KR102146776B1 - Apparatus for exchanging a collet and a hood - Google Patents

Abstract

The collet and hood replacement apparatus replaces an eject hood for ejecting a die from a wafer in a die bonding process and a collet for bonding the die onto a substrate. The collet and hood replacement device is disposed to be adjacent to a collet receiving unit in which a plurality of collets are accommodated, and to the collet receiving unit, and to a hood receiving unit in which a plurality of eject hoods are stored, and to be adjacent to the collet receiving unit, A collection unit for recovering the replaced collets and the replaced hood, and the hood is separated from the eject body and transferred to the recovery unit, and the hood is mounted on the eject body from the hood receiving unit, and separated from the pickup head The collet is transferred to the collecting unit, and the collet is transferred from the collet receiving unit to the pickup head, and the collet is separated from the pickup head and transferred to the first robot. It may include a second robot receiving the collet and mounted on the pickup head. Accordingly, it is possible to supply and recover the collet and the hood without interrupting the die bonding process.

Description

Collet and hood replacement device {Apparatus for exchanging a collet and a hood}

The present invention relates to a collet and hood replacement apparatus, and more particularly, an eject hood for ejecting a die from a wafer in a die bonding process, and a collet and hood replacement apparatus for replacing a collet for bonding the die onto a substrate. It is about.

In general, the die bonding process is a process for bonding individualized dies to a substrate through a sawing process.In the die bonding process, an ejector for ejecting the dies from a wafer and a pickup unit for picking up and transferring the dies may be used. have.

The pickup unit may include a collet for picking up the die using the vacuum, a pickup head to which the collet is coupled, and a driving unit for moving the pickup head.

The collet may be worn out due to prolonged use or may require replacement to adsorb a die of a different size. According to the prior art, the collet is inserted and loaded into a collet receiving groove formed on a panel for replacement, and the collet coupled to the pickup head is removed using a locking member provided on the panel, and the The collet is coupled to the pickup head using magnetic force. The technology is disclosed in Korean Patent Registration No. 10-1340831.

When all of the collets loaded on the panel are used, the die bonding process is stopped and the new collets are supplied to the panel. In addition, the removed collet may be recovered while the die bonding process is stopped. Since the die bonding process is often stopped in order to supply the new collets and recover the replaced collets, the productivity of the die bonding process may decrease.

On the other hand, the ejector includes an ejector body that moves according to a position of the die under the wafer, and a hood provided at an end of the ejection body to eject the dies.

The hood may require replacement to eject dies of different sizes. Since the hood is manually replaced by an operator, manual replacement by the operator may take a considerable amount of time. In addition, since the die bonding process is stopped even when the hood is replaced, productivity of the die bonding process may further decrease.

Korean Patent Registration No. 10-1340831 (registered on Dec. 05, 2013)

The present invention provides a collet and hood replacement apparatus capable of replacing a collet and a hood without interrupting the die bonding process.

The collet and hood replacement apparatus according to the present invention includes an eject hood for ejecting a die from a wafer in a die bonding process, and an apparatus for replacing a collet for bonding the die onto a substrate, wherein a collet in which a plurality of collets are accommodated A storage unit, a hood storage unit disposed adjacent to the collet storage unit, and a hood storage unit in which a plurality of ejection hoods are received, and a recovery unit disposed adjacent to the collet storage unit, and for recovering the replaced collets and the replaced hood And, separating the hood from the eject body and transferring it to the recovery unit, mounting the hood from the hood receiving unit to the ejection body, transferring the collet separated from the pickup head to the recovery unit, and from the collet receiving unit A first robot that transfers a collet to be mounted on a pickup head and a second robot that separates the collet from the pickup head and transfers it to the first robot, receives the collet from the first robot, and mounts the collet on the pickup head. Can include.

Separating the collet from the pickup head and transferring it to the collection unit, transporting the collet from the collet receiving unit and mounting it on the pickup head, transferring the hood to be mounted on the eject body from the hood receiving unit, and separating from the eject body A first robot that transfers the removed hood to the collection unit and a second robot that separates the hood from the eject body and transfers the hood to the first robot, receives the hood from the first robot, and mounts the hood on the eject body. I can.

According to an exemplary embodiment of the present invention, the collet receiving unit, the hood receiving unit, and the collecting unit may be provided in the form of drawers so that the collet and the hood can be supplied from the outside and the separated collet and the hood can be discharged.

According to an exemplary embodiment of the present invention, collets to be mounted on the pickup head may be delivered in a state loaded on a supply stacker, and collets separated from the pickup head may be delivered in a state loaded on a collection stacker.

According to an exemplary embodiment of the present invention, the supply stacker and the collection stacker may have the same shape as the hood so that the first robot holds the supply stacker, the collection stacker, and the hood in common.

According to one embodiment of the present invention, the supply stacker includes a body for receiving the collet in a loaded state, and a support for elastically supporting the collet accommodated in the body, and is provided on the inner bottom of the body. Includes permanent magnets provided on both sides of the upper end of the member and the body, and fixing the collets by applying a magnetic force to the upper pad of the collet, which is a magnetic material, to prevent the collet from being separated from the body by the elastic force of the support member. can do.

According to one embodiment of the present invention, the collection stacker is provided on both sides of a body for accommodating the collet and an upper end of the body, and allows the pickup head to move up and down, but restricts the upward movement of the collet, It may include a locking member for separating the collet from the pickup head while the pickup head is moved upward.

According to an embodiment of the present invention, the collet is separated and mounted at a collet replacement position, and the second robot is provided on a stage equipped with the wafer and the ejection body, and the collet is moved according to the movement of the stage. You can move to the replacement position.

The collet and hood replacement apparatus according to the present invention can automatically replace the collet and the hood using the first robot and the second robot. Accordingly, it is possible to quickly and accurately replace the collet and the hood, thereby improving the productivity of the die bonding process.

In addition, the collet and hood replacement device loads and delivers the collets to a supply stacker and a recovery stacker having the same shape as the hood. Accordingly, the first robot may hold the supply stacker, the collection stacker, and the hood in common. Since a separate robot for grasping and transporting the collet robot and the hood robot is not required, it is possible to reduce the cost required for the collet and hood replacement device.

In addition, the collet and hood replacement device has a drawer shape capable of opening and closing the collet storage unit, the hood storage unit, and the recovery unit from the outside. Accordingly, it is possible to supply the collet and the hood to the collet storage unit and the hood storage unit or recover the collet and the hood from the recovery unit without stopping the die bonding process. Accordingly, the die bonding process can be completely automated, and productivity of the die bonding process can be improved.

1 is a schematic perspective view illustrating a collet and hood replacement apparatus according to an embodiment of the present invention.
2 is a schematic cross-sectional view for explaining the pickup unit shown in FIG. 1.
3 is a bottom view for explaining the pickup head of the pickup unit shown in FIG. 2.
4 is a schematic side view for explaining the collet receiving unit shown in FIG. 1.
5 is a schematic cross-sectional view for explaining the supply stacker shown in FIG. 1.
6 is a schematic cross-sectional view for explaining the recovery stacker shown in FIG. 1.

Hereinafter, a collet and hood replacement apparatus according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings. In the present invention, various modifications may be made and various forms may be applied, and specific embodiments will be illustrated in the drawings and described in detail in the text. However, this is not intended to limit the present invention to a specific form disclosed, it should be understood to include all changes, equivalents, and substitutes included in the spirit and scope of the present invention. In describing each drawing, similar reference numerals have been used for similar elements. In the accompanying drawings, the dimensions of the structures are shown to be enlarged compared to the actual size for clarity of the present invention.

Terms such as first and second may be used to describe various components, but the components should not be limited by the terms. These terms are used only for the purpose of distinguishing one component from another component. For example, without departing from the scope of the present invention, a first element may be referred to as a second element, and similarly, a second element may be referred to as a first element.

The terms used in the present application are used only to describe specific embodiments, and are not intended to limit the present invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In the present application, terms such as "comprise" or "have" are intended to designate the presence of features, numbers, steps, actions, components, parts, or combinations thereof described in the specification, but one or more other features. It is to be understood that the presence or addition of elements or numbers, steps, actions, components, parts, or combinations thereof, does not preclude in advance the possibility of being added.

Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which the present invention belongs. Terms such as those defined in a commonly used dictionary should be interpreted as having a meaning consistent with the meaning in the context of the related technology, and should not be interpreted as an ideal or excessively formal meaning unless explicitly defined in this application. Does not.

1 is a schematic perspective view illustrating a collet and hood replacement apparatus according to an embodiment of the present invention.

Referring to FIG. 1, the collet and hood replacement apparatus 100 is provided in the chamber 10 in which the die bonding process is performed, individualized through a dicing process, and then attached to a dicing tape from a wafer (not shown). The hood 20 for ejecting the die (not shown) and the collet 70 for bonding the die to the substrate are replaced. The collet and hood replacement device 100 includes a collet storage unit 110, a hood storage unit 120, a collection unit 130, a supply stacker 140, a collection stacker 150, a first robot 160 and a second It includes a robot 170.

In the chamber 10, a hood 20, an eject body 30, a wafer holder 40, a stage 50, a pickup unit 60, and a die stage 90 are provided for bonding of the die.

The hood 20 and the eject body 30 lift the die from the lower portion of the wafer to eject. The hood 20 has a substantially cylindrical shape, and is coupled to the eject body 30. The hood 20 may be replaced according to the size of the die.

The wafer holder 40 supports the edge of the wafer so that the hood 20 and the eject body 30 stably eject the die.

The stage 50 supports the hood 20, the eject body 30 and the wafer holder 40. The stage 50 is provided to be movable along the Y-axis direction. Accordingly, the positions of the hood 20, the eject body 30, and the wafer holder 40 can be moved in the Y-axis direction.

The hood 20 and the eject body 30 are provided to be movable on the stage 50 in the X-axis and Y-axis directions. Accordingly, the hood 20 and the eject body 30 can eject several dies of the wafer.

The pickup unit 60 is provided to be movable along the X-axis, Y-axis and Z-axis directions, picks up and transfers the die from the wafer, and bonds the die onto the substrate.

FIG. 2 is a schematic cross-sectional view illustrating the pickup unit illustrated in FIG. 1, and FIG. 3 is a bottom view illustrating the pickup head of the pickup unit illustrated in FIG. 2.

2 and 3, the pickup unit 60 may include a pickup head 80 and a collet 70 attached to the pickup head 80, and the collet 70 is a pickup head using magnetic force. Can be mounted on 80. In particular, the collet 70 may be provided with a plurality of adsorption holes 72 for adsorbing the die, and the pickup head 80 has a pneumatic pipe 82 for providing vacuum to the adsorption holes 72 Can be provided.

The collet 70 may have a substantially rectangular shape and may include a hard upper pad 74 and a soft lower pad 76. The adsorption holes 72 for adsorbing the die may be provided through the upper pad 74 and the lower pad 76, and may communicate with the pneumatic pipe 82 of the pickup head 80.

As an example, the pickup head 80 may have a substantially rectangular shape so that the collet 70 can be mounted, and may include a drive shaft connected to a transfer unit (not shown) for transferring the pickup unit 60. A hollow shaft may be used as the drive shaft, and may function as a pneumatic pipe 82. However, the shape of the pickup head 80 and the collet 70 is not limited to a square shape, and various shapes such as a circle may be used depending on the case, and thus the scope of the present invention will not be limited thereto.

Meanwhile, the pickup head 80 and the collet 70 may be coupled to each other by magnetic force. As an example, the pickup head 80 may be provided with a permanent magnet 84 for the head to provide the magnetic force, and the upper pad 74 of the collet 70 may be formed of a magnetic material. On the other hand, guide members 86 for guiding the mounting position of the collet 70 may be disposed at an edge of the lower surface of the pickup head 80.

At least one pair of pickup units 60 may be provided. When a pair of pick-up units 60 are provided, one pick-up unit 60 picks up and transfers the die of the wafer, and the other pick-up unit 60 bonds the picked up die to the substrate.

The die stage 90 is provided between the pair of pickup units 60 and supports the die picked up from one pickup unit 60 so that the other pickup unit 60 can pick up the die. . Due to the die stage 90, a pair of pick-up units 60 can divide and perform the pick-up of the die and the bonding of the die. Therefore, it is possible to improve the efficiency of the die bonding process. The die stage 90 preferably maintains a fixed position, but the position can be avoided for replacement of the collet 70. For example, the collet 70 can be avoided in the Y-axis direction.

Referring back to FIG. 1, the collet receiving unit 110 accommodates a plurality of collets 70 to be mounted on the pickup head 80. At this time, the collets 70 are accommodated in the collet storage unit 110 while being loaded on the supply stacker 120. In addition, a collection stacker 130 for loading the collet 70 separated from the pickup head 80 may be accommodated in the collet storage unit 120 in an empty state.

The supply stacker 120 and the recovery stacker 130 have the same shape as the hood 20. For example, the supply stacker 120 and the recovery stacker 130 may have a substantially cylindrical shape. In this case, the cross-sectional area of the supply stacker 120 and the recovery stacker 130 may be substantially the same as the cross-sectional area of the hood 20. However, the lengths of the supply stacker 120 and the collection stacker 130 may be the same as or different from the length of the hood 20.

Since the hood 20, the supply stacker 120 and the collection stacker 130 have the same shape, the first robot 160 and the second robot 170 not only the hood 20 but also the supply stacker 120 and the collection Stacker 130 may also be gripped. A separate robot for gripping the supply stacker 120 and the collection stacker 130 is unnecessary.

4 is a schematic side view for explaining the collet receiving unit shown in FIG. 1.

Referring to FIG. 4, specifically, the collet receiving part 110 includes a plate 112 extending in the Y-axis direction, and the plate 112 has a plurality of slots 114 on the side in the X-axis direction. The supply stacker 120 and the recovery stacker 130 may be inserted into the slots 114.

The supply stacker 120 and the recovery stacker 130 may have grooves or locking projections formed on side surfaces of the supply stacker 120 and the recovery stacker 130 so that the supply stacker 120 and the recovery stacker 130 can be inserted and fixed in the slots 114. The groove or the locking jaw may be formed partially or entirely along side circumferences of the supply stacker 120 and the recovery stacker 130.

5 is a schematic cross-sectional view for explaining the supply stacker shown in FIG. 1.

Referring to FIG. 5, the supply stacker 120 includes a body 122, a support member 124, and a permanent magnet 126.

The body 122 accommodates the collets 70 in a state loaded therein. The body 122 has an approximately cylindrical shape. The outer surface of the body 122 is formed with a groove or a locking jaw for fixing with the slots 114 of the collet receiving portion 110.

The support member 124 is provided on the inner bottom of the body 122 and elastically supports the collets 70 accommodated in the body 122.

The support member 124 includes a plate 125 and a coil spring 126.

The plate 125 is disposed in a horizontal state inside the body 122. The coil spring 126 is disposed between the bottom surface of the body 122 and the plate 125, and elastically supports the plate 125

The plate 125 supports the collets 70 accommodated in the body 122. Thus, the plate 125 contacts the lower pad 76 of the collet 70. The plate 125 may be made of a material having a low coefficient of friction. Examples of the material include PEEK resin, Teflon resin, and the like. Since the coefficient of friction of the plate 125 is low, damage to the lower pad 76 can be prevented.

The coil spring 126 buffers an impact applied to the collet 70 when the collet 70 descends and contacts the plate 125. Accordingly, damage to the collet 70 can be prevented.

Further, due to the restoring force of the coil spring 126, the plate 125 rises, and accordingly, the plate 125 pushes up the collet 70 accommodated in the body 122.

A permanent magnet 126 for fixing the collet 70 is provided at the upper end of the body 122. For example, when the collet 70 has a quadrangular shape, the permanent magnets 126 may be disposed on both sides of the body 122 that face inside, or may be disposed on the four sides of the body 122.

The permanent magnets 126 may magnetically fix the upper pad 74 of the collet 70 which is magnetic. Even if the collets 70 inside the body 122 are pushed up by the elastic force of the support member 124, the permanent magnets 126 may fix the collet 70 at the top end. Therefore, it is possible to prevent the collet 70 from being separated from the body 122 by the elastic force of the support member 124.

On the other hand, the pickup head 80 moves downward while the supply stacker 120 is positioned under the pickup head 80 or the supply stacker 120 moves upward, so that the collet 70 at the top is moved to the pickup head ( 80) can be mounted on the lower surface. At this time, the upper surface of the new collet 70 may be guided to the lower surface of the pickup head 80 by guide members 86 provided at the edge of the pickup head 80, and For easy mounting, the permanent magnet 84 for the head preferably has a greater magnetic force than the permanent magnet 126.

5 is a schematic cross-sectional view for explaining the recovery stacker shown in FIG. 1.

Referring to FIG. 5, the recovery stacker 130 includes a body 132 and locking members 134.

The body 132 may accommodate the collets 70 loaded therein. The body 132 has an approximately cylindrical shape. The outer surface of the body 132 is formed with a groove or a locking jaw for fixing with the slots 114 of the collet receiving portion 110.

The locking members 134 are provided on both sides of the upper end of the body 132. The engaging members 134 allow the pickup head 80 to move up and down, but limit the upward movement of the collet 70 to separate the collet 70 from the pickup head 80 while the pickup head 80 is moved upward. can do.

Specifically, the pickup head 80 and the collet 70 may be moved downward toward the inside of the collection stacker 130 to remove the collet 70, and then may be moved upward again.

In this case, the locking members 134 may be provided on both sides of the vertical movement path of the pickup head 80. In particular, the engaging members 134 may allow downward and upward movement of the pickup head 80, but may allow downward movement with respect to the collet 70, but may limit upward movement. As a result, the locking members 134 may separate the collet 70 from the pickup head 80 while the pickup head 80 is moved upward from the inside of the collection stacker 130.

As an example, locking members 134 may be mounted on inner surfaces of both sides of the opening 112 so as to be rotated downward by a spring (not shown), for example, a coil spring or a torsion spring. The locking members 134 may be rotated downward to enable the collet 70 to move downward, but after the collet 70 passes downward, it returns to the initial position by the torsion spring and the upper part of the collet 70 You can restrict movement. Unlike the above, the locking member 110 may be installed to be able to advance and retreat from the inner surface of the recovery stacker 130 using a spring.

As a result, the collet 70 can be separated from the pickup head 80 by being caught by the locking members 134 while the pickup head 80 is moved upward in the collection stacker 130. At this time, as shown in FIG. 3, recesses 88 may be provided on both sides of the pickup head 80, respectively, and vertical movement of the pickup head 80 is performed by the recesses 88. Interference with (134) can be prevented.

Meanwhile, the collet 70 may be separated from the pickup head 80 by blocking the upward movement of the collet 70 by the locking members 134 as described above, but in some cases, the collet 70 may be It may be raised in a state suspended from the pickup head 80 without being completely separated from the 80. That is, there may be a case where the side of the collet 70 is reattached to the lower surface of the pickup head 80 by magnetic force immediately after the upper surface of the collet 70 is separated from the lower surface of the pickup head 80. have.

In order to solve the above problems, air may be injected into the collet 70 through the pneumatic pipe 82 while the pickup head 80 is ascending. That is, the air injected from the pneumatic pipe 82 exerts a downward force on the upper surface of the collet 70, thereby assisting the separation operation of the collet 70.

Referring back to FIG. 1, the hood storage unit 120 accommodates the hoods 20 to be mounted on the eject body 30. The hood receiving unit 120 has a shape similar to the collet receiving unit 110.

Specifically, the hood accommodating part 120 includes a plate extending in the Y-axis direction, and the plate has a plurality of slots on the side in the X-axis direction. Hoods 20 may be inserted into the slots.

A groove or a locking jaw may be formed on the side of each hood 20 so that the hoods 20 can be inserted and fixed in the slots. The groove or the locking jaw may be formed partially or entirely along the circumference of the side of the hood 20.

The recovery unit 130 accommodates the collet 70 separated from the pickup head 80 and the hood 20 separated from the eject body 30. The recovery unit 130 has a basket shape with an open top. The separated collets 70 are accommodated in the recovery unit 130 while being loaded on the recovery stacker 130.

The bottom surface of the recovery unit 130 may be an inclined surface inclined in one direction. For example, the one direction may be a Y-axis direction. The recovery stacker 130 and the hood 20 having the cylindrical shape may be accommodated in the recovery unit 130 and move along the inclined bottom surface.

The collet receiving unit 110, the hood receiving unit 120, and the collecting unit 130 are disposed to be adjacent to each other, and may be opened and closed in the form of a drawer on one side of the chamber 10. Accordingly, the collet storage unit 110, the hood storage unit 120, and the recovery unit 130 are opened from the outside of the chamber 10 to supply the collet 70 and the hood 20, or the separated collet 70 and The hood 20 can be discharged.

Specifically, the collet storage unit 110 may be opened to supply the supply stacker 120 in which the collets 70 are loaded and the empty collection stacker 130. In addition, the hood 20 may be supplied by opening the hood accommodating part 120. In addition, by opening the collection unit 130, the collection stacker 120 in which the separated collets 70 are loaded and the separated hoods 20 may be discharged.

Since the collet 70 and the hood 20 are supplied from the outside of the chamber 10 or the separated collet 70 and the hood 20 are discharged, the collet 70 and the hood 20 are supplied and the separated collet ( 70) And there is no need to stop the die bonding process when the hood 20 is discharged. Therefore, it is possible to improve the productivity of the die bonding process.

The first robot 160 is provided to be movable in the X-axis, Y-axis and Z-axis directions, and has a supply stacker 120, a collection stacker 130, and a gripper for holding the hood 20.

The first robot 160 separates the hood 20 from the eject body 30 and transfers it to the recovery unit 150.

Specifically, the first robot 160 moves in the X-axis and Y-axis directions and is positioned above the eject body 30. Next, the first robot 160 descends along the Z axis and grips the hood 20 coupled to the eject body 30 with a gripper. The hood 20 is separated from the eject body 30 by the first robot 160 ascending along the Z axis while holding the hood 20 with the gripper. The first robot 160 moves in the X-axis and Y-axis directions again to transfer the separated hood 20 to the recovery unit 150.

In addition, the first robot 160 mounts the hood 20 of the hood accommodating part 140 to the eject body 30.

Specifically, the first robot 160 moves in the X-axis and Y-axis directions to grip the hood 20 of the hood accommodating part 140 with the gripper. While holding the hood 20, the first robot 160 moves in the X-axis and Y-axis directions and is positioned above the eject body 30. Thereafter, the first robot 160 descends along the Z axis to mount the hood 20 on the eject body 30. In a state in which the gripper is released, the first robot 160 rises along the Z axis.

The first robot 160 receives the collet 70 separated from the pickup head 80 from the second robot 170.

Specifically, the first robot 160 moves in the X-axis and Y-axis directions to hold the empty collection stacker 130 from the collet storage unit 110. The first robot 160 moves in the X-axis and Y-axis directions and transfers the empty collection stacker 130 to the second robot 170 while being disposed adjacent to the second robot 170.

In addition, the first robot 160 is located adjacent to the second robot 170, the collet 70 separated from the pickup head 80 from the second robot 170 is loaded on the recovery stacker 130 It is delivered to. Thereafter, the first robot 160 moves in the X-axis and Y-axis directions to transfer the collection stacker 130 to the collection unit 150.

The first robot 160 transfers the collet 70 to be mounted from the collet receiving unit 110 to the second robot 170.

Specifically, the first robot 160 moves in the X-axis and Y-axis directions and grips the collets 70 to be mounted in the collet storage unit 110 while being loaded in the supply stacker 120. The first robot 160 moves in the X-axis and Y-axis directions to deliver the supply stacker 120 to the second robot 170 while being disposed adjacent to the second robot 170.

In addition, the first robot 160 receives the empty supply stacker 120 from the second robot 170 while being positioned adjacent to the second robot 170. Thereafter, the first robot 160 moves in the X-axis and Y-axis directions to transfer the empty supply stacker 120 to the collection unit 150.

The second robot 170 is provided to be movable in the Y-axis and Z-axis directions, and has a gripper for gripping the supply stacker 120 and the collection stacker 130.

For example, the second robot 170 may be fixed on the stage 50 so as to be movable in the Z-axis direction. Since the stage 50 can move in the Y-axis direction, the second robot 170 can move in the Y-axis direction according to the movement of the stage 50. As another example, the second robot 170 may be provided to be movable in the Y-axis and Z-axis directions irrespective of the stage 50.

The second robot 170 separates the collet 70 from the pickup head 80 and transfers it to the first robot 160.

Specifically, the second robot 170 receives the empty collection stacker 130 from the first robot 160 and fixes it with a gripper. The second robot 170 moves in the Y-axis direction to position the collection stacker 130 at a collet replacement position. For example, as the stage 50 moves in the Y-axis direction, the second robot 170 may move in the Y-axis direction. The collet replacement position may be a position of the die stage 90. In this case, the die stage 90 may move to a different position in order to prevent a collision with the second robot 170.

In order for the recovery stacker 130 fixed to the gripper to move to the collet replacement position, which is the position of the die stage 90 only by moving in the Y-axis direction, the gripper and the die stage 90 of the second robot 170 are the same Y It can be located on the axis.

With the collection stacker 130 positioned at the collet replacement position and the pickup unit 60 positioned above the collection stacker 130, the collection stacker 130 and the pickup unit 60 are relatively moved along the Z-axis direction. The collet 70 is separated from the pickup head 80 and loaded onto the collection stacker 130.

For example, by raising the second robot 170 in the Z-axis direction and then lowering it, or by lowering the pickup unit 60 and then raising it, the collet 70 is moved to the locking members 134 of the recovery stacker 130. And is separated from the pickup head 80.

When there are a plurality of die stages 90, the collet replacement positions are also plural, and thus the second robot 170 may be provided as many times as the die stage 90. In this case, a plurality of second robots 170 provided on the stage 50 may each move to the collet replacement positions at a time by the stage 50. Further, the collet 70 may be separated at the same time at each collet replacement position.

When the separation of the collet 70 is completed, the second robot 170 moves in the Y-axis direction according to the movement of the stage 50 and transfers the collection stacker 130 in which the separated collets 70 are loaded. 160).

In addition, the second robot 170 mounts the collet 70 of the collet receiving unit 110 on the pickup head 80.

Specifically, the second robot 170 receives the supply stacker 120 loaded with collets 70 from the first robot 160 and grips it with the gripper. The second robot 170 moves in the Y-axis direction to position the supply stacker 120 at the collet replacement position.

With the supply stacker 120 positioned at the collet replacement position and the pickup head 80 positioned above the supply stacker 120, the supply stacker 120 and the pickup head 80 are moved relative to each other along the Z-axis direction. The collet 70 is mounted on the pickup head 80.

For example, the second robot 170 is raised in the Z-axis direction and then lowered, or the pickup head 80 is lowered and raised, thereby colleting the pickup head 80 with the magnetic force of the permanent magnet 84 for the head. 70 is mounted.

When there are a plurality of die stages 90, the collet replacement positions are also plural, and thus the second robot 170 may be provided as many times as the die stage 90. In this case, a plurality of second robots 170 provided on the stage 50 may each move to the collet replacement positions at a time by the stage 50. In addition, the collet 70 may be installed at the same time at each collet replacement position.

When the mounting of the collet 70 is completed, the second robot 170 moves in the Y-axis direction according to the movement of the stage 50 and transfers the empty supply stacker 120 to the first robot 160.

The collet and hood replacement apparatus 100 may automatically replace the collet 70 and the hood 20 without interrupting the die bonding process. Accordingly, the die bonding process can be completely automated, and productivity of the die bonding process can be improved.

As described above, the collet and hood replacement apparatus according to the present invention can automatically replace the collet and the hood, and supply the collet and the hood to the collet storage unit and the hood storage unit without interrupting the die bonding process, or The collet and hood can be recovered from. Accordingly, the die bonding process can be completely automated, and productivity of the die bonding process can be improved.

Although the above has been described with reference to preferred embodiments of the present invention, those skilled in the art will be able to variously modify and change the present invention without departing from the spirit and scope of the present invention described in the following claims. You will understand that you can.

100: collet and hood replacement device 110: collet storage unit
120: supply stacker 130: recovery stacker
140: hood storage unit 150: recovery unit
160: first robot 170: second robot
10: chamber 20: hood
30: eject body 40: wafer holder
50: stage 60: pickup unit
70: collet 80: pickup head
90: die stage

Claims (7)

An apparatus for replacing an eject hood for ejecting a die from a wafer in a die bonding process, and a collet for bonding the die onto a substrate, comprising:
A collet receiving unit in which a plurality of collets are accommodated;
A hood receiving unit disposed adjacent to the collet receiving unit and receiving a plurality of ejection hoods;
A collection unit disposed adjacent to the collet receiving unit and configured to recover the replaced collets and the replaced hood;
Separate the hood from the eject body and transfer it to the collection unit, mount the hood from the hood storage unit to the eject body, transfer the collet separated from the pickup head to the collection unit, and mount it on the pickup head from the collet storage unit A first robot that delivers a collet to be done; And
And a second robot that separates the collet from the pickup head and transfers the collet to the first robot, receives the collet from the first robot, and mounts the collet on the pickup head. The collet and hood according to claim 1, wherein the collet receiving unit, the hood receiving unit, and the collecting unit are provided in the form of drawers so that the collet and the hood can be supplied from the outside and the separated collet and the hood can be discharged. Replacement device. The collet and hood replacement device according to claim 1, wherein the collets to be mounted on the pickup head are delivered in a state loaded on a supply stacker, and the collets separated from the pickup head are delivered in a state loaded on a recovery stacker. . The collet and hood replacement device according to claim 3, wherein the supply stacker and the collection stacker have the same shape as the hood so that the first robot holds the supply stacker, the collection stacker, and the hood in common. . The method of claim 3, wherein the supply stacker,
A body for receiving the collet in a loaded state;
A support member provided on the inner bottom of the body and elastically supporting the collet accommodated in the body; And
It includes permanent magnets provided on both sides of the upper end of the body and applying a magnetic force to the upper pad of the collet, which is a magnetic material, to prevent the collet from being separated from the body by the elastic force of the support member to fix the collets. Collet and hood replacement device characterized by. The method of claim 3, wherein the recovery stacker,
A body for receiving the collet; And
It is provided on both sides of the upper end of the body, and allows the pickup head to move up and down, but restricts the upward movement of the collet, and includes a locking member for separating the collet from the pickup head while the pickup head is moved upward. Collet and hood replacement device, characterized in that. The method of claim 1, wherein the collet is separated and mounted at a collet replacement position, and the second robot is provided on a stage equipped with the wafer and the ejection body to move to the collet replacement position according to the movement of the stage. Collet and hood replacement device, characterized in that to move.

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