JP5528452B2 - Ｏリングを可動合わせ部へ結合する溝付きｔｓｓｌドア - Google Patents

Ｏリングを可動合わせ部へ結合する溝付きｔｓｓｌドア Download PDF

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Publication number
JP5528452B2
JP5528452B2 JP2011525196A JP2011525196A JP5528452B2 JP 5528452 B2 JP5528452 B2 JP 5528452B2 JP 2011525196 A JP2011525196 A JP 2011525196A JP 2011525196 A JP2011525196 A JP 2011525196A JP 5528452 B2 JP5528452 B2 JP 5528452B2
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Japan
Prior art keywords
chamber
slit valve
valve door
coupled
slit
Prior art date
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JP2011525196A
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English (en)
Japanese (ja)
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JP2012501424A (ja
JP2012501424A5 (enExample
Inventor
メーラン ベヒドジャト
真一 栗田
ジョン エム ホワイト
スハイル アンワー
真 稲川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
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Publication date
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Publication of JP2012501424A publication Critical patent/JP2012501424A/ja
Publication of JP2012501424A5 publication Critical patent/JP2012501424A5/ja
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/24—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with valve members that, on opening of the valve, are initially lifted from the seat and next are turned around an axis parallel to the seat
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)
  • Physical Vapour Deposition (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Gasket Seals (AREA)
  • Pressure Vessels And Lids Thereof (AREA)
  • Drying Of Semiconductors (AREA)
JP2011525196A 2008-08-28 2009-08-27 Ｏリングを可動合わせ部へ結合する溝付きｔｓｓｌドア Active JP5528452B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US9248008P 2008-08-28 2008-08-28
US61/092,480 2008-08-28
PCT/US2009/055206 WO2010025257A2 (en) 2008-08-28 2009-08-27 Slotted tssl door to couple o-ring with moving mating part

Publications (3)

Publication Number Publication Date
JP2012501424A JP2012501424A (ja) 2012-01-19
JP2012501424A5 JP2012501424A5 (enExample) 2012-10-11
JP5528452B2 true JP5528452B2 (ja) 2014-06-25

Family

ID=41722269

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011525196A Active JP5528452B2 (ja) 2008-08-28 2009-08-27 Ｏリングを可動合わせ部へ結合する溝付きｔｓｓｌドア

Country Status (6)

Country Link
US (2) US8567756B2 (enExample)
JP (1) JP5528452B2 (enExample)
KR (1) KR101650320B1 (enExample)
CN (2) CN102138033B (enExample)
TW (1) TWI476338B (enExample)
WO (1) WO2010025257A2 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102138033B (zh) 2008-08-28 2015-05-20 应用材料公司 具有移动适配部分的用以耦接o形环的狭缝化tssl阀门
CN105336656B (zh) * 2014-06-18 2020-01-21 上海华力微电子有限公司 一种单晶圆承载腔室结构
US9638335B2 (en) 2015-01-08 2017-05-02 King Lai Hygienic Materials Co., Ltd. Double sealing valve
JP2019532493A (ja) * 2016-08-22 2019-11-07 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 真空チャンバ用のドアシール
US10636629B2 (en) 2017-10-05 2020-04-28 Applied Materials, Inc. Split slit liner door
GB2573110A (en) * 2018-04-23 2019-10-30 Emerson & Renwick Ltd Load Lock
DE102019133555A1 (de) * 2019-12-09 2021-06-10 Vat Holding Ag Vakuumventil oder Vakuumtür
KR20250119108A (ko) 2024-01-31 2025-08-07 캐논 톡키 가부시키가이샤 도어 밸브 장치, 로드락 장치, 성막 장치, 성막 방법 및 전자 디바이스 제조방법
KR20250119115A (ko) 2024-01-31 2025-08-07 캐논 톡키 가부시키가이샤 도어 밸브 장치, 로드락 장치, 성막 장치, 성막 방법 및 전자 디바이스 제조방법
KR102682885B1 (ko) * 2024-04-22 2024-07-09 주식회사 에이치앤이루자 로드락 챔버의 도어

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH582842A5 (enExample) * 1974-07-15 1976-12-15 Vat Ag
US4381100A (en) * 1981-01-02 1983-04-26 Fairchild Industries, Inc. Valve and valving apparatus
JPS60136671A (ja) * 1983-12-26 1985-07-20 Fuji Seikou Kk ゲ−トバルブのシ−ル構造
JPS61124778A (ja) * 1984-11-21 1986-06-12 Fuji Seiko Kk 真空用バルブのシ−ル方法
JPS63254275A (ja) 1987-04-10 1988-10-20 Irie Koken Kk 高真空用無しゆう動ゲ−トバルブ
JPH05215275A (ja) 1992-02-03 1993-08-24 Ebara Corp 弁装置及び開閉装置における可動要素構造
JP2655576B2 (ja) * 1992-09-30 1997-09-24 信越半導体株式会社 単結晶引上装置におけるアイソレーションバルブ
US6390448B1 (en) * 2000-03-30 2002-05-21 Lam Research Corporation Single shaft dual cradle vacuum slot valve
JP3425938B2 (ja) * 2000-12-14 2003-07-14 入江工研株式会社 ゲート弁
JP2006526125A (ja) * 2003-05-13 2006-11-16 アプライド　マテリアルズ　インコーポレイテッド 処理チャンバの開口を封止するための方法および装置
US8206075B2 (en) * 2004-06-02 2012-06-26 Applied Materials, Inc. Methods and apparatus for sealing a chamber
US8648977B2 (en) * 2004-06-02 2014-02-11 Applied Materials, Inc. Methods and apparatus for providing a floating seal having an isolated sealing surface for chamber doors
US7575220B2 (en) * 2004-06-14 2009-08-18 Applied Materials, Inc. Curved slit valve door
US7497414B2 (en) * 2004-06-14 2009-03-03 Applied Materials, Inc. Curved slit valve door with flexible coupling
US7802772B2 (en) * 2005-12-20 2010-09-28 Vat Holding Ag Pendulum and slide gate vacuum valve
TWI388754B (zh) * 2006-06-16 2013-03-11 Vat Holding Ag 真空閥
US7822324B2 (en) * 2006-08-14 2010-10-26 Applied Materials, Inc. Load lock chamber with heater in tube
CN102138033B (zh) 2008-08-28 2015-05-20 应用材料公司 具有移动适配部分的用以耦接o形环的狭缝化tssl阀门

Also Published As

Publication number Publication date
WO2010025257A2 (en) 2010-03-04
US10453718B2 (en) 2019-10-22
CN102138033B (zh) 2015-05-20
US20140023460A1 (en) 2014-01-23
JP2012501424A (ja) 2012-01-19
CN103939628A (zh) 2014-07-23
TW201017016A (en) 2010-05-01
CN103939628B (zh) 2016-05-18
CN102138033A (zh) 2011-07-27
KR101650320B1 (ko) 2016-08-23
KR20110069033A (ko) 2011-06-22
US20100050534A1 (en) 2010-03-04
US8567756B2 (en) 2013-10-29
TWI476338B (zh) 2015-03-11
WO2010025257A3 (en) 2010-05-20

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