KR101650320B1 - 오링을 이동하는 대응 부분에 커플링시키기 위한 슬롯이 형성된 ｔｓｓｌ 도어 - Google Patents

오링을 이동하는 대응 부분에 커플링시키기 위한 슬롯이 형성된 ｔｓｓｌ 도어 Download PDF

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Publication number
KR101650320B1
KR101650320B1 KR1020117007165A KR20117007165A KR101650320B1 KR 101650320 B1 KR101650320 B1 KR 101650320B1 KR 1020117007165 A KR1020117007165 A KR 1020117007165A KR 20117007165 A KR20117007165 A KR 20117007165A KR 101650320 B1 KR101650320 B1 KR 101650320B1
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KR
South Korea
Prior art keywords
valve door
slit valve
coupled
chamber
load lock
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KR1020117007165A
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English (en)
Korean (ko)
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KR20110069033A (ko
Inventor
메란 베드자트
시니치 쿠리타
존 엠. 화이트
수하일 앤워
마코토 이나가와
Original Assignee
어플라이드 머티어리얼스, 인코포레이티드
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Publication of KR20110069033A publication Critical patent/KR20110069033A/ko
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/24—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with valve members that, on opening of the valve, are initially lifted from the seat and next are turned around an axis parallel to the seat
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)
  • Physical Vapour Deposition (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Gasket Seals (AREA)
  • Pressure Vessels And Lids Thereof (AREA)
  • Drying Of Semiconductors (AREA)
KR1020117007165A 2008-08-28 2009-08-27 오링을 이동하는 대응 부분에 커플링시키기 위한 슬롯이 형성된 ｔｓｓｌ 도어 Active KR101650320B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US9248008P 2008-08-28 2008-08-28
US61/092,480 2008-08-28

Publications (2)

Publication Number Publication Date
KR20110069033A KR20110069033A (ko) 2011-06-22
KR101650320B1 true KR101650320B1 (ko) 2016-08-23

Family

ID=41722269

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020117007165A Active KR101650320B1 (ko) 2008-08-28 2009-08-27 오링을 이동하는 대응 부분에 커플링시키기 위한 슬롯이 형성된 ｔｓｓｌ 도어

Country Status (6)

Country Link
US (2) US8567756B2 (enExample)
JP (1) JP5528452B2 (enExample)
KR (1) KR101650320B1 (enExample)
CN (2) CN102138033B (enExample)
TW (1) TWI476338B (enExample)
WO (1) WO2010025257A2 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102138033B (zh) 2008-08-28 2015-05-20 应用材料公司 具有移动适配部分的用以耦接o形环的狭缝化tssl阀门
CN105336656B (zh) * 2014-06-18 2020-01-21 上海华力微电子有限公司 一种单晶圆承载腔室结构
US9638335B2 (en) 2015-01-08 2017-05-02 King Lai Hygienic Materials Co., Ltd. Double sealing valve
JP2019532493A (ja) * 2016-08-22 2019-11-07 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 真空チャンバ用のドアシール
US10636629B2 (en) 2017-10-05 2020-04-28 Applied Materials, Inc. Split slit liner door
GB2573110A (en) * 2018-04-23 2019-10-30 Emerson & Renwick Ltd Load Lock
DE102019133555A1 (de) * 2019-12-09 2021-06-10 Vat Holding Ag Vakuumventil oder Vakuumtür
KR20250119108A (ko) 2024-01-31 2025-08-07 캐논 톡키 가부시키가이샤 도어 밸브 장치, 로드락 장치, 성막 장치, 성막 방법 및 전자 디바이스 제조방법
KR20250119115A (ko) 2024-01-31 2025-08-07 캐논 톡키 가부시키가이샤 도어 밸브 장치, 로드락 장치, 성막 장치, 성막 방법 및 전자 디바이스 제조방법
KR102682885B1 (ko) * 2024-04-22 2024-07-09 주식회사 에이치앤이루자 로드락 챔버의 도어

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006005348A (ja) * 2004-06-14 2006-01-05 Applied Materials Inc 湾曲したスリットバルブドア

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Publication number Priority date Publication date Assignee Title
CH582842A5 (enExample) * 1974-07-15 1976-12-15 Vat Ag
US4381100A (en) * 1981-01-02 1983-04-26 Fairchild Industries, Inc. Valve and valving apparatus
JPS60136671A (ja) * 1983-12-26 1985-07-20 Fuji Seikou Kk ゲ−トバルブのシ−ル構造
JPS61124778A (ja) * 1984-11-21 1986-06-12 Fuji Seiko Kk 真空用バルブのシ−ル方法
JPS63254275A (ja) 1987-04-10 1988-10-20 Irie Koken Kk 高真空用無しゆう動ゲ−トバルブ
JPH05215275A (ja) 1992-02-03 1993-08-24 Ebara Corp 弁装置及び開閉装置における可動要素構造
JP2655576B2 (ja) * 1992-09-30 1997-09-24 信越半導体株式会社 単結晶引上装置におけるアイソレーションバルブ
US6390448B1 (en) * 2000-03-30 2002-05-21 Lam Research Corporation Single shaft dual cradle vacuum slot valve
JP3425938B2 (ja) * 2000-12-14 2003-07-14 入江工研株式会社 ゲート弁
JP2006526125A (ja) * 2003-05-13 2006-11-16 アプライド　マテリアルズ　インコーポレイテッド 処理チャンバの開口を封止するための方法および装置
US8206075B2 (en) * 2004-06-02 2012-06-26 Applied Materials, Inc. Methods and apparatus for sealing a chamber
US8648977B2 (en) * 2004-06-02 2014-02-11 Applied Materials, Inc. Methods and apparatus for providing a floating seal having an isolated sealing surface for chamber doors
US7497414B2 (en) * 2004-06-14 2009-03-03 Applied Materials, Inc. Curved slit valve door with flexible coupling
US7802772B2 (en) * 2005-12-20 2010-09-28 Vat Holding Ag Pendulum and slide gate vacuum valve
TWI388754B (zh) * 2006-06-16 2013-03-11 Vat Holding Ag 真空閥
US7822324B2 (en) * 2006-08-14 2010-10-26 Applied Materials, Inc. Load lock chamber with heater in tube
CN102138033B (zh) 2008-08-28 2015-05-20 应用材料公司 具有移动适配部分的用以耦接o形环的狭缝化tssl阀门

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006005348A (ja) * 2004-06-14 2006-01-05 Applied Materials Inc 湾曲したスリットバルブドア

Also Published As

Publication number Publication date
WO2010025257A2 (en) 2010-03-04
US10453718B2 (en) 2019-10-22
CN102138033B (zh) 2015-05-20
US20140023460A1 (en) 2014-01-23
JP2012501424A (ja) 2012-01-19
CN103939628A (zh) 2014-07-23
TW201017016A (en) 2010-05-01
CN103939628B (zh) 2016-05-18
CN102138033A (zh) 2011-07-27
JP5528452B2 (ja) 2014-06-25
KR20110069033A (ko) 2011-06-22
US20100050534A1 (en) 2010-03-04
US8567756B2 (en) 2013-10-29
TWI476338B (zh) 2015-03-11
WO2010025257A3 (en) 2010-05-20

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