KR101563418B1 - 와이어 쏘 및 와이어 쏘의 제조방법 - Google Patents

와이어 쏘 및 와이어 쏘의 제조방법 Download PDF

Info

Publication number
KR101563418B1
KR101563418B1 KR1020140023279A KR20140023279A KR101563418B1 KR 101563418 B1 KR101563418 B1 KR 101563418B1 KR 1020140023279 A KR1020140023279 A KR 1020140023279A KR 20140023279 A KR20140023279 A KR 20140023279A KR 101563418 B1 KR101563418 B1 KR 101563418B1
Authority
KR
South Korea
Prior art keywords
layer
abrasive grains
wire saw
electrodeposition
abriboelectric
Prior art date
Application number
KR1020140023279A
Other languages
English (en)
Korean (ko)
Other versions
KR20140122999A (ko
Inventor
미야사카 요시오
카토 오사무
사사베 히로시
니시오 타카히데
사카타 신이치
Original Assignee
가부시키가이샤 후지키한
와이어 엔지니어링 프로덕티버티 엘엘씨
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 후지키한, 와이어 엔지니어링 프로덕티버티 엘엘씨 filed Critical 가부시키가이샤 후지키한
Publication of KR20140122999A publication Critical patent/KR20140122999A/ko
Application granted granted Critical
Publication of KR101563418B1 publication Critical patent/KR101563418B1/ko

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • B28D5/045Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23DPLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D61/00Tools for sawing machines or sawing devices; Clamping devices for these tools
    • B23D61/18Sawing tools of special type, e.g. wire saw strands, saw blades or saw wire equipped with diamonds or other abrasive particles in selected individual positions
    • B23D61/185Saw wires; Saw cables; Twisted saw strips
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/007Use, recovery or regeneration of abrasive mediums
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304Mechanical treatment, e.g. grinding, polishing, cutting

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
KR1020140023279A 2013-04-11 2014-02-27 와이어 쏘 및 와이어 쏘의 제조방법 KR101563418B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013083332A JP6245833B2 (ja) 2013-04-11 2013-04-11 ワイヤソーの製造方法
JPJP-P-2013-083332 2013-04-11

Publications (2)

Publication Number Publication Date
KR20140122999A KR20140122999A (ko) 2014-10-21
KR101563418B1 true KR101563418B1 (ko) 2015-10-26

Family

ID=51666008

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020140023279A KR101563418B1 (ko) 2013-04-11 2014-02-27 와이어 쏘 및 와이어 쏘의 제조방법

Country Status (4)

Country Link
JP (1) JP6245833B2 (zh)
KR (1) KR101563418B1 (zh)
CN (1) CN104097270B (zh)
TW (1) TWI566864B (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104908500B (zh) * 2015-05-18 2017-08-25 刘肖梅 一种钢丝纹理加工装置的雕刻轮
CN104849211B (zh) * 2015-05-27 2017-11-17 深圳市常兴技术股份有限公司 电镀磨具表面金刚石加厚程度的检测方法
CN106086950B (zh) * 2016-06-24 2018-12-18 中国有色桂林矿产地质研究院有限公司 一种齿缝镶嵌金刚石的内圆刀片的制备方法
CN108527664A (zh) * 2018-02-09 2018-09-14 江苏中博钻石科技有限公司 环形金刚石线锯切割装置
CN110091435A (zh) * 2019-06-12 2019-08-06 成都易德莱斯科技有限公司 负反馈自动调控绳锯及调控方法
CN110704985A (zh) * 2019-10-16 2020-01-17 北京航空航天大学 一种渐开线砂轮磨削表面形貌仿真方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010201542A (ja) * 2009-03-02 2010-09-16 Sumitomo Electric Ind Ltd ダイヤモンドワイヤーソー、ダイヤモンドワイヤーソーの製造方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10100070A (ja) * 1996-09-26 1998-04-21 Toyota Banmotsupusu Kk メタルボンド砥石
KR100299102B1 (ko) * 1998-11-24 2001-11-22 홍영철 취성재료절단용다이아몬드전착와이어및그제조방법
JP2002075767A (ja) * 2000-08-31 2002-03-15 Sumitomo Special Metals Co Ltd 耐食性被膜を有する希土類系永久磁石およびその製造方法
TW571000B (en) * 2001-10-19 2004-01-11 Nihon Parkerizing Methods of preparing metal wires for plastic processing
JP2004009238A (ja) * 2002-06-10 2004-01-15 Kanai Hiroaki ソーワイヤ製造方法及びソーワイヤ
JP2007152485A (ja) * 2005-12-05 2007-06-21 Kanai Hiroaki ソーワイヤの製造方法
WO2007039934A1 (ja) * 2005-12-27 2007-04-12 Japan Fine Steel Co., Ltd. 固定砥粒ワイヤ
JP2007268627A (ja) * 2006-03-30 2007-10-18 Noritake Super Abrasive:Kk 電着ワイヤソー
CN102481647B (zh) * 2009-08-14 2015-07-15 圣戈班磨料磨具有限公司 包括粘结到长形本体上的磨料颗粒的磨料物品
JP5576177B2 (ja) * 2010-04-28 2014-08-20 株式会社リード 固定砥粒ワイヤーソー及びその製造方法
JP2012157908A (ja) * 2011-01-28 2012-08-23 Sumco Corp 硬脆性材料のスライス方法
JP5863170B2 (ja) * 2011-01-31 2016-02-16 サンコール株式会社 固定砥粒ワイヤの製造方法
TWM412050U (en) * 2011-03-17 2011-09-21 Tomohiko Sinosaki Wire saw structure with fixed abrasive particle
KR20120117594A (ko) * 2011-04-16 2012-10-24 다이섹(주) 엔드리스 와이어 톱용 컷팅 비드
CN103857494B (zh) * 2011-09-16 2017-07-11 圣戈班磨料磨具有限公司 研磨制品和形成方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010201542A (ja) * 2009-03-02 2010-09-16 Sumitomo Electric Ind Ltd ダイヤモンドワイヤーソー、ダイヤモンドワイヤーソーの製造方法

Also Published As

Publication number Publication date
CN104097270A (zh) 2014-10-15
JP2014205211A (ja) 2014-10-30
KR20140122999A (ko) 2014-10-21
JP6245833B2 (ja) 2017-12-13
TW201438833A (zh) 2014-10-16
TWI566864B (zh) 2017-01-21
CN104097270B (zh) 2016-03-30

Similar Documents

Publication Publication Date Title
KR101563418B1 (ko) 와이어 쏘 및 와이어 쏘의 제조방법
EP2843688B1 (en) Dicing blade
CN1130274C (zh) 研磨工具
US9539695B2 (en) Carrier, method for coating a carrier, and method for the simultaneous double-side material-removing machining of semiconductor wafers
JP4667263B2 (ja) シリコンウエハの製造方法
EP1574289B1 (en) A method for manufacturing a carrier for holding an object to be polished
KR20110139188A (ko) 유리 기판 및 그 제조 방법
EP1606085B1 (en) High precision multi-grit slicing blade
KR101610438B1 (ko) 연마 패드 드레서 및 그 제조 방법, 연마 패드 드레싱 디바이스 및 연마 시스템
EP2879164A1 (en) Dicing device and dicing method
JP2010167509A (ja) 固定砥粒ソーワイヤ及び切断方法
JP6014835B2 (ja) Cmpパッドコンディショナおよび当該cmpパッドコンディショナの製造方法
KR100888026B1 (ko) 소우 와이어
JP2010234597A (ja) 切断ブレード、切断ブレードの製造方法及び切断加工装置
KR101303552B1 (ko) 반도체 웨이퍼의 양면을 화학적으로 그라인딩하는 방법
JP2009196056A (ja) 薄刃砥石
KR101402214B1 (ko) 다결정 다이아몬드를 사용한 다층 전착 연삭 에지공구
JP2012228771A (ja) 樹脂製保護層を有するワイヤソー、ワイヤソーを用いた切断方法
JP2013086238A (ja) Cu−Ga合金の切断方法およびスパッタリングターゲットの製造方法
JP2006026760A (ja) 被研磨物保持用キャリア
JP2003231061A (ja) セグメント型砥石車
KR0175433B1 (ko) 반도체 생산 설비용 가스 분사 장치와 그것을 성형하기 위한 방법 및 그 조성물
US20240136173A1 (en) Method for producing discs from a cylindrical rod made of a semiconductor material
US20210380843A1 (en) Production process of polishing stone and polishing stone
TWI472416B (zh) 具有硬質薄膜之固定磨粒電鍍切割線

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant