KR101576176B1 - 절단장치 및 절단방법 - Google Patents
절단장치 및 절단방법 Download PDFInfo
- Publication number
- KR101576176B1 KR101576176B1 KR1020140049903A KR20140049903A KR101576176B1 KR 101576176 B1 KR101576176 B1 KR 101576176B1 KR 1020140049903 A KR1020140049903 A KR 1020140049903A KR 20140049903 A KR20140049903 A KR 20140049903A KR 101576176 B1 KR101576176 B1 KR 101576176B1
- Authority
- KR
- South Korea
- Prior art keywords
- distance
- cutting
- unit
- cutter
- distance sensing
- Prior art date
Links
- 238000005520 cutting process Methods 0.000 title claims abstract description 331
- 238000000034 method Methods 0.000 title claims abstract description 29
- 238000012545 processing Methods 0.000 claims abstract description 106
- 238000012937 correction Methods 0.000 claims abstract description 37
- 238000005259 measurement Methods 0.000 claims description 10
- 230000000149 penetrating effect Effects 0.000 claims description 6
- 239000000463 material Substances 0.000 description 19
- 238000001514 detection method Methods 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000011179 visual inspection Methods 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000005281 excited state Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30625—With simultaneous mechanical treatment, e.g. mechanico-chemical polishing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Nonmetal Cutting Devices (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Laser Beam Processing (AREA)
- Control Of Cutting Processes (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310567379.X | 2013-11-14 | ||
CN201310567379.XA CN103739192B (zh) | 2013-11-14 | 2013-11-14 | 切割装置及切割方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20150056027A KR20150056027A (ko) | 2015-05-22 |
KR101576176B1 true KR101576176B1 (ko) | 2015-12-10 |
Family
ID=50496284
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020140049903A KR101576176B1 (ko) | 2013-11-14 | 2014-04-25 | 절단장치 및 절단방법 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP5922701B2 (zh) |
KR (1) | KR101576176B1 (zh) |
CN (1) | CN103739192B (zh) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104328643B (zh) * | 2014-09-30 | 2019-05-31 | 江苏和鹰机电科技有限公司 | 自动裁剪机及其机头控制方法 |
CN104389151B (zh) * | 2014-09-30 | 2019-06-28 | 江苏和鹰机电科技有限公司 | 自动裁剪机及其打孔方法 |
CN104358095B (zh) * | 2014-09-30 | 2019-08-13 | 江苏和鹰机电科技有限公司 | 自动裁剪机及其划线方法 |
CN104358096B (zh) * | 2014-09-30 | 2018-10-19 | 长园和鹰智能科技有限公司 | 自动裁剪机及其切割方法 |
CN105522605B (zh) * | 2016-01-29 | 2017-04-05 | 山东美鹰食品设备有限公司 | 胶粉聚苯颗粒保温板自动切割装置及方法 |
JP6744626B2 (ja) * | 2016-07-25 | 2020-08-19 | 三星ダイヤモンド工業株式会社 | スクライブ方法並びにスクライブ装置 |
CN107601834B (zh) * | 2017-10-18 | 2019-11-26 | 台玻安徽玻璃有限公司 | 一种高效率等距浮法玻璃切割机 |
CN108356877B (zh) * | 2018-04-24 | 2024-03-22 | 索菲亚家居湖北有限公司 | 一种百叶包覆自动切分系统 |
CN113735429B (zh) * | 2021-08-24 | 2023-09-08 | 芜湖东旭光电科技有限公司 | 玻璃划线切割装置及其切割方法 |
CN113478540B (zh) * | 2021-09-08 | 2021-11-05 | 江苏三维智能制造研究院有限公司 | 智能装备系统及其方法 |
CN114012911B (zh) * | 2021-11-18 | 2024-03-22 | 浙江精力工具有限公司 | 一种高压无刷电机开槽机 |
CN113953687B (zh) * | 2021-12-08 | 2023-05-05 | 业成科技(成都)有限公司 | 切割方法及切割装置 |
CN115435686A (zh) * | 2022-11-08 | 2022-12-06 | 宁德时代新能源科技股份有限公司 | 测量设备及测量方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001170889A (ja) * | 1999-12-16 | 2001-06-26 | Horizon International Kk | 断裁機 |
JP2002137197A (ja) * | 2000-10-31 | 2002-05-14 | Sanyo Electric Co Ltd | カッティング機 |
JP2011245607A (ja) * | 2010-05-31 | 2011-12-08 | Sumitomo Chemical Co Ltd | 積層体フィルムの切断装置および積層体フィルムの切断方法 |
JP2012096986A (ja) * | 2007-06-06 | 2012-05-24 | Mitsuboshi Diamond Industrial Co Ltd | ホルダ取り付け部 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6285343U (zh) * | 1985-11-20 | 1987-05-30 | ||
JP3116743B2 (ja) * | 1994-09-09 | 2000-12-11 | ヤマハ株式会社 | ホイールカッター方式切断装置 |
JPH1055987A (ja) * | 1996-08-07 | 1998-02-24 | Seiko Seiki Co Ltd | ダイシング装置 |
JP4659300B2 (ja) * | 2000-09-13 | 2011-03-30 | 浜松ホトニクス株式会社 | レーザ加工方法及び半導体チップの製造方法 |
JP5065551B2 (ja) * | 2001-01-12 | 2012-11-07 | 坂東機工株式会社 | ガラス板切断ヘッド及びこれを具備しているガラス板加工装置 |
JP2003094393A (ja) * | 2001-09-25 | 2003-04-03 | Toray Ind Inc | 基板の切断方法および切断装置 |
JP4663673B2 (ja) * | 2007-04-16 | 2011-04-06 | 株式会社牧野フライス製作所 | 工具測定方法、及び工具測定機能を備えた工作機械 |
JP4985185B2 (ja) * | 2007-07-27 | 2012-07-25 | 富士ゼロックス株式会社 | 記録材切断装置及びこれを用いた記録材切断処理装置 |
JP5625225B2 (ja) * | 2008-02-21 | 2014-11-19 | 坂東機工株式会社 | ガラス板の加工機械 |
CN101780649B (zh) * | 2009-01-16 | 2012-10-10 | 鸿富锦精密工业(深圳)有限公司 | 刀具检测系统及方法 |
-
2013
- 2013-11-14 CN CN201310567379.XA patent/CN103739192B/zh not_active Expired - Fee Related
-
2014
- 2014-04-24 JP JP2014090359A patent/JP5922701B2/ja not_active Expired - Fee Related
- 2014-04-25 KR KR1020140049903A patent/KR101576176B1/ko active IP Right Grant
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001170889A (ja) * | 1999-12-16 | 2001-06-26 | Horizon International Kk | 断裁機 |
JP2002137197A (ja) * | 2000-10-31 | 2002-05-14 | Sanyo Electric Co Ltd | カッティング機 |
JP2012096986A (ja) * | 2007-06-06 | 2012-05-24 | Mitsuboshi Diamond Industrial Co Ltd | ホルダ取り付け部 |
JP2011245607A (ja) * | 2010-05-31 | 2011-12-08 | Sumitomo Chemical Co Ltd | 積層体フィルムの切断装置および積層体フィルムの切断方法 |
Also Published As
Publication number | Publication date |
---|---|
CN103739192A (zh) | 2014-04-23 |
CN103739192B (zh) | 2016-02-17 |
JP5922701B2 (ja) | 2016-05-24 |
JP2015093377A (ja) | 2015-05-18 |
KR20150056027A (ko) | 2015-05-22 |
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