KR101945789B1 - 전동 액추에이터 - Google Patents

전동 액추에이터 Download PDF

Info

Publication number
KR101945789B1
KR101945789B1 KR1020120147330A KR20120147330A KR101945789B1 KR 101945789 B1 KR101945789 B1 KR 101945789B1 KR 1020120147330 A KR1020120147330 A KR 1020120147330A KR 20120147330 A KR20120147330 A KR 20120147330A KR 101945789 B1 KR101945789 B1 KR 101945789B1
Authority
KR
South Korea
Prior art keywords
negative pressure
pressure supply
axial direction
suction holes
dust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020120147330A
Other languages
English (en)
Korean (ko)
Other versions
KR20130082434A (ko
Inventor
요시히로 후카노
쇼이치 마카도
히로유키 시오미
Original Assignee
에스엠시 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 에스엠시 가부시키가이샤 filed Critical 에스엠시 가부시키가이샤
Publication of KR20130082434A publication Critical patent/KR20130082434A/ko
Application granted granted Critical
Publication of KR101945789B1 publication Critical patent/KR101945789B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H25/24—Elements essential to such mechanisms, e.g. screws, nuts
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K5/00—Casings; Enclosures; Supports
    • H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
    • H02K5/12—Casings or enclosures characterised by the shape, form or construction thereof specially adapted for operating in liquid or gas
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/06—Means for converting reciprocating motion into rotary motion or vice versa
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H2025/2031—Actuator casings
    • F16H2025/2034—Extruded frame casings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H25/22—Screw mechanisms with balls, rollers, or similar members between the co-operating parts; Elements essential to the use of such members
    • F16H25/2204—Screw mechanisms with balls, rollers, or similar members between the co-operating parts; Elements essential to the use of such members with balls
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H25/24—Elements essential to such mechanisms, e.g. screws, nuts
    • F16H25/2418—Screw seals, wipers, scrapers or the like
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/18—Mechanical movements
    • Y10T74/18568—Reciprocating or oscillating to or from alternating rotary
    • Y10T74/18576—Reciprocating or oscillating to or from alternating rotary including screw and nut
    • Y10T74/18664—Shaft moves through rotary drive means

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Transmission Devices (AREA)
  • Cleaning In General (AREA)
  • Manipulator (AREA)
  • Motor Or Generator Frames (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
KR1020120147330A 2012-01-11 2012-12-17 전동 액추에이터 Active KR101945789B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2012-002641 2012-01-11
JP2012002641A JP2013143824A (ja) 2012-01-11 2012-01-11 電動アクチュエータ

Publications (2)

Publication Number Publication Date
KR20130082434A KR20130082434A (ko) 2013-07-19
KR101945789B1 true KR101945789B1 (ko) 2019-02-08

Family

ID=48652722

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020120147330A Active KR101945789B1 (ko) 2012-01-11 2012-12-17 전동 액추에이터

Country Status (6)

Country Link
US (1) US8973452B2 (enExample)
JP (1) JP2013143824A (enExample)
KR (1) KR101945789B1 (enExample)
CN (1) CN103206500B (enExample)
DE (1) DE102013100047A1 (enExample)
TW (1) TWI583875B (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20140093212A (ko) * 2011-11-22 2014-07-25 가부시기가이샤 아이 에이 아이 액추에이터
US20140326091A1 (en) * 2013-05-06 2014-11-06 Velmex, Inc. Miniature Linear Positioning System
CN104728379B (zh) * 2013-12-18 2017-05-10 上银科技股份有限公司 滚珠螺杆支撑装置
CN103982613B (zh) * 2014-05-12 2016-04-20 武汉电力设备厂 一种用于带电环境下的直线运动装置
JP6506508B2 (ja) * 2014-06-26 2019-04-24 日本トムソン株式会社 アクチュエータ
CN105549334B (zh) * 2016-01-28 2017-12-29 武汉华星光电技术有限公司 曝光机
DE102016211670A1 (de) * 2016-06-29 2018-01-04 MTU Aero Engines AG Vorrichtung zur Energieversorgung bewegter Maschinenkomponenten
US11280996B2 (en) 2016-10-19 2022-03-22 Sony Corporation Light source unit and projection display apparatus
CN106773551B (zh) * 2017-01-23 2018-11-09 武汉华星光电技术有限公司 曝光机
CN107882966A (zh) * 2017-12-27 2018-04-06 洛阳明创矿山冶金设备有限公司 一种可提高减速机效率的辅助装置
CN109139848A (zh) * 2018-08-31 2019-01-04 江门市天功自动化科技有限公司 一种新型滑座结构及其加工工艺
US20220074253A1 (en) * 2020-09-10 2022-03-10 Nick Ede Linear actuator
US11620868B2 (en) 2021-07-22 2023-04-04 Trinity Axis Inc. Techniques to dispense an item and release a jammed item from a dispensing system
CN113777891B (zh) * 2021-08-19 2022-08-26 杭州新诺微电子有限公司 可移动压板结构及具有该结构的曝光机及曝光机压板方法
CN114542677B (zh) * 2022-03-07 2025-10-24 奥特(南京)智能制造有限公司 一种用于直线传动机构中叠式抽拉防尘装置

Family Cites Families (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3620969A1 (de) * 1985-06-24 1987-01-02 Canon Kk Praezisionszufuehrmechanismus
JPH02106282A (ja) * 1988-10-11 1990-04-18 Mitsubishi Electric Corp 産業用ロボット
JPH058194A (ja) * 1991-07-02 1993-01-19 Sony Corp 直交型ロボツトの集塵構造
JPH0516092A (ja) * 1991-07-08 1993-01-26 Sony Corp 直交型ロボツトの集塵構造
US5799543A (en) * 1993-09-02 1998-09-01 Smc Kabushiki Kaisha Actuator structural body
JP3347844B2 (ja) * 1993-10-12 2002-11-20 エスエムシー株式会社 バランサ
EP0896855B1 (en) * 1993-10-12 2003-02-26 SMC Kabushiki Kaisha Actuator
US5637940A (en) * 1994-04-05 1997-06-10 Smc Kabushiki Kaisha Electric Actuator
JP2700621B2 (ja) * 1995-02-20 1998-01-21 セイコー精機株式会社 ロボット
JP3695784B2 (ja) * 1995-03-08 2005-09-14 Ｓｍｃ株式会社 電動アクチュエータ
JP3705641B2 (ja) * 1996-01-19 2005-10-12 Ｓｍｃ株式会社 アクチュエータ
DE19882072T1 (de) * 1997-02-05 2000-01-27 Smc Kk Stellglied und Steuervorrichtung hierfür
JPH11235690A (ja) * 1998-02-18 1999-08-31 Shibaura Mechatronics Corp 産業ロボットにおける排気構造、及びこれを備えた産業ロボット
JP2000088070A (ja) * 1998-09-09 2000-03-28 Smc Corp 電動アクチュエータ
JP3543065B2 (ja) * 1999-04-16 2004-07-14 Ｓｍｃ株式会社 直線作動装置
JP2002046039A (ja) * 2000-08-01 2002-02-12 Smc Corp 電動アクチュエーター
WO2002016073A1 (de) * 2000-08-18 2002-02-28 Rexroth Star Gmbh Linearführungseinheit
US6656133B2 (en) * 2000-10-13 2003-12-02 Ethicon Endo-Surgery, Inc. Transmission assembly for a surgical biopsy device
JP2003014070A (ja) * 2001-07-02 2003-01-15 Smc Corp 電動アクチュエータ
JP4221564B2 (ja) 2002-11-01 2009-02-12 日本精工株式会社 電動アクチュエータ
JP2005036899A (ja) * 2003-07-15 2005-02-10 Smc Corp 電動アクチュエータ
DE102004055306B4 (de) * 2003-11-21 2007-06-14 Smc K.K. Stellglied
JP4500102B2 (ja) * 2004-05-13 2010-07-14 日本トムソン株式会社 スライド装置
JP2007270860A (ja) * 2006-03-30 2007-10-18 Smc Corp 電動アクチュエータ
WO2009034804A1 (ja) * 2007-09-13 2009-03-19 Thk Co., Ltd. 防塵機構付きリニアアクチュエータ
TWI383276B (zh) * 2007-12-04 2013-01-21 Smc Kk 電動致動器
TWI426685B (zh) * 2008-04-17 2014-02-11 Smc Kk 電動致動器
US8196484B2 (en) * 2008-04-18 2012-06-12 Tol-O-Matic, Inc. Electric actuator
JP5306838B2 (ja) * 2008-12-26 2013-10-02 ナブテスコ株式会社 電動アクチュエータ
CN101931285B (zh) * 2009-06-19 2014-11-05 黑田精工株式会社 直动装置
JP5417132B2 (ja) * 2009-11-26 2014-02-12 Ｎｔｎ株式会社 電動アクチュエータ
JP5547563B2 (ja) * 2010-06-25 2014-07-16 Ｎｔｎ株式会社 電動アクチュエータ
JP2013008857A (ja) * 2011-06-24 2013-01-10 Panasonic Industrial Devices Sunx Co Ltd ファイバレーザ発振器及びファイバレーザ加工装置

Also Published As

Publication number Publication date
US8973452B2 (en) 2015-03-10
DE102013100047A1 (de) 2013-07-11
TW201341690A (zh) 2013-10-16
US20130174679A1 (en) 2013-07-11
CN103206500A (zh) 2013-07-17
TWI583875B (zh) 2017-05-21
KR20130082434A (ko) 2013-07-19
CN103206500B (zh) 2017-08-15
JP2013143824A (ja) 2013-07-22

Similar Documents

Publication Publication Date Title
KR101945789B1 (ko) 전동 액추에이터
KR20080005766U (ko) 스핀들 유닛
KR102049219B1 (ko) 회전축 장치 및 상기 회전축 장치를 구비한 방전 가공기
CN102633107B (zh) 集成电路换向装置
JP6229651B2 (ja) チャック装置
US20160108932A1 (en) Pneumatic mechanism
CN1749582A (zh) 气缸装置
KR100537785B1 (ko) 전동액츄에이터
CN212793125U (zh) 一种阀门加工用打孔装置
CN103894384B (zh) 一种用于清洗设备的多维传动装置
US8568032B2 (en) Clean room-suitable linear guide
KR101715677B1 (ko) 유압기어펌프
CN112514550A (zh) 致动器
TWM594986U (zh) 油水分離機
US6119726A (en) Apparatus for effecting transfer of fluid from any one of a plurality of fluid sources to a single fluid outlet
CN105478940B (zh) 一种用于内部弯曲孔电火花加工的柔性传动装置
CN110732905B (zh) 一种采用包覆式夹持的磁性夹具
EP3814058B1 (en) A power screw driver
JPWO2017081775A1 (ja) 実装シャフト装置、実装ヘッド、表面実装機
CN103769932B (zh) 高速旋转加工机构
KR102776778B1 (ko) 덴탈용 드릴 기기의 패시브 에어 커튼 스핀들
KR101623330B1 (ko) 기체의 압축배출이 가능한 진공펌프
KR101555464B1 (ko) 스크류형 진공펌프
KR102412059B1 (ko) 유체이송용 정밀펌프
US9072569B2 (en) Medical air-driven handpiece with anti-retraction stop

Legal Events

Date Code Title Description
PA0109 Patent application

Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 20121217

PG1501 Laying open of application
A201 Request for examination
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20170906

Comment text: Request for Examination of Application

Patent event code: PA02011R01I

Patent event date: 20121217

Comment text: Patent Application

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20180822

Patent event code: PE09021S01D

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 20181227

GRNT Written decision to grant
PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 20190130

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 20190131

End annual number: 3

Start annual number: 1

PG1601 Publication of registration
PR1001 Payment of annual fee

Payment date: 20220121

Start annual number: 4

End annual number: 4

PR1001 Payment of annual fee

Payment date: 20240119

Start annual number: 6

End annual number: 6