方法、装置、电子设备及存储介质

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JP3531554B2 (ja) 1999-10-21 2004-05-31 松下電器産業株式会社 光学ミラーと光学スキャナーおよびレーザ加工機
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Also Published As

Publication number Publication date
KR20190126364A (ko) 2019-11-11
CN110494789B (zh) 2021-07-06
TW201837521A (zh) 2018-10-16
WO2018189828A1 (ja) 2018-10-18
JPWO2018189828A1 (ja) 2019-04-18
JP6272587B1 (ja) 2018-01-31
TWI654461B (zh) 2019-03-21
CN110494789A (zh) 2019-11-22

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