KR102216162B1 - Gas supply apparatus capable of independently moving a plurality of modules - Google Patents

Abstract

The present invention aims to provide a gas supply apparatus capable of independently moving a plurality of modules, thereby making the transferred module lighter and making it possible to minutely control their positions when aligning containers. To this end, according to the present invention, the gas supply apparatus comprises: an upper module which includes an upper plate installed to be fixed at a position apart upward from a valve unit placed on an upper end of a container; a lower module which includes a cover separation unit which separates a cover on a valve connector placed on the valve unit, and a connector fastening unit for connecting a connecting pipe connector connected to a gas consumer to the valve connector; a valve opening/closing module for opening/closing a valve of the valve unit; a first vertical transfer unit which is placed to transfer the lower module vertically toward the upper module; and a second vertical transfer unit which is placed to transfer the valve opening/closing module vertically toward the upper module independently from the vertical transfer of the lower module.

Description

Gas supply apparatus capable of independently moving a plurality of modules.

The present invention relates to a gas supply device capable of independently transporting a plurality of modules, and more particularly, a gas capable of fine adjustment when aligning a container by allowing a plurality of modules to be transported independently It relates to the supply device.

In general, in the case of a device using gas, in particular, a device that supplies gas to a gas source where precise work is performed, such as semiconductor equipment, it is required that a gas of a kind suitable for each purpose satisfies a certain concentration and pressure.

In order to provide this efficiently, many types of gases are stored under high pressure. In particular, gases having harmful properties such as flammability, toxicity, and corrosiveness are strictly managed in a separate space where humans are blocked.

The gas storage container (hereinafter abbreviated as'container') that stores gas is connected to the gas source, and when all the gas stored in the container is consumed, the connection pipe connected to the gas source is separated from the valve of the gas container. After the container is replaced, gas is supplied again by connecting the connection pipe connector connected to the gas source to the valve connector of the replaced container.

In the case of replacing the container in this way, the operator must place the container in the correct position of the container loading part, but if an automated device for placing the container in the correct position is not provided, it is difficult for the operator to place the gas container in the correct position. have.

Of course, if the automatic device is provided, it is possible to place the container in the correct position, but there is a problem in that the configuration of the device is complicated and the manufacturing cost is high.

In addition, in order to connect the connection pipe connector to the valve of the container, the container must be aligned in the correct position. A method of manually moving a device by an operator for such alignment is known. However, since the device is large and heavy, there is a problem that it is difficult for an operator to manually move it, and there is a problem in that it is difficult to perform fine alignment.

As a prior art for a gas supply device for semiconductor equipment, Korean Patent Registration No. 10-0242982 has been disclosed.

The present invention was conceived to solve the above-described problems, and it is intended to provide a gas supply device capable of fine-tuning when aligning containers because the weight of the modules to be transferred is light by allowing a plurality of modules to be transferred independently. There is a purpose.

Another object of the present invention is to provide a gas supply device that can be easily aligned by an operator by allowing a plurality of modules to be transported independently.

Another object of the present invention is to provide a gas supply device capable of lifting and lowering in a vertical direction and preventing damage of an alignment portion by allowing alignment during horizontal transfer.

Another object of the present invention is to provide a gas supply device that enables more accurate alignment by allowing the alignment unit to rotate during horizontal transfer.

Another object of the present invention is to provide a gas supply device capable of maintaining a state in which the upper module and the lower module are rigidly coupled to the fixing block provided on the container side.

Another object of the present invention is to provide a gas supply device capable of preventing damage when a cover and a cover separation unit are combined.

The gas supply device of the present invention for achieving the above object comprises: an upper module including an upper plate installed to be fixed at a position spaced upward from a valve portion provided at an upper end of the container; A lower module having a cover separating unit for separating a cover covering the valve connector provided in the valve unit, and a connector fastening unit for connecting a connection pipe connector connected to a gas consumption destination to the valve connector; A valve opening/closing module for opening and closing a valve of the valve part; A first vertical transfer unit provided to allow the lower module to be transferred in a vertical direction with respect to the upper module; The valve opening/closing module includes a second vertical transfer unit provided to be transferred in a vertical direction with respect to the upper module independently of the vertical transfer of the lower module.

The first vertical transfer unit is provided in the upper module and includes a first vertical transfer guide for guiding the vertical transfer of the lower module; The second vertical transfer unit may include a second vertical transfer guide provided in the upper module to guide the valve opening/closing module to be transferred in a vertical direction with respect to the upper module.

A valve opening/closing module transfer means for generating a driving force for transferring the valve opening/closing module in a vertical direction with respect to the upper module may be provided.

The upper module includes a lower plate coupled to an upper portion of a horizontal transfer guide for transporting the lower module in a horizontal direction with respect to the upper module, and a second vertical transfer guide coupled to a bottom surface of the lower plate to have a length in a vertical direction. Including a bonding plate; The valve opening/closing module is installed to face the second vertical conveying guide engaging plate so that the second vertical conveying guide is provided between the second vertical conveying guide engaging plate, and vertically with the valve opening and closing module. It may include a second vertical transfer guide support member to be transferred.

The valve opening/closing module includes: a second vertical transfer guide supporting member coupled to the second vertical transfer guide and formed in a length in a vertical direction; A first horizontal plate coupled to the second vertical transfer guide support member to be vertically formed to have a length in a horizontal direction; A valve opening/closing module main body coupled to the lower portion of the first horizontal plate and including a handle coupling portion into which a handle for opening and closing a valve of the valve portion is inserted.

The valve opening/closing module may include a valve opening/closing module main body including a handle coupling portion into which a handle for opening and closing a valve of the valve portion is inserted; It may include a first horizontal plate that is transported in a vertical direction by the second vertical transfer guide together with the valve opening/closing module body, and provided to allow relative rotation of the valve opening/closing module body.

The valve opening/closing module includes: a second horizontal plate provided under the first horizontal plate; The first horizontal plate and the second horizontal plate are coupled, and a coupling strength adjusting unit capable of adjusting the strength of the coupling; and, when the coupling strength is increased by the coupling strength adjusting unit, the valve opening/closing module body is If the relative rotation is not performed with respect to the first horizontal plate and the coupling strength is weakened by the coupling strength adjusting unit, the valve opening/closing module main body may rotate relative to the first horizontal plate.

The coupling strength adjustment unit may include a shaft member having a screw portion screwed to the first horizontal plate and passing through the second horizontal plate vertically; It may be formed integrally with the lower end of the shaft member and formed of a handle portion formed to rotate the shaft member.

The valve opening/closing module may include a second horizontal plate provided under the first horizontal plate, having an arc-shaped guide hole, and coupled to the valve opening/closing module body; A shaft member coupled to the first horizontal plate and inserted into the guide hole, and rotating the valve opening/closing module main body and the second horizontal plate, the shaft member may be moved within the guide hole.

A plurality of plates provided in the upper module; One side of the valve opening/closing module may be coupled to the second vertical transfer guide, and the other side of the valve opening/closing module may be provided with a coupling/separating part to be coupled to or separated from any one of the plurality of plates.

Any one of the plurality of plates is provided with a locking portion to which the coupling and separating portion is coupled; The engaging and separating unit may include a locking member that is engaged by being engaged with the locking portion or is separated by releasing the locking.

The valve opening/closing module may include a valve opening/closing module main body including a handle coupling portion into which a handle for opening and closing a valve of the valve portion is inserted; And a first horizontal plate that is transported in a vertical direction by the second vertical transfer guide together with the valve opening/closing module body, and provided to allow relative rotation of the valve opening/closing module body, wherein the coupling and separating part comprises: 1 further comprising a coupling unit body coupled to the horizontal plate, and a pin coupled to the coupling unit body; The locking member may be locked or released from the locking portion by rotating about the pin.

The upper module may be provided with a horizontal transfer guide for transferring the lower module in a horizontal direction.

The horizontal transfer guide includes: a first horizontal transfer guide provided to guide the lower module to be transferred in a first direction in any one of horizontal directions; A second horizontal transfer guide for guiding the lower module to be transferred in a second direction perpendicular to the first direction among horizontal directions.

In the upper module, an upper plate, an intermediate plate, and a lower plate are provided to be spaced apart from each other from top to bottom; The first horizontal transfer guide is provided between the upper plate and the intermediate plate; The second horizontal transfer guide may be provided between the intermediate plate and the lower plate.

The lower module may include a second alignment unit for aligning with the container by coupling with a first alignment unit provided in the valve unit.

When the covers are positioned to face each other without being inserted into the cover separating portion, a portion of the first alignment portion and the second alignment portion may be coupled to each other during the alignment.

One of the first alignment portion and the second alignment portion may be formed of a pin-shaped alignment pin having a length in a horizontal direction, and the other may be formed of an alignment pin insertion groove into which the alignment pin is inserted.

The first alignment unit is provided on a fixed block coupled to the valve unit; A second coupling portion for coupling to a first coupling portion provided adjacent to the first alignment portion in the fixed block is provided adjacent to the second alignment portion in the lower module; When the second alignment unit is transferred in the direction of the first alignment unit and the first alignment unit and the second alignment unit are partially engaged and completely engaged, the first and second alignment units are combined and the A combined state of the fixing block and the lower module may be maintained.

According to the present invention, by allowing a plurality of modules to be transported independently, the weight of the transported modules is light, so that fine control during alignment of containers is possible.

In addition, by allowing a plurality of modules to be transported independently, the operator can easily align.

In addition, since the valve opening and closing portions can be independently rotated in the horizontal direction, it is possible to facilitate the combination of the valve opening and closing portions and the handle.

In addition, it is possible to prevent the alignment portion from being damaged by allowing the lower module to move up and down in the vertical direction and to be aligned during horizontal transfer.

In addition, alignment can be made more accurately by allowing the lower module to rotate with respect to the upper module.

In addition, even if the operator does not place the container in the correct position of the container loading unit, the container can be accurately aligned, so the operation becomes convenient.

In addition, it is possible to maintain a state in which the upper module and the lower module are firmly coupled to the fixing block provided on the container side.

In addition, it is possible to prevent damage when the cover and the cover separation unit are combined.

1(a) and (b) are perspective views showing the gas supply device of the present invention from one side and the other side
2 is a perspective view showing a state in which a fixing block is coupled to a valve part of a container in the gas supply device of the present invention
3 is a perspective view showing an upper module and a valve opening/closing module of the gas supply device of the present invention
4 is a perspective view showing an upper module and a valve opening/closing module of the gas supply device of the present invention in a different direction from FIG.
5 is a perspective view showing a state in which the upper plate is removed from the upper module and the valve opening/closing module of the gas supply device of the present invention
6 is a perspective view of an upper module and a valve opening/closing module of the gas supply device of the present invention as viewed from below
7 is a perspective view showing a lower module of the gas supply device of the present invention
8 is a view showing a bottom plate, a fixing pin, and a guide pin in the upper module of the gas supply device of the present invention
9 is a side view showing the gas supply device of the present invention from the side
10 is a view showing a cross-sectional structure of an upper module of the gas supply device of the present invention
FIG. 11 is a view showing a plurality of plates constituting an upper module and a plurality of plates constituting a valve opening/closing module in the gas supply apparatus of the present invention, and a coupling separation unit
12 is a view showing a plurality of plates constituting an upper module and a plurality of plates constituting a valve opening/closing module in the gas supply device of the present invention
13 is a plan view showing a state in which a first alignment unit and a second alignment unit are positioned to face each other in the gas supply device of the present invention
FIG. 14 is a plan view showing a state in which the lower module is moved forward in the state of FIG. 13 so that the first and second alignment parts are partially combined
FIG. 15 is a plan view showing a state in which the first alignment unit and the second alignment unit are completely coupled by further moving the lower module in the state of FIG. 14
16 is a side view showing a state in which the valve opening/closing module is moved downward in the gas supply device of the present invention
FIG. 17 is a plan view showing a state in which the cover separation part is separated from the valve connector in the state of FIG. 15, and the cover separation part and the connector fastening part are integrally transferred in the Y direction so that the connector fastening part is positioned to face the valve connector.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

Herein, referring to the direction, the X-axis illustrated in FIG. 1 is referred to as a front-rear direction, a Y-axis is referred to as a left-right direction, and a Z-axis is referred to as a vertical direction. In addition, the horizontal direction includes the left and right directions and the front and rear directions formed by the XY plane.

Referring to FIG. 1, a gas supply device 1 capable of independently transporting a plurality of modules of the present invention is an upper plate installed to be fixed at a position spaced upward from a valve portion provided at an upper end of the container 10 An upper module 2 including 211, a cover provided below the upper module 2 and separating a cover 31 (FIG. 2) covering the valve connector 30 (FIG. 2) provided in the valve part A lower module (Fig. 7) having a connector fastening unit 330 (Fig. 7) for connecting the separation unit 320 (Fig. 7) and the connection pipe connector 331 (Fig. 7) connected to the gas consumption destination to the valve connector 30 ( 3), a valve opening/closing module 4 for opening and closing a valve of the valve unit, and a first vertical transfer unit 241 and 242 provided so that the lower module 3 can be transferred in a vertical direction with respect to the upper module 2; 3), the valve opening and closing module 4 is made of a second vertical transfer unit provided to be able to transfer in a vertical direction with respect to the upper module 2 independently of the vertical transfer of the lower module (3).

Referring to FIG. 2, the container 10 is configured to store and supply process gas supplied to a gas source such as a semiconductor device, and the valve portion is provided on the upper portion of the container 10.

The valve part includes a valve (not shown) for controlling the supply of gas, a valve connector 30 provided on one side of the valve and fastened to a connector fastening part 330 of the lower module 3, and the valve connector A cover 31 covering 30, a valve shutter (not shown) for opening and closing the valve, and a handle 50 for opening and closing the valve by raising and lowering the valve shutter as it is connected to the upper portion of the valve shutter and rotated. It consists of including.

Fixing blocks 510, 520, and 530 are coupled to the valve part. The first alignment unit 512 is provided in the fixed blocks 510, 520, and 530.

The fixing blocks 510, 520, and 530 may include a first fixing block 510, a second fixing block 520, and a third fixing block 530 surrounding the valve part.

When the valve part is wrapped by the coupling of the second fixing block 520 and the third fixing block 530, the valve connector 30 and the cover 31 among the valve parts are separated from the fixing blocks 520 and 530. It is exposed by protruding in the lateral direction, and the handle 50 of the valve part is exposed by protruding upward with respect to the fixing blocks 520 and 530.

The first fixing block 510 has a rectangular cylindrical shape having a length in the Y-axis direction, the second fixing block 520 is coupled to one side of the Y-axis direction, and the second fixing block 520 is coupled to one side of the X-axis direction. A first alignment unit 512 is provided.

The first alignment part 512 may be formed of an alignment pin insertion groove 512 concavely formed on one side of the X-axis direction.

The lower module 3 is capable of being transported in a horizontal direction with respect to the upper module 2 and at the same time being capable of elevating and descending in a vertical direction.

The first alignment unit 512 is aligned with the second alignment unit 351 (FIG. 8) provided in the lower module 3 when the lower module 3 is transported in the horizontal direction. It is supposed to be lost.

Referring to FIG. 7, the second alignment unit 351 protrudes in the X-axis direction, which is a direction facing the alignment pin insertion groove 512 in the alignment block 350 of the lower module 3 to be described later. It may be made of an alignment pin 351 having a length in the horizontal direction.

Alignment of the container 10 is achieved by allowing the alignment pin 351 to be inserted into the alignment pin insertion groove 512.

In this embodiment, although the first alignment unit 512 is made of an alignment pin insertion groove and the second alignment unit 351 is made of an alignment pin, the first alignment unit is composed of alignment pins, The second alignment portion may be configured as an alignment pin insertion groove.

In addition, in the present embodiment, the alignment pin is exemplified as being inserted into the alignment pin insertion groove, but the embodiment is not limited thereto, and the first alignment unit and the second alignment unit may be fastened or coupled. The method in which the first alignment unit and the second alignment unit are inserted, fastened, and coupled are collectively defined as'combination'.

The first fixing block 510 is provided with a first coupling portion 511 at a position adjacent to the first alignment portion 512, and a second coupling portion coupled to the first coupling portion 511 ( 352 is provided in the alignment block 350 of the lower module 3.

The first coupling part 511 may be formed of a fixing groove 511 formed concave in the X-axis direction on the same surface as the surface on which the first alignment part 512 is formed in the first fixing block 510.

The second coupling portion 352 may be formed of a fixed block coupling member 352 protruding toward the first coupling portion 511 from an alignment block 350 located adjacent to the second alignment portion 351. have.

A plurality of protrusions 352a are provided on the outer surface of the fixing block coupling member 352, and the plurality of protrusions 352a are elastically supported by a spring (not shown) provided therein. A protrusion insertion groove (not shown) into which the protrusion 352a is inserted is formed in the fixing groove 511. When the fixing block coupling member 352 is inserted into the fixing groove 511, the projection 352a is inserted into the projection insertion groove, so that the fixing block coupling member 352 is removed from the fixing groove 511. This is prevented, so that the lower module 3 can maintain a state coupled to the first fixing block 510.

When the fixing block coupling member 352 is removed from the fixing groove 511, air is supplied so that the protrusion 352a overcomes the elastic force of the spring and moves from the surface of the fixing block coupling member 352 to the inside. When it enters, the protrusion 352a comes out from the protrusion insertion groove. Accordingly, the fixing block coupling member 352 can be removed from the fixing groove 511.

3 to 6, the upper module 2 includes an upper plate 211, an intermediate plate 212, a lower plate 213, a first horizontal transfer guide 220, and a second horizontal transfer guide ( 230), first vertical transfer units 241 and 242 are provided.

The upper plate 211 is formed in a flat plate shape, and is coupled to a fixed object such as a cabinet not shown.

The intermediate plate 212 is also formed in a flat plate shape, and has a stepped shape such that the intermediate portion is high, and is provided to be spaced apart from the lower portion of the upper plate 211.

The lower plate 213 is also formed in a flat plate shape, and is provided to be spaced apart from the lower portion of the intermediate plate 212.

The first horizontal transfer guide 220 is provided between the upper plate 211 and the intermediate plate 212, and the intermediate plate 212 and the second horizontal transfer guide 230 and the lower plate 213 are provided. 1 All parts connected to the lower part of the intermediate plate 212 including the vertical transfer parts 241 and 242, the lower module 3 and the valve opening/closing module 4 are transferred in the horizontal Y-axis direction (first direction). It can be made of a guiding LM guide.

The second horizontal transfer guide 230 is provided between the intermediate plate 212 and the lower plate 213, and the lower plate 213 and the first vertical transfer parts 241 and 242, the lower module 3 and the valve It may consist of an LM guide that guides all parts connected to the lower part of the lower plate 213 including the opening/closing module 4 to be transported in the X-axis direction (second direction) orthogonal to the Y-axis as a horizontal direction.

A pair of transfer guide coupling plates 243 and 244 are coupled to the lower plate 213 on both sides in the Y-axis direction, and a pair of transfer guides are supported at a position spaced from the pair of transfer guide coupling plates 243 and 244. Members 251 and 252 are provided.

The pair of transfer guide coupling plates 243 and 244 are provided on one side and the other side of the lower plate 213 to face each other, and have a plate shape having a length in the vertical direction.

The transfer guide support member 251 on one side and the transfer guide support member 252 on the other side are formed in a rectangular plate shape having a length in the vertical direction, and the transfer guide coupling plate 243 on the one side and the transfer guide on the other side It is provided spaced apart from the coupling plate 244 to the outside in the Y-axis direction, respectively.

A first vertical transfer part (241, 242) is provided between the transfer guide coupling plate 243 on the one side and the transfer guide support member 251, and between the transfer guide coupling plate 244 and the transfer guide support member 252 on the other side, respectively. It is equipped.

Above one side At the lower end of the transfer guide support member 251 and the transfer guide support member 252 on the other side, one side and the other side of a rectangular bottom plate 253 having a length in the Y-axis direction are respectively coupled. The lower module 3 is coupled to the lower part of the floor plate 253.

The first vertical transfer units 241 and 242 may be formed of a first vertical transfer guide for guiding a linear transfer in a vertical direction. The first vertical transfer guides 241 and 242 integrally transfer the pair of transfer guide support members 251 and 252 and the floor plate 253 and the lower module 3 coupled to the floor plate 253 in a vertical direction. It can be made of a guiding LM guide.

A driving means is not connected to the first horizontal transfer guide 220, the second horizontal transfer guide 230, and the first vertical transfer guides 241 and 242, but only functions as a guide so that an operator can manually transfer. That is, when the operator holds the lower module 3 with his hand and applies a force in the X-axis, Y-axis, and Z-axis directions, the lower module 3 is transported along the respective transfer guides in the direction in which the force is applied. In this case, when transferring in the X-axis and Y-axis directions, the valve opening/closing module 4 is transferred together with the lower module 3, but when transferring in the Z-axis direction, only the lower module 3 is the first vertical transfer guide ( 241,242) while being guided.

The first horizontal transfer guide 220 and the first vertical transfer guides 241 and 242 may be provided with a braking unit that functions as a brake.

When guided by the first horizontal transfer guide 220 and transferred in the first direction, a horizontal braking part 225 may be provided that performs a brake function for maintaining a stopped state at a specific position.

When the first vertical transfer guides 241 and 242 are transported in a vertical direction, a vertical braking unit 260 may be provided that performs a brake function for maintaining a stopped state at a specific position.

The horizontal braking part 225 and the vertical braking part 260 maintain braking force while holding the rail of the LM guide with a pressing force of a spring (not shown), and supply air to prevent the spring. It can be configured that the braking force is released when the pressing force is removed from the rail.

A switch box 270 for applying operation signals of the horizontal braking unit 225 and the vertical braking unit 260 may be provided.

The switch box 270 includes a first switch 271 for applying and releasing the braking force of the horizontal braking part 225 and the vertical braking part 260, a connector fastening part 330 and a cover separating part ( A second switch 272 for rotating and stopping the 320) is provided. The first switch 271 and the second switch 272 may be configured in such a manner that an operator operates by hand, or may be configured in a manner such as a solenoid valve to be turned on/off without manually operating.

When the operator presses the first switch 271 of the switch box 270, the braking force of the horizontal braking unit 225 and the vertical braking unit 260 is released by supply of air. The lower module 3 is guided by the first and third transfer guides 220 and 241 and 242 so that they can move freely in the Y-axis and Z-axis directions. The momentary switch when the operator releases the first switch 271 and the operation of the switch is released is automatically restored by the force of the spring, and the braking force of the horizontal braking part 225 and the vertical braking part 260 is applied. The lower module 3 can be kept fixed without moving.

The second switch 272 may be formed as a toggle switch. The second switch 272 is provided to rotate the connector fastening portion 330 and the cover separating portion 320 in a forward direction or in a reverse direction.

The upper part of the lower module 3 and the lower part of the upper module 2 are coupled by a fixing pin, and at least one guide pin is coupled to one of the lower module 3 and the upper module 2, and the rest One may be configured such that the guide pin is inserted so that the guide pin insertion hole is formed so that the lower module 3 can rotate the fixing pin about a rotational center. An example of such a configuration will be described with reference to FIG. 8.

Referring to FIG. 8, a fixing pin insertion hole (not shown) into which the fixing pin 254 is inserted is formed in the center of the bottom plate 253, and a pair of guide pins are provided at both sides of the fixing pin insertion hole. Insertion holes 253a and 253b are formed.

The guide pin insertion holes 253a and 253b may be formed as long holes having a length in the X-axis direction. A pair of guide pins 255 and 256 are respectively inserted into the pair of guide pin insertion holes 253a and 253b.

The head of the fixing pin 254 and the guide pins 255 and 256 is exposed to the top of the bottom plate 253, the body is inserted into the fixing pin insertion hole and the guide pin insertion hole 253a, 253b, respectively, and the lower part It is screwed to the upper housing 311 of the lower module 3 to be described later. Since the fixing pin 254 is inserted through the fixing pin insertion hole, it is possible to rotate relative to the bottom plate 253.

Each of the guide pin insertion holes 253a and 253b is made of a long hole, so that the guide pins 255 and 256 are movable along the longitudinal direction of the guide pin insertion holes 253a and 253b. Further, the guide pin insertion holes 253a and 253b may be formed in an arc shape so that the guide pins 255 and 256 rotate around the fixing pin 254.

When configured in this way, the lower module 3 can rotate in a horizontal direction with respect to the upper module 2. That is, when the operator applies a force in the direction in which the lower module 3 is to be rotated, the lower module 3 rotates with the fixing pin 254 as a rotation center. In this case, the guide pins 255 and 256 are guided within the guide pin insertion holes 253a and 253b, and the rotation angle is limited by the length of the guide pin insertion holes 253a and 253b.

In this way, the lower module 3 is rotated in a horizontal direction with respect to the upper module 3, and at the same time, the first horizontal transfer guide 220, the second horizontal transfer guide 230, and the first vertical transfer guides 241,242 ), it is possible to move linearly in the X-axis, Y-axis, and Z-axis directions, so that the operator can easily align and accurate alignment is possible, so that the first and second alignment units collide during alignment. Can be prevented.

The lower module 3 will be described with reference to FIG. 7.

In the lower module 3, a plurality of housings 311, 312, 313, 314, a cover separation part 320, a connector fastening part 330, a connector fastening part transfer means 340, an alignment block 350, and a plug module 360 And a gasket supply unit 370 is provided.

The plurality of housings 311, 312, 313, and 314 may include an upper housing 311 provided in a plate shape on an upper portion of the lower module 3, and a first side housing 312 coupled to both sides of the upper housing 311 in the Y-axis direction, respectively. ), a second side housing 313, and a lower housing 314 spaced downward from the upper housing 311 and coupled to both sides of the first side housing 312 and the second side housing 313.

The fixing pin 254 of the upper module 2 and the lower ends of the guide pins 255 and 256 are coupled to the upper housing 311. The upper housing 311, the first and second side housings 312 and 313, and the lower housing 314 are provided to surround the upper, lower, and both sides of the lower module 3 except for the front and rear sides.

The cover separating part 320 separates the cover 31 covering the valve connector 30 provided in the valve part from the valve connector 30.

The cover separation unit 320 has a groove formed so that the cover 31 is inserted therein, and a rotating means (not shown) in a state in which the cover 31 is inserted into the groove of the cover separation unit 320 When the cover separation part 320 is rotated by driving, the cover 31 is separated from the valve connector 30. Conversely, the cover 31 separated from the cover separating part 320 may be coupled to the valve connector 30 by driving the rotating means.

The connector fastening part 330 is provided to connect a connection pipe connector 331 connected to a gas demand destination to the valve connector 30. When the valve 20 is opened while the connector fastening part 330 and the valve connector 30 are connected, the gas inside the container 10 passes through the valve connector 30 and the connection pipe connector 331. Is supplied to.

The connector fastening part transfer means 340 integrally transfers the cover separation part 320 and the connector fastening part 330 in the left and right directions (Y-axis direction) and the front-rear direction (X-axis direction). The connector fastening part transfer means 340 includes a first transfer means for integrally transferring the cover separation part 320 and the connector fastening part 330 in the front-rear direction, and the cover separation part 320 and the connector fastening. It may be made of a second transfer means for transferring the unit 330 in the horizontal direction integrally.

The first transfer means may include a transfer guide for transferring along the front-rear direction and an air cylinder for applying a transfer force by supply of air. In addition, the second transfer means may include a transfer guide for transferring along the left-right direction and an air cylinder for applying a transfer force by supply of air.

The rotating means rotates the cover separating part 320 and the connector fastening part 330. The rotation means includes a motor and a speed reducer for generating rotational force, and includes a rotation transmission member for transmitting the rotational force to the cover separation unit 320 and the connector fastening unit 330.

The rotation transmission member transmits the rotational force to the cover separation unit 320 and the connector fastening unit 330, respectively, and when the motor is driven, the cover separation unit 320 and the connector fastening unit 330 rotate at the same time. . Alternatively, the rotating means 380 may include two motors, and the cover separating portion 320 and the connector fastening portion 330 may be respectively rotated using the two motors.

A control unit for controlling the entire gas supply device of the present invention is provided, including the valve opening/closing part transfer means, the connector fastening part transfer means 340 and the rotation means.

In order to install the cover separating part 320 and the connector fastening part 330, an inner housing 315 may be provided that has front and rear open and surrounds the left and right sides and upper and lower sides. The inner housing 315 may be coupled to an upper portion of the lower housing 314.

The alignment block 350 is coupled to protrude from the front end of the inner housing 315, and has a substantially polyhedral shape. An alignment pin 351, which is a second alignment portion 351, is formed on a front surface of the alignment block 350 in a shape protruding toward the valve portion, and a side portion of the alignment pin 351 The fixing block coupling member 352, which is the two coupling portion 352, is formed in a shape protruding toward the valve portion.

The plug module 360 is coupled to the connector fastening part 330 to prevent foreign substances from flowing into the connector fastening part 330 when the valve connector 30 and the connector fastening part 330 are not fastened. A plug 361, a plug support member 362 for supporting an end of the plug 361, a plug support housing 363 in which the plug support member 362 is coupled and supported, the plug 361 and the plug A plug transfer guide 364 for integrally transferring the support member 362 and the plug support housing 363 in the front-rear direction, and the plug transfer guide 364 are coupled and supported and coupled to the first side housing 312 It comprises a plug module support 316.

The gasket supply unit 370 is for attaching a new gasket to the connection pipe connector 331 when the container 10 is replaced, and accommodates a gasket holder (not shown) for holding a gasket (not shown) and a plurality of gaskets. A gasket receiving portion (not shown), and a gasket conveying means for transferring the gasket accommodated in the gasket receiving portion to the connection pipe connector 331. The gasket transfer means is provided to reciprocate along the Y-axis direction while the gasket is held by the gasket holder.

The valve opening/closing module 4 will be described with reference to FIGS. 6 and 9 to 12.

The valve opening/closing module 4 is configured to open and close a valve of the valve part by rotating a handle 50 provided at an upper end of the valve part.

The valve opening/closing module 4 includes a handle coupling portion 410 into which the handle 50 is inserted into the inner space 411, a handle driving portion 420 providing a driving force for rotating the handle coupling portion 410, It includes a valve opening/closing module body 401 including the handle coupling part 410.

Inside the handle engaging portion 410, a plurality of handle engaging portions 412 are formed to protrude inward to correspond to the shape of the handle 50 and engage with the handle to rotate integrally. When the handle 50 is inserted into the inner space 411 and the handle driving unit 420 is driven, the handle 50 rotates to open and close the valve of the valve unit.

The valve opening/closing module 4 can be transferred in a vertical direction with respect to the upper module 2 independently of the vertical transfer of the lower module 3 by the second vertical transfer unit. To this end, the second vertical transfer unit is provided in the upper module 2 to guide the valve opening/closing module 4 in a vertical direction with respect to the upper module 2. ). The second vertical transfer guide 430 may be formed of an LM guide including an LM rail having a length in a vertical direction and an LM block.

In this case, the second vertical transfer unit may be configured to be manually transported in the vertical direction by an operator, or may be configured to be transported in the vertical direction by a valve opening/closing module transport means generating a driving force for transporting in the vertical direction. . Hereinafter, a case of being manually transported in the vertical direction by an operator will be described.

A second vertical transfer guide coupling plate 214 is coupled to the upper module 2 on the bottom surface of the lower plate 213. The second vertical transfer guide coupling plate 214 has a plate shape parallel to the YZ plane, and is coupled to the lower plate 213 to have a length in a vertical direction.

The valve opening/closing module 4 includes a second vertical transfer guide supporting member 441 provided with the second vertical transfer guide 430 between the second vertical transfer guide coupling plate 214, and the second vertical transfer guide It includes a first horizontal plate 442 coupled to the upper end of the transfer guide support member 441.

The second vertical transfer guide support member 441 is a plate shape parallel to the YZ plane, is provided to have a length in a vertical direction, and is installed to face the second vertical transfer guide coupling plate 214. The second vertical transfer guide support member 441 is transferred in a vertical direction together with the valve opening and closing module 4 when the valve opening and closing module 4 is transferred in a vertical direction along the second vertical transfer guide 430.

The first horizontal plate 442 is a plate shape parallel to the XY plane, has a length in a horizontal direction, and the second vertical transfer guide support member 441 is vertically coupled to a bottom surface of one end thereof. The valve opening/closing module main body 401 is coupled to the bottom surface of the first horizontal plate 442 with the second horizontal plate 443 therebetween. Accordingly, the first horizontal plate 442 is transported in a vertical direction by the second vertical transfer guide 430 together with the valve opening/closing module main body 401.

On the other hand, the first horizontal plate 442 is provided so that the relative rotation of the valve opening and closing module main body 401 is made. That is, the second horizontal plate 443 is provided under the first horizontal plate 442, and the first horizontal plate 442 and the second horizontal plate 443 are coupled. In addition, the valve opening/closing module main body 401 is coupled to the bottom surface of the second horizontal plate 443. In this case, coupling strength adjustment units 461 and 462 are provided to adjust the strength of the coupling between the first horizontal plate 442 and the second horizontal plate 443.

The coupling strength adjustment portions 461 and 462 include a screw portion 461a screwed to the first horizontal plate 442 formed at an upper end thereof, and a shaft member 461 vertically penetrating the second horizontal plate 443 , It is formed integrally at the lower end of the shaft member 461 is made of a handle portion 462 formed to extend in the lateral direction so as to rotate the shaft member 461.

In this case, an arc-shaped guide hole 443a is formed in the second horizontal plate 443, and the shaft member 461 is inserted into the guide hole 443a to move the second horizontal plate 443 up and down. It will penetrate into.

When the shaft member 461 is rotated in one direction while holding the handle part 462, the screw coupling of the screw part 461a is tightened, and the coupling strength in the coupling strength adjusting parts 461 and 462 is increased. Therefore, the first horizontal plate 442 and the second horizontal plate 443 are strongly coupled in a direction in which opposite surfaces are in close contact with each other, so that the valve opening/closing module main body 401, the handle coupling part 410 and the handle driving part 420 ) And the second horizontal plate 443 are not rotated relative to the first horizontal plate 442.

When the shaft member 461 is rotated in the other direction while holding the handle part 462, the screw connection of the threaded part 461a is released, and the coupling strength in the coupling strength adjusting parts 461 and 462 is weakened. Accordingly, the first horizontal plate 442 and the second horizontal plate 443 have weakened coupling force so that opposite surfaces do not come into close contact with each other. It is possible to rotate 420 and the second horizontal plate 443 in the horizontal direction with respect to the first horizontal plate 442. When rotating in this manner, the rotation is guided along the guide hole 443a while the shaft member 461 is inserted into the guide hole 443a, and the rotation range is limited by the length of the guide hole 443a. do.

When the valve opening and closing module main body 401, the handle coupling part 410, the handle driving part 420, and the second horizontal plate 443 are configured to be rotatable with respect to the first horizontal plate 442, the operator When the handle coupling portion 410 is coupled to the handle 50, the phase of the handle coupling portion 410 is matched to the shape of the handle 50, so that it can be easily coupled.

The valve opening/closing module 4 may be provided with a coupling and separating part 450. One side of the valve opening/closing module 4 is coupled to the second vertical transfer guide 430 through the second vertical transfer guide support member 441, and the other side of the valve opening/closing module 4 is the coupling and separation unit. It is provided to be coupled to or separated from any one of a plurality of plates 211, 212, 213 provided in the upper module 2 by 450.

In the present embodiment, the coupling and separation unit 450 is coupled to the intermediate plate 212 among the plurality of plates 211, 212, and 213.

The intermediate plate 212 is provided with a locking portion 212a having a b shape.

The engaging and separating part 450 is a locking member 452 that is engaged by being engaged with the end 212b of the locking part 212a or is released and separated, and is coupled to the first horizontal plate 442. It includes a coupling unit body 451, a pin 453 coupled to the coupling unit body 451 and coupled to the locking member 452 so as to be rotatable.

The upper end 452a of the locking member 452 is formed in a hook shape, and when the hook-shaped portion is locked by the locking part 213a by rotating the locking member 452 upward, the valve opening/closing module 4 The structure is caught by the intermediate plate 212 to prevent the valve opening/closing module 4 from moving downward.

In addition, when the operator wants to move the valve opening and closing module 4 downward, the locking member 452 is rotated around the pin 453 so that the hook-shaped portion of the locking member 452 is in contact with the locking portion 213a. The locking state is released so that the valve opening/closing module 4 can be moved downward. In this state, when the operator manually moves the valve opening/closing module 4 downward, the valve opening/closing module 4 moves downward along the second vertical transfer guide 430.

The operation of the gas supply device according to the present invention will be described with reference to FIGS. 13 to 17.

First, in order to replace the container, a new container 10 is loaded on the container loading part (not shown). In this case, since the horizontal braking part 225 and the vertical braking part 260 are in a braking state, the lower module 3 does not move in the Y-axis direction and the Z-axis direction and maintains a fixed state.

Then, the operator presses the first switch 271. When the first switch 271 is pressed, the braking force of the horizontal braking part 225 and the vertical braking part 260 is released, and the lower module 3 is moved to the first transfer guide 220 and the third transfer guide. 241, 242), so that it can move freely in the Y-axis and Z-axis directions.

In this state, the operator applies a force to the lower module 3 to move it in the front and rear, left and right directions, and up and down, and align the second alignment unit 351 to face the first alignment unit 512 as shown in FIG. 13. Phosphorus is achieved. In this case, the second coupling portion 352 is positioned to face the first coupling portion 511.

When the operator applies force to the lower module 3 so that it rotates in the horizontal direction when aligning in this way, a pair of guide pins 255 and 256 with the fixing pin 254 as the center of rotation are inserted into the guide pin insertion hole 253a. , 253b) Since the lower module 3 is rotated on the XY plane by moving in the front-rear direction inside, the first alignment unit 512 and the second alignment unit 351 can be accurately aligned.

In the state of FIG. 13, the operator continuously adjusts the position of the lower module 3 so that only a part of the alignment pin 351 is inserted into the alignment pin insertion groove 512 as shown in FIG. 14.

The state of FIG. 13 and the state of FIG. 14 may be performed in one operation due to the continuous work of the operator.

In this way, when the operator rotates the lower module 3 in the horizontal direction along with the transfer in the front and rear, left and right directions, and up and down, the first alignment unit 512 and the second alignment unit 351 can be easily aligned .

On the other hand, the length of the alignment pin 351 protruding from the alignment block 350 is longer than the length protruding from the alignment block 350, the fixed block engaging member 352, which is the second engaging portion 352, When only a part of the alignment pin 351 is inserted into the alignment pin insertion groove 512, the first coupling portion 511 and the second coupling portion 352 are not coupled, and the cover separation portion 320 ) And the valve connector 30 covered with the cover 31 are positioned to face each other.

In such a state, the operator releases his hand from the first switch 271. When the first switch 271 is released, a braking force is applied to the horizontal braking part 225 and the vertical braking part 260 so that the lower module 3 is fixed without moving in the Y-axis and Z-axis directions. Will remain in the state.

In this state, when the operator operates the second switch 272, the rotating means is driven to rotate the cover separating part 320. When the shape of the cover 31 is, for example, a hexagon, the groove of the cover separating part 320 is also formed in a hexagonal shape to correspond thereto.

In a state in which the hexagonal shape of the groove of the cover separation unit 320 and the hexagonal shape of the cover 31 do not match, the lower module 3 is used to insert the cover 31 into the groove of the cover separation unit 320. ), a collision between the cover separation unit 320 and the cover 31 occurs.

Therefore, in the present invention, when the operator moves the lower module 3 while rotating the cover separation unit 320 by operating the second switch 272, the groove of the cover separation unit 320 and the phase of the cover 31 coincide. At the moment when the cover separation part 320 and the cover 31 are molded, the coupling is possible without collision.

In addition, there is a method of detecting a hexagonal shape of the cover 31 using a sensor to match the phase with the cover separating part 320, but according to the present invention, there is no need to provide a sensor.

When the lower module 3 is further pushed forward in the state of FIG. 14, as shown in FIG. 15, the entire alignment pin 351 is inserted into the alignment pin insertion groove 512 and the first alignment unit 512 And the second alignment unit 351 are completely combined. In this case, the second coupling portion 352 is inserted into the first coupling portion 511 so that the protrusion 352a is inserted into the projection insertion groove, so that the first coupling portion 511 and the second coupling portion 352 are coupled. This allows the lower module 3 to be maintained in a fixed state without moving in the X-axis direction. In addition, the cover 31 is inserted into the groove of the cover separation unit 320.

In this state, the lower module 3 is braked by the horizontal braking unit 225 and the vertical braking unit 260 to transfer in the Y-axis and Z-axis directions, and the transfer in the X-axis direction is controlled. Since braking is performed by the coupling of the first coupling portion 511 and the second coupling portion 352, it is possible to maintain a fixed state in all directions of the X, Y, and Z axes.

After that, the operator makes the handle coupling portion 410 and the handle 50 of the valve opening/closing module 4 coupled. To this end, when the locking member 452 is rotated around the pin 453, the locking state of the locking portion 212a and the upper end 452a of the locking member 452 is released.

In this state, when the valve opening/closing module 4 is moved downward, the valve opening/closing module 4 is transported in a vertical direction while being guided by the second vertical transfer guide 430 to become the state shown in FIG. The handle 50 is inserted into the inside of the. In this case, the valve opening/closing module main body 401 and the handle coupling portion 410 and the handle are in a state in which the coupling strength between the first horizontal plate 442 and the second horizontal plate 443 is weakened by rotating the shaft member 461. When the driving unit 420 and the second horizontal plate 443 are rotated in a horizontal direction with respect to the first horizontal plate 442, the shaft member 461 is rotated along the guide hole 443a, so that the handle 50 and the The coupling of the handle coupling portion 410 may be made more easily.

When the handle coupling unit 410 and the handle 50 are combined in this way, the operation after that is automatically performed by the control unit by the operator applying an operation signal.

When the rotation means is driven by the control unit to rotate the cover separation unit 320 and the first transfer unit is driven to move the cover separation unit 320 to the rear, the cover 31 is moved to the valve connector 30 ) From

When the cover 31 is separated from the valve connector 30 and the second transfer means of the connector fastening section transfer means 340 is driven, as shown in FIG. 17, the cover separation section 320 and the connector fastening section 330 ) Is integrally moved along the Y-axis direction so that the connector fastening portion 330 and the valve connector 30 face each other.

In this state, the connector fastening part 330 is transferred in the direction of the valve connector 30 to connect the connection pipe connector 331 to the valve connector 30.

Then, when the handle driving unit 420 is driven while the handle 50 is inserted into the handle coupling unit 410, the handle 50 is rotated to open the valve of the valve unit, and the gas contained in the container 10 is gas It is supplied to the customer.

According to the above configuration, the plurality of modules 2, 3, and 4 can be transported independently, so that the weight of the transported module is light, so that fine adjustment is possible when aligning the containers. In addition, by allowing the plurality of modules 2, 3, and 4 to be transported independently, the operator can easily align them.

As described above, the present invention has been described in detail with reference to preferred embodiments, but the present invention is not limited to the above-described embodiments, and various modifications within the scope of the claims and the detailed description of the invention and the accompanying drawings. It is possible to do so, and this also belongs to the present invention.

1: gas supply device 2: upper module
3: lower module 4: valve opening and closing module
10: container 20: valve
30: valve connector 31: cover
50: handle 211: upper plate
212: middle plate 213: lower plate
214: second vertical feed guide coupling plate
220: first transfer guide 225: horizontal braking part
230: 2nd transfer guide 241,242: 3rd transfer guide
243,244: feed guide coupling plate
251,252: transfer guide support member 253: floor plate
253a, 253b: guide pin insertion hole 254: fixing pin
255,256: guide pin 260: vertical brake part
270: switch box 271: first switch
272: second switch 311: upper housing
312: first side housing 313: second side housing
314: lower housing 315: inner housing
316: plug module support 320: cover separation
330: connector connection part 331: connection piping connector
340: transfer means 350: alignment block
351: second alignment unit 352: second coupling unit
352a: protrusion 360: plug module
361: plug 362: plug support member
363: plug support housing 364: plug transfer guide
370: gasket supply unit 371: gasket
372: gasket holder 374: gasket moving means
380: rotating means 410: handle coupling portion
412: handle engaging portion 420: handle driving portion
430: second vertical transfer guide 441: second vertical transfer guide support member
442: first horizontal plate 443: second horizontal plate
450: coupling and separation unit 451: coupling unit body
452: locking member 453: pin
461: shaft member 461a: threaded portion
462: handle part 510, 520, 530: fixing block
511: first coupling unit 512: first alignment unit

Claims (19)

An upper module including an upper plate installed at a position spaced upward from the valve portion provided at the upper end of the container;
A lower module having a cover separating unit for separating a cover covering the valve connector provided in the valve unit, and a connector fastening unit for connecting a connection pipe connector connected to a gas consumption destination to the valve connector;
A valve opening/closing module for opening and closing a valve of the valve part;
A first vertical transfer unit provided with a first vertical transfer guide for guiding the lower module to be transferred in a vertical direction with respect to the upper module;
A second vertical transfer unit provided with a second vertical transfer guide for guiding the valve opening/closing module to be transferred in a vertical direction with respect to the upper module independently of the vertical transfer of the lower module;
Including,
The valve opening/closing module includes: a second vertical transfer guide supporting member coupled to the second vertical transfer guide and formed in a length in a vertical direction; A first horizontal plate coupled to the second vertical transfer guide support member to be vertically formed to have a length in a horizontal direction; A valve opening/closing module main body coupled to a lower portion of the first horizontal plate and including a handle coupling portion into which a handle for opening and closing a valve of the valve portion is inserted;
Gas supply device comprising a An upper module including an upper plate installed so as to be fixed at a position spaced upward from the valve portion provided at the upper end of the container;
A lower module having a cover separating unit for separating a cover covering the valve connector provided in the valve unit, and a connector fastening unit for connecting a connection pipe connector connected to a gas consumption destination to the valve connector;
A valve opening/closing module for opening and closing a valve of the valve part;
A first vertical transfer unit provided with a first vertical transfer guide for guiding the lower module to be transferred in a vertical direction with respect to the upper module;
A second vertical transfer unit provided with a second vertical transfer guide for guiding the valve opening/closing module to be transferred in a vertical direction with respect to the upper module independently of the vertical transfer of the lower module;
Including,
The upper module includes a lower plate coupled to an upper portion of a horizontal transfer guide for transporting the lower module in a horizontal direction with respect to the upper module, and a second vertical transfer guide coupled to a bottom surface of the lower plate to have a length in a vertical direction. Including a bonding plate;
The valve opening/closing module is installed to face the second vertical conveying guide engaging plate so that the second vertical conveying guide is provided between the second vertical conveying guide engaging plate, and vertically with the valve opening and closing module. Gas supply device including a second vertical transfer guide support member to be transferred The method according to claim 1 or 2,
The first vertical transfer guide is provided in the upper module to guide the vertical transfer of the lower module;
The second vertical transfer guide is provided in the upper module to guide the valve opening/closing module to be transferred in a vertical direction with respect to the upper module;
Gas supply device, characterized in that The method of claim 3,
A gas supply device comprising a valve opening/closing module transfer means for generating a driving force for transferring the valve opening/closing module in a vertical direction with respect to the upper module. delete The method of claim 3,
The valve opening and closing module,
A valve opening/closing module main body including a handle coupling portion into which a handle for opening and closing a valve of the valve portion is inserted;
A first horizontal plate conveyed in a vertical direction by the second vertical transfer guide together with the valve opening/closing module body, and provided to perform relative rotation of the valve opening/closing module body;
Gas supply device comprising a The method of claim 6,
The valve opening and closing module,
A second horizontal plate provided under the first horizontal plate;
Including; coupling the first horizontal plate and the second horizontal plate, but the coupling strength adjusting unit for adjusting the strength of the coupling,
When the coupling strength is increased in the coupling strength control unit, the valve opening/closing module main body does not rotate relative to the first horizontal plate, and when the coupling strength is weakened by the coupling strength adjusting unit, the valve opening/closing module body Gas supply device, characterized in that the relative rotation with respect to the first horizontal plate The method of claim 7,
The bonding strength adjustment unit,
A shaft member having a threaded portion screwed to the first horizontal plate and passing through the second horizontal plate vertically;
A handle integrally formed at the lower end of the shaft member to rotate the shaft member;
Gas supply device, characterized in that consisting of The method of claim 6,
The valve opening and closing module,
A second horizontal plate provided under the first horizontal plate, having an arc-shaped guide hole, and coupled to the valve opening/closing module body;
Including; a shaft member coupled to the first horizontal plate and inserted into the guide hole,
When the valve opening and closing module main body and the second horizontal plate are rotated, the shaft member is moved within the guide hole. The method of claim 3,
A plurality of plates provided in the upper module;
The valve opening/closing module has one side coupled to the second vertical transfer guide, and the other side having a coupling and separating unit coupled to or separated from any one of the plurality of plates;
Gas supply device, characterized in that The method of claim 10,
Any one of the plurality of plates is provided with a locking portion to which the coupling and separating portion is coupled;
The engaging and separating unit includes a locking member that is engaged with the locking unit to be engaged or is released and separated from the locking unit;
Gas supply device, characterized in that The method of claim 11,
The valve opening and closing module,
A valve opening/closing module main body including a handle coupling portion into which a handle for opening and closing a valve of the valve portion is inserted;
A first horizontal plate conveyed in a vertical direction by the second vertical transfer guide together with the valve opening/closing module body, and provided to perform relative rotation of the valve opening/closing module body;
Including,
The coupling separation unit further includes a coupling unit body coupled to the first horizontal plate and a pin coupled to the coupling unit body;
The locking member is a gas supply device, characterized in that the locking portion is locked or the locking is released by rotating about the pin The method according to claim 1 or 2,
The gas supply device, characterized in that the upper module is provided with a horizontal transfer guide for transferring the lower module in a horizontal direction. The method of claim 13,
The horizontal transfer guide,
A first horizontal transfer guide provided to guide the lower module to be transferred in any one of horizontal directions;
A second horizontal transfer guide for guiding the lower module to be transferred in a second direction perpendicular to the first direction among horizontal directions;
Gas supply device, characterized in that consisting of The method of claim 14,
In the upper module, an upper plate, an intermediate plate, and a lower plate are provided to be spaced apart from each other from top to bottom;
The first horizontal transfer guide is provided between the upper plate and the intermediate plate;
The gas supply device, characterized in that the second horizontal transfer guide is provided between the intermediate plate and the lower plate The method of claim 13,
And a second alignment unit in which the lower module is aligned with the container by coupling with the first alignment unit provided in the valve unit. The method of claim 16,
When the covers are positioned to face each other without being inserted into the cover separating unit, a gas supply device, characterized in that, is provided so that a part of the first alignment unit and the second alignment unit may be coupled during the alignment. The method of claim 17,
One of the first and second alignment portions is formed of a pin-shaped alignment pin having a length in a horizontal direction, and the other is formed of an alignment pin insertion groove into which the alignment pin is inserted. Gas supply device The method of claim 17,
The first alignment unit is provided on a fixed block coupled to the valve unit;
A second coupling portion for coupling to a first coupling portion provided adjacent to the first alignment portion in the fixed block is provided adjacent to the second alignment portion in the lower module;
When the second alignment unit is transferred in the direction of the first alignment unit and the first alignment unit and the second alignment unit are partially engaged and completely engaged, the first and second alignment units are combined and the Gas supply device, characterized in that the combined state of the fixing block and the lower module is maintained

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