KR101986331B1 - 성막 마스크, 그 제조 방법 및 성막 마스크의 리페어 방법 - Google Patents

성막 마스크, 그 제조 방법 및 성막 마스크의 리페어 방법 Download PDF

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Publication number
KR101986331B1
KR101986331B1 KR1020187026749A KR20187026749A KR101986331B1 KR 101986331 B1 KR101986331 B1 KR 101986331B1 KR 1020187026749 A KR1020187026749 A KR 1020187026749A KR 20187026749 A KR20187026749 A KR 20187026749A KR 101986331 B1 KR101986331 B1 KR 101986331B1
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South Korea
Prior art keywords
metal layer
mask sheet
support member
mask
opening
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Expired - Fee Related
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KR1020187026749A
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English (en)
Korean (ko)
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KR20180112030A (ko
Inventor
슈지 구도
료 노구치
유지 사이토
지후아 한
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브이 테크놀로지 씨오. 엘티디
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Priority claimed from PCT/JP2017/011844 external-priority patent/WO2017170172A1/ja
Publication of KR20180112030A publication Critical patent/KR20180112030A/ko
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
    • B05B12/16—Arrangements for controlling delivery; Arrangements for controlling the spray area for controlling the spray area
    • B05B12/20—Masking elements, i.e. elements defining uncoated areas on an object to be coated
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K11/00—Resistance welding; Severing by resistance heating
    • B23K11/10—Spot welding; Stitch welding
    • B23K11/11—Spot welding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/20—Bonding
    • B23K26/21—Bonding by welding
    • B23K26/22—Spot welding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/042—Coating on selected surface areas, e.g. using masks using masks

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physical Vapour Deposition (AREA)
  • Electroluminescent Light Sources (AREA)
  • Laser Beam Processing (AREA)
KR1020187026749A 2016-03-29 2017-03-23 성막 마스크, 그 제조 방법 및 성막 마스크의 리페어 방법 Expired - Fee Related KR101986331B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JPJP-P-2016-066678 2016-03-29
JP2016066678 2016-03-29
JPJP-P-2016-241333 2016-12-13
JP2016241333A JP6341434B2 (ja) 2016-03-29 2016-12-13 成膜マスク、その製造方法及び成膜マスクのリペア方法
PCT/JP2017/011844 WO2017170172A1 (ja) 2016-03-29 2017-03-23 成膜マスク、その製造方法及び成膜マスクのリペア方法

Publications (2)

Publication Number Publication Date
KR20180112030A KR20180112030A (ko) 2018-10-11
KR101986331B1 true KR101986331B1 (ko) 2019-06-05

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KR1020187026749A Expired - Fee Related KR101986331B1 (ko) 2016-03-29 2017-03-23 성막 마스크, 그 제조 방법 및 성막 마스크의 리페어 방법

Country Status (5)

Country Link
US (1) US10920311B2 (enExample)
JP (1) JP6341434B2 (enExample)
KR (1) KR101986331B1 (enExample)
CN (1) CN108779550B (enExample)
TW (1) TWI657156B (enExample)

Families Citing this family (26)

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CN113737128A (zh) 2017-01-31 2021-12-03 堺显示器制品株式会社 蒸镀掩模、蒸镀掩模及有机半导体元件的制造方法
WO2019186720A1 (ja) * 2018-03-27 2019-10-03 シャープ株式会社 表示デバイスの製造方法、及び表示デバイス
JP6588125B2 (ja) * 2018-04-26 2019-10-09 堺ディスプレイプロダクト株式会社 蒸着マスクの製造方法、蒸着マスク、および有機半導体素子の製造方法
TWI773911B (zh) * 2018-08-10 2022-08-11 日商大日本印刷股份有限公司 蒸鍍罩、蒸鍍罩裝置、蒸鍍罩之製造方法、蒸鍍罩裝置之製造方法及蒸鍍方法
KR102236542B1 (ko) * 2018-12-03 2021-04-06 주식회사 오럼머티리얼 마스크 지지 템플릿, 마스크 금속막 지지 템플릿, 마스크 지지 템플릿의 제조 방법 및 프레임 일체형 마스크의 제조 방법
KR102800982B1 (ko) * 2019-01-07 2025-04-30 삼성디스플레이 주식회사 마스크 조립체
KR102837467B1 (ko) 2019-02-06 2025-07-24 다이니폰 인사츠 가부시키가이샤 증착 마스크 장치, 마스크 지지 기구 및 증착 마스크 장치의 제조 방법
CN110079762B (zh) * 2019-04-11 2021-06-01 Tcl华星光电技术有限公司 掩膜板及蒸镀oled器件的方法
KR102852453B1 (ko) * 2019-07-02 2025-08-29 삼성디스플레이 주식회사 증착용 마스크 및 그 제조방법
KR102009714B1 (ko) * 2019-07-15 2019-08-13 (주)세우인코퍼레이션 초미세 와이어를 이용한 다중 다각망 구조의 네트 마스크 제조방법
JP7113861B2 (ja) * 2020-03-13 2022-08-05 キヤノントッキ株式会社 マスク取付装置、成膜装置、マスク取付方法、成膜方法、電子デバイスの製造方法
KR20220004880A (ko) * 2020-07-03 2022-01-12 삼성디스플레이 주식회사 마스크 어셈블리 및 이를 포함하는 증착 설비
KR102836418B1 (ko) 2020-09-18 2025-07-22 삼성디스플레이 주식회사 마스크 수리 장치 및 그것을 이용한 마스크 수리 방법
JP2022067159A (ja) * 2020-10-20 2022-05-06 株式会社ジャパンディスプレイ 蒸着マスクユニットとその製造方法
KR20220068327A (ko) 2020-11-18 2022-05-26 삼성디스플레이 주식회사 마스크 어셈블리 및 그 마스크 어셈블리의 제조 방법
KR102868862B1 (ko) * 2020-12-10 2025-10-13 삼성디스플레이 주식회사 증착용 마스크 및 이를 포함하는 증착 장치
KR20220113588A (ko) * 2021-02-05 2022-08-16 삼성디스플레이 주식회사 마스크 및 이의 제조 방법
KR102912257B1 (ko) * 2021-07-20 2026-01-14 주식회사 선익시스템 섀도우 마스크의 제조 방법
KR102810615B1 (ko) * 2021-08-25 2025-05-22 주식회사 킵스바이오파마 디스플레이 패널용 증착 마스크 프레임 어셈블리 제조방법
CN113714004B (zh) * 2021-09-18 2022-07-05 广东电网有限责任公司 一种配网安健环自动喷漆装置及其使用方法
KR102936519B1 (ko) * 2021-11-08 2026-03-10 삼성디스플레이 주식회사 마스크 어셈블리 및 이의 수리방법
KR102427524B1 (ko) * 2021-12-21 2022-08-01 주식회사 핌스 Oled 증착용 대면적 마스크 시트 및 마스크 조립체
KR20230096185A (ko) 2021-12-22 2023-06-30 삼성디스플레이 주식회사 마스크 어셈블리, 이의 수리방법, 및 이의 제조방법
JP2024009519A (ja) 2022-07-11 2024-01-23 ウシオ電機株式会社 蒸着マスク製造方法
KR20240103148A (ko) * 2022-12-26 2024-07-04 삼성디스플레이 주식회사 마스크 및 그것의 제조 방법
CN120272853B (zh) * 2025-06-09 2025-10-24 浙江众凌科技有限公司 一种掩膜组件及其制备方法

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JP6078747B2 (ja) * 2013-01-28 2017-02-15 株式会社ブイ・テクノロジー 蒸着マスクの製造方法及びレーザ加工装置
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JP6078818B2 (ja) * 2013-07-02 2017-02-15 株式会社ブイ・テクノロジー 成膜マスク及び成膜マスクの製造方法
KR102130546B1 (ko) * 2013-10-11 2020-07-07 삼성디스플레이 주식회사 마스크 조립체 및 이를 이용한 평판표시장치용 증착 장치
JP2015074826A (ja) * 2013-10-11 2015-04-20 株式会社ブイ・テクノロジー 成膜マスク及びその製造方法
JP6446736B2 (ja) * 2014-07-14 2019-01-09 株式会社ブイ・テクノロジー 成膜方法及び成膜装置
CN108779553B (zh) * 2016-03-23 2021-04-06 鸿海精密工业股份有限公司 蒸镀掩膜及其制造方法、有机半导体元件的制造方法

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Publication number Publication date
US20200199732A1 (en) 2020-06-25
CN108779550B (zh) 2019-07-02
JP2017179591A (ja) 2017-10-05
TW201802267A (zh) 2018-01-16
CN108779550A (zh) 2018-11-09
KR20180112030A (ko) 2018-10-11
US10920311B2 (en) 2021-02-16
TWI657156B (zh) 2019-04-21
JP6341434B2 (ja) 2018-06-13

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