KR102033142B1 - 극저온 펌프 - Google Patents

극저온 펌프 Download PDF

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Publication number
KR102033142B1
KR102033142B1 KR1020187034235A KR20187034235A KR102033142B1 KR 102033142 B1 KR102033142 B1 KR 102033142B1 KR 1020187034235 A KR1020187034235 A KR 1020187034235A KR 20187034235 A KR20187034235 A KR 20187034235A KR 102033142 B1 KR102033142 B1 KR 102033142B1
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South Korea
Prior art keywords
delete delete
stage
cryogenic
baffles
cryogenic pump
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Korean (ko)
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KR20180129975A (ko
Inventor
세르게이 시소에브
알렌 제이. 바틀레트
존 제이. 카셀로
제프리 에이. 웰스
미카헬 제이. 이코바찌
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브룩스 오토메이션, 인크.
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D8/00—Cold traps; Cold baffles
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49229—Prime mover or fluid pump making
    • Y10T29/49236—Fluid pump or compressor making

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
KR1020187034235A 2011-02-09 2012-02-08 극저온 펌프 Active KR102033142B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201161441027P 2011-02-09 2011-02-09
US61/441,027 2011-02-09
PCT/US2012/024243 WO2012109304A2 (en) 2011-02-09 2012-02-08 Cryopump

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
KR1020137023831A Division KR101986159B1 (ko) 2011-02-09 2012-02-08 극저온 펌프

Publications (2)

Publication Number Publication Date
KR20180129975A KR20180129975A (ko) 2018-12-05
KR102033142B1 true KR102033142B1 (ko) 2019-10-16

Family

ID=45757776

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020187034235A Active KR102033142B1 (ko) 2011-02-09 2012-02-08 극저온 펌프
KR1020137023831A Active KR101986159B1 (ko) 2011-02-09 2012-02-08 극저온 펌프

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020137023831A Active KR101986159B1 (ko) 2011-02-09 2012-02-08 극저온 펌프

Country Status (5)

Country Link
US (2) US9266038B2 (https=)
JP (2) JP6031451B2 (https=)
KR (2) KR102033142B1 (https=)
TW (2) TWI557320B (https=)
WO (1) WO2012109304A2 (https=)

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JPH089522B2 (ja) 1991-11-22 1996-01-31 扶桑化学工業株式会社 殺藻剤および海苔養殖法
KR102033142B1 (ko) 2011-02-09 2019-10-16 브룩스 오토메이션, 인크. 극저온 펌프
JP5557786B2 (ja) * 2011-04-05 2014-07-23 住友重機械工業株式会社 クライオポンプのための蓋構造、クライオポンプ、クライオポンプの立ち上げ方法、及びクライオポンプの保管方法
JP6053552B2 (ja) 2013-02-18 2016-12-27 住友重機械工業株式会社 クライオポンプ及びクライオポンプ取付構造
JP6057782B2 (ja) * 2013-03-05 2017-01-11 住友重機械工業株式会社 クライオポンプ
JP6338403B2 (ja) * 2013-03-25 2018-06-06 住友重機械工業株式会社 クライオポンプ及び真空排気方法
JP6076843B2 (ja) * 2013-06-14 2017-02-08 住友重機械工業株式会社 クライオポンプ
TWI580865B (zh) * 2013-03-25 2017-05-01 Sumitomo Heavy Industries Low temperature pump
WO2015143219A1 (en) * 2014-03-21 2015-09-24 Brooks Automation, Inc. Cryopump hybrid frontal array
JP6415230B2 (ja) * 2014-10-07 2018-10-31 住友重機械工業株式会社 クライオポンプ
JP6466225B2 (ja) * 2015-03-31 2019-02-06 住友重機械工業株式会社 クライオポンプ
CN106014916B (zh) * 2015-03-31 2018-07-03 住友重机械工业株式会社 低温泵
JP6639129B2 (ja) * 2015-07-13 2020-02-05 アルバック・クライオ株式会社 クライオトラップ
JP6857046B2 (ja) * 2016-03-29 2021-04-14 住友重機械工業株式会社 クライオポンプ
KR102136290B1 (ko) * 2017-11-28 2020-08-26 주식회사 엔바이온 에너지 절감형 농축로터 및 이를 포함하는 폐가스 처리 시스템
JP7339950B2 (ja) * 2018-09-06 2023-09-06 住友重機械工業株式会社 クライオポンプ
GB2596831A (en) * 2020-07-08 2022-01-12 Edwards Vacuum Llc Cryopump
GB2600479A (en) * 2020-11-02 2022-05-04 Edwards Vacuum Llc Cryopumps and inlet flow restrictors for cryopumps
KR102381667B1 (ko) 2020-11-17 2022-03-31 박희주 외부 열침입 저감 구조를 적용한 극저온 왕복동 펌프
JP7500403B2 (ja) * 2020-11-24 2024-06-17 アルバック・クライオ株式会社 クライオポンプ
GB2613595A (en) * 2021-12-08 2023-06-14 Edwards Vacuum Llc A cryopump with increased capacity
JP2025093787A (ja) * 2023-12-12 2025-06-24 住友重機械工業株式会社 クライオポンプ

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Also Published As

Publication number Publication date
JP2017015098A (ja) 2017-01-19
KR20180129975A (ko) 2018-12-05
JP2014509365A (ja) 2014-04-17
US9266038B2 (en) 2016-02-23
KR101986159B1 (ko) 2019-06-05
WO2012109304A3 (en) 2012-11-29
TWI639769B (zh) 2018-11-01
TWI557320B (zh) 2016-11-11
JP6475211B2 (ja) 2019-02-27
US9926919B2 (en) 2018-03-27
US20160146200A1 (en) 2016-05-26
KR20140006021A (ko) 2014-01-15
TW201239196A (en) 2012-10-01
TW201700864A (zh) 2017-01-01
WO2012109304A2 (en) 2012-08-16
JP6031451B2 (ja) 2016-11-24
US20130312431A1 (en) 2013-11-28

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