KR102216162B1 - 복수의 모듈을 독립적으로 이송할 수 있는 가스공급장치 - Google Patents

복수의 모듈을 독립적으로 이송할 수 있는 가스공급장치 Download PDF

Info

Publication number
KR102216162B1
KR102216162B1 KR1020200053765A KR20200053765A KR102216162B1 KR 102216162 B1 KR102216162 B1 KR 102216162B1 KR 1020200053765 A KR1020200053765 A KR 1020200053765A KR 20200053765 A KR20200053765 A KR 20200053765A KR 102216162 B1 KR102216162 B1 KR 102216162B1
Authority
KR
South Korea
Prior art keywords
module
valve
unit
valve opening
closing
Prior art date
Application number
KR1020200053765A
Other languages
English (en)
Korean (ko)
Inventor
박용건
이상욱
김용철
서철교
김상진
Original Assignee
주식회사 케이씨
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 케이씨 filed Critical 주식회사 케이씨
Priority to KR1020200053765A priority Critical patent/KR102216162B1/ko
Priority to CN202010884935.6A priority patent/CN113623540B/zh
Priority to TW109131964A priority patent/TWI777242B/zh
Priority to KR1020210006912A priority patent/KR102341096B1/ko
Priority to KR1020210006911A priority patent/KR102292289B1/ko
Application granted granted Critical
Publication of KR102216162B1 publication Critical patent/KR102216162B1/ko

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/08—Mounting arrangements for vessels
    • F17C13/084—Mounting arrangements for vessels for small-sized storage vessels, e.g. compressed gas cylinders or bottles, disposable gas vessels, vessels adapted for automotive use
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/04—Arrangement or mounting of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/002—Details of vessels or of the filling or discharging of vessels for vessels under pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C7/00—Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2201/00—Vessel construction, in particular geometry, arrangement or size
    • F17C2201/01—Shape
    • F17C2201/0104—Shape cylindrical
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2201/00—Vessel construction, in particular geometry, arrangement or size
    • F17C2201/05—Size
    • F17C2201/056—Small (<1 m3)
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0388—Arrangement of valves, regulators, filters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
    • F17C2223/0107—Single phase
    • F17C2223/0123—Single phase gaseous, e.g. CNG, GNC
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/05—Applications for industrial use
    • F17C2270/0518—Semiconductors

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Non-Mechanical Conveyors (AREA)
KR1020200053765A 2020-05-06 2020-05-06 복수의 모듈을 독립적으로 이송할 수 있는 가스공급장치 KR102216162B1 (ko)

Priority Applications (5)

Application Number Priority Date Filing Date Title
KR1020200053765A KR102216162B1 (ko) 2020-05-06 2020-05-06 복수의 모듈을 독립적으로 이송할 수 있는 가스공급장치
CN202010884935.6A CN113623540B (zh) 2020-05-06 2020-08-28 能够独立地移送多个模块的气体供应装置
TW109131964A TWI777242B (zh) 2020-05-06 2020-09-16 能夠獨立地移送多個模塊的氣體供應裝置
KR1020210006912A KR102341096B1 (ko) 2020-05-06 2021-01-18 복수의 모듈을 독립적으로 이송할 수 있는 가스공급장치
KR1020210006911A KR102292289B1 (ko) 2020-05-06 2021-01-18 복수의 모듈을 독립적으로 이송할 수 있는 가스공급장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020200053765A KR102216162B1 (ko) 2020-05-06 2020-05-06 복수의 모듈을 독립적으로 이송할 수 있는 가스공급장치

Related Child Applications (2)

Application Number Title Priority Date Filing Date
KR1020210006911A Division KR102292289B1 (ko) 2020-05-06 2021-01-18 복수의 모듈을 독립적으로 이송할 수 있는 가스공급장치
KR1020210006912A Division KR102341096B1 (ko) 2020-05-06 2021-01-18 복수의 모듈을 독립적으로 이송할 수 있는 가스공급장치

Publications (1)

Publication Number Publication Date
KR102216162B1 true KR102216162B1 (ko) 2021-02-16

Family

ID=74687071

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020200053765A KR102216162B1 (ko) 2020-05-06 2020-05-06 복수의 모듈을 독립적으로 이송할 수 있는 가스공급장치
KR1020210006911A KR102292289B1 (ko) 2020-05-06 2021-01-18 복수의 모듈을 독립적으로 이송할 수 있는 가스공급장치

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020210006911A KR102292289B1 (ko) 2020-05-06 2021-01-18 복수의 모듈을 독립적으로 이송할 수 있는 가스공급장치

Country Status (3)

Country Link
KR (2) KR102216162B1 (zh)
CN (1) CN113623540B (zh)
TW (1) TWI777242B (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102599731B1 (ko) * 2021-10-20 2023-11-08 주식회사 케이씨 가스공급장치의 커넥터 플러그 체결 장치 및 방법

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190014463A (ko) * 2017-08-02 2019-02-12 에이엠티 주식회사 가스통 밸브 자동 개폐장치 및 그 방법
KR102049326B1 (ko) * 2018-07-20 2019-11-27 주식회사 케이씨 커넥터 체결장치
KR20200011682A (ko) * 2018-07-25 2020-02-04 주식회사 케이씨 밸브 개폐장치

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2520224B2 (ja) * 1993-12-27 1996-07-31 明光産業株式会社 Ｌｐガス充填装置
JPH0814497A (ja) * 1994-06-30 1996-01-16 Yahata Denki Seiko Kk ガス充填装置
WO2016183221A1 (en) * 2015-05-12 2016-11-17 Entegris, Inc. Valve assemblies and fluid storage and dispensing packages comprising same
KR102040713B1 (ko) * 2017-10-11 2019-11-27 에이엠티 주식회사 고압가스통 자동교체시스템 및 그 방법
KR101980045B1 (ko) * 2018-07-03 2019-05-17 주식회사 유니락 가스 실린더 자동 결합 시스템 및 방법
CN208871332U (zh) * 2018-09-26 2019-05-17 李涛 一种液化气钢瓶自动开关手轮装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190014463A (ko) * 2017-08-02 2019-02-12 에이엠티 주식회사 가스통 밸브 자동 개폐장치 및 그 방법
KR102049326B1 (ko) * 2018-07-20 2019-11-27 주식회사 케이씨 커넥터 체결장치
KR20200011682A (ko) * 2018-07-25 2020-02-04 주식회사 케이씨 밸브 개폐장치

Also Published As

Publication number Publication date
KR102292289B1 (ko) 2021-08-24
TWI777242B (zh) 2022-09-11
CN113623540A (zh) 2021-11-09
TW202142804A (zh) 2021-11-16
CN113623540B (zh) 2023-07-07

Similar Documents

Publication Publication Date Title
KR102241538B1 (ko) 가스공급장치와 개스킷 교체 방법
KR102216162B1 (ko) 복수의 모듈을 독립적으로 이송할 수 있는 가스공급장치
KR101475420B1 (ko) 캐리어 가스 시스템 및 기판 캐리어와 로드포트의 연결
US8297319B2 (en) Carrier gas system and coupling substrate carrier to a loadport
KR102398266B1 (ko) 얼라인 기능이 구비된 가스공급장치
US8083057B2 (en) Screw feeder having a magazine for holding a screw head
KR102513311B1 (ko) 복수의 모듈을 독립적으로 이송할 수 있는 가스공급장치
KR102337062B1 (ko) 얼라인 기능이 구비된 가스공급장치 및 얼라인 방법
KR102233471B1 (ko) 가스공급장치
KR102341096B1 (ko) 복수의 모듈을 독립적으로 이송할 수 있는 가스공급장치
US9457956B2 (en) Drawer device and storage device
CA3228225A1 (en) Hangar and assembly for replacing a battery from an aircraftft
US20100117391A1 (en) Transporting apparatus
KR101705656B1 (ko) 어레이 도파로 격자 모듈 자동조립장치
KR102233470B1 (ko) 커넥터 이송부를 구비한 가스공급장치 및 가스공급장치의 커넥터 결합방법
KR102353914B1 (ko) 개스킷 공급모듈 및 가스공급장치
CN220354844U (zh) 样本处理装置
KR102233472B1 (ko) 가스공급장치
JPH0732485Y2 (ja) 搬送装置
CN114179935A (zh) 移动机器人、移动车体及转运支架

Legal Events

Date Code Title Description
A107 Divisional application of patent
E701 Decision to grant or registration of patent right
GRNT Written decision to grant