KR101744365B1 - 레이저 가공 장치 - Google Patents

레이저 가공 장치 Download PDF

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Publication number
KR101744365B1
KR101744365B1 KR1020130008095A KR20130008095A KR101744365B1 KR 101744365 B1 KR101744365 B1 KR 101744365B1 KR 1020130008095 A KR1020130008095 A KR 1020130008095A KR 20130008095 A KR20130008095 A KR 20130008095A KR 101744365 B1 KR101744365 B1 KR 101744365B1
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KR
South Korea
Prior art keywords
gas
machining
laser
vicinity
substrate
Prior art date
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KR1020130008095A
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English (en)
Korean (ko)
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KR20130099821A (ko
Inventor
게이이치 나카츠카
Original Assignee
브이 테크놀로지 씨오. 엘티디
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 브이 테크놀로지 씨오. 엘티디 filed Critical 브이 테크놀로지 씨오. 엘티디
Publication of KR20130099821A publication Critical patent/KR20130099821A/ko
Application granted granted Critical
Publication of KR101744365B1 publication Critical patent/KR101744365B1/ko

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    • A—HUMAN NECESSITIES
    • A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
    • A01G—HORTICULTURE; CULTIVATION OF VEGETABLES, FLOWERS, RICE, FRUIT, VINES, HOPS OR SEAWEED; FORESTRY; WATERING
    • A01G18/00—Cultivation of mushrooms
    • A01G18/60—Cultivation rooms; Equipment therefor
    • A—HUMAN NECESSITIES
    • A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
    • A01G—HORTICULTURE; CULTIVATION OF VEGETABLES, FLOWERS, RICE, FRUIT, VINES, HOPS OR SEAWEED; FORESTRY; WATERING
    • A01G9/00—Cultivation in receptacles, forcing-frames or greenhouses; Edging for beds, lawn or the like
    • A01G9/24—Devices or systems for heating, ventilating, regulating temperature, illuminating, or watering, in greenhouses, forcing-frames, or the like
    • A01G9/246—Air-conditioning systems
    • A—HUMAN NECESSITIES
    • A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
    • A01G—HORTICULTURE; CULTIVATION OF VEGETABLES, FLOWERS, RICE, FRUIT, VINES, HOPS OR SEAWEED; FORESTRY; WATERING
    • A01G9/00—Cultivation in receptacles, forcing-frames or greenhouses; Edging for beds, lawn or the like
    • A01G9/24—Devices or systems for heating, ventilating, regulating temperature, illuminating, or watering, in greenhouses, forcing-frames, or the like
    • A01G9/247—Watering arrangements
    • A—HUMAN NECESSITIES
    • A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
    • A01G—HORTICULTURE; CULTIVATION OF VEGETABLES, FLOWERS, RICE, FRUIT, VINES, HOPS OR SEAWEED; FORESTRY; WATERING
    • A01G9/00—Cultivation in receptacles, forcing-frames or greenhouses; Edging for beds, lawn or the like
    • A01G9/24—Devices or systems for heating, ventilating, regulating temperature, illuminating, or watering, in greenhouses, forcing-frames, or the like
    • A01G9/26—Electric devices

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Environmental Sciences (AREA)
  • Mycology (AREA)
  • Chemical Vapour Deposition (AREA)
  • Chemical & Material Sciences (AREA)
  • Laser Beam Processing (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
KR1020130008095A 2012-02-29 2013-01-24 레이저 가공 장치 KR101744365B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012044034A JP5994090B2 (ja) 2012-02-29 2012-02-29 レーザ加工装置
JPJP-P-2012-044034 2012-02-29

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020150080117A Division KR20150068943A (ko) 2012-02-29 2015-06-05 레이저 가공 장치

Publications (2)

Publication Number Publication Date
KR20130099821A KR20130099821A (ko) 2013-09-06
KR101744365B1 true KR101744365B1 (ko) 2017-06-07

Family

ID=49091903

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020130008095A KR101744365B1 (ko) 2012-02-29 2013-01-24 레이저 가공 장치
KR1020150080117A KR20150068943A (ko) 2012-02-29 2015-06-05 레이저 가공 장치

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020150080117A KR20150068943A (ko) 2012-02-29 2015-06-05 레이저 가공 장치

Country Status (4)

Country Link
JP (1) JP5994090B2 (zh)
KR (2) KR101744365B1 (zh)
CN (1) CN103290391B (zh)
TW (1) TWI541094B (zh)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104609706A (zh) * 2015-02-15 2015-05-13 南通路博石英材料有限公司 一种激光修补石英坩埚的装置
KR101680291B1 (ko) * 2015-10-02 2016-11-30 참엔지니어링(주) 증착 장치 및 증착 방법
KR101723923B1 (ko) * 2015-11-11 2017-04-11 참엔지니어링(주) 증착 장치
KR101765244B1 (ko) * 2015-12-14 2017-08-07 참엔지니어링(주) 증착 장치 및 증착 방법
CN107012446B (zh) * 2015-11-11 2019-09-17 灿美工程股份有限公司 沉积装置及沉积方法
KR101876960B1 (ko) * 2017-03-14 2018-07-10 주식회사 에이치비테크놀러지 박막형성 장치
KR101876963B1 (ko) * 2017-03-14 2018-07-10 주식회사 에이치비테크놀러지 박막형성 장치
KR101876961B1 (ko) * 2017-03-14 2018-07-10 주식회사 에이치비테크놀러지 박막형성 장치
CN107799395A (zh) * 2017-09-26 2018-03-13 武汉华星光电技术有限公司 退火装置及退火方法
CN112705850A (zh) * 2021-01-15 2021-04-27 南京航空航天大学 一种用于激光镜像焊接随焊冷却的精确控温装置及方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011154951A (ja) * 2010-01-28 2011-08-11 Hitachi Displays Ltd プラズマ処理装置およびプラズマ処理方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005023376A (ja) * 2003-07-02 2005-01-27 Sony Corp レーザｃｖｄ装置
JP2005179711A (ja) * 2003-12-17 2005-07-07 Shimadzu Corp レーザーｃｖｄ装置
JP2007037895A (ja) * 2005-08-05 2007-02-15 Matsushita Electric Works Ltd 食器棚
JP4597894B2 (ja) * 2006-03-31 2010-12-15 東京エレクトロン株式会社 基板載置台および基板処理装置
JP5481715B2 (ja) * 2007-10-22 2014-04-23 株式会社ブイ・テクノロジー レーザ加工装置及びレーザ加工方法
JP5476519B2 (ja) * 2010-01-20 2014-04-23 株式会社ブイ・テクノロジー レーザ加工装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011154951A (ja) * 2010-01-28 2011-08-11 Hitachi Displays Ltd プラズマ処理装置およびプラズマ処理方法

Also Published As

Publication number Publication date
KR20150068943A (ko) 2015-06-22
JP2013181182A (ja) 2013-09-12
JP5994090B2 (ja) 2016-09-21
TW201347890A (zh) 2013-12-01
TWI541094B (zh) 2016-07-11
KR20130099821A (ko) 2013-09-06
CN103290391A (zh) 2013-09-11
CN103290391B (zh) 2015-09-16

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