KR101482627B1 - 평판 표시 장치 및 그 제조 방법 - Google Patents

평판 표시 장치 및 그 제조 방법 Download PDF

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Publication number
KR101482627B1
KR101482627B1 KR20100053597A KR20100053597A KR101482627B1 KR 101482627 B1 KR101482627 B1 KR 101482627B1 KR 20100053597 A KR20100053597 A KR 20100053597A KR 20100053597 A KR20100053597 A KR 20100053597A KR 101482627 B1 KR101482627 B1 KR 101482627B1
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KR
South Korea
Prior art keywords
electrode
storage electrode
storage
layer
adjustment layer
Prior art date
Application number
KR20100053597A
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English (en)
Korean (ko)
Other versions
KR20110133923A (ko
Inventor
짠지펑
태승규
김덕회
Original Assignee
삼성디스플레이 주식회사
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Application filed by 삼성디스플레이 주식회사 filed Critical 삼성디스플레이 주식회사
Priority to KR20100053597A priority Critical patent/KR101482627B1/ko
Priority to US13/029,636 priority patent/US8643013B2/en
Priority to JP2011042038A priority patent/JP5762775B2/ja
Priority to CN201110058809.6A priority patent/CN102269901B/zh
Priority to TW100115133A priority patent/TWI531846B/zh
Publication of KR20110133923A publication Critical patent/KR20110133923A/ko
Priority to US14/163,873 priority patent/US9012273B2/en
Application granted granted Critical
Publication of KR101482627B1 publication Critical patent/KR101482627B1/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors
    • H01L28/60—Electrodes
    • H01L28/82—Electrodes with an enlarged surface, e.g. formed by texturisation
    • H01L28/86—Electrodes with an enlarged surface, e.g. formed by texturisation having horizontal extensions
    • H01L28/87—Electrodes with an enlarged surface, e.g. formed by texturisation having horizontal extensions made by depositing layers, e.g. by depositing alternating conductive and insulating layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
    • H01L27/1259—Multistep manufacturing methods
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
    • H01L27/1255—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs integrated with passive devices, e.g. auxiliary capacitors
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136213—Storage capacitors associated with the pixel electrode

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Liquid Crystal (AREA)
  • Manufacturing & Machinery (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
KR20100053597A 2010-06-07 2010-06-07 평판 표시 장치 및 그 제조 방법 KR101482627B1 (ko)

Priority Applications (6)

Application Number Priority Date Filing Date Title
KR20100053597A KR101482627B1 (ko) 2010-06-07 2010-06-07 평판 표시 장치 및 그 제조 방법
US13/029,636 US8643013B2 (en) 2010-06-07 2011-02-17 Flat panel display device including a storage capacitor
JP2011042038A JP5762775B2 (ja) 2010-06-07 2011-02-28 平板表示装置及びその製造方法
CN201110058809.6A CN102269901B (zh) 2010-06-07 2011-03-09 平板显示设备及其制造方法
TW100115133A TWI531846B (zh) 2010-06-07 2011-04-29 平板顯示裝置和製造其之方法
US14/163,873 US9012273B2 (en) 2010-06-07 2014-01-24 Method of manufacturing a flat panel display device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR20100053597A KR101482627B1 (ko) 2010-06-07 2010-06-07 평판 표시 장치 및 그 제조 방법

Publications (2)

Publication Number Publication Date
KR20110133923A KR20110133923A (ko) 2011-12-14
KR101482627B1 true KR101482627B1 (ko) 2015-01-14

Family

ID=45052247

Family Applications (1)

Application Number Title Priority Date Filing Date
KR20100053597A KR101482627B1 (ko) 2010-06-07 2010-06-07 평판 표시 장치 및 그 제조 방법

Country Status (5)

Country Link
US (2) US8643013B2 (zh)
JP (1) JP5762775B2 (zh)
KR (1) KR101482627B1 (zh)
CN (1) CN102269901B (zh)
TW (1) TWI531846B (zh)

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US9036114B2 (en) * 2012-06-01 2015-05-19 Semiconductor Energy Laboratory Co., Ltd. Polymer/liquid crystal composite and liquid crystal display device including the same
KR101924079B1 (ko) 2012-07-06 2018-12-03 삼성디스플레이 주식회사 액정 표시 장치 및 그 제조 방법
CN103296030B (zh) * 2012-07-25 2015-12-09 上海天马微电子有限公司 Tft-lcd阵列基板
KR101959506B1 (ko) * 2012-10-26 2019-03-19 삼성디스플레이 주식회사 유기 발광 표시 장치
JP6063766B2 (ja) * 2013-02-20 2017-01-18 株式会社ジャパンディスプレイ 半導体装置
KR102045036B1 (ko) * 2013-08-27 2019-11-14 엘지디스플레이 주식회사 고 개구율 유기발광 다이오드 표시장치 및 그 제조 방법
KR102304725B1 (ko) * 2014-10-16 2021-09-27 삼성디스플레이 주식회사 박막 트랜지스터 어레이 기판 및 이의 제조 방법, 박막 트랜지스터 어레이 기판을 포함하는 유기 발광 표시 장치
KR102366566B1 (ko) * 2014-10-16 2022-02-25 삼성디스플레이 주식회사 박막 트랜지스터 어레이 기판 및 이를 포함하는 유기 발광 표시 장치
KR102346675B1 (ko) 2014-10-31 2022-01-04 삼성디스플레이 주식회사 디스플레이 장치 및 그 제조 방법
JP6758844B2 (ja) * 2015-02-13 2020-09-23 株式会社半導体エネルギー研究所 表示装置
KR102431309B1 (ko) * 2015-06-25 2022-08-11 티씨엘 차이나 스타 옵토일렉트로닉스 테크놀로지 컴퍼니 리미티드 박막 트랜지스터 기판, 및 표시 장치
TWI709248B (zh) * 2015-12-10 2020-11-01 聯華電子股份有限公司 電容及其製作方法
KR102477984B1 (ko) * 2015-12-11 2022-12-15 삼성디스플레이 주식회사 액정 표시 장치 및 그 제조 방법
KR102543038B1 (ko) * 2015-12-11 2023-06-15 엘지디스플레이 주식회사 유기전계발광표시장치 및 이의 제조방법
CN105487315A (zh) * 2016-01-19 2016-04-13 武汉华星光电技术有限公司 Tft阵列基板
CN105679768B (zh) * 2016-01-25 2019-07-12 武汉华星光电技术有限公司 阵列基板、液晶显示面板及液晶显示装置
DE102016218187B4 (de) * 2016-03-31 2020-12-24 Shanghai Tianma AM-OLED Co., Ltd. Array-Substrat und Herstellungsverfahren, Anzeigepaneel und Anzeigeeinrichtung
CN105742296B (zh) * 2016-03-31 2019-05-07 上海天马有机发光显示技术有限公司 一种阵列基板及其制备方法、显示面板和显示装置
CN105977261B (zh) * 2016-05-27 2019-01-04 武汉华星光电技术有限公司 阵列基板、液晶显示面板及液晶显示装置
CN106483728B (zh) 2017-01-04 2019-05-21 京东方科技集团股份有限公司 像素结构、阵列基板和显示装置
CN107065359A (zh) * 2017-05-31 2017-08-18 深圳市华星光电技术有限公司 显示面板
CN109148480B (zh) * 2018-08-21 2021-03-16 武汉华星光电半导体显示技术有限公司 阵列基板
CN110265412A (zh) * 2019-06-27 2019-09-20 京东方科技集团股份有限公司 阵列基板、显示面板和阵列基板的制造方法
WO2022130086A1 (ja) * 2020-12-15 2022-06-23 株式会社半導体エネルギー研究所 半導体装置

Citations (4)

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KR20030069668A (ko) * 2002-02-22 2003-08-27 삼성전자주식회사 액티브 매트릭스형 유기전계발광 표시장치 및 그 제조방법
US20050121677A1 (en) 2003-11-27 2005-06-09 Deuk-Jong Kim Capacitor and flat panel display having the same
KR20070049743A (ko) * 2005-11-09 2007-05-14 엘지.필립스 엘시디 주식회사 액정표시장치용 어레이기판과 그 제조방법
US20080303776A1 (en) 2007-03-08 2008-12-11 Samsung Sdi Co., Ltd Flat panel display device

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JP2625268B2 (ja) * 1991-03-19 1997-07-02 シャープ株式会社 アクティブマトリクス基板
JP3783500B2 (ja) * 1999-12-28 2006-06-07 セイコーエプソン株式会社 電気光学装置及び投射型表示装置
JP3745343B2 (ja) * 2002-04-23 2006-02-15 株式会社半導体エネルギー研究所 半導体素子
US7242021B2 (en) 2002-04-23 2007-07-10 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and display element using semiconductor device
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JP4586573B2 (ja) * 2005-02-28 2010-11-24 エプソンイメージングデバイス株式会社 電気光学装置及びその製造方法、薄膜トランジスタ、電子機器
KR100696522B1 (ko) 2005-05-28 2007-03-19 삼성에스디아이 주식회사 평판표시장치
US7652291B2 (en) 2005-05-28 2010-01-26 Samsung Mobile Display Co., Ltd. Flat panel display
JP4405557B2 (ja) * 2005-09-22 2010-01-27 シャープ株式会社 アクティブマトリクス基板、表示装置、テレビジョン装置、アクティブマトリクス基板の製造方法、及び表示装置の製造方法
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KR20030069668A (ko) * 2002-02-22 2003-08-27 삼성전자주식회사 액티브 매트릭스형 유기전계발광 표시장치 및 그 제조방법
US20050121677A1 (en) 2003-11-27 2005-06-09 Deuk-Jong Kim Capacitor and flat panel display having the same
KR20070049743A (ko) * 2005-11-09 2007-05-14 엘지.필립스 엘시디 주식회사 액정표시장치용 어레이기판과 그 제조방법
US20080303776A1 (en) 2007-03-08 2008-12-11 Samsung Sdi Co., Ltd Flat panel display device

Also Published As

Publication number Publication date
TW201219945A (en) 2012-05-16
KR20110133923A (ko) 2011-12-14
US9012273B2 (en) 2015-04-21
CN102269901A (zh) 2011-12-07
JP2011257735A (ja) 2011-12-22
US20110297941A1 (en) 2011-12-08
CN102269901B (zh) 2016-04-13
US8643013B2 (en) 2014-02-04
US20140141574A1 (en) 2014-05-22
TWI531846B (zh) 2016-05-01
JP5762775B2 (ja) 2015-08-12

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