KR101482870B1 - Apparatus for exchanging a collet - Google Patents

Abstract

The collet replacement apparatus includes a panel having an opening through which a collet coupled with a pick-up head and a pick-up head using a magnetic force is passed in a vertical direction, a panel for guiding an upper pad of the collet for replacement of the collet, And a plurality of receiving permanent magnets provided along the inner surface of the body and having storage spaces for holding the collets in a horizontal state by applying the same magnetic force to the upper pad of the collet which is a magnetic body, And an engaging member provided on both sides of the vertical movement path of the pickup head in the opening and for separating the collet from the pick-up head while allowing the upward movement of the pick-up head and restricting the upward movement of the collet, . ≪ / RTI >

Description

Apparatus for exchanging a collet

Embodiments of the invention relate to a collet replacement device. More particularly, the present invention relates to a device for replacing a collet for picking up and transporting a die in a die bonding process.

Generally, the die bonding process is a process for bonding individualized dies to a substrate through a soaking process, and a pickup unit for picking up and transferring the dies from a wafer in the die bonding process may be used. The pick-up unit may include a collet for picking up the die using the vacuum, a pick-up head to which the collet is coupled, and a drive unit for moving the pick-up head.

In one example, the pick-up head and the collet may be coupled to each other using a magnetic force. The pick-up head may be provided with a pneumatic pipe for providing vacuum, and the collet may be provided with a plurality of suction holes connected to the pneumatic pipe to pick up the die.

The collet may be required to be worn due to prolonged use or replaced to adsorb dies of different sizes. The collet is inserted and loaded into a collet receiving groove formed on the panel for replacement, and when the collet is replaced, the collet is coupled to the pickup head using magnetic force.

The collet may include a hard top pad and a soft bottom pad. The sizes of the lower pads vary depending on the size of the die to be picked up by the collet. Accordingly, the collet has various kinds. Since the collet receiving groove has a shape corresponding to a specific collet, the collet receiving groove accommodates only a specific collet, and other types of collets are difficult to accommodate. That is, when another type of collet is inserted into the collet receiving groove, the collet may be caught in the collet receiving groove or the collet receiving groove and clearance may occur. Therefore, it is difficult for the collet to maintain a horizontal state. When the collet is replaced in this state, defective coupling between the pick-up head and the collet may occur.

It is an object of the present invention to provide a collet replacement device capable of performing automatic replacement of a collet used in a die bonding process.

The collet replacing apparatus according to the present invention includes a panel having a pick-up head and an opening through which a collet coupled with the pick-up head using magnetic force passes in a vertical direction, and a plurality of And permanent magnets for storage that are provided along the inner surface of the body and fix the collets in a horizontal state by applying a magnetic force to the upper pad of the collet which is a magnetic body, A plurality of receiving portions provided on the panel and both sides of a vertical movement path of the pick-up head in the opening, allowing upward movement of the pick-up head while restricting upward movement of the collet, And a latching member for separating the collet from the pick-up head while being moved upward There.

According to one embodiment of the present invention, the receiving permanent magnets may have the same magnetic force with each other.

According to one embodiment of the present invention, the height from the bottom of the inner space of the body to the receiving permanent magnets may be equal to or greater than the thickness of the collet.

According to an embodiment of the present invention, each of the receiving portions is provided between the body of the receiving portions and the panel, and further includes coil springs for buffering the force of the pickup head lowering for picking up the collet can do.

According to an embodiment of the present invention, the respective receiving portions are coupled with the panel through the body so as to be spaced apart from the body of the receiving portions by a predetermined distance, and when the pick-up head and the collet are misaligned, And may further include a fastening screw for swinging.

According to one embodiment of the present invention, the collet replacing device may further include a collecting portion provided below the opening in the panel, for receiving the collet separated from the pick-up head by the engaging member .

According to an embodiment of the present invention, the collet replacement apparatus may further include a driving unit connected to the panel, and configured to move the panel such that the opening or the receiving units are positioned below the pickup head.

According to the embodiments of the present invention as described above, the accommodating portion for accommodating a plurality of collets for replacing the collet can be provided on the panel, and by arranging the receiving permanent magnets on the side of the body of the accommodating portion, The collets can be maintained horizontal in the body. Since the collets remain in a horizontal state, defects can be prevented from occurring when the collets are mounted on the pick-up head.

It is also contemplated to provide a method for removing a collet from a pick-up head, comprising the steps of: providing an opening in the panel to remove a collet from the pick-up head; and removing the collet from the pick- It is possible to provide latching members on both inner sides of the opening and to inject air into the collet for complete removal of the collet separated from the pick-up head by the latching members.

As a result, the separation and mounting of the collet can be accurately carried out, so that the automatic replacement of the collet can be performed stably.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic diagram for explaining a collet replacement apparatus according to an embodiment of the present invention; FIG.
Fig. 2 is a schematic plan view for explaining the collet replacement apparatus shown in Fig. 1. Fig.
3 is a sectional view for explaining the accommodating portion shown in Fig.
4 is a schematic cross-sectional view for explaining the pick-up head and the collet shown in Fig.
5 is a bottom view for explaining the pick-up head shown in Fig.
Figs. 6 to 8 are schematic cross-sectional views for explaining a method of removing the collet using the engagement members shown in Fig.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a collet replacement apparatus according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings. The present invention is capable of various modifications and various forms, and specific embodiments are illustrated in the drawings and described in detail in the text. It should be understood, however, that the invention is not intended to be limited to the particular forms disclosed, but includes all modifications, equivalents, and alternatives falling within the spirit and scope of the invention. Like reference numerals are used for like elements in describing each drawing. In the accompanying drawings, the dimensions of the structures are enlarged to illustrate the present invention in order to clarify the present invention.

The terms first, second, etc. may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component.

The terminology used in this application is used only to describe a specific embodiment and is not intended to limit the invention. The singular expressions include plural expressions unless the context clearly dictates otherwise. In this application, the terms "comprises", "having", and the like are used to specify that a feature, a number, a step, an operation, an element, a part or a combination thereof is described in the specification, But do not preclude the presence or addition of one or more other features, integers, steps, operations, components, parts, or combinations thereof.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Terms such as those defined in commonly used dictionaries are to be interpreted as having a meaning consistent with the contextual meaning of the related art and are to be interpreted as either ideal or overly formal in the sense of the present application Do not.

FIG. 1 is a schematic structural view for explaining a collet exchanging apparatus according to an embodiment of the present invention, and FIG. 2 is a schematic plan view for explaining a collet exchanging apparatus shown in FIG. FIG. 3 is a cross-sectional view for explaining a receiving portion shown in FIG. 1, FIG. 4 is a schematic cross-sectional view for explaining a pick-up head and a collet shown in FIG. 1, .

1 through 5, the collet replacement apparatus 100 according to an exemplary embodiment of the present invention can automatically change the collet 20 in order to pick up the worn or otherwise sized die in the die bonding process. Can be replaced.

Specifically, in the die bonding process, the pick-up unit 10 can be used for picking up and transporting a die from a wafer which is individualized through a dicing process and then adhered on the dicing tape. Further, the pick-up unit 10 can be used for bonding the die onto the substrate.

The pick-up unit 10 may include a pick-up head 30 and a collet 20 attached to the pick-up head 30. The collet 20 may be mounted on the pick-up head 30 using magnetic force. In particular, the collet 20 may be provided with a plurality of suction holes 22 for suctioning the die, and the pickup head 30 is provided with a pneumatic piping 32 for providing vacuum to the suction holes 22, .

The collet 20 may have a generally rectangular shape and may include a hard top pad 24 and a soft bottom pad 26. The suction holes 22 for sucking the die may be provided through the upper pad 24 and the lower pad 26 and communicate with the pneumatic piping 32 of the pickup head 30.

As an example, the pick-up head 30 may have a substantially rectangular shape for mounting the collet 20 and may include a drive shaft connected to a transfer unit (not shown) for transferring the pick-up unit 10. As the drive shaft, a hollow shaft may be used, and it may function as a pneumatic piping 32. However, the shapes of the pick-up head 30 and the collet 20 are not limited to square, and various shapes such as a circle may be used in some cases, so that the scope of the present invention is not limited thereto.

On the other hand, the pick-up head 30 and the collet 20 can be coupled to each other by a magnetic force. As an example, the pick-up head 30 may be provided with a permanent magnet for the head 34 to provide the magnetic force, and the upper pad 24 of the collet 20 may be made of a magnetic material. On the other hand, guide members 36 for guiding the mounting position of the collet 20 may be disposed on the edge of the lower surface of the pick-up head 30.

The collet replacement apparatus 100 includes a panel 110, a receiving unit 120, latching members 130, a collecting unit 140, a driving unit 150, and a chuck 160.

The panel 110 is in the form of a disk or a polygonal plate and includes areas for accommodating the accommodating portion 120 accommodated by the plurality of collets 20 for replacement of the collet 20, And may have an opening 112 formed therethrough to allow the substrate 20 to pass in a vertical direction. In one example, the areas and openings 112 may be provided along the top surface of the panel 110.

The receiving portion 120 may be provided on the panel 110 in plural numbers. The receiving portion 120 has a body 122 having a space for accommodating the collet 20 therein. At this time, the size of the space may be equal to or slightly larger than the size of the upper pad 24 of the collet 20.

On the inner side surface of the body 122, accommodating permanent magnets 124 for fixing the collet 20 are provided. For example, when the collet 20 has a rectangular shape, the accommodating permanent magnets 124 may be disposed on both inner sides of the body 122 or on four sides inside the body 122.

The storage permanent magnets 124 fix the upper pad 24 of the collet 20, which is a magnetic body, with the same magnetic force. The height of the upper pad 24 in the collet 20 inserted into the body 122 is substantially equal to the height of the storage permanent magnets 124 when the collet 20 is fixed to the storage permanent magnets 124. [ Can be the same. Therefore, the collet 20 can maintain a horizontal state inside the body 122. Therefore, when the collet 20 is replaced, the pick-up head 30 can accurately engage with the collet 20, thereby improving the reliability of the collet replacement process.

The height from the bottom of the inner space of the body 122 to the permanent magnets 124 for storage may be higher than the thickness of the collet 20. Therefore, when the upper pad 24 is fixed to the receiving permanent magnets 124, the lower pad 26 is not in contact with or spaced from the inner bottom surface of the body 122. Therefore, it is possible to prevent the damage caused by the contact of the lower pad 26 with the inner bottom surface of the body 122. The collets 20 having various thicknesses in a range where the thickness of the collet 20 is smaller than the height from the inner bottom surface of the body 122 to the receiving permanent magnets 124 are received in the receiving portion 120 .

On the other hand, the height from the bottom of the inner space of the body 122 to the storage permanent magnets 124 may be equal to the thickness of the collet 20. At this time, when the upper pad 24 is fixed to the receiving permanent magnets 124, the lower pad 26 can contact the inner bottom surface of the body 122.

Since the storage permanent magnets 124 fix the upper pad 24 of the collet 20, the collet 20 can be received horizontally irrespective of the size of the lower pad 26. Accordingly, the receiving portion 120 can accommodate various kinds of collets 20. [

Meanwhile, a coil spring 126 may be provided between the body 122 and the panel 110. For example, one coil spring 126 may be disposed at the center of the lower surface of the body 122, or a plurality of coil springs 126 may be disposed at regular intervals over the entire lower surface of the body 122. When the pick-up head 30 is lowered to pick up the collet 20, the coil spring 126 is contracted by the downward force of the pick-up head 30, and the body 122 is lowered. Therefore, it is possible to prevent the collet 20 from being damaged by the force that the pickup head 30 is lowered.

In addition, the body 122 supported by the coil spring 126 can swing in the horizontal direction, i.e., front, back, left, and right.

The fastening screw 128 passes through the body 122 and is fastened to the panel 110. Accordingly, the body 122 can be fixed to the panel 110. [ At this time, the fastening screw 128 may be spaced apart from the body 122 by a predetermined distance in the horizontal direction and the vertical direction. Since the body 122 is supported by the coil spring 126 and has a clearance with the tightening screw 128, when the body 122 is fixed to the panel 110, the body 122 swings in the horizontal and vertical directions can do. Therefore, even if the pick-up head 30 and the collet 20 in the body 122 are slightly offset from each other, the body 121 can be swung so that the misalignment between the pick-up head 30 and the collet 20 can be aligned.

The engaging members 130 are for separating the collet 20 from the pick-up head 30 and are provided inside the opening 112.

Figs. 6 to 8 are schematic cross-sectional views for explaining a method of removing the collet using the engagement members shown in Fig.

6-8, the pick-up head 30 and the collet 20 can be moved downwardly through the opening 112 by the feed section for removal of the collet 20, As shown in FIG.

At this time, the engaging members 130 may be provided on both sides of the vertical movement path of the pickup head 30 in the opening 112. In particular, the latching members 130 may allow downward and upward movement of the pick-up head 30, but allow downward movement for the collet 20 but limit upward movement. As a result, the engaging members 130 can separate the collet 20 from the pick-up head 30 while the pick-up head 30 is moved upward through the opening 112.

As one example, the locking members 130 may be mounted on the inner side surfaces of the opening 112 so as to be downwardly rotatable by a spring (not shown), for example, a coil spring or a torsion spring. The locking members 130 may be rotated downward to allow the collet 20 to move downwardly, but after the collet 20 has passed downward, the locking members 130 return to the initial position by the torsion spring, You can limit your movement. Alternatively, the engaging member 110 may be installed to be movable forward and backward from the inner surface of the opening 112 by using a spring.

As a result, the collet 20 can be separated from the pick-up head 30 by being caught by the engaging members 130 while the pick-up head 30 is moved upward through the opening 112. 5, the pickup head 30 may be provided with recesses 38 on both sides thereof, and the vertical movement of the pickup head 30 may be performed by the recesses 38, (130) can be prevented.

The collet 20 can be separated from the pick-up head 30 by blocking the upward movement of the collet 20 by the catching members 130 as described above, The pickup head 30 may be lifted from the pickup head 30 without being completely separated from the pickup head 30. That is, there may be a case where the side surface of the collet 20 is reattached to the lower surface of the pickup head 30 by magnetic force immediately after the upper surface of the collet 20 is separated from the lower surface of the pickup head 30 have.

Air can be injected into the collet 20 through the pneumatic piping 32 while the pick-up head 30 is lifted to solve the above problems. That is, the air injected from the pneumatic piping 32 exerts downward force on the upper surface of the collet 20, so that the separation operation of the collet 20 can be assisted.

1 to 5, the collecting unit 140 is disposed below the opening 112 in the panel 110 and collects the collet 20 separated from the pick-up head 30.

The recovery unit 140 may be mounted on the panel 110 or may be provided separately from the panel 110.

The driving unit 150 is connected to the panel 110 and moves the panel 110 such that the opening 112 or the receiving unit 120 is positioned below the pickup head 30. The collet 20 can be removed from the pick-up head 30 when the opening 112 is located below the pick-up head 30. The pickup head 30 can mount one of the plurality of collets 20 received in the receiving portions 120 when the receiving portion 120 is positioned below the pickup head 30. [

As an example, when the panel 110 has a disc shape, the opening 112 and the receiving portions 120 may be arranged in the circumferential direction of the panel 110. [ In this case, the driving unit 150 rotates the panel 110 so that one of the collets 20 stored in the opening 112 or the collet receiving grooves 106 is moved under the pickup head 30 from which the collet 20 is removed As shown in FIG.

The pick-up head 30 can be moved downward with one of the receptacles 120 positioned below the pick-up head 30 so that one of the collets 20 is moved to the pick-up head 30 As shown in FIG. At this time, the upper surface of the new collet 20 can be guided to the lower surface of the pickup head 30 by the guide members 36 provided at the edge portion of the pickup head 30, It is preferable that the permanent magnet for head 34 has a larger magnetic force than the permanent magnet for storage 124 for easy mounting.

After the new collet 20 is mounted on the pick-up head 30, the pick-up head 30 can be raised by the conveying part.

The chuck 160 is provided at the central portion of the panel 110 and can support the die transferred from the wafer. The panel 110 may function as a buffer unit to temporarily support the die transferred from the wafer and then the panel 110 may be die bonded by the drive 150 after the die is seated on the chuck 160, And may be transported adjacent to the region in which the process is performed.

Alternatively, the pick-up head 30 and the collet 20 may be used to move the die from the wafer onto the chuck 160, alternatively picking up the die from the chuck 160, May be used for bonding. Alternatively, the pick-up head 30 and the collet 20 may be used to pick up the die from the wafer and bond directly onto the substrate.

According to the embodiments of the present invention as described above, various types of collets can be maintained in a horizontal state inside the body by disposing permanent magnets for storage on the side of the body of the receiving part. Since the collets remain in a horizontal state, defects can be prevented from occurring when the collets are mounted on the pick-up head. Further, the collet can be completely removed from the pick-up head by using the engagement members provided in the opening of the panel.

As a result, the separation and mounting of the collet can be performed accurately, so that the stability and reliability of the automatic replacement process of the collet can be improved.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the present invention as defined by the following claims. It can be understood that it is possible.

100: Collet replacement device 110: Panel
120: accommodating portion 130: engaging member
140: recovery unit 150:
160: Chuck 10: Pickup unit
20: Collet 30: Pickup head

Claims (7)

A panel having a pick-up head and an opening through which a collet coupled with the pick-up head using magnetic force passes in a vertical direction;
A body having an interior space for accommodating a plurality of collets by guiding an upper pad of the collet for replacement of the collet and a collet which is provided along the inner side of the body and applies a magnetic force to the upper pad of the collet, And a plurality of receiving portions formed on the panel. And
Wherein the pick-up head is provided on both sides of the vertical movement path of the pick-up head in the opening, and the upward movement of the pick-up head is permitted while the upward movement of the collet is restricted, And an engaging member for separating the engaging member from the engaging member,
Further comprising a fastening screw which is engaged with the panel through the body so as to be spaced apart from the body of the receptacle by a predetermined distance and which allows the body to swing when the pick-up head and the collet are misaligned, Replacement device. The collet replacing apparatus according to claim 1, wherein the accommodating permanent magnets have the same magnetic force. The collet replacing apparatus according to claim 1, wherein the height from the bottom of the inner space of the body to the accommodating permanent magnets is equal to or higher than the thickness of the collet. The apparatus of claim 1, further comprising coil springs provided between the body of the receptacles and the panel, the coil springs for buffering the force that the pick-up head descends to pick up the collet. delete The apparatus according to claim 1, further comprising a collecting portion provided below the opening in the panel, for receiving the collet separated from the pick-up head by the engaging member. The apparatus of claim 1, further comprising a drive unit coupled to the panel and adapted to move the panel such that the opening or the receptacles are positioned below the pick-up head.

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