JP2012501424A5 - - Google Patents

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Publication number
JP2012501424A5
JP2012501424A5 JP2011525196A JP2011525196A JP2012501424A5 JP 2012501424 A5 JP2012501424 A5 JP 2012501424A5 JP 2011525196 A JP2011525196 A JP 2011525196A JP 2011525196 A JP2011525196 A JP 2011525196A JP 2012501424 A5 JP2012501424 A5 JP 2012501424A5
Authority
JP
Japan
Prior art keywords
valve door
slit
coupled
slit valve
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011525196A
Other languages
English (en)
Japanese (ja)
Other versions
JP2012501424A (ja
JP5528452B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/US2009/055206 external-priority patent/WO2010025257A2/en
Publication of JP2012501424A publication Critical patent/JP2012501424A/ja
Publication of JP2012501424A5 publication Critical patent/JP2012501424A5/ja
Application granted granted Critical
Publication of JP5528452B2 publication Critical patent/JP5528452B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2011525196A 2008-08-28 2009-08-27 Ｏリングを可動合わせ部へ結合する溝付きｔｓｓｌドア Active JP5528452B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US9248008P 2008-08-28 2008-08-28
US61/092,480 2008-08-28
PCT/US2009/055206 WO2010025257A2 (en) 2008-08-28 2009-08-27 Slotted tssl door to couple o-ring with moving mating part

Publications (3)

Publication Number Publication Date
JP2012501424A JP2012501424A (ja) 2012-01-19
JP2012501424A5 true JP2012501424A5 (enExample) 2012-10-11
JP5528452B2 JP5528452B2 (ja) 2014-06-25

Family

ID=41722269

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011525196A Active JP5528452B2 (ja) 2008-08-28 2009-08-27 Ｏリングを可動合わせ部へ結合する溝付きｔｓｓｌドア

Country Status (6)

Country Link
US (2) US8567756B2 (enExample)
JP (1) JP5528452B2 (enExample)
KR (1) KR101650320B1 (enExample)
CN (2) CN102138033B (enExample)
TW (1) TWI476338B (enExample)
WO (1) WO2010025257A2 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102138033B (zh) 2008-08-28 2015-05-20 应用材料公司 具有移动适配部分的用以耦接o形环的狭缝化tssl阀门
CN105336656B (zh) * 2014-06-18 2020-01-21 上海华力微电子有限公司 一种单晶圆承载腔室结构
US9638335B2 (en) 2015-01-08 2017-05-02 King Lai Hygienic Materials Co., Ltd. Double sealing valve
JP2019532493A (ja) * 2016-08-22 2019-11-07 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 真空チャンバ用のドアシール
US10636629B2 (en) 2017-10-05 2020-04-28 Applied Materials, Inc. Split slit liner door
GB2573110A (en) * 2018-04-23 2019-10-30 Emerson & Renwick Ltd Load Lock
DE102019133555A1 (de) * 2019-12-09 2021-06-10 Vat Holding Ag Vakuumventil oder Vakuumtür
KR20250119108A (ko) 2024-01-31 2025-08-07 캐논 톡키 가부시키가이샤 도어 밸브 장치, 로드락 장치, 성막 장치, 성막 방법 및 전자 디바이스 제조방법
KR20250119115A (ko) 2024-01-31 2025-08-07 캐논 톡키 가부시키가이샤 도어 밸브 장치, 로드락 장치, 성막 장치, 성막 방법 및 전자 디바이스 제조방법
KR102682885B1 (ko) * 2024-04-22 2024-07-09 주식회사 에이치앤이루자 로드락 챔버의 도어

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH582842A5 (enExample) * 1974-07-15 1976-12-15 Vat Ag
US4381100A (en) * 1981-01-02 1983-04-26 Fairchild Industries, Inc. Valve and valving apparatus
JPS60136671A (ja) * 1983-12-26 1985-07-20 Fuji Seikou Kk ゲ−トバルブのシ−ル構造
JPS61124778A (ja) * 1984-11-21 1986-06-12 Fuji Seiko Kk 真空用バルブのシ−ル方法
JPS63254275A (ja) 1987-04-10 1988-10-20 Irie Koken Kk 高真空用無しゆう動ゲ−トバルブ
JPH05215275A (ja) 1992-02-03 1993-08-24 Ebara Corp 弁装置及び開閉装置における可動要素構造
JP2655576B2 (ja) * 1992-09-30 1997-09-24 信越半導体株式会社 単結晶引上装置におけるアイソレーションバルブ
US6390448B1 (en) * 2000-03-30 2002-05-21 Lam Research Corporation Single shaft dual cradle vacuum slot valve
JP3425938B2 (ja) * 2000-12-14 2003-07-14 入江工研株式会社 ゲート弁
JP2006526125A (ja) * 2003-05-13 2006-11-16 アプライド　マテリアルズ　インコーポレイテッド 処理チャンバの開口を封止するための方法および装置
US8206075B2 (en) * 2004-06-02 2012-06-26 Applied Materials, Inc. Methods and apparatus for sealing a chamber
US8648977B2 (en) * 2004-06-02 2014-02-11 Applied Materials, Inc. Methods and apparatus for providing a floating seal having an isolated sealing surface for chamber doors
US7575220B2 (en) * 2004-06-14 2009-08-18 Applied Materials, Inc. Curved slit valve door
US7497414B2 (en) * 2004-06-14 2009-03-03 Applied Materials, Inc. Curved slit valve door with flexible coupling
US7802772B2 (en) * 2005-12-20 2010-09-28 Vat Holding Ag Pendulum and slide gate vacuum valve
TWI388754B (zh) * 2006-06-16 2013-03-11 Vat Holding Ag 真空閥
US7822324B2 (en) * 2006-08-14 2010-10-26 Applied Materials, Inc. Load lock chamber with heater in tube
CN102138033B (zh) 2008-08-28 2015-05-20 应用材料公司 具有移动适配部分的用以耦接o形环的狭缝化tssl阀门

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