JP6004640B2 - 圧電素子、液体吐出ヘッド、超音波モータ、塵埃除去装置、およびデバイス - Google Patents

圧電素子、液体吐出ヘッド、超音波モータ、塵埃除去装置、およびデバイス Download PDF

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Publication number
JP6004640B2
JP6004640B2 JP2011275097A JP2011275097A JP6004640B2 JP 6004640 B2 JP6004640 B2 JP 6004640B2 JP 2011275097 A JP2011275097 A JP 2011275097A JP 2011275097 A JP2011275097 A JP 2011275097A JP 6004640 B2 JP6004640 B2 JP 6004640B2
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JP
Japan
Prior art keywords
piezoelectric element
piezoelectric
electrode
piezoelectric material
element according
Prior art date
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Active
Application number
JP2011275097A
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English (en)
Japanese (ja)
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JP2012156493A (ja
JP2012156493A5 (enExample
Inventor
幹夫 島田
幹夫 島田
利明 饗場
利明 饗場
伊福　俊博
俊博 伊福
松田　堅義
堅義 松田
隆之 渡邉
隆之 渡邉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2011275097A priority Critical patent/JP6004640B2/ja
Application filed by Canon Inc filed Critical Canon Inc
Priority to PCT/JP2011/080550 priority patent/WO2012093646A1/en
Priority to EP11813578.9A priority patent/EP2641283B1/en
Priority to KR1020137020167A priority patent/KR101497857B1/ko
Priority to CN201180064223.9A priority patent/CN103283051B/zh
Priority to US13/977,915 priority patent/US9825213B2/en
Publication of JP2012156493A publication Critical patent/JP2012156493A/ja
Publication of JP2012156493A5 publication Critical patent/JP2012156493A5/ja
Application granted granted Critical
Publication of JP6004640B2 publication Critical patent/JP6004640B2/ja
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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/02—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by distortion, beating, or vibration of the surface to be cleaned
    • B08B7/026—Using sound waves
    • B08B7/028—Using ultrasounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/106—Langevin motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
    • H02N2/163—Motors with ring stator
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/09—Forming piezoelectric or electrostrictive materials
    • H10N30/093—Forming inorganic materials
    • H10N30/097—Forming inorganic materials by sintering
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8536—Alkaline earth metal based oxides, e.g. barium titanates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Semiconductor Memories (AREA)
JP2011275097A 2011-01-07 2011-12-15 圧電素子、液体吐出ヘッド、超音波モータ、塵埃除去装置、およびデバイス Active JP6004640B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2011275097A JP6004640B2 (ja) 2011-01-07 2011-12-15 圧電素子、液体吐出ヘッド、超音波モータ、塵埃除去装置、およびデバイス
EP11813578.9A EP2641283B1 (en) 2011-01-07 2011-12-22 Piezoelectric element, liquid discharge head, ultrasonic motor, and dust removing device
KR1020137020167A KR101497857B1 (ko) 2011-01-07 2011-12-22 압전 소자, 액체 토출 헤드, 초음파 모터, 및 진애 제거 장치
CN201180064223.9A CN103283051B (zh) 2011-01-07 2011-12-22 压电元件、液体排出头、超声马达和灰尘去除装置
PCT/JP2011/080550 WO2012093646A1 (en) 2011-01-07 2011-12-22 Piezoelectric element, liquid discharge head, ultrasonic motor, and dust removing device
US13/977,915 US9825213B2 (en) 2011-01-07 2011-12-22 Piezoelectric element, liquid discharge head, ultrasonic motor, and dust removing device

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2011001669 2011-01-07
JP2011001669 2011-01-07
JP2011275097A JP6004640B2 (ja) 2011-01-07 2011-12-15 圧電素子、液体吐出ヘッド、超音波モータ、塵埃除去装置、およびデバイス

Publications (3)

Publication Number Publication Date
JP2012156493A JP2012156493A (ja) 2012-08-16
JP2012156493A5 JP2012156493A5 (enExample) 2015-02-05
JP6004640B2 true JP6004640B2 (ja) 2016-10-12

Family

ID=45531914

Family Applications (1)

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JP2011275097A Active JP6004640B2 (ja) 2011-01-07 2011-12-15 圧電素子、液体吐出ヘッド、超音波モータ、塵埃除去装置、およびデバイス

Country Status (6)

Country Link
US (1) US9825213B2 (enExample)
EP (1) EP2641283B1 (enExample)
JP (1) JP6004640B2 (enExample)
KR (1) KR101497857B1 (enExample)
CN (1) CN103283051B (enExample)
WO (1) WO2012093646A1 (enExample)

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EP2729971B1 (en) * 2011-07-05 2017-06-07 Canon Kabushiki Kaisha Piezoelectric material
JP5979992B2 (ja) 2011-07-05 2016-08-31 キヤノン株式会社 圧電材料
KR101602427B1 (ko) 2011-07-05 2016-03-10 캐논 가부시끼가이샤 압전 엘리먼트, 적층 압전 엘리먼트, 액체 토출 헤드, 액체 토출 장치, 초음파 모터, 광학 장치 및 전자 장치
JP5967988B2 (ja) * 2012-03-14 2016-08-10 キヤノン株式会社 圧電材料、圧電素子、液体吐出ヘッド、超音波モータおよび塵埃除去装置
EP2837045B1 (en) 2012-03-30 2016-11-02 Canon Kabushiki Kaisha Piezoelectric ceramics, piezoelectric element, liquid ejection head, ultrasonic motor, and dust removing device
TWI581472B (zh) * 2012-11-02 2017-05-01 佳能股份有限公司 壓電材料、壓電元件、及電子裝置
TWI545814B (zh) 2012-11-02 2016-08-11 佳能股份有限公司 壓電式材料、壓電式元件及電子設備
EP2936576B1 (en) * 2012-12-21 2017-03-15 Canon Kabushiki Kaisha Vibration wave driving device, image pickup device, optical apparatus, liquid discharge device, and electronic apparatus
JP6315883B2 (ja) 2012-12-26 2018-04-25 キヤノン株式会社 圧電素子、振動波モーター用ステーター
EP2749550B1 (en) * 2012-12-28 2017-05-17 Canon Kabushiki Kaisha Piezoelectric material, piezoelectric element, and electronic apparatus
JP6602432B2 (ja) * 2013-07-12 2019-11-06 キヤノン株式会社 圧電材料、圧電素子、および電子機器
EP2824091B1 (en) * 2013-07-12 2020-02-19 Canon Kabushiki Kaisha Piezoelectric material, piezoelectric element, and electronic equipment
EP2824094B8 (en) * 2013-07-12 2018-12-19 Canon Kabushiki Kaisha Piezoelectric material, piezoelectric element, and electronic apparatus
JP6381294B2 (ja) * 2013-07-12 2018-08-29 キヤノン株式会社 圧電材料、圧電素子、および電子機器
JP6362087B2 (ja) 2013-07-12 2018-07-25 キヤノン株式会社 圧電材料、圧電素子、および電子機器
US9680085B2 (en) * 2014-03-07 2017-06-13 Canon Kabushiki Kaisha Ceramic powder, piezoelectric ceramic, piezoelectric element, and electronic equipment
TWI601581B (zh) 2014-05-30 2017-10-11 佳能股份有限公司 壓電材料、壓電元件、壓電元件製造方法和電子設備
TWI550923B (zh) * 2014-05-30 2016-09-21 佳能股份有限公司 壓電材料、壓電元件、壓電元件的製造方法和電子器件
JP6700793B2 (ja) * 2015-01-09 2020-05-27 キヤノン株式会社 圧電材料、圧電素子、およびこれを用いた装置
EP3072693B1 (en) * 2015-03-23 2018-11-28 Brother Kogyo Kabushiki Kaisha Piezoelectric actuator and recording head
CN106142841B (zh) * 2015-03-27 2019-09-24 兄弟工业株式会社 压电促动器和记录头
JP2018107437A (ja) * 2016-12-27 2018-07-05 キヤノン株式会社 振動子、振動波駆動装置、振動波モータおよび電子機器
CN108116489B (zh) * 2017-11-24 2019-06-18 陕西师范大学 一种超声波马达汽车自动转向系统及汽车自动转向方法
JP7024381B2 (ja) * 2017-12-21 2022-02-24 セイコーエプソン株式会社 圧電素子および液体吐出ヘッド

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Also Published As

Publication number Publication date
KR101497857B1 (ko) 2015-03-02
US20140084750A1 (en) 2014-03-27
JP2012156493A (ja) 2012-08-16
WO2012093646A1 (en) 2012-07-12
KR20130120504A (ko) 2013-11-04
US9825213B2 (en) 2017-11-21
EP2641283A1 (en) 2013-09-25
CN103283051A (zh) 2013-09-04
EP2641283B1 (en) 2017-06-28
CN103283051B (zh) 2016-01-13

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