KR101391070B1 - 약액 공급 장치 - Google Patents

약액 공급 장치 Download PDF

Info

Publication number
KR101391070B1
KR101391070B1 KR1020137003791A KR20137003791A KR101391070B1 KR 101391070 B1 KR101391070 B1 KR 101391070B1 KR 1020137003791 A KR1020137003791 A KR 1020137003791A KR 20137003791 A KR20137003791 A KR 20137003791A KR 101391070 B1 KR101391070 B1 KR 101391070B1
Authority
KR
South Korea
Prior art keywords
chemical liquid
tube
primary
chamber
pump
Prior art date
Application number
KR1020137003791A
Other languages
English (en)
Korean (ko)
Other versions
KR20130041211A (ko
Inventor
타케오 야지마
Original Assignee
가부시키가이샤 고가네이
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 고가네이 filed Critical 가부시키가이샤 고가네이
Publication of KR20130041211A publication Critical patent/KR20130041211A/ko
Application granted granted Critical
Publication of KR101391070B1 publication Critical patent/KR101391070B1/ko

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F04B43/10—Pumps having fluid drive
    • F04B43/107—Pumps having fluid drive the fluid being actuated directly by a piston
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F04B43/10—Pumps having fluid drive
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Reciprocating Pumps (AREA)
  • Coating Apparatus (AREA)
KR1020137003791A 2010-09-28 2011-04-14 약액 공급 장치 KR101391070B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2010-216461 2010-09-28
JP2010216461A JP5416672B2 (ja) 2010-09-28 2010-09-28 薬液供給装置
PCT/JP2011/059292 WO2012042955A1 (ja) 2010-09-28 2011-04-14 薬液供給装置

Publications (2)

Publication Number Publication Date
KR20130041211A KR20130041211A (ko) 2013-04-24
KR101391070B1 true KR101391070B1 (ko) 2014-04-30

Family

ID=45892438

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020137003791A KR101391070B1 (ko) 2010-09-28 2011-04-14 약액 공급 장치

Country Status (3)

Country Link
JP (1) JP5416672B2 (ja)
KR (1) KR101391070B1 (ja)
WO (1) WO2012042955A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180018446A (ko) * 2016-08-11 2018-02-21 도쿄엘렉트론가부시키가이샤 메니스커스 제어에 의한 고정밀 분배 시스템
KR20180018444A (ko) * 2016-08-11 2018-02-21 도쿄엘렉트론가부시키가이샤 고순도 분배 유닛
KR20180018445A (ko) * 2016-08-11 2018-02-21 도쿄엘렉트론가부시키가이샤 고순도 분배 시스템

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10655619B2 (en) 2014-10-23 2020-05-19 Tokyo Electron Limited Pump, pump device, and liquid supply system
JP6442377B2 (ja) * 2014-10-23 2018-12-19 東京エレクトロン株式会社 ポンプ装置セット及び液供給システム
JP6860193B2 (ja) * 2016-12-06 2021-04-14 学校法人 中央大学 筒ユニット及び搬送装置
JP6840380B2 (ja) * 2016-09-21 2021-03-10 学校法人 中央大学 筒ユニット及び搬送装置
WO2018056378A1 (ja) * 2016-09-21 2018-03-29 学校法人 中央大学 筒ユニット及び搬送装置
CN109790834B (zh) * 2016-09-21 2020-09-11 株式会社索拉里斯 筒单元和输送装置
JP6727506B2 (ja) * 2016-09-27 2020-07-22 学校法人 中央大学 管体
KR101948178B1 (ko) * 2016-12-02 2019-02-15 주식회사 엔씨에스 약액공급방법
JP7042639B2 (ja) * 2018-02-07 2022-03-28 株式会社コガネイ 液体供給装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005305396A (ja) 2004-04-26 2005-11-04 Koganei Corp 可撓性タンクとこれを用いた薬液供給装置
JP3947398B2 (ja) 2001-12-28 2007-07-18 株式会社コガネイ 薬液供給装置および薬液供給方法
JP2008025561A (ja) 2006-06-19 2008-02-07 Koganei Corp 薬液供給装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5666470A (en) * 1979-11-06 1981-06-04 Showa Alum Ind Kk Apparatus for transporting high-viscous fluid
JP3554115B2 (ja) * 1996-08-26 2004-08-18 株式会社コガネイ 薬液供給装置
JP2004218626A (ja) * 2003-01-16 2004-08-05 Minoru Nakamura チュウブポンプ等に使用する圧縮方法及び開閉弁構造
JP4124712B2 (ja) * 2003-09-11 2008-07-23 株式会社コガネイ 薬液供給用の可撓性チューブ
JP2007154767A (ja) * 2005-12-06 2007-06-21 Iwaki Co Ltd チューブポンプ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3947398B2 (ja) 2001-12-28 2007-07-18 株式会社コガネイ 薬液供給装置および薬液供給方法
JP2005305396A (ja) 2004-04-26 2005-11-04 Koganei Corp 可撓性タンクとこれを用いた薬液供給装置
JP2008025561A (ja) 2006-06-19 2008-02-07 Koganei Corp 薬液供給装置

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180018446A (ko) * 2016-08-11 2018-02-21 도쿄엘렉트론가부시키가이샤 메니스커스 제어에 의한 고정밀 분배 시스템
KR20180018444A (ko) * 2016-08-11 2018-02-21 도쿄엘렉트론가부시키가이샤 고순도 분배 유닛
KR20180018445A (ko) * 2016-08-11 2018-02-21 도쿄엘렉트론가부시키가이샤 고순도 분배 시스템
KR20220016252A (ko) * 2016-08-11 2022-02-08 도쿄엘렉트론가부시키가이샤 고순도 분배 시스템
KR102394995B1 (ko) * 2016-08-11 2022-05-04 도쿄엘렉트론가부시키가이샤 고순도 분배 유닛
KR102462049B1 (ko) * 2016-08-11 2022-11-02 도쿄엘렉트론가부시키가이샤 고순도 분배 시스템
KR102485546B1 (ko) * 2016-08-11 2023-01-05 도쿄엘렉트론가부시키가이샤 고순도 분배 시스템
KR102545444B1 (ko) * 2016-08-11 2023-06-19 도쿄엘렉트론가부시키가이샤 메니스커스 제어에 의한 고정밀 분배 시스템

Also Published As

Publication number Publication date
KR20130041211A (ko) 2013-04-24
JP5416672B2 (ja) 2014-02-12
JP2012071230A (ja) 2012-04-12
WO2012042955A1 (ja) 2012-04-05

Similar Documents

Publication Publication Date Title
KR101391070B1 (ko) 약액 공급 장치
JP6199553B2 (ja) 容積式ディスペンサー及び個別量の液体を吐出する方法
KR100687539B1 (ko) 펌프장치
JPH1061558A (ja) 薬液供給装置
JPH10299644A (ja) 集積回路のエポキシ樹脂封止用の吐出ポンプ
KR100751657B1 (ko) 케미컬 리퀴드 공급용 플렉시블 튜브
JP2008101510A (ja) 薬液供給装置
JP5114527B2 (ja) 液体供給装置
US5807085A (en) Liquid medicine supplying system with valve devices
WO2005089955A1 (ja) 薬液供給装置
JP2001113212A (ja) 液体吐出装置
KR20030048515A (ko) 약액공급장치
US6343721B1 (en) Sealed dispensing device
KR101763121B1 (ko) 개선된 약액 가압 장치, 및 이를 구비한 약액 공급 장치
KR102406046B1 (ko) 고압 밸브
JP4595551B2 (ja) 材料吐出装置
KR101640246B1 (ko) 유체 혼합장치
KR101414080B1 (ko) 약액공급장치
TWI826920B (zh) 液體供給裝置
KR101837001B1 (ko) 개선된 약액 펌핑용 가압 장치 및 방법, 및 이를 구비한 약액 공급 장치 및 방법
JP5508052B2 (ja) 静電塗装システム
JP4538524B2 (ja) 静電塗装装置の中間貯留槽
JP2014031811A (ja) 液体供給制御弁
KR101147167B1 (ko) 개선된 약액 펌핑 장치 및 방법, 및 이를 구비한 약액 공급 장치
JP2006127204A (ja) 高粘度液用圧力調整弁

Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20170306

Year of fee payment: 4

FPAY Annual fee payment

Payment date: 20180319

Year of fee payment: 5

FPAY Annual fee payment

Payment date: 20190401

Year of fee payment: 6