KR102068345B1 - 콘테이너 세척 시스템 - Google Patents

콘테이너 세척 시스템 Download PDF

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Publication number
KR102068345B1
KR102068345B1 KR1020180044628A KR20180044628A KR102068345B1 KR 102068345 B1 KR102068345 B1 KR 102068345B1 KR 1020180044628 A KR1020180044628 A KR 1020180044628A KR 20180044628 A KR20180044628 A KR 20180044628A KR 102068345 B1 KR102068345 B1 KR 102068345B1
Authority
KR
South Korea
Prior art keywords
container
cleaning
arm
nozzle
chamber
Prior art date
Application number
KR1020180044628A
Other languages
English (en)
Korean (ko)
Other versions
KR20180117061A (ko
Inventor
유대일
한규용
강봉석
서현모
Original Assignee
(주)에스티아이
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by (주)에스티아이 filed Critical (주)에스티아이
Publication of KR20180117061A publication Critical patent/KR20180117061A/ko
Application granted granted Critical
Publication of KR102068345B1 publication Critical patent/KR102068345B1/ko

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02—Cleaning by the force of jets or sprays
    • B08B3/022—Cleaning travelling work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto 
    • B08B9/08—Cleaning containers, e.g. tanks
    • B08B9/20—Cleaning containers, e.g. tanks by using apparatus into or on to which containers, e.g. bottles, jars, cans are brought
    • B08B9/28—Cleaning containers, e.g. tanks by using apparatus into or on to which containers, e.g. bottles, jars, cans are brought the apparatus cleaning by splash, spray, or jet application, with or without soaking
    • B08B9/30—Cleaning containers, e.g. tanks by using apparatus into or on to which containers, e.g. bottles, jars, cans are brought the apparatus cleaning by splash, spray, or jet application, with or without soaking and having conveyors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B3/00—Spraying or sprinkling apparatus with moving outlet elements or moving deflecting elements
    • B08B1/04—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/30—Cleaning by methods involving the use of tools by movement of cleaning members over a surface
    • B08B1/32—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto 
    • B08B9/08—Cleaning containers, e.g. tanks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto 
    • B08B9/08—Cleaning containers, e.g. tanks
    • B08B9/20—Cleaning containers, e.g. tanks by using apparatus into or on to which containers, e.g. bottles, jars, cans are brought
    • B08B9/28—Cleaning containers, e.g. tanks by using apparatus into or on to which containers, e.g. bottles, jars, cans are brought the apparatus cleaning by splash, spray, or jet application, with or without soaking
    • B08B9/34—Arrangements of conduits or nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto 
    • B08B9/08—Cleaning containers, e.g. tanks
    • B08B9/20—Cleaning containers, e.g. tanks by using apparatus into or on to which containers, e.g. bottles, jars, cans are brought
    • B08B9/42—Cleaning containers, e.g. tanks by using apparatus into or on to which containers, e.g. bottles, jars, cans are brought the apparatus being characterised by means for conveying or carrying containers therethrough
    • B08B9/44—Cleaning containers, e.g. tanks by using apparatus into or on to which containers, e.g. bottles, jars, cans are brought the apparatus being characterised by means for conveying or carrying containers therethrough the means being for loading or unloading the apparatus

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning In General (AREA)
KR1020180044628A 2017-04-18 2018-04-17 콘테이너 세척 시스템 KR102068345B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR20170050023 2017-04-18
KR1020170050023 2017-04-18

Publications (2)

Publication Number Publication Date
KR20180117061A KR20180117061A (ko) 2018-10-26
KR102068345B1 true KR102068345B1 (ko) 2020-02-11

Family

ID=63938948

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020180044628A KR102068345B1 (ko) 2017-04-18 2018-04-17 콘테이너 세척 시스템

Country Status (3)

Country Link
KR (1) KR102068345B1 (zh)
CN (1) CN108723038B (zh)
TW (1) TWI674930B (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102083228B1 (ko) * 2019-04-09 2020-03-03 삼영기업(주) 중형산적용기 세척장치

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2936252B2 (ja) * 1996-10-01 1999-08-23 株式会社設楽製作所 コンテナ容器洗浄機
JP2010056296A (ja) * 2008-08-28 2010-03-11 Tdk Corp 密閉容器の蓋開閉システム及び蓋開閉方法
KR101253219B1 (ko) * 2011-05-12 2013-04-16 (주)클레슨 대형 상자용 자동 세척기 및 자동 세척기의 세척방법
KR101265182B1 (ko) * 2012-07-20 2013-05-27 (주) 디바이스이엔지 웨이퍼 보관용기 세정장치

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6279724B1 (en) * 1997-12-19 2001-08-28 Semitoll Inc. Automated semiconductor processing system
US6926017B2 (en) * 1998-01-09 2005-08-09 Entegris, Inc. Wafer container washing apparatus
US6030208A (en) * 1998-06-09 2000-02-29 Semitool, Inc. Thermal processor
US6830057B2 (en) * 2002-11-01 2004-12-14 Semitool, Inc. Wafer container cleaning system
CN1802222A (zh) * 2003-04-10 2006-07-12 安堤格里斯公司 晶片承载器清洗系统
US7520286B2 (en) * 2005-12-05 2009-04-21 Semitool, Inc. Apparatus and method for cleaning and drying a container for semiconductor workpieces
CN201049351Y (zh) * 2007-06-05 2008-04-23 郭立霖 包装盒清洁设备
US9646858B2 (en) * 2011-06-23 2017-05-09 Brooks Automation, Inc. Semiconductor cleaner systems and methods
CN104380455B (zh) * 2012-06-14 2016-10-12 村田机械株式会社 盖开闭装置
JP5959381B2 (ja) * 2012-09-20 2016-08-02 ヒューグルエレクトロニクス株式会社 基板ケース洗浄装置
CN103681247A (zh) * 2013-12-30 2014-03-26 上海集成电路研发中心有限公司 清洗晶圆反应腔室的装置
TWM532314U (zh) * 2016-06-08 2016-11-21 錫宬國際有限公司 晶圓盒清洗裝置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2936252B2 (ja) * 1996-10-01 1999-08-23 株式会社設楽製作所 コンテナ容器洗浄機
JP2010056296A (ja) * 2008-08-28 2010-03-11 Tdk Corp 密閉容器の蓋開閉システム及び蓋開閉方法
KR101253219B1 (ko) * 2011-05-12 2013-04-16 (주)클레슨 대형 상자용 자동 세척기 및 자동 세척기의 세척방법
KR101265182B1 (ko) * 2012-07-20 2013-05-27 (주) 디바이스이엔지 웨이퍼 보관용기 세정장치

Also Published As

Publication number Publication date
KR20180117061A (ko) 2018-10-26
TWI674930B (zh) 2019-10-21
TW201841696A (zh) 2018-12-01
CN108723038B (zh) 2021-07-30
CN108723038A (zh) 2018-11-02

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E701 Decision to grant or registration of patent right
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