KR101860292B1 - 피복 공구 제조 방법 - Google Patents

피복 공구 제조 방법 Download PDF

Info

Publication number
KR101860292B1
KR101860292B1 KR1020187007055A KR20187007055A KR101860292B1 KR 101860292 B1 KR101860292 B1 KR 101860292B1 KR 1020187007055 A KR1020187007055 A KR 1020187007055A KR 20187007055 A KR20187007055 A KR 20187007055A KR 101860292 B1 KR101860292 B1 KR 101860292B1
Authority
KR
South Korea
Prior art keywords
gas
coating
substrate
dlc
film
Prior art date
Application number
KR1020187007055A
Other languages
English (en)
Korean (ko)
Other versions
KR20180030253A (ko
Inventor
사레흐 아부스이리크
겐이치 이노우에
Original Assignee
히타치 긴조쿠 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 히타치 긴조쿠 가부시키가이샤 filed Critical 히타치 긴조쿠 가부시키가이샤
Publication of KR20180030253A publication Critical patent/KR20180030253A/ko
Application granted granted Critical
Publication of KR101860292B1 publication Critical patent/KR101860292B1/ko

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21D—WORKING OR PROCESSING OF SHEET METAL OR METAL TUBES, RODS OR PROFILES WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21D37/00—Tools as parts of machines covered by this subclass
    • B21D37/20—Making tools by operations not covered by a single other subclass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21D—WORKING OR PROCESSING OF SHEET METAL OR METAL TUBES, RODS OR PROFILES WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21D37/00—Tools as parts of machines covered by this subclass
    • B21D37/01—Selection of materials
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605—Carbon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Forging (AREA)
  • Drilling Tools (AREA)
  • Mounting, Exchange, And Manufacturing Of Dies (AREA)
  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Carbon And Carbon Compounds (AREA)
KR1020187007055A 2013-03-29 2014-03-27 피복 공구 제조 방법 KR101860292B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2013073617 2013-03-29
JPJP-P-2013-073617 2013-03-29
PCT/JP2014/058982 WO2014157560A1 (ja) 2013-03-29 2014-03-27 被覆工具およびその製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
KR1020157026340A Division KR20150121173A (ko) 2013-03-29 2014-03-27 피복 공구 및 그 제조 방법

Publications (2)

Publication Number Publication Date
KR20180030253A KR20180030253A (ko) 2018-03-21
KR101860292B1 true KR101860292B1 (ko) 2018-05-21

Family

ID=51624518

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020187007055A KR101860292B1 (ko) 2013-03-29 2014-03-27 피복 공구 제조 방법
KR1020157026340A KR20150121173A (ko) 2013-03-29 2014-03-27 피복 공구 및 그 제조 방법

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020157026340A KR20150121173A (ko) 2013-03-29 2014-03-27 피복 공구 및 그 제조 방법

Country Status (7)

Country Link
JP (2) JP6103040B2 (zh)
KR (2) KR101860292B1 (zh)
CN (2) CN105102665A (zh)
MY (1) MY173635A (zh)
PH (1) PH12015502188A1 (zh)
TW (1) TWI616544B (zh)
WO (1) WO2014157560A1 (zh)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101860292B1 (ko) * 2013-03-29 2018-05-21 히타치 긴조쿠 가부시키가이샤 피복 공구 제조 방법
JP6211987B2 (ja) * 2014-04-22 2017-10-11 株式会社神戸製鋼所 Ｚｎめっき鋼板の熱間成形用金型
SG11201700614VA (en) * 2014-08-01 2017-03-30 Hitachi Metals Ltd Method of manufacturing coated tool
JP6855863B2 (ja) * 2017-03-22 2021-04-07 日本製鉄株式会社 チタン板のプレス用金型及びチタン板のプレス成形方法
JP6855864B2 (ja) * 2017-03-22 2021-04-07 日本製鉄株式会社 チタン板のプレス用金型及びチタン板のプレス成形方法
WO2019058587A1 (ja) * 2017-09-20 2019-03-28 日本アイ・ティ・エフ株式会社 アーク式成膜装置および成膜方法
CN108950479A (zh) * 2018-08-16 2018-12-07 佛山市南海唐立新五金工具有限公司 类金刚石涂层锯片制备方法及类金刚石涂层锯片
MX2023003236A (es) * 2021-09-30 2023-09-28 Tpr Co Ltd Miembro deslizante.
CN114318287B (zh) * 2021-12-23 2023-11-03 深圳技术大学 金刚石自支撑膜的制备方法和金刚石自支撑膜

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009220238A (ja) 2008-03-18 2009-10-01 Tungaloy Corp 非晶質炭素被覆工具

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01201095A (ja) * 1988-02-04 1989-08-14 Idemitsu Petrochem Co Ltd ダイヤモンド状炭素膜とその製造方法
JPH1192934A (ja) * 1997-09-17 1999-04-06 Daido Steel Co Ltd 硬質炭素厚膜及びその製造方法
JP2001062605A (ja) * 1999-08-30 2001-03-13 Sumitomo Electric Ind Ltd 非晶質カーボン被覆工具
DE10018143C5 (de) * 2000-04-12 2012-09-06 Oerlikon Trading Ag, Trübbach DLC-Schichtsystem sowie Verfahren und Vorrichtung zur Herstellung eines derartigen Schichtsystems
JP3719708B2 (ja) * 2001-06-13 2005-11-24 住友電気工業株式会社 非晶質カーボン被覆工具およびその製造方法
EP1479946B1 (en) * 2003-05-23 2012-12-19 Nissan Motor Co., Ltd. Piston for internal combustion engine
TWI386494B (zh) * 2005-11-18 2013-02-21 Hon Hai Prec Ind Co Ltd 一種具有多層鍍膜之模具
JP5741891B2 (ja) * 2009-06-19 2015-07-01 株式会社ジェイテクト Ｄｌｃ膜形成方法
JP2012066285A (ja) * 2010-09-24 2012-04-05 Hitachi Tool Engineering Ltd アルミニウム板加工金型
KR101860292B1 (ko) * 2013-03-29 2018-05-21 히타치 긴조쿠 가부시키가이샤 피복 공구 제조 방법
SG11201700614VA (en) * 2014-08-01 2017-03-30 Hitachi Metals Ltd Method of manufacturing coated tool
JP2016056435A (ja) * 2014-09-12 2016-04-21 株式会社神戸製鋼所 硬質摺動部材の製造方法、および硬質摺動部材

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009220238A (ja) 2008-03-18 2009-10-01 Tungaloy Corp 非晶質炭素被覆工具

Also Published As

Publication number Publication date
TWI616544B (zh) 2018-03-01
KR20180030253A (ko) 2018-03-21
KR20150121173A (ko) 2015-10-28
JP2017013136A (ja) 2017-01-19
CN105102665A (zh) 2015-11-25
CN110616399A (zh) 2019-12-27
JPWO2014157560A1 (ja) 2017-02-16
MY173635A (en) 2020-02-12
TW201512434A (zh) 2015-04-01
CN110616399B (zh) 2022-05-24
WO2014157560A1 (ja) 2014-10-02
PH12015502188B1 (en) 2016-01-25
PH12015502188A1 (en) 2016-01-25
JP6337944B2 (ja) 2018-06-06
JP6103040B2 (ja) 2017-03-29

Similar Documents

Publication Publication Date Title
KR101860292B1 (ko) 피복 공구 제조 방법
EP3437774B1 (en) Coated cutting tool
US20070071993A1 (en) Carbon film-coated article and method of producing the same
EP3067438A1 (en) Method for forming intermediate layer formed between substrate and dlc film, method for forming dlc film, and intermediate layer formed between substrate and dlc film
JP2016032861A (ja) 被覆工具
Fujii et al. Dry machining of metal using an engraving cutter coated with a droplet-free ta-C film prepared via a T-shape filtered arc deposition
JP6308298B2 (ja) 被覆工具の製造方法
CN111945119A (zh) 碳基薄膜、碳基薄膜的制备方法、刀具及应用
JP5464494B2 (ja) 硬質被覆層の耐欠損性、耐剥離性に優れる表面被覆切削工具
WO2015068655A1 (ja) Ｄｌｃ皮膜の成膜方法
JP6528936B2 (ja) 被覆工具の製造方法
Zia et al. Evaluation of bias voltage effect on diamond‐like carbon coating properties deposited on tungsten carbide cobalt
Shekhtman et al. Influence of ion bombardment of a substrate on the quality of vacuum-plasma Ti-TiN coatings
JP3016748B2 (ja) 電子ビーム励起プラズマｃｖｄによる炭素系高機能材料薄膜の成膜方法
JP5327534B2 (ja) 硬質被覆層の耐欠損性、耐剥離性に優れる表面被覆切削工具
JP2006169614A (ja) 金属複合ダイヤモンドライクカーボン（ｄｌｃ）皮膜、その形成方法、及び摺動部材
CN115413313B (zh) 活塞环及其制造方法
JP6739156B2 (ja) Ｄｌｃ膜被覆部材
CA3101723A1 (fr) Piece revetue par un revetement de carbone amorphe non-hydrogene sur une sous-couche comportant du chrome, du carbone et du silicium
WO2019243720A1 (fr) Pièce revêtue par un revêtement de carbone amorphe hydrogéné sur une sous-couche comportant du chrome, du carbone et du silicium
JP2006082177A (ja) 非晶質カーボン被覆工具及び非晶質カーボン皮膜の被覆方法

Legal Events

Date Code Title Description
A107 Divisional application of patent
A201 Request for examination
E701 Decision to grant or registration of patent right
GRNT Written decision to grant