KR101967966B1 - 임프린트 방법 및 장치 - Google Patents

임프린트 방법 및 장치 Download PDF

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Publication number
KR101967966B1
KR101967966B1 KR1020167001312A KR20167001312A KR101967966B1 KR 101967966 B1 KR101967966 B1 KR 101967966B1 KR 1020167001312 A KR1020167001312 A KR 1020167001312A KR 20167001312 A KR20167001312 A KR 20167001312A KR 101967966 B1 KR101967966 B1 KR 101967966B1
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South Korea
Prior art keywords
mold
composition
photocurable composition
condensable gas
gas
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Korean (ko)
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KR20160021274A (ko
Inventor
도시키 이토
다카시 요시다
히토시 사토
요오지 가와사키
아키코 이이무라
게이지 야마시타
다케히코 우에노
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캐논 가부시끼가이샤
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/002—Component parts, details or accessories; Auxiliary operations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/005—Surface shaping of articles, e.g. embossing; Apparatus therefor characterised by the choice of material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B29C59/026—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing of layered or coated substantially flat surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2033/00—Use of polymers of unsaturated acids or derivatives thereof as moulding material
    • B29K2033/04—Polymers of esters
    • B29K2033/08—Polymers of acrylic acid esters, e.g. PMA, i.e. polymethylacrylate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2105/00—Condition, form or state of moulded material or of the material to be shaped
    • B29K2105/0005—Condition, form or state of moulded material or of the material to be shaped containing compounding ingredients

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
KR1020167001312A 2013-06-26 2014-06-18 임프린트 방법 및 장치 Active KR101967966B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JPJP-P-2013-133541 2013-06-26
JP2013133541 2013-06-26
JPJP-P-2014-121911 2014-06-12
JP2014121911A JP6494185B2 (ja) 2013-06-26 2014-06-12 インプリント方法および装置
PCT/JP2014/066753 WO2014208571A1 (en) 2013-06-26 2014-06-18 Imprint method and apparatus

Publications (2)

Publication Number Publication Date
KR20160021274A KR20160021274A (ko) 2016-02-24
KR101967966B1 true KR101967966B1 (ko) 2019-04-10

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Country Status (7)

Country Link
US (1) US10386717B2 (enExample)
EP (1) EP3000120B1 (enExample)
JP (1) JP6494185B2 (enExample)
KR (1) KR101967966B1 (enExample)
CN (1) CN105359254A (enExample)
TW (1) TWI541857B (enExample)
WO (1) WO2014208571A1 (enExample)

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US10124529B2 (en) * 2013-12-10 2018-11-13 Canon Nanotechnologies, Inc. Imprint lithography template and method for zero-gap imprinting
JP2016162863A (ja) * 2015-02-27 2016-09-05 キヤノン株式会社 パターンの形成方法、加工基板の製造方法、光学部品の製造方法、回路基板の製造方法、電子部品の製造方法
CN114975098A (zh) * 2015-02-27 2022-08-30 佳能株式会社 纳米压印液体材料及其制造方法、固化产物图案的制造方法和电路板的制造方法
JP6632200B2 (ja) * 2015-02-27 2020-01-22 キヤノン株式会社 パターンの形成方法、加工基板の製造方法、光学部品の製造方法、回路基板の製造方法、電子部品の製造方法
JP2016164977A (ja) * 2015-02-27 2016-09-08 キヤノン株式会社 ナノインプリント用液体材料、ナノインプリント用液体材料の製造方法、硬化物パターンの製造方法、光学部品の製造方法、回路基板の製造方法、および電子部品の製造方法
JP6562707B2 (ja) * 2015-05-13 2019-08-21 キヤノン株式会社 インプリント装置、インプリント方法及び物品の製造方法
WO2017073388A1 (ja) * 2015-10-29 2017-05-04 国立研究開発法人産業技術総合研究所 インプリント装置
JP6643048B2 (ja) * 2015-11-09 2020-02-12 キヤノン株式会社 基板を処理する装置、物品の製造方法、および気体供給経路
US11194247B2 (en) 2018-01-31 2021-12-07 Canon Kabushiki Kaisha Extrusion control by capillary force reduction
JP7278828B2 (ja) * 2019-03-26 2023-05-22 キヤノン株式会社 成形方法、成形装置、インプリント方法、および物品の製造方法
IL318240A (en) 2019-12-25 2025-03-01 Scivax Corp Imprinting Device and Imprinting Method
JP7581033B2 (ja) * 2020-12-11 2024-11-12 キヤノン株式会社 インプリント装置、インプリント方法、物品の製造方法、およびコンピュータプログラム
TWI898644B (zh) * 2024-06-07 2025-09-21 志聖工業股份有限公司 壓合裝置

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US10386717B2 (en) 2019-08-20
US20160147143A1 (en) 2016-05-26
CN105359254A (zh) 2016-02-24
EP3000120A4 (en) 2017-03-15
TWI541857B (zh) 2016-07-11
WO2014208571A1 (en) 2014-12-31
EP3000120A1 (en) 2016-03-30
JP6494185B2 (ja) 2019-04-03
KR20160021274A (ko) 2016-02-24
JP2015029073A (ja) 2015-02-12
TW201506996A (zh) 2015-02-16
EP3000120B1 (en) 2022-01-12

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