KR102111070B1 - 광학 장치, 그것을 구비한 노광 장치 및 물품 제조 방법 - Google Patents

광학 장치, 그것을 구비한 노광 장치 및 물품 제조 방법 Download PDF

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Publication number
KR102111070B1
KR102111070B1 KR1020160162575A KR20160162575A KR102111070B1 KR 102111070 B1 KR102111070 B1 KR 102111070B1 KR 1020160162575 A KR1020160162575 A KR 1020160162575A KR 20160162575 A KR20160162575 A KR 20160162575A KR 102111070 B1 KR102111070 B1 KR 102111070B1
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South Korea
Prior art keywords
coil
cooling
unit
optical element
disposed
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Korean (ko)
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KR20170069146A (ko
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도모후미 니시카와라
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캐논 가부시끼가이샤
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
    • G02B6/0011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
    • G02B6/0081—Mechanical or electrical aspects of the light guide and light source in the lighting device peculiar to the adaptation to planar light guides, e.g. concerning packaging
    • G02B6/0085—Means for removing heat created by the light source from the package
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0825—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a flexible sheet or membrane, e.g. for varying the focus
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70258—Projection system adjustments, e.g. adjustments during exposure or alignment during assembly of projection system
    • G03F7/70266—Adaptive optics, e.g. deformable optical elements for wavefront control, e.g. for aberration adjustment or correction

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
KR1020160162575A 2015-12-10 2016-12-01 광학 장치, 그것을 구비한 노광 장치 및 물품 제조 방법 Active KR102111070B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015240736A JP6742717B2 (ja) 2015-12-10 2015-12-10 光学装置、それを備えた露光装置、および物品の製造方法
JPJP-P-2015-240736 2015-12-10

Publications (2)

Publication Number Publication Date
KR20170069146A KR20170069146A (ko) 2017-06-20
KR102111070B1 true KR102111070B1 (ko) 2020-05-15

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KR1020160162575A Active KR102111070B1 (ko) 2015-12-10 2016-12-01 광학 장치, 그것을 구비한 노광 장치 및 물품 제조 방법

Country Status (4)

Country Link
JP (1) JP6742717B2 (https=)
KR (1) KR102111070B1 (https=)
CN (1) CN106873148B (https=)
TW (1) TWI657317B (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102098867B1 (ko) * 2018-09-12 2020-04-09 (주)아이테드 임프린팅 장치 및 임프린팅 방법
CN114924378B (zh) * 2022-05-30 2023-10-27 深圳综合粒子设施研究院 一种反射镜面形控制结构及光束线装置
WO2025143884A1 (ko) * 2023-12-29 2025-07-03 주식회사 기가테라라이팅 조명 장치

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007316132A (ja) 2006-05-23 2007-12-06 Canon Inc 反射装置
JP2010045347A (ja) 2008-08-11 2010-02-25 Nikon Corp 変形可能なミラー、ミラー装置、及び露光装置
JP2010141071A (ja) * 2008-12-11 2010-06-24 Nikon Corp 光学部材冷却装置、光学系、露光装置及びデバイスの製造方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2756551B2 (ja) * 1992-10-20 1998-05-25 住友重機械工業株式会社 伝導冷却型超電導磁石装置
JP3870002B2 (ja) * 2000-04-07 2007-01-17 キヤノン株式会社 露光装置
JP3944008B2 (ja) * 2002-06-28 2007-07-11 キヤノン株式会社 反射ミラー装置及び露光装置及びデバイス製造方法
JP2004039862A (ja) * 2002-07-03 2004-02-05 Nikon Corp 光学装置、露光装置、並びにデバイス製造方法
JP4245975B2 (ja) * 2003-05-15 2009-04-02 オリンパス株式会社 可変形状ミラーおよびその駆動方法
US20050236915A1 (en) * 2004-04-23 2005-10-27 Nikon Corporation Electromagnetic force actuator
JP4817702B2 (ja) * 2005-04-14 2011-11-16 キヤノン株式会社 光学装置及びそれを備えた露光装置
US8002420B2 (en) * 2008-07-23 2011-08-23 Nikon Corporation Hydrostatic liquid-metal deformable optical elements
JP5142946B2 (ja) * 2008-10-29 2013-02-13 三菱電機株式会社 アクチュエータ
DE102011005778A1 (de) * 2011-03-18 2012-09-20 Carl Zeiss Smt Gmbh Optisches Element
JP2015050353A (ja) * 2013-09-02 2015-03-16 キヤノン株式会社 光学装置、投影光学系、露光装置、並びに物品の製造方法
JP6381877B2 (ja) * 2013-09-04 2018-08-29 株式会社ニコン リニアモータ、露光装置、デバイス製造方法、及びコイルユニット
JP2015065246A (ja) * 2013-09-24 2015-04-09 キヤノン株式会社 光学装置、光学系、露光装置及び物品の製造方法
JP6336274B2 (ja) * 2013-12-25 2018-06-06 キヤノン株式会社 光学装置、投影光学系、露光装置、および物品の製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007316132A (ja) 2006-05-23 2007-12-06 Canon Inc 反射装置
KR100842001B1 (ko) * 2006-05-23 2008-06-27 캐논 가부시끼가이샤 반사 장치
JP2010045347A (ja) 2008-08-11 2010-02-25 Nikon Corp 変形可能なミラー、ミラー装置、及び露光装置
JP2010141071A (ja) * 2008-12-11 2010-06-24 Nikon Corp 光学部材冷却装置、光学系、露光装置及びデバイスの製造方法

Also Published As

Publication number Publication date
JP6742717B2 (ja) 2020-08-19
TW201734652A (zh) 2017-10-01
JP2017107070A (ja) 2017-06-15
KR20170069146A (ko) 2017-06-20
CN106873148A (zh) 2017-06-20
TWI657317B (zh) 2019-04-21
CN106873148B (zh) 2020-11-03

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