KR101497857B1 - 압전 소자, 액체 토출 헤드, 초음파 모터, 및 진애 제거 장치 - Google Patents

압전 소자, 액체 토출 헤드, 초음파 모터, 및 진애 제거 장치 Download PDF

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Publication number
KR101497857B1
KR101497857B1 KR1020137020167A KR20137020167A KR101497857B1 KR 101497857 B1 KR101497857 B1 KR 101497857B1 KR 1020137020167 A KR1020137020167 A KR 1020137020167A KR 20137020167 A KR20137020167 A KR 20137020167A KR 101497857 B1 KR101497857 B1 KR 101497857B1
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South Korea
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piezoelectric
piezoelectric element
piezoelectric material
electrode
crystal grains
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Expired - Fee Related
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KR1020137020167A
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Korean (ko)
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KR20130120504A (ko
Inventor
미키오 시마다
도시아키 아이바
도시히로 이후쿠
다카노리 마츠다
다카유키 와타나베
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캐논 가부시끼가이샤
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/02—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by distortion, beating, or vibration of the surface to be cleaned
    • B08B7/026—Using sound waves
    • B08B7/028—Using ultrasounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/106—Langevin motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
    • H02N2/163—Motors with ring stator
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/09—Forming piezoelectric or electrostrictive materials
    • H10N30/093—Forming inorganic materials
    • H10N30/097—Forming inorganic materials by sintering
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8536—Alkaline earth metal based oxides, e.g. barium titanates

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Semiconductor Memories (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
KR1020137020167A 2011-01-07 2011-12-22 압전 소자, 액체 토출 헤드, 초음파 모터, 및 진애 제거 장치 Expired - Fee Related KR101497857B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JPJP-P-2011-001669 2011-01-07
JP2011001669 2011-01-07
JPJP-P-2011-275097 2011-12-15
JP2011275097A JP6004640B2 (ja) 2011-01-07 2011-12-15 圧電素子、液体吐出ヘッド、超音波モータ、塵埃除去装置、およびデバイス
PCT/JP2011/080550 WO2012093646A1 (en) 2011-01-07 2011-12-22 Piezoelectric element, liquid discharge head, ultrasonic motor, and dust removing device

Publications (2)

Publication Number Publication Date
KR20130120504A KR20130120504A (ko) 2013-11-04
KR101497857B1 true KR101497857B1 (ko) 2015-03-02

Family

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KR1020137020167A Expired - Fee Related KR101497857B1 (ko) 2011-01-07 2011-12-22 압전 소자, 액체 토출 헤드, 초음파 모터, 및 진애 제거 장치

Country Status (6)

Country Link
US (1) US9825213B2 (enExample)
EP (1) EP2641283B1 (enExample)
JP (1) JP6004640B2 (enExample)
KR (1) KR101497857B1 (enExample)
CN (1) CN103283051B (enExample)
WO (1) WO2012093646A1 (enExample)

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JP5979992B2 (ja) 2011-07-05 2016-08-31 キヤノン株式会社 圧電材料
WO2013005702A1 (en) * 2011-07-05 2013-01-10 Canon Kabushiki Kaisha Piezoelectric material
KR101602427B1 (ko) * 2011-07-05 2016-03-10 캐논 가부시끼가이샤 압전 엘리먼트, 적층 압전 엘리먼트, 액체 토출 헤드, 액체 토출 장치, 초음파 모터, 광학 장치 및 전자 장치
JP5967988B2 (ja) * 2012-03-14 2016-08-10 キヤノン株式会社 圧電材料、圧電素子、液体吐出ヘッド、超音波モータおよび塵埃除去装置
WO2013147295A2 (en) 2012-03-30 2013-10-03 Canon Kabushiki Kaisha Piezoelectric ceramics, piezoelectric element, liquid ejection head, ultrasonic motor, and dust removing device
TWI581472B (zh) * 2012-11-02 2017-05-01 佳能股份有限公司 壓電材料、壓電元件、及電子裝置
TWI545814B (zh) * 2012-11-02 2016-08-11 佳能股份有限公司 壓電式材料、壓電式元件及電子設備
KR101671141B1 (ko) 2012-12-21 2016-10-31 캐논 가부시끼가이샤 진동파 구동 장치, 촬상 장치, 광학 기기, 액체 토출 장치 및 전자 기기
JP6315883B2 (ja) * 2012-12-26 2018-04-25 キヤノン株式会社 圧電素子、振動波モーター用ステーター
EP2749550B1 (en) 2012-12-28 2017-05-17 Canon Kabushiki Kaisha Piezoelectric material, piezoelectric element, and electronic apparatus
JP6362087B2 (ja) * 2013-07-12 2018-07-25 キヤノン株式会社 圧電材料、圧電素子、および電子機器
JP6381294B2 (ja) 2013-07-12 2018-08-29 キヤノン株式会社 圧電材料、圧電素子、および電子機器
EP2824091B1 (en) * 2013-07-12 2020-02-19 Canon Kabushiki Kaisha Piezoelectric material, piezoelectric element, and electronic equipment
EP2824094B8 (en) * 2013-07-12 2018-12-19 Canon Kabushiki Kaisha Piezoelectric material, piezoelectric element, and electronic apparatus
JP6602432B2 (ja) * 2013-07-12 2019-11-06 キヤノン株式会社 圧電材料、圧電素子、および電子機器
US9680085B2 (en) * 2014-03-07 2017-06-13 Canon Kabushiki Kaisha Ceramic powder, piezoelectric ceramic, piezoelectric element, and electronic equipment
TWI550923B (zh) * 2014-05-30 2016-09-21 佳能股份有限公司 壓電材料、壓電元件、壓電元件的製造方法和電子器件
TWI601581B (zh) 2014-05-30 2017-10-11 佳能股份有限公司 壓電材料、壓電元件、壓電元件製造方法和電子設備
JP6700793B2 (ja) * 2015-01-09 2020-05-27 キヤノン株式会社 圧電材料、圧電素子、およびこれを用いた装置
EP3072693B1 (en) * 2015-03-23 2018-11-28 Brother Kogyo Kabushiki Kaisha Piezoelectric actuator and recording head
CN106142841B (zh) * 2015-03-27 2019-09-24 兄弟工业株式会社 压电促动器和记录头
JP2018107437A (ja) * 2016-12-27 2018-07-05 キヤノン株式会社 振動子、振動波駆動装置、振動波モータおよび電子機器
CN108116489B (zh) * 2017-11-24 2019-06-18 陕西师范大学 一种超声波马达汽车自动转向系统及汽车自动转向方法
JP7024381B2 (ja) * 2017-12-21 2022-02-24 セイコーエプソン株式会社 圧電素子および液体吐出ヘッド

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EP1039559A1 (en) * 1999-03-25 2000-09-27 Seiko Epson Corporation Method for manufacturing piezoelectric material
EP1063208A1 (en) * 1999-06-14 2000-12-27 Ngk Insulators, Ltd. Electric-field-inducible deformable material
KR100923733B1 (ko) * 2007-09-14 2009-10-27 강원대학교산학협력단 황입자를 이용한 수중 독성탐지장치 및 방법

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US6783588B2 (en) * 2000-12-15 2004-08-31 Canon Kabushiki Kaisha BaTiO3-PbTiO3 series single crystal and method of manufacturing the same piezoelectric type actuator and liquid discharge head using such piezoelectric type actuator
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EP1039559A1 (en) * 1999-03-25 2000-09-27 Seiko Epson Corporation Method for manufacturing piezoelectric material
JP2001138529A (ja) * 1999-03-25 2001-05-22 Seiko Epson Corp 圧電体の製造方法
EP1063208A1 (en) * 1999-06-14 2000-12-27 Ngk Insulators, Ltd. Electric-field-inducible deformable material
KR100923733B1 (ko) * 2007-09-14 2009-10-27 강원대학교산학협력단 황입자를 이용한 수중 독성탐지장치 및 방법

Also Published As

Publication number Publication date
CN103283051B (zh) 2016-01-13
US9825213B2 (en) 2017-11-21
JP2012156493A (ja) 2012-08-16
EP2641283A1 (en) 2013-09-25
EP2641283B1 (en) 2017-06-28
WO2012093646A1 (en) 2012-07-12
KR20130120504A (ko) 2013-11-04
US20140084750A1 (en) 2014-03-27
JP6004640B2 (ja) 2016-10-12
CN103283051A (zh) 2013-09-04

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