KR102202461B1 - 프로브 카드 모듈 - Google Patents

프로브 카드 모듈 Download PDF

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Publication number
KR102202461B1
KR102202461B1 KR1020170137623A KR20170137623A KR102202461B1 KR 102202461 B1 KR102202461 B1 KR 102202461B1 KR 1020170137623 A KR1020170137623 A KR 1020170137623A KR 20170137623 A KR20170137623 A KR 20170137623A KR 102202461 B1 KR102202461 B1 KR 102202461B1
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KR
South Korea
Prior art keywords
switch
output terminal
card module
resistor
probe
Prior art date
Application number
KR1020170137623A
Other languages
English (en)
Korean (ko)
Other versions
KR20180044222A (ko
Inventor
훙-웨이 라이
주-훙 첸
Original Assignee
싱크-테크 시스템 코포레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 싱크-테크 시스템 코포레이션 filed Critical 싱크-테크 시스템 코포레이션
Publication of KR20180044222A publication Critical patent/KR20180044222A/ko
Application granted granted Critical
Publication of KR102202461B1 publication Critical patent/KR102202461B1/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2884—Testing of integrated circuits [IC] using dedicated test connectors, test elements or test circuits on the IC under test
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/28—Provision in measuring instruments for reference values, e.g. standard voltage, standard waveform
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/30—Structural combination of electric measuring instruments with basic electronic circuits, e.g. with amplifier
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
    • G01R31/2879—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to electrical aspects, e.g. to voltage or current supply or stimuli or to electrical loads

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  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Environmental & Geological Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
KR1020170137623A 2016-10-21 2017-10-23 프로브 카드 모듈 KR102202461B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201662411100P 2016-10-21 2016-10-21
US62/411,100 2016-10-21

Publications (2)

Publication Number Publication Date
KR20180044222A KR20180044222A (ko) 2018-05-02
KR102202461B1 true KR102202461B1 (ko) 2021-01-14

Family

ID=62012454

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020170137623A KR102202461B1 (ko) 2016-10-21 2017-10-23 프로브 카드 모듈

Country Status (4)

Country Link
JP (2) JP2018066739A (zh)
KR (1) KR102202461B1 (zh)
CN (2) CN111965400A (zh)
TW (1) TWI634334B (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI636260B (zh) * 2017-01-06 2018-09-21 新特系統股份有限公司 探針卡模組
CN113640556B (zh) * 2021-08-11 2023-03-03 山东大学 一种探针台针卡

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JP2008003037A (ja) * 2006-06-26 2008-01-10 Yokogawa Electric Corp Ｉｃテスタ
JP2008269725A (ja) * 2007-04-23 2008-11-06 Sharp Corp 電気的特性評価装置
WO2009087874A1 (ja) * 2008-01-08 2009-07-16 Advantest Corporation 試験装置、プローブカード、および試験方法
JP2009198250A (ja) * 2008-02-20 2009-09-03 Advantest Corp 試験装置
JP2012129810A (ja) * 2010-12-15 2012-07-05 Advantest Corp ドライバ回路およびそれを用いた試験装置

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JP3191791B2 (ja) * 1999-01-14 2001-07-23 日本電気株式会社 プローブカード
US6253588B1 (en) 2000-04-07 2001-07-03 General Motors Corporation Quick plastic forming of aluminum alloy sheet metal
US7188275B2 (en) 2004-01-16 2007-03-06 Hewlett-Packard Development Company, L.P. Method of verifying a monitoring and responsive infrastructure of a system
US7852101B2 (en) * 2005-09-07 2010-12-14 Nec Corporation Semiconductor device testing apparatus and power supply unit for semiconductor device testing apparatus
JP4955250B2 (ja) * 2005-10-14 2012-06-20 ルネサスエレクトロニクス株式会社 半導体装置及びそのテスト方法
KR101097585B1 (ko) * 2005-11-26 2011-12-22 엘지디스플레이 주식회사 액정표시장치용 전압 발생 회로 및 이를 이용한액정표시장치
US8125399B2 (en) * 2006-01-14 2012-02-28 Paratek Microwave, Inc. Adaptively tunable antennas incorporating an external probe to monitor radiated power
US7557592B2 (en) * 2006-06-06 2009-07-07 Formfactor, Inc. Method of expanding tester drive and measurement capability
US7502980B2 (en) * 2006-08-24 2009-03-10 Advantest Corporation Signal generator, test apparatus, and circuit device
JPWO2010095378A1 (ja) * 2009-02-18 2012-08-23 株式会社アドバンテスト 出力装置および試験装置
JP2010210238A (ja) * 2009-03-06 2010-09-24 Renesas Electronics Corp プローブカード、それを備えた半導体検査装置及びプローブカードのヒューズチェック方法
JP5312227B2 (ja) * 2009-06-29 2013-10-09 株式会社日本マイクロニクス プローブカード及び検査装置
JP4482707B1 (ja) * 2009-07-13 2010-06-16 株式会社アドバンテスト 試験装置
US8220947B2 (en) * 2009-10-14 2012-07-17 Advantest Corporation Differential driver circuit
DE102010035456A1 (de) * 2010-02-19 2011-08-25 Rohde & Schwarz GmbH & Co. KG, 81671 Tastkopf-System mit Kompensationsnetzwerk
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US9188606B2 (en) * 2013-04-29 2015-11-17 Keysight Technologies, Inc. Oscilloscope current probe with interchangeable range and sensitivity setting modules
CN104345185B (zh) * 2013-07-26 2018-09-25 苏州普源精电科技有限公司 一种有源单端探头及一种测试测量仪器
CN203949945U (zh) * 2014-01-24 2014-11-19 矽创电子股份有限公司 主动式探针装置
CN110146729A (zh) * 2014-01-24 2019-08-20 矽创电子股份有限公司 主动式探针装置
TWI512296B (zh) * 2014-01-24 2015-12-11 Sitronix Technology Corp 主動式探針裝置
CN105372574A (zh) 2015-10-14 2016-03-02 华东光电集成器件研究所 一种半导体芯片晶圆毫伏级信号测试系统

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006023233A (ja) * 2004-07-09 2006-01-26 Advantest Corp 半導体試験装置および半導体試験方法
JP2008003037A (ja) * 2006-06-26 2008-01-10 Yokogawa Electric Corp Ｉｃテスタ
JP2008269725A (ja) * 2007-04-23 2008-11-06 Sharp Corp 電気的特性評価装置
WO2009087874A1 (ja) * 2008-01-08 2009-07-16 Advantest Corporation 試験装置、プローブカード、および試験方法
JP2009198250A (ja) * 2008-02-20 2009-09-03 Advantest Corp 試験装置
JP2012129810A (ja) * 2010-12-15 2012-07-05 Advantest Corp ドライバ回路およびそれを用いた試験装置

Also Published As

Publication number Publication date
KR20180044222A (ko) 2018-05-02
CN111965400A (zh) 2020-11-20
TW201816400A (zh) 2018-05-01
JP2018066739A (ja) 2018-04-26
CN107976565A (zh) 2018-05-01
TWI634334B (zh) 2018-09-01
JP2020046444A (ja) 2020-03-26

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