KR101384498B1 - 태양 전지 제조를 위한 소형 컨택트 어레이 - Google Patents
태양 전지 제조를 위한 소형 컨택트 어레이 Download PDFInfo
- Publication number
- KR101384498B1 KR101384498B1 KR1020097024837A KR20097024837A KR101384498B1 KR 101384498 B1 KR101384498 B1 KR 101384498B1 KR 1020097024837 A KR1020097024837 A KR 1020097024837A KR 20097024837 A KR20097024837 A KR 20097024837A KR 101384498 B1 KR101384498 B1 KR 101384498B1
- Authority
- KR
- South Korea
- Prior art keywords
- dots
- solar cell
- wafer
- metal contact
- regions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F10/00—Individual photovoltaic cells, e.g. solar cells
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/20—Electrodes
- H10F77/206—Electrodes for devices having potential barriers
- H10F77/211—Electrodes for devices having potential barriers for photovoltaic cells
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F10/00—Individual photovoltaic cells, e.g. solar cells
- H10F10/10—Individual photovoltaic cells, e.g. solar cells having potential barriers
- H10F10/14—Photovoltaic cells having only PN homojunction potential barriers
- H10F10/146—Back-junction photovoltaic cells, e.g. having interdigitated base-emitter regions on the back side
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/20—Electrodes
- H10F77/206—Electrodes for devices having potential barriers
- H10F77/211—Electrodes for devices having potential barriers for photovoltaic cells
- H10F77/219—Arrangements for electrodes of back-contact photovoltaic cells
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W20/00—Interconnections in chips, wafers or substrates
- H10W20/01—Manufacture or treatment
- H10W20/071—Manufacture or treatment of dielectric parts thereof
- H10W20/081—Manufacture or treatment of dielectric parts thereof by forming openings in the dielectric parts
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P50/00—Etching of wafers, substrates or parts of devices
- H10P50/73—Etching of wafers, substrates or parts of devices using masks for insulating materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
- H10P76/40—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising inorganic materials
- H10P76/408—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising inorganic materials characterised by their sizes, orientations, dispositions, behaviours or shapes
- H10P76/4085—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising inorganic materials characterised by their sizes, orientations, dispositions, behaviours or shapes characterised by the processes involved to create the masks
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Photovoltaic Devices (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Sustainable Development (AREA)
- Sustainable Energy (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/807,567 | 2007-05-29 | ||
| US11/807,567 US7838062B2 (en) | 2007-05-29 | 2007-05-29 | Array of small contacts for solar cell fabrication |
| PCT/US2008/006017 WO2008150344A1 (en) | 2007-05-29 | 2008-05-12 | Array of small contacts for solar cell fabrication |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20100017457A KR20100017457A (ko) | 2010-02-16 |
| KR101384498B1 true KR101384498B1 (ko) | 2014-04-14 |
Family
ID=40088567
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020097024837A Expired - Fee Related KR101384498B1 (ko) | 2007-05-29 | 2008-05-12 | 태양 전지 제조를 위한 소형 컨택트 어레이 |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US7838062B2 (enExample) |
| EP (1) | EP2153466B1 (enExample) |
| JP (2) | JP5791896B2 (enExample) |
| KR (1) | KR101384498B1 (enExample) |
| CN (1) | CN101681902B (enExample) |
| AU (1) | AU2008260627B2 (enExample) |
| WO (1) | WO2008150344A1 (enExample) |
Families Citing this family (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080202577A1 (en) | 2007-02-16 | 2008-08-28 | Henry Hieslmair | Dynamic design of solar cell structures, photovoltaic modules and corresponding processes |
| US7838062B2 (en) * | 2007-05-29 | 2010-11-23 | Sunpower Corporation | Array of small contacts for solar cell fabrication |
| US20100294349A1 (en) * | 2009-05-20 | 2010-11-25 | Uma Srinivasan | Back contact solar cells with effective and efficient designs and corresponding patterning processes |
| US8211731B2 (en) | 2010-06-07 | 2012-07-03 | Sunpower Corporation | Ablation of film stacks in solar cell fabrication processes |
| US8263899B2 (en) | 2010-07-01 | 2012-09-11 | Sunpower Corporation | High throughput solar cell ablation system |
| US8912083B2 (en) | 2011-01-31 | 2014-12-16 | Nanogram Corporation | Silicon substrates with doped surface contacts formed from doped silicon inks and corresponding processes |
| US8586403B2 (en) | 2011-02-15 | 2013-11-19 | Sunpower Corporation | Process and structures for fabrication of solar cells with laser ablation steps to form contact holes |
| US8692111B2 (en) | 2011-08-23 | 2014-04-08 | Sunpower Corporation | High throughput laser ablation processes and structures for forming contact holes in solar cells |
| US8822262B2 (en) | 2011-12-22 | 2014-09-02 | Sunpower Corporation | Fabricating solar cells with silicon nanoparticles |
| US8513045B1 (en) | 2012-01-31 | 2013-08-20 | Sunpower Corporation | Laser system with multiple laser pulses for fabrication of solar cells |
| FR2995451B1 (fr) * | 2012-09-11 | 2014-10-24 | Commissariat Energie Atomique | Procede de metallisation d'une cellule photovoltaique et cellule photovoltaique ainsi obtenue |
| US9577134B2 (en) * | 2013-12-09 | 2017-02-21 | Sunpower Corporation | Solar cell emitter region fabrication using self-aligned implant and cap |
| US9337369B2 (en) * | 2014-03-28 | 2016-05-10 | Sunpower Corporation | Solar cells with tunnel dielectrics |
| US9911874B2 (en) * | 2014-05-30 | 2018-03-06 | Sunpower Corporation | Alignment free solar cell metallization |
| US9559219B1 (en) * | 2014-06-23 | 2017-01-31 | Sandia Corporation | Fast process flow, on-wafer interconnection and singulation for MEPV |
| US10840394B2 (en) | 2015-09-25 | 2020-11-17 | Total Marketing Services | Conductive strip based mask for metallization of semiconductor devices |
| USD822890S1 (en) | 2016-09-07 | 2018-07-10 | Felxtronics Ap, Llc | Lighting apparatus |
| US10775030B2 (en) | 2017-05-05 | 2020-09-15 | Flex Ltd. | Light fixture device including rotatable light modules |
| USD877964S1 (en) | 2017-08-09 | 2020-03-10 | Flex Ltd. | Lighting module |
| USD862777S1 (en) | 2017-08-09 | 2019-10-08 | Flex Ltd. | Lighting module wide distribution lens |
| USD872319S1 (en) | 2017-08-09 | 2020-01-07 | Flex Ltd. | Lighting module LED light board |
| USD833061S1 (en) | 2017-08-09 | 2018-11-06 | Flex Ltd. | Lighting module locking endcap |
| USD846793S1 (en) | 2017-08-09 | 2019-04-23 | Flex Ltd. | Lighting module locking mechanism |
| USD832494S1 (en) | 2017-08-09 | 2018-10-30 | Flex Ltd. | Lighting module heatsink |
| USD832495S1 (en) | 2017-08-18 | 2018-10-30 | Flex Ltd. | Lighting module locking mechanism |
| USD862778S1 (en) | 2017-08-22 | 2019-10-08 | Flex Ltd | Lighting module lens |
| USD888323S1 (en) | 2017-09-07 | 2020-06-23 | Flex Ltd | Lighting module wire guard |
| JP6875252B2 (ja) | 2017-10-26 | 2021-05-19 | 信越化学工業株式会社 | ポリイミドペーストの乾燥方法及び高光電変換効率太陽電池の製造方法 |
| DE102021106232A1 (de) * | 2021-03-15 | 2022-09-15 | Airbus Operations Gmbh | Lackierverfahren mit gedruckter Maske sowie Druckvorrichtung |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6387726B1 (en) | 1999-12-30 | 2002-05-14 | Sunpower Corporation | Method of fabricating a silicon solar cell |
| US6423568B1 (en) | 1999-12-30 | 2002-07-23 | Sunpower Corporation | Method of fabricating a silicon solar cell |
| US20050090029A1 (en) | 2003-02-05 | 2005-04-28 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing a display device |
Family Cites Families (44)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US4234352A (en) | 1978-07-26 | 1980-11-18 | Electric Power Research Institute, Inc. | Thermophotovoltaic converter and cell for use therein |
| EP0018924B2 (fr) | 1979-05-08 | 1989-01-04 | Saint Gobain Vitrage International | Procédé de fabrication de panneaux de photopiles solaires et panneaux obtenus par ce procédé |
| US4429657A (en) * | 1979-12-13 | 1984-02-07 | Additive Technology Corporation | Method, materials and apparatus for manufacturing printed circuits |
| US4387116A (en) | 1981-12-28 | 1983-06-07 | Exxon Research And Engineering Co. | Conditioner for adherence of nickel to a tin oxide surface |
| US4478879A (en) | 1983-02-10 | 1984-10-23 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Screen printed interdigitated back contact solar cell |
| US4838952A (en) | 1988-04-29 | 1989-06-13 | Spectrolab, Inc. | Controlled reflectance solar cell |
| US4927770A (en) | 1988-11-14 | 1990-05-22 | Electric Power Research Inst. Corp. Of District Of Columbia | Method of fabricating back surface point contact solar cells |
| US5217539A (en) | 1991-09-05 | 1993-06-08 | The Boeing Company | III-V solar cells and doping processes |
| US5053083A (en) | 1989-05-08 | 1991-10-01 | The Board Of Trustees Of The Leland Stanford Junior University | Bilevel contact solar cells |
| US5164019A (en) | 1991-07-31 | 1992-11-17 | Sunpower Corporation | Monolithic series-connected solar cells having improved cell isolation and method of making same |
| US5185042A (en) | 1991-08-01 | 1993-02-09 | Trw Inc. | Generic solar cell array using a printed circuit substrate |
| US5360990A (en) | 1993-03-29 | 1994-11-01 | Sunpower Corporation | P/N junction device having porous emitter |
| US5369291A (en) | 1993-03-29 | 1994-11-29 | Sunpower Corporation | Voltage controlled thyristor |
| US5468652A (en) | 1993-07-14 | 1995-11-21 | Sandia Corporation | Method of making a back contacted solar cell |
| EP0645444A3 (en) * | 1993-09-27 | 1995-05-24 | Texaco Development Corp | Lubricant with overbased detergents made from linear alkyl aromatics. |
| EP0840381A3 (en) | 1996-10-31 | 1999-08-04 | Sony Corporation | Thin-film semiconductor device and its manufacturing method and apparatus and thin-film semiconductor solar cell module and its manufacturing method |
| JP3639703B2 (ja) * | 1997-11-14 | 2005-04-20 | キヤノン株式会社 | インクジェット記録装置およびインクジェット記録方法 |
| US5972732A (en) | 1997-12-19 | 1999-10-26 | Sandia Corporation | Method of monolithic module assembly |
| US6278054B1 (en) | 1998-05-28 | 2001-08-21 | Tecstar Power Systems, Inc. | Solar cell having an integral monolithically grown bypass diode |
| US6337283B1 (en) | 1999-12-30 | 2002-01-08 | Sunpower Corporation | Method of fabricating a silicon solar cell |
| US6274402B1 (en) * | 1999-12-30 | 2001-08-14 | Sunpower Corporation | Method of fabricating a silicon solar cell |
| US6313395B1 (en) | 2000-04-24 | 2001-11-06 | Sunpower Corporation | Interconnect structure for solar cells and method of making same |
| JP3968554B2 (ja) * | 2000-05-01 | 2007-08-29 | セイコーエプソン株式会社 | バンプの形成方法及び半導体装置の製造方法 |
| US6333457B1 (en) | 2000-08-29 | 2001-12-25 | Sunpower Corporation | Edge passivated silicon solar/photo cell and method of manufacture |
| GB2367788A (en) * | 2000-10-16 | 2002-04-17 | Seiko Epson Corp | Etching using an ink jet print head |
| JP4137415B2 (ja) | 2000-11-21 | 2008-08-20 | シャープ株式会社 | 太陽電池セルの交換方法 |
| DE10139441C1 (de) | 2001-08-10 | 2002-10-10 | Astrium Gmbh | Verfahren zur Reparatur eines Solar-Panels |
| JP2003298078A (ja) | 2002-03-29 | 2003-10-17 | Ebara Corp | 光起電力素子 |
| US6872321B2 (en) * | 2002-09-25 | 2005-03-29 | Lsi Logic Corporation | Direct positive image photo-resist transfer of substrate design |
| JP2004134499A (ja) * | 2002-10-09 | 2004-04-30 | Sharp Corp | 太陽電池の製造方法およびその製造装置 |
| JP2004209887A (ja) * | 2003-01-07 | 2004-07-29 | Seiko Epson Corp | 液体吐出装置、液体吐出方法、プログラム及びコンピュータシステム |
| US7388147B2 (en) | 2003-04-10 | 2008-06-17 | Sunpower Corporation | Metal contact structure for solar cell and method of manufacture |
| JP4344270B2 (ja) * | 2003-05-30 | 2009-10-14 | セイコーエプソン株式会社 | 液晶表示装置の製造方法 |
| US6998288B1 (en) | 2003-10-03 | 2006-02-14 | Sunpower Corporation | Use of doped silicon dioxide in the fabrication of solar cells |
| JP2006073617A (ja) * | 2004-08-31 | 2006-03-16 | Sharp Corp | 太陽電池およびその製造方法 |
| JP4605361B2 (ja) * | 2004-10-29 | 2011-01-05 | 独立行政法人科学技術振興機構 | 箔及びその製造方法 |
| JP2006156542A (ja) * | 2004-11-26 | 2006-06-15 | Seiko Epson Corp | インクジェット方式を使用したレジストパターンの形成方法、弾性表面波素子片の製造方法および弾性表面波デバイス |
| JP5000119B2 (ja) * | 2005-02-17 | 2012-08-15 | Jx日鉱日石エネルギー株式会社 | 色素増感型太陽電池素子 |
| US7554031B2 (en) * | 2005-03-03 | 2009-06-30 | Sunpower Corporation | Preventing harmful polarization of solar cells |
| JP4656996B2 (ja) * | 2005-04-21 | 2011-03-23 | シャープ株式会社 | 太陽電池 |
| JP2007125855A (ja) * | 2005-11-07 | 2007-05-24 | Sony Corp | 画像形成方法 |
| US20070295399A1 (en) * | 2005-12-16 | 2007-12-27 | Bp Corporation North America Inc. | Back-Contact Photovoltaic Cells |
| US7838062B2 (en) * | 2007-05-29 | 2010-11-23 | Sunpower Corporation | Array of small contacts for solar cell fabrication |
| US8274402B1 (en) | 2008-01-24 | 2012-09-25 | LDARtools, Inc. | Data collection process for optical leak detection |
-
2007
- 2007-05-29 US US11/807,567 patent/US7838062B2/en active Active
-
2008
- 2008-05-12 KR KR1020097024837A patent/KR101384498B1/ko not_active Expired - Fee Related
- 2008-05-12 EP EP08754346.8A patent/EP2153466B1/en not_active Not-in-force
- 2008-05-12 CN CN2008800161241A patent/CN101681902B/zh active Active
- 2008-05-12 JP JP2010510284A patent/JP5791896B2/ja not_active Expired - Fee Related
- 2008-05-12 WO PCT/US2008/006017 patent/WO2008150344A1/en not_active Ceased
- 2008-05-12 AU AU2008260627A patent/AU2008260627B2/en active Active
-
2010
- 2010-11-18 US US12/949,523 patent/US8883247B2/en active Active
-
2014
- 2014-04-09 JP JP2014080282A patent/JP5767359B2/ja not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6387726B1 (en) | 1999-12-30 | 2002-05-14 | Sunpower Corporation | Method of fabricating a silicon solar cell |
| US6423568B1 (en) | 1999-12-30 | 2002-07-23 | Sunpower Corporation | Method of fabricating a silicon solar cell |
| US20050090029A1 (en) | 2003-02-05 | 2005-04-28 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing a display device |
Also Published As
| Publication number | Publication date |
|---|---|
| EP2153466A4 (en) | 2014-04-09 |
| JP5791896B2 (ja) | 2015-10-07 |
| JP2010528487A (ja) | 2010-08-19 |
| EP2153466B1 (en) | 2015-10-21 |
| US20080299297A1 (en) | 2008-12-04 |
| CN101681902A (zh) | 2010-03-24 |
| US8883247B2 (en) | 2014-11-11 |
| AU2008260627B2 (en) | 2013-08-15 |
| US20110061731A1 (en) | 2011-03-17 |
| JP5767359B2 (ja) | 2015-08-19 |
| CN101681902B (zh) | 2012-07-04 |
| EP2153466A1 (en) | 2010-02-17 |
| JP2014168076A (ja) | 2014-09-11 |
| US7838062B2 (en) | 2010-11-23 |
| KR20100017457A (ko) | 2010-02-16 |
| WO2008150344A1 (en) | 2008-12-11 |
| AU2008260627A1 (en) | 2008-12-11 |
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| PA0105 | International application |
St.27 status event code: A-0-1-A10-A15-nap-PA0105 |
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| PG1501 | Laying open of application |
St.27 status event code: A-1-1-Q10-Q12-nap-PG1501 |
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| R18-X000 | Changes to party contact information recorded |
St.27 status event code: A-3-3-R10-R18-oth-X000 |
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| A201 | Request for examination | ||
| PA0201 | Request for examination |
St.27 status event code: A-1-2-D10-D11-exm-PA0201 |
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| P22-X000 | Classification modified |
St.27 status event code: A-2-2-P10-P22-nap-X000 |
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| E701 | Decision to grant or registration of patent right | ||
| P22-X000 | Classification modified |
St.27 status event code: A-2-2-P10-P22-nap-X000 |
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| PE0701 | Decision of registration |
St.27 status event code: A-1-2-D10-D22-exm-PE0701 |
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| GRNT | Written decision to grant | ||
| PR0701 | Registration of establishment |
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