CN103206500B - 电动执行机构 - Google Patents

电动执行机构 Download PDF

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Publication number
CN103206500B
CN103206500B CN201310011454.4A CN201310011454A CN103206500B CN 103206500 B CN103206500 B CN 103206500B CN 201310011454 A CN201310011454 A CN 201310011454A CN 103206500 B CN103206500 B CN 103206500B
Authority
CN
China
Prior art keywords
negative pressure
pressure supply
suction holes
electric actuator
supply ports
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201310011454.4A
Other languages
English (en)
Chinese (zh)
Other versions
CN103206500A (zh
Inventor
深野喜弘
马门正
马门正一
盐见裕幸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SMC Corp
Original Assignee
SMC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SMC Corp filed Critical SMC Corp
Publication of CN103206500A publication Critical patent/CN103206500A/zh
Application granted granted Critical
Publication of CN103206500B publication Critical patent/CN103206500B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H25/24—Elements essential to such mechanisms, e.g. screws, nuts
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K5/00—Casings; Enclosures; Supports
    • H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
    • H02K5/12—Casings or enclosures characterised by the shape, form or construction thereof specially adapted for operating in liquid or gas
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/06—Means for converting reciprocating motion into rotary motion or vice versa
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H2025/2031—Actuator casings
    • F16H2025/2034—Extruded frame casings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H25/22—Screw mechanisms with balls, rollers, or similar members between the co-operating parts; Elements essential to the use of such members
    • F16H25/2204—Screw mechanisms with balls, rollers, or similar members between the co-operating parts; Elements essential to the use of such members with balls
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H25/24—Elements essential to such mechanisms, e.g. screws, nuts
    • F16H25/2418—Screw seals, wipers, scrapers or the like
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/18—Mechanical movements
    • Y10T74/18568—Reciprocating or oscillating to or from alternating rotary
    • Y10T74/18576—Reciprocating or oscillating to or from alternating rotary including screw and nut
    • Y10T74/18664—Shaft moves through rotary drive means

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Transmission Devices (AREA)
  • Cleaning In General (AREA)
  • Manipulator (AREA)
  • Motor Or Generator Frames (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
CN201310011454.4A 2012-01-11 2013-01-11 电动执行机构 Active CN103206500B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012002641A JP2013143824A (ja) 2012-01-11 2012-01-11 電動アクチュエータ
JP2012-002641 2012-01-11

Publications (2)

Publication Number Publication Date
CN103206500A CN103206500A (zh) 2013-07-17
CN103206500B true CN103206500B (zh) 2017-08-15

Family

ID=48652722

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201310011454.4A Active CN103206500B (zh) 2012-01-11 2013-01-11 电动执行机构

Country Status (6)

Country Link
US (1) US8973452B2 (enExample)
JP (1) JP2013143824A (enExample)
KR (1) KR101945789B1 (enExample)
CN (1) CN103206500B (enExample)
DE (1) DE102013100047A1 (enExample)
TW (1) TWI583875B (enExample)

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KR20140093212A (ko) * 2011-11-22 2014-07-25 가부시기가이샤 아이 에이 아이 액추에이터
US20140326091A1 (en) * 2013-05-06 2014-11-06 Velmex, Inc. Miniature Linear Positioning System
CN104728379B (zh) * 2013-12-18 2017-05-10 上银科技股份有限公司 滚珠螺杆支撑装置
CN103982613B (zh) * 2014-05-12 2016-04-20 武汉电力设备厂 一种用于带电环境下的直线运动装置
JP6506508B2 (ja) * 2014-06-26 2019-04-24 日本トムソン株式会社 アクチュエータ
CN105549334B (zh) * 2016-01-28 2017-12-29 武汉华星光电技术有限公司 曝光机
DE102016211670A1 (de) * 2016-06-29 2018-01-04 MTU Aero Engines AG Vorrichtung zur Energieversorgung bewegter Maschinenkomponenten
US11280996B2 (en) 2016-10-19 2022-03-22 Sony Corporation Light source unit and projection display apparatus
CN106773551B (zh) * 2017-01-23 2018-11-09 武汉华星光电技术有限公司 曝光机
CN107882966A (zh) * 2017-12-27 2018-04-06 洛阳明创矿山冶金设备有限公司 一种可提高减速机效率的辅助装置
CN109139848A (zh) * 2018-08-31 2019-01-04 江门市天功自动化科技有限公司 一种新型滑座结构及其加工工艺
US20220074253A1 (en) * 2020-09-10 2022-03-10 Nick Ede Linear actuator
US11620868B2 (en) 2021-07-22 2023-04-04 Trinity Axis Inc. Techniques to dispense an item and release a jammed item from a dispensing system
CN113777891B (zh) * 2021-08-19 2022-08-26 杭州新诺微电子有限公司 可移动压板结构及具有该结构的曝光机及曝光机压板方法
CN114542677B (zh) * 2022-03-07 2025-10-24 奥特(南京)智能制造有限公司 一种用于直线传动机构中叠式抽拉防尘装置

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DE3620969A1 (de) * 1985-06-24 1987-01-02 Canon Kk Praezisionszufuehrmechanismus
JPH02106282A (ja) * 1988-10-11 1990-04-18 Mitsubishi Electric Corp 産業用ロボット
JPH058194A (ja) * 1991-07-02 1993-01-19 Sony Corp 直交型ロボツトの集塵構造
JPH0516092A (ja) * 1991-07-08 1993-01-26 Sony Corp 直交型ロボツトの集塵構造
US5799543A (en) * 1993-09-02 1998-09-01 Smc Kabushiki Kaisha Actuator structural body
JP3347844B2 (ja) * 1993-10-12 2002-11-20 エスエムシー株式会社 バランサ
EP0896855B1 (en) * 1993-10-12 2003-02-26 SMC Kabushiki Kaisha Actuator
US5637940A (en) * 1994-04-05 1997-06-10 Smc Kabushiki Kaisha Electric Actuator
JP2700621B2 (ja) * 1995-02-20 1998-01-21 セイコー精機株式会社 ロボット
JP3695784B2 (ja) * 1995-03-08 2005-09-14 Ｓｍｃ株式会社 電動アクチュエータ
JP3705641B2 (ja) * 1996-01-19 2005-10-12 Ｓｍｃ株式会社 アクチュエータ
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JPH11235690A (ja) * 1998-02-18 1999-08-31 Shibaura Mechatronics Corp 産業ロボットにおける排気構造、及びこれを備えた産業ロボット
JP2000088070A (ja) * 1998-09-09 2000-03-28 Smc Corp 電動アクチュエータ
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JP2002046039A (ja) * 2000-08-01 2002-02-12 Smc Corp 電動アクチュエーター
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CN101931285B (zh) * 2009-06-19 2014-11-05 黑田精工株式会社 直动装置
JP5417132B2 (ja) * 2009-11-26 2014-02-12 Ｎｔｎ株式会社 電動アクチュエータ
JP5547563B2 (ja) * 2010-06-25 2014-07-16 Ｎｔｎ株式会社 電動アクチュエータ
JP2013008857A (ja) * 2011-06-24 2013-01-10 Panasonic Industrial Devices Sunx Co Ltd ファイバレーザ発振器及びファイバレーザ加工装置

Also Published As

Publication number Publication date
US8973452B2 (en) 2015-03-10
DE102013100047A1 (de) 2013-07-11
TW201341690A (zh) 2013-10-16
US20130174679A1 (en) 2013-07-11
CN103206500A (zh) 2013-07-17
TWI583875B (zh) 2017-05-21
KR101945789B1 (ko) 2019-02-08
KR20130082434A (ko) 2013-07-19
JP2013143824A (ja) 2013-07-22

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