TWI583875B - 電動致動器 - Google Patents

電動致動器 Download PDF

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Publication number
TWI583875B
TWI583875B TW101145422A TW101145422A TWI583875B TW I583875 B TWI583875 B TW I583875B TW 101145422 A TW101145422 A TW 101145422A TW 101145422 A TW101145422 A TW 101145422A TW I583875 B TWI583875 B TW I583875B
Authority
TW
Taiwan
Prior art keywords
negative pressure
pressure supply
electric actuator
suction holes
dust
Prior art date
Application number
TW101145422A
Other languages
English (en)
Chinese (zh)
Other versions
TW201341690A (zh
Inventor
深野喜弘
馬門正一
鹽見裕幸
Original Assignee
Ｓｍｃ股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ｓｍｃ股份有限公司 filed Critical Ｓｍｃ股份有限公司
Publication of TW201341690A publication Critical patent/TW201341690A/zh
Application granted granted Critical
Publication of TWI583875B publication Critical patent/TWI583875B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H25/24—Elements essential to such mechanisms, e.g. screws, nuts
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K5/00—Casings; Enclosures; Supports
    • H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
    • H02K5/12—Casings or enclosures characterised by the shape, form or construction thereof specially adapted for operating in liquid or gas
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/06—Means for converting reciprocating motion into rotary motion or vice versa
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H2025/2031—Actuator casings
    • F16H2025/2034—Extruded frame casings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H25/22—Screw mechanisms with balls, rollers, or similar members between the co-operating parts; Elements essential to the use of such members
    • F16H25/2204—Screw mechanisms with balls, rollers, or similar members between the co-operating parts; Elements essential to the use of such members with balls
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H25/24—Elements essential to such mechanisms, e.g. screws, nuts
    • F16H25/2418—Screw seals, wipers, scrapers or the like
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/18—Mechanical movements
    • Y10T74/18568—Reciprocating or oscillating to or from alternating rotary
    • Y10T74/18576—Reciprocating or oscillating to or from alternating rotary including screw and nut
    • Y10T74/18664—Shaft moves through rotary drive means

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Transmission Devices (AREA)
  • Cleaning In General (AREA)
  • Manipulator (AREA)
  • Motor Or Generator Frames (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
TW101145422A 2012-01-11 2012-12-04 電動致動器 TWI583875B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012002641A JP2013143824A (ja) 2012-01-11 2012-01-11 電動アクチュエータ

Publications (2)

Publication Number Publication Date
TW201341690A TW201341690A (zh) 2013-10-16
TWI583875B true TWI583875B (zh) 2017-05-21

Family

ID=48652722

Family Applications (1)

Application Number Title Priority Date Filing Date
TW101145422A TWI583875B (zh) 2012-01-11 2012-12-04 電動致動器

Country Status (6)

Country Link
US (1) US8973452B2 (enExample)
JP (1) JP2013143824A (enExample)
KR (1) KR101945789B1 (enExample)
CN (1) CN103206500B (enExample)
DE (1) DE102013100047A1 (enExample)
TW (1) TWI583875B (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20140093212A (ko) * 2011-11-22 2014-07-25 가부시기가이샤 아이 에이 아이 액추에이터
US20140326091A1 (en) * 2013-05-06 2014-11-06 Velmex, Inc. Miniature Linear Positioning System
CN104728379B (zh) * 2013-12-18 2017-05-10 上银科技股份有限公司 滚珠螺杆支撑装置
CN103982613B (zh) * 2014-05-12 2016-04-20 武汉电力设备厂 一种用于带电环境下的直线运动装置
JP6506508B2 (ja) * 2014-06-26 2019-04-24 日本トムソン株式会社 アクチュエータ
CN105549334B (zh) * 2016-01-28 2017-12-29 武汉华星光电技术有限公司 曝光机
DE102016211670A1 (de) * 2016-06-29 2018-01-04 MTU Aero Engines AG Vorrichtung zur Energieversorgung bewegter Maschinenkomponenten
US11280996B2 (en) 2016-10-19 2022-03-22 Sony Corporation Light source unit and projection display apparatus
CN106773551B (zh) * 2017-01-23 2018-11-09 武汉华星光电技术有限公司 曝光机
CN107882966A (zh) * 2017-12-27 2018-04-06 洛阳明创矿山冶金设备有限公司 一种可提高减速机效率的辅助装置
CN109139848A (zh) * 2018-08-31 2019-01-04 江门市天功自动化科技有限公司 一种新型滑座结构及其加工工艺
US20220074253A1 (en) * 2020-09-10 2022-03-10 Nick Ede Linear actuator
US11620868B2 (en) 2021-07-22 2023-04-04 Trinity Axis Inc. Techniques to dispense an item and release a jammed item from a dispensing system
CN113777891B (zh) * 2021-08-19 2022-08-26 杭州新诺微电子有限公司 可移动压板结构及具有该结构的曝光机及曝光机压板方法
CN114542677B (zh) * 2022-03-07 2025-10-24 奥特(南京)智能制造有限公司 一种用于直线传动机构中叠式抽拉防尘装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0516092A (ja) * 1991-07-08 1993-01-26 Sony Corp 直交型ロボツトの集塵構造
US5713244A (en) * 1995-02-20 1998-02-03 Seiko Seiki Kabushiki Kaisha Robot

Family Cites Families (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3620969A1 (de) * 1985-06-24 1987-01-02 Canon Kk Praezisionszufuehrmechanismus
JPH02106282A (ja) * 1988-10-11 1990-04-18 Mitsubishi Electric Corp 産業用ロボット
JPH058194A (ja) * 1991-07-02 1993-01-19 Sony Corp 直交型ロボツトの集塵構造
US5799543A (en) * 1993-09-02 1998-09-01 Smc Kabushiki Kaisha Actuator structural body
JP3347844B2 (ja) * 1993-10-12 2002-11-20 エスエムシー株式会社 バランサ
EP0896855B1 (en) * 1993-10-12 2003-02-26 SMC Kabushiki Kaisha Actuator
US5637940A (en) * 1994-04-05 1997-06-10 Smc Kabushiki Kaisha Electric Actuator
JP3695784B2 (ja) * 1995-03-08 2005-09-14 Ｓｍｃ株式会社 電動アクチュエータ
JP3705641B2 (ja) * 1996-01-19 2005-10-12 Ｓｍｃ株式会社 アクチュエータ
DE19882072T1 (de) * 1997-02-05 2000-01-27 Smc Kk Stellglied und Steuervorrichtung hierfür
JPH11235690A (ja) * 1998-02-18 1999-08-31 Shibaura Mechatronics Corp 産業ロボットにおける排気構造、及びこれを備えた産業ロボット
JP2000088070A (ja) * 1998-09-09 2000-03-28 Smc Corp 電動アクチュエータ
JP3543065B2 (ja) * 1999-04-16 2004-07-14 Ｓｍｃ株式会社 直線作動装置
JP2002046039A (ja) * 2000-08-01 2002-02-12 Smc Corp 電動アクチュエーター
WO2002016073A1 (de) * 2000-08-18 2002-02-28 Rexroth Star Gmbh Linearführungseinheit
US6656133B2 (en) * 2000-10-13 2003-12-02 Ethicon Endo-Surgery, Inc. Transmission assembly for a surgical biopsy device
JP2003014070A (ja) * 2001-07-02 2003-01-15 Smc Corp 電動アクチュエータ
JP4221564B2 (ja) 2002-11-01 2009-02-12 日本精工株式会社 電動アクチュエータ
JP2005036899A (ja) * 2003-07-15 2005-02-10 Smc Corp 電動アクチュエータ
DE102004055306B4 (de) * 2003-11-21 2007-06-14 Smc K.K. Stellglied
JP4500102B2 (ja) * 2004-05-13 2010-07-14 日本トムソン株式会社 スライド装置
JP2007270860A (ja) * 2006-03-30 2007-10-18 Smc Corp 電動アクチュエータ
WO2009034804A1 (ja) * 2007-09-13 2009-03-19 Thk Co., Ltd. 防塵機構付きリニアアクチュエータ
TWI383276B (zh) * 2007-12-04 2013-01-21 Smc Kk 電動致動器
TWI426685B (zh) * 2008-04-17 2014-02-11 Smc Kk 電動致動器
US8196484B2 (en) * 2008-04-18 2012-06-12 Tol-O-Matic, Inc. Electric actuator
JP5306838B2 (ja) * 2008-12-26 2013-10-02 ナブテスコ株式会社 電動アクチュエータ
CN101931285B (zh) * 2009-06-19 2014-11-05 黑田精工株式会社 直动装置
JP5417132B2 (ja) * 2009-11-26 2014-02-12 Ｎｔｎ株式会社 電動アクチュエータ
JP5547563B2 (ja) * 2010-06-25 2014-07-16 Ｎｔｎ株式会社 電動アクチュエータ
JP2013008857A (ja) * 2011-06-24 2013-01-10 Panasonic Industrial Devices Sunx Co Ltd ファイバレーザ発振器及びファイバレーザ加工装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0516092A (ja) * 1991-07-08 1993-01-26 Sony Corp 直交型ロボツトの集塵構造
US5713244A (en) * 1995-02-20 1998-02-03 Seiko Seiki Kabushiki Kaisha Robot

Also Published As

Publication number Publication date
US8973452B2 (en) 2015-03-10
DE102013100047A1 (de) 2013-07-11
TW201341690A (zh) 2013-10-16
US20130174679A1 (en) 2013-07-11
CN103206500A (zh) 2013-07-17
KR101945789B1 (ko) 2019-02-08
KR20130082434A (ko) 2013-07-19
CN103206500B (zh) 2017-08-15
JP2013143824A (ja) 2013-07-22

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