KR102218298B1 - 물체를 세정하기 위한 시스템 및 방법 - Google Patents

물체를 세정하기 위한 시스템 및 방법 Download PDF

Info

Publication number
KR102218298B1
KR102218298B1 KR1020167036843A KR20167036843A KR102218298B1 KR 102218298 B1 KR102218298 B1 KR 102218298B1 KR 1020167036843 A KR1020167036843 A KR 1020167036843A KR 20167036843 A KR20167036843 A KR 20167036843A KR 102218298 B1 KR102218298 B1 KR 102218298B1
Authority
KR
South Korea
Prior art keywords
roll
support
cleaner
elastomeric
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020167036843A
Other languages
English (en)
Korean (ko)
Other versions
KR20170013942A (ko
Inventor
로리 에이. 울프
스티븐 프랭크 미첼
쉴라 해밀턴
Original Assignee
일리노이즈 툴 워크스 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 일리노이즈 툴 워크스 인코포레이티드 filed Critical 일리노이즈 툴 워크스 인코포레이티드
Publication of KR20170013942A publication Critical patent/KR20170013942A/ko
Application granted granted Critical
Publication of KR102218298B1 publication Critical patent/KR102218298B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • B08B1/007—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/10—Cleaning by methods involving the use of tools characterised by the type of cleaning tool
    • B08B1/14—Wipes; Absorbent members, e.g. swabs or sponges
    • B08B1/143—Wipes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/50—Cleaning by methods involving the use of tools involving cleaning of the cleaning members
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/50—Cleaning by methods involving the use of tools involving cleaning of the cleaning members
    • B08B1/54—Cleaning by methods involving the use of tools involving cleaning of the cleaning members using mechanical tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0028—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by adhesive surfaces
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1316—Methods for cleaning the liquid crystal cells, or components thereof, during manufacture: Materials therefor
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133528—Polarisers

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Cleaning In General (AREA)
KR1020167036843A 2014-06-05 2014-06-05 물체를 세정하기 위한 시스템 및 방법 Active KR102218298B1 (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US2014/041008 WO2015187161A1 (en) 2014-06-05 2014-06-05 System and method for cleaning an object

Publications (2)

Publication Number Publication Date
KR20170013942A KR20170013942A (ko) 2017-02-07
KR102218298B1 true KR102218298B1 (ko) 2021-02-23

Family

ID=51134326

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020167036843A Active KR102218298B1 (ko) 2014-06-05 2014-06-05 물체를 세정하기 위한 시스템 및 방법

Country Status (7)

Country Link
US (1) US10399128B2 (https=)
EP (1) EP3151981B1 (https=)
JP (1) JP6560258B2 (https=)
KR (1) KR102218298B1 (https=)
CN (1) CN106660078B (https=)
DK (1) DK3151981T3 (https=)
WO (1) WO2015187161A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109550718B (zh) * 2018-12-29 2022-01-11 大族激光科技产业集团股份有限公司 一种擦拭装置
US20240042499A1 (en) * 2020-12-11 2024-02-08 Illinois Tool Works Inc. System and method for cleaning an object
GB202019613D0 (en) * 2020-12-11 2021-01-27 Illinois Tool Works System and method for cleaning an object
CN116867579A (zh) * 2020-12-11 2023-10-10 伊利诺斯工具制品有限公司 用于清洁物体的系统和方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008168188A (ja) * 2007-01-10 2008-07-24 Mitsuma Giken Kk クリーニング装置
WO2012079713A1 (de) * 2010-12-16 2012-06-21 Karl W. Niemann Gmbh & Co. Kg Verfahren und vorrichtung zum kaschieren einer substratplatte mit einer kunststofffolie

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8519334D0 (en) 1985-07-31 1985-09-04 Teknek Electronics Ltd Treating sheet articles
JP2811820B2 (ja) * 1989-10-30 1998-10-15 株式会社ブリヂストン シート状物の連続表面処理方法及び装置
US6082292A (en) * 1999-01-05 2000-07-04 Wisconsin Alumni Research Foundation Sealing roller system for surface treatment gas reactors
ES2220711T3 (es) * 2000-02-11 2004-12-16 Dow Corning Ireland Limited Sistema de plasma a presion atmosferica.
JP4763165B2 (ja) * 2001-07-19 2011-08-31 ヒラノ光音株式会社 連続シート状材料の表面処理装置及びそのガスシール構造
FR2836157B1 (fr) * 2002-02-19 2004-04-09 Usinor Procede de nettoyage de la surface d'un materiau enduit d'une susbstance organique, generateur et dispositif de mise en oeuvre
US20040045578A1 (en) * 2002-05-03 2004-03-11 Jackson David P. Method and apparatus for selective treatment of a precision substrate surface
US7553440B2 (en) * 2005-05-12 2009-06-30 Leonard William K Method and apparatus for electric treatment of substrates
US20070154650A1 (en) * 2005-12-30 2007-07-05 Atomic Energy Council - Institute Of Nuclear Energy Research Method and apparatus for glow discharge plasma treatment of flexible material at atmospheric pressure
US20100105830A1 (en) * 2007-03-31 2010-04-29 Konica Minolta Opto, Inc. Method for producing optical film, optical film, polarizing plate and display
JP3142185U (ja) * 2008-03-25 2008-06-05 沛▲きん▼科技有限公司 押圧金型洗浄機
KR101296659B1 (ko) * 2008-11-14 2013-08-14 엘지디스플레이 주식회사 세정 장치
CN102224287B (zh) 2008-11-25 2013-03-27 3M创新有限公司 用于清洁柔性幅材的设备和方法
TWI483789B (zh) 2009-03-23 2015-05-11 Bando Chemical Ind Clean system
JP5455539B2 (ja) * 2009-10-13 2014-03-26 藤森工業株式会社 積層体の製造方法及び積層体、それを用いた包装容器
WO2011081440A2 (ko) * 2009-12-30 2011-07-07 성균관대학교산학협력단 그래핀 필름의 롤투롤 도핑 방법 및 도핑된 그래핀 필름
EP2590802B1 (en) * 2010-07-09 2014-07-02 Vito NV Method and device for atmospheric pressure plasma treatment
DE102010051668A1 (de) 2010-11-17 2012-05-24 Li-Tec Battery Gmbh Verfahren und System zur Reinigung von blatt- oder plattenförmigen Objekten
JP5626899B2 (ja) * 2011-05-17 2014-11-19 株式会社日立製作所 大気圧プラズマ処理装置
KR20130095119A (ko) * 2012-02-17 2013-08-27 김일욱 대기압 플라스마 발생 장치
CN202683514U (zh) 2012-06-11 2013-01-23 特新电子机械设备（东莞）有限公司 一种板面清洁机的除尘机构
US20140123854A1 (en) * 2012-11-05 2014-05-08 William K. Leonard Method and apparatus for electric treatment of substrates
US20150268383A1 (en) * 2013-03-15 2015-09-24 Triton Systems, Inc. Systems and methods for forming a large-scale motheye film coating on a substrate
US20160329193A1 (en) * 2015-05-05 2016-11-10 Eastman Kodak Company Atmospheric-pressure plasma treatment system

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008168188A (ja) * 2007-01-10 2008-07-24 Mitsuma Giken Kk クリーニング装置
WO2012079713A1 (de) * 2010-12-16 2012-06-21 Karl W. Niemann Gmbh & Co. Kg Verfahren und vorrichtung zum kaschieren einer substratplatte mit einer kunststofffolie

Also Published As

Publication number Publication date
CN106660078A (zh) 2017-05-10
CN106660078B (zh) 2021-01-29
KR20170013942A (ko) 2017-02-07
US10399128B2 (en) 2019-09-03
US20170113254A1 (en) 2017-04-27
EP3151981A1 (en) 2017-04-12
EP3151981B1 (en) 2021-11-17
DK3151981T3 (da) 2022-02-07
WO2015187161A1 (en) 2015-12-10
JP6560258B2 (ja) 2019-08-14
JP2017516651A (ja) 2017-06-22

Similar Documents

Publication Publication Date Title
KR102218298B1 (ko) 물체를 세정하기 위한 시스템 및 방법
JP5491518B2 (ja) 可撓性ウェブ洗浄用装置及び方法
KR102109357B1 (ko) 필름 클리닝 장치
CN102725076B (zh) 洁净装置
CN106313879B (zh) 转印设备和转印方法
CN102933323B (zh) 洁净系统
KR101071368B1 (ko) 클리닝장치 및 클리닝방법
CN107037688A (zh) 光掩模相关基板所使用的基板清洗装置以及基板清洗方法
US8961693B2 (en) Component supporting device
KR20170048136A (ko) 클리닝 헤드 및 청소 방법
JP2017516651A5 (https=)
KR200385609Y1 (ko) 압력 방폭 구조의 제전바가 장착된 제진장치
KR102160935B1 (ko) 반송 유닛 및 기판 처리 장치
KR100873149B1 (ko) 롤러 세정용 블레이드 어셈블리
JPH0750271B2 (ja) 液晶表示板のラビング方法
KR100766771B1 (ko) 초음파 장치를 구비한 플라즈마 장치 및 그 표면처리 방법
TWI420616B (zh) 基板清洗機台與基板清洗方法
KR102134441B1 (ko) 기판 처리 장치
KR20090069562A (ko) 기판 반송 장치
JP4860295B2 (ja) プラズマ処理方法
KR102006342B1 (ko) 러빙포 제전장치 및 이를 갖는 액정표시장치 제조용 러빙 시스템
JP2023142890A (ja) 除塵装置、成膜システムおよび膜付き基板製造方法
KR200319214Y1 (ko) 대형 평판 표시 패널의 세정장치
CN120122357A (zh) 一种液晶基板清洗设备及方法
KR101430668B1 (ko) 패널 클리닝 롤러 자동 교체장치

Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

R17-X000 Change to representative recorded

St.27 status event code: A-3-3-R10-R17-oth-X000

A201 Request for examination
PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

D13-X000 Search requested

St.27 status event code: A-1-2-D10-D13-srh-X000

D14-X000 Search report completed

St.27 status event code: A-1-2-D10-D14-srh-X000

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U12-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 5

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 6

U11 Full renewal or maintenance fee paid

Free format text: ST27 STATUS EVENT CODE: A-4-4-U10-U11-OTH-PR1001 (AS PROVIDED BY THE NATIONAL OFFICE)

Year of fee payment: 6