KR101905590B1 - 얇은 n-형 영역을 갖는 ⅲ-v족 발광 디바이스 - Google Patents

얇은 n-형 영역을 갖는 ⅲ-v족 발광 디바이스 Download PDF

Info

Publication number
KR101905590B1
KR101905590B1 KR1020177020575A KR20177020575A KR101905590B1 KR 101905590 B1 KR101905590 B1 KR 101905590B1 KR 1020177020575 A KR1020177020575 A KR 1020177020575A KR 20177020575 A KR20177020575 A KR 20177020575A KR 101905590 B1 KR101905590 B1 KR 101905590B1
Authority
KR
South Korea
Prior art keywords
type region
contact
transparent conductive
layer
iii nitride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020177020575A
Other languages
English (en)
Korean (ko)
Other versions
KR20170098304A (ko
Inventor
프레데릭 듀퐁
존 이. 에플러
Original Assignee
코닌클리케 필립스 엔.브이.
루미레즈 엘엘씨
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 코닌클리케 필립스 엔.브이., 루미레즈 엘엘씨 filed Critical 코닌클리케 필립스 엔.브이.
Publication of KR20170098304A publication Critical patent/KR20170098304A/ko
Application granted granted Critical
Publication of KR101905590B1 publication Critical patent/KR101905590B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H01L33/42
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/83Electrodes
    • H10H20/832Electrodes characterised by their material
    • H10H20/833Transparent materials
    • H01L33/0079
    • H01L33/10
    • H01L33/30
    • H01L33/32
    • H01L33/505
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/01Manufacture or treatment
    • H10H20/011Manufacture or treatment of bodies, e.g. forming semiconductor layers
    • H10H20/018Bonding of wafers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/01Manufacture or treatment
    • H10H20/032Manufacture or treatment of electrodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/81Bodies
    • H10H20/814Bodies having reflecting means, e.g. semiconductor Bragg reflectors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/81Bodies
    • H10H20/822Materials of the light-emitting regions
    • H10H20/824Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/81Bodies
    • H10H20/822Materials of the light-emitting regions
    • H10H20/824Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP
    • H10H20/825Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP containing nitrogen, e.g. GaN
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/85Packages
    • H10H20/851Wavelength conversion means
    • H10H20/8514Wavelength conversion means characterised by their shape, e.g. plate or foil
    • H01L2933/0016

Landscapes

  • Led Devices (AREA)
  • Led Device Packages (AREA)
KR1020177020575A 2009-11-23 2010-11-12 얇은 n-형 영역을 갖는 ⅲ-v족 발광 디바이스 Active KR101905590B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/624,268 2009-11-23
US12/624,268 US8581229B2 (en) 2009-11-23 2009-11-23 III-V light emitting device with thin n-type region
PCT/IB2010/055147 WO2011061664A1 (en) 2009-11-23 2010-11-12 Iii-v light emitting device with thin n-type region

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
KR1020127016290A Division KR101762368B1 (ko) 2009-11-23 2010-11-12 얇은 n-형 영역을 갖는 ⅲ-v족 발광 디바이스

Publications (2)

Publication Number Publication Date
KR20170098304A KR20170098304A (ko) 2017-08-29
KR101905590B1 true KR101905590B1 (ko) 2018-10-10

Family

ID=43502070

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020177020575A Active KR101905590B1 (ko) 2009-11-23 2010-11-12 얇은 n-형 영역을 갖는 ⅲ-v족 발광 디바이스
KR1020127016290A Active KR101762368B1 (ko) 2009-11-23 2010-11-12 얇은 n-형 영역을 갖는 ⅲ-v족 발광 디바이스

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020127016290A Active KR101762368B1 (ko) 2009-11-23 2010-11-12 얇은 n-형 영역을 갖는 ⅲ-v족 발광 디바이스

Country Status (7)

Country Link
US (2) US8581229B2 (enExample)
EP (1) EP2504868B1 (enExample)
JP (1) JP5674806B2 (enExample)
KR (2) KR101905590B1 (enExample)
CN (1) CN102714255B (enExample)
TW (1) TWI523258B (enExample)
WO (1) WO2011061664A1 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011012298A1 (de) * 2010-12-28 2012-06-28 Osram Opto Semiconductors Gmbh Verbundsubstrat, Halbleiterchip mit Verbundsubstrat und Verfahren zur Herstellung von Verbundsubstraten und Halbleiterchips
KR20120099318A (ko) * 2011-01-26 2012-09-10 엘지이노텍 주식회사 발광 소자 및 그 제조방법
CN103748696B (zh) 2011-08-26 2018-06-22 亮锐控股有限公司 加工半导体结构的方法
JP2014027092A (ja) * 2012-07-26 2014-02-06 Sharp Corp 半導体発光素子
CN104508815B (zh) 2012-07-31 2018-02-13 索泰克公司 使用激光剥离过程制造半导体结构的方法和相关的半导体结构
US9653647B2 (en) 2013-06-14 2017-05-16 Micron Technology, Inc. Ultrathin solid state dies and methods of manufacturing the same
EA201691900A1 (ru) * 2014-03-31 2017-05-31 Наньян Текнолоджикал Юнивёрсити Способ повторного использования подложек и несущих подложек
DE102016124646A1 (de) * 2016-12-16 2018-06-21 Osram Opto Semiconductors Gmbh Verfahren zur Herstellung eines Halbleiterbauelements
CN111933765B (zh) * 2020-07-03 2022-04-26 厦门士兰明镓化合物半导体有限公司 微型发光二极管及制作方法,微型led显示模块及制作方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR200370465Y1 (ko) * 2004-04-23 2004-12-17 슈퍼노바 옵토일렉트로닉스 코포레이션 갈륨 질화물계 발광 다이오드의 수직 전극 구조
JP2005012188A (ja) * 2003-05-22 2005-01-13 Matsushita Electric Ind Co Ltd 半導体素子の製造方法
JP2008053425A (ja) * 2006-08-24 2008-03-06 Matsushita Electric Ind Co Ltd 半導体発光装置

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3757544B2 (ja) * 1997-05-21 2006-03-22 昭和電工株式会社 Iii族窒化物半導体発光素子
US20040248335A1 (en) 2001-01-09 2004-12-09 Ivan Eliashevich Electrode structures for p-type nitride semiconductores and methods of making same
JP3896027B2 (ja) * 2002-04-17 2007-03-22 シャープ株式会社 窒化物系半導体発光素子およびその製造方法
TWI249148B (en) * 2004-04-13 2006-02-11 Epistar Corp Light-emitting device array having binding layer
US7880182B2 (en) * 2002-07-15 2011-02-01 Epistar Corporation Light-emitting element array
JP4135567B2 (ja) * 2003-06-10 2008-08-20 松下電器産業株式会社 キャップ取り外し装置
US20050173724A1 (en) * 2004-02-11 2005-08-11 Heng Liu Group III-nitride based LED having a transparent current spreading layer
JP2005268581A (ja) * 2004-03-19 2005-09-29 Matsushita Electric Ind Co Ltd 窒化ガリウム系化合物半導体発光素子
US7361938B2 (en) * 2004-06-03 2008-04-22 Philips Lumileds Lighting Company Llc Luminescent ceramic for a light emitting device
TWI299914B (en) * 2004-07-12 2008-08-11 Epistar Corp Light emitting diode with transparent electrically conductive layer and omni directional reflector
US8334155B2 (en) * 2005-09-27 2012-12-18 Philips Lumileds Lighting Company Llc Substrate for growing a III-V light emitting device
JP5232970B2 (ja) * 2006-04-13 2013-07-10 豊田合成株式会社 半導体発光素子の製造方法及び半導体発光素子とそれを備えたランプ
JP4929924B2 (ja) * 2006-08-25 2012-05-09 サンケン電気株式会社 半導体発光素子、その製造方法、及び複合半導体装置
JP2008177525A (ja) * 2006-12-20 2008-07-31 Showa Denko Kk Iii族窒化物半導体発光素子の製造方法、及びiii族窒化物半導体発光素子、並びにランプ
US8704254B2 (en) * 2006-12-22 2014-04-22 Philips Lumileds Lighting Company, Llc Light emitting device including a filter
US7951693B2 (en) * 2006-12-22 2011-05-31 Philips Lumileds Lighting Company, Llc III-nitride light emitting devices grown on templates to reduce strain
TWI331411B (en) * 2006-12-29 2010-10-01 Epistar Corp High efficiency light-emitting diode and method for manufacturing the same
US7791096B2 (en) * 2007-06-08 2010-09-07 Koninklijke Philips Electronics N.V. Mount for a semiconductor light emitting device
US20090050905A1 (en) * 2007-08-20 2009-02-26 Abu-Ageel Nayef M Highly Efficient Light-Emitting Diode
US20090140279A1 (en) * 2007-12-03 2009-06-04 Goldeneye, Inc. Substrate-free light emitting diode chip
KR101025948B1 (ko) * 2007-12-21 2011-03-30 삼성엘이디 주식회사 질화물 반도체 발광소자 및 그 제조방법
US7939839B2 (en) * 2008-09-11 2011-05-10 Bridgelux, Inc. Series connected segmented LED
US9117944B2 (en) * 2008-09-24 2015-08-25 Koninklijke Philips N.V. Semiconductor light emitting devices grown on composite substrates
US8089091B2 (en) * 2009-06-18 2012-01-03 Koninklijke Philips Electronics N.V. Semiconductor light emitting device with a contact formed on a textured surface
US20100327300A1 (en) * 2009-06-25 2010-12-30 Koninklijke Philips Electronics N.V. Contact for a semiconductor light emitting device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005012188A (ja) * 2003-05-22 2005-01-13 Matsushita Electric Ind Co Ltd 半導体素子の製造方法
KR200370465Y1 (ko) * 2004-04-23 2004-12-17 슈퍼노바 옵토일렉트로닉스 코포레이션 갈륨 질화물계 발광 다이오드의 수직 전극 구조
JP2008053425A (ja) * 2006-08-24 2008-03-06 Matsushita Electric Ind Co Ltd 半導体発光装置

Also Published As

Publication number Publication date
US8878160B2 (en) 2014-11-04
KR20170098304A (ko) 2017-08-29
US8581229B2 (en) 2013-11-12
US20140034990A1 (en) 2014-02-06
CN102714255B (zh) 2015-10-21
KR20120094502A (ko) 2012-08-24
TWI523258B (zh) 2016-02-21
CN102714255A (zh) 2012-10-03
EP2504868A1 (en) 2012-10-03
WO2011061664A1 (en) 2011-05-26
TW201125161A (en) 2011-07-16
KR101762368B1 (ko) 2017-07-27
JP5674806B2 (ja) 2015-02-25
JP2013511853A (ja) 2013-04-04
US20110121332A1 (en) 2011-05-26
EP2504868B1 (en) 2018-05-16

Similar Documents

Publication Publication Date Title
KR101905590B1 (ko) 얇은 n-형 영역을 갖는 ⅲ-v족 발광 디바이스
KR101674228B1 (ko) 복합 기판 상에 성장되는 반도체 발광 장치
KR101894691B1 (ko) 복합 기판의 형성 및 복합 기판 상 ⅲ-ⅴ족 발광 장치 성장 방법
US10103301B2 (en) Semiconductor light emitting device
JP6535598B2 (ja) フィルタ及び保護層を含む発光デバイス
US8203153B2 (en) III-V light emitting device including a light extracting structure
US20110062467A1 (en) Light emitting device and manufacturing method thereof
TW201933632A (zh) 照明結構及製造發光裝置之方法
CN102484178A (zh) 具有曲率控制层的iii族氮化物发光装置
CN102884643B (zh) 生长在松弛层上的iii族氮化物发光装置
US8574938B2 (en) Using isolated epitaxial structures in glue bonding for multiple group-III nitride LEDS on a single substrate
US8257989B2 (en) Contact for a semiconductor light emitting device
US20130023073A1 (en) Using non-isolated epitaxial structures in glue bonding for multiple group-iii nitride leds on a single substrate
KR101810711B1 (ko) 반도체 소자를 성장시키기 위한 복합 성장 기판
WO2013084155A1 (en) Forming thick metal layers on a semiconductor light emitting device

Legal Events

Date Code Title Description
A107 Divisional application of patent
PA0104 Divisional application for international application

Comment text: Divisional Application for International Patent

Patent event code: PA01041R01D

Patent event date: 20170721

Application number text: 1020127016290

Filing date: 20120622

A201 Request for examination
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20170821

Comment text: Request for Examination of Application

PG1501 Laying open of application
E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20171120

Patent event code: PE09021S01D

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 20180629

GRNT Written decision to grant
PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 20181001

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 20181002

End annual number: 3

Start annual number: 1

PG1601 Publication of registration
PR1001 Payment of annual fee

Payment date: 20210916

Start annual number: 4

End annual number: 4

PR1001 Payment of annual fee

Payment date: 20230919

Start annual number: 6

End annual number: 6

PR1001 Payment of annual fee

Payment date: 20240913

Start annual number: 7

End annual number: 7