KR101606705B1 - 기판 이송장치 - Google Patents

기판 이송장치 Download PDF

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Publication number
KR101606705B1
KR101606705B1 KR1020140116166A KR20140116166A KR101606705B1 KR 101606705 B1 KR101606705 B1 KR 101606705B1 KR 1020140116166 A KR1020140116166 A KR 1020140116166A KR 20140116166 A KR20140116166 A KR 20140116166A KR 101606705 B1 KR101606705 B1 KR 101606705B1
Authority
KR
South Korea
Prior art keywords
belt
substrate
cassette
conveying
conveying member
Prior art date
Application number
KR1020140116166A
Other languages
English (en)
Korean (ko)
Other versions
KR20160027716A (ko
Inventor
양창실
김태룡
박종인
권기청
Original Assignee
비아이 이엠티 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 비아이 이엠티 주식회사 filed Critical 비아이 이엠티 주식회사
Priority to KR1020140116166A priority Critical patent/KR101606705B1/ko
Priority to CN201580016379.8A priority patent/CN106537575A/zh
Priority to PCT/KR2015/008283 priority patent/WO2016036019A1/ko
Publication of KR20160027716A publication Critical patent/KR20160027716A/ko
Application granted granted Critical
Publication of KR101606705B1 publication Critical patent/KR101606705B1/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
KR1020140116166A 2014-09-02 2014-09-02 기판 이송장치 KR101606705B1 (ko)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020140116166A KR101606705B1 (ko) 2014-09-02 2014-09-02 기판 이송장치
CN201580016379.8A CN106537575A (zh) 2014-09-02 2015-08-07 基板移送装置
PCT/KR2015/008283 WO2016036019A1 (ko) 2014-09-02 2015-08-07 기판 이송장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020140116166A KR101606705B1 (ko) 2014-09-02 2014-09-02 기판 이송장치

Publications (2)

Publication Number Publication Date
KR20160027716A KR20160027716A (ko) 2016-03-10
KR101606705B1 true KR101606705B1 (ko) 2016-03-28

Family

ID=55440032

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020140116166A KR101606705B1 (ko) 2014-09-02 2014-09-02 기판 이송장치

Country Status (3)

Country Link
KR (1) KR101606705B1 (zh)
CN (1) CN106537575A (zh)
WO (1) WO2016036019A1 (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101894476B1 (ko) 2016-12-01 2018-10-04 김성용 기판 정렬 투입장치
CN106735933A (zh) * 2016-12-27 2017-05-31 天津曼科科技有限公司 一种太阳能硅晶片自动切割机
KR102350865B1 (ko) * 2017-02-23 2022-01-13 주식회사 원익아이피에스 기판처리시스템 및 그에 사용되는 기판교환모듈
KR101817315B1 (ko) * 2017-07-27 2018-01-11 주식회사 크럭셀 영상판 반송장치 및 이를 이용한 영상판 스캐너
CN109920749A (zh) * 2017-12-12 2019-06-21 湘潭宏大真空技术股份有限公司 一种大面积玻璃基板装载机
CN117316830B (zh) * 2023-11-28 2024-02-02 成都高投芯未半导体有限公司 一种半导体封装系统及控制方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001010711A (ja) * 1999-06-28 2001-01-16 Naohito Miyashita 伸縮可能なベルトコンベアー
JP2014007193A (ja) * 2012-06-21 2014-01-16 Kawasaki Heavy Ind Ltd 基板搬送システム

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20100040037A (ko) 2008-10-09 2010-04-19 김병준 기판이송용 트레이 및 이를 구비한 진공처리장치
JP5931389B2 (ja) * 2011-09-29 2016-06-08 川崎重工業株式会社 搬送システム
KR20130062837A (ko) * 2011-12-05 2013-06-13 주식회사 테라세미콘 기판 이송 시스템

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001010711A (ja) * 1999-06-28 2001-01-16 Naohito Miyashita 伸縮可能なベルトコンベアー
JP2014007193A (ja) * 2012-06-21 2014-01-16 Kawasaki Heavy Ind Ltd 基板搬送システム

Also Published As

Publication number Publication date
WO2016036019A1 (ko) 2016-03-10
CN106537575A (zh) 2017-03-22
KR20160027716A (ko) 2016-03-10

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