KR101858325B1 - 워드 라인들의 순차적 선택을 갖는 3d 비-휘발성 메모리에 대한 소거 - Google Patents

워드 라인들의 순차적 선택을 갖는 3d 비-휘발성 메모리에 대한 소거 Download PDF

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KR101858325B1
KR101858325B1 KR1020157006567A KR20157006567A KR101858325B1 KR 101858325 B1 KR101858325 B1 KR 101858325B1 KR 1020157006567 A KR1020157006567 A KR 1020157006567A KR 20157006567 A KR20157006567 A KR 20157006567A KR 101858325 B1 KR101858325 B1 KR 101858325B1
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erase
string
storage elements
selected storage
storage element
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KR1020157006567A
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KR20150046121A (ko
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씨잉 코스타
승 유
하이보 리
로이 이. 슈에르레인
만 엘. 무이
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샌디스크 테크놀로지스 엘엘씨
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    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C16/00Erasable programmable read-only memories
    • G11C16/02Erasable programmable read-only memories electrically programmable
    • G11C16/06Auxiliary circuits, e.g. for writing into memory
    • G11C16/10Programming or data input circuits
    • G11C16/14Circuits for erasing electrically, e.g. erase voltage switching circuits
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/56Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency
    • G11C11/5621Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency using charge storage in a floating gate
    • G11C11/5628Programming or writing circuits; Data input circuits
    • G11C11/5635Erasing circuits
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C16/00Erasable programmable read-only memories
    • G11C16/02Erasable programmable read-only memories electrically programmable
    • G11C16/06Auxiliary circuits, e.g. for writing into memory
    • G11C16/10Programming or data input circuits
    • G11C16/14Circuits for erasing electrically, e.g. erase voltage switching circuits
    • G11C16/16Circuits for erasing electrically, e.g. erase voltage switching circuits for erasing blocks, e.g. arrays, words, groups
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C16/00Erasable programmable read-only memories
    • G11C16/02Erasable programmable read-only memories electrically programmable
    • G11C16/06Auxiliary circuits, e.g. for writing into memory
    • G11C16/24Bit-line control circuits
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C16/00Erasable programmable read-only memories
    • G11C16/02Erasable programmable read-only memories electrically programmable
    • G11C16/06Auxiliary circuits, e.g. for writing into memory
    • G11C16/34Determination of programming status, e.g. threshold voltage, overprogramming or underprogramming, retention
    • G11C16/3436Arrangements for verifying correct programming or erasure
    • G11C16/344Arrangements for verifying correct erasure or for detecting overerased cells
    • G11C16/3445Circuits or methods to verify correct erasure of nonvolatile memory cells
    • H01L27/11582
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76Unipolar devices, e.g. field effect transistors
    • H01L29/772Field effect transistors
    • H01L29/78Field effect transistors with field effect produced by an insulated gate
    • H01L29/792Field effect transistors with field effect produced by an insulated gate with charge trapping gate insulator, e.g. MNOS-memory transistors
    • H01L29/7926Vertical transistors, i.e. transistors having source and drain not in the same horizontal plane
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B41/00Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
    • H10B41/20Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by three-dimensional arrangements, e.g. with cells on different height levels
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B43/00EEPROM devices comprising charge-trapping gate insulators
    • H10B43/20EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels
    • H10B43/23EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels
    • H10B43/27EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels the channels comprising vertical portions, e.g. U-shaped channels

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Semiconductor Memories (AREA)
  • Read Only Memory (AREA)
  • Non-Volatile Memory (AREA)
KR1020157006567A 2012-08-13 2013-08-09 워드 라인들의 순차적 선택을 갖는 3d 비-휘발성 메모리에 대한 소거 KR101858325B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201261682600P 2012-08-13 2012-08-13
US61/682,600 2012-08-13
US13/960,360 2013-08-06
US13/960,360 US8908444B2 (en) 2012-08-13 2013-08-06 Erase for 3D non-volatile memory with sequential selection of word lines
PCT/US2013/054232 WO2014028308A1 (fr) 2012-08-13 2013-08-09 Effacement de mémoire non volatile 3d, avec sélection séquentielle de lignes de mots

Publications (2)

Publication Number Publication Date
KR20150046121A KR20150046121A (ko) 2015-04-29
KR101858325B1 true KR101858325B1 (ko) 2018-05-15

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KR1020157006567A KR101858325B1 (ko) 2012-08-13 2013-08-09 워드 라인들의 순차적 선택을 갖는 3d 비-휘발성 메모리에 대한 소거

Country Status (5)

Country Link
US (2) US8908444B2 (fr)
EP (1) EP2883229B8 (fr)
KR (1) KR101858325B1 (fr)
CN (1) CN104813407B (fr)
WO (1) WO2014028308A1 (fr)

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Also Published As

Publication number Publication date
WO2014028308A1 (fr) 2014-02-20
EP2883229B8 (fr) 2016-09-07
US8908444B2 (en) 2014-12-09
EP2883229B1 (fr) 2016-06-29
CN104813407A (zh) 2015-07-29
EP2883229A1 (fr) 2015-06-17
US8861280B2 (en) 2014-10-14
US20140043916A1 (en) 2014-02-13
KR20150046121A (ko) 2015-04-29
CN104813407B (zh) 2018-06-08
US20140247661A1 (en) 2014-09-04

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