KR101374022B1 - 엑시머 램프 - Google Patents

엑시머 램프 Download PDF

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Publication number
KR101374022B1
KR101374022B1 KR20100011609A KR20100011609A KR101374022B1 KR 101374022 B1 KR101374022 B1 KR 101374022B1 KR 20100011609 A KR20100011609 A KR 20100011609A KR 20100011609 A KR20100011609 A KR 20100011609A KR 101374022 B1 KR101374022 B1 KR 101374022B1
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KR
South Korea
Prior art keywords
gas
iodine
discharge
xenon
excimer
Prior art date
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KR20100011609A
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English (en)
Korean (ko)
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KR20100105362A (ko
Inventor
유키히로 모리모토
사토시 마츠자와
Original Assignee
우시오덴키 가부시키가이샤
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Publication of KR20100105362A publication Critical patent/KR20100105362A/ko
Application granted granted Critical
Publication of KR101374022B1 publication Critical patent/KR101374022B1/ko

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  • Discharge Lamp (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
  • Physics & Mathematics (AREA)
  • Liquid Crystal (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
KR20100011609A 2009-03-16 2010-02-08 엑시머 램프 KR101374022B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2009-062664 2009-03-16
JP2009062664A JP5304354B2 (ja) 2009-03-16 2009-03-16 エキシマランプ

Publications (2)

Publication Number Publication Date
KR20100105362A KR20100105362A (ko) 2010-09-29
KR101374022B1 true KR101374022B1 (ko) 2014-03-12

Family

ID=42744144

Family Applications (1)

Application Number Title Priority Date Filing Date
KR20100011609A KR101374022B1 (ko) 2009-03-16 2010-02-08 엑시머 램프

Country Status (4)

Country Link
JP (1) JP5304354B2 (ja)
KR (1) KR101374022B1 (ja)
CN (1) CN101840839B (ja)
TW (1) TWI449082B (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110797253A (zh) * 2019-10-30 2020-02-14 深圳市嘉光科技有限公司 一种双面发均匀平行光的长方形准分子灯

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0794150A (ja) * 1993-07-30 1995-04-07 Toshiba Lighting & Technol Corp 希ガス放電灯およびこれを用いた表示装置
JPH11265688A (ja) * 1997-12-12 1999-09-28 Resonance Ltd 無電極ランプ
KR20040100998A (ko) * 2003-05-19 2004-12-02 우시오덴키 가부시키가이샤 엑시머 램프 발광 장치
KR20050025251A (ko) * 2003-09-04 2005-03-14 우시오덴키 가부시키가이샤 엑시머 램프

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH031436A (ja) * 1988-10-04 1991-01-08 Minoru Obara 高効率エキシマ放電ランプ
EP0521553B1 (en) * 1991-07-01 1996-04-24 Koninklijke Philips Electronics N.V. High-pressure glow discharge lamp
EP1815498A2 (en) * 2004-11-19 2007-08-08 Koninklijke Philips Electronics N.V. Rapid re-strike ceramic discharge metal halide lamp
JP2006302720A (ja) * 2005-04-22 2006-11-02 Ｈｏｙａ Ｃａｎｄｅｏ Ｏｐｔｒｏｎｉｃｓ株式会社 エキシマランプ
JP5019156B2 (ja) * 2006-08-21 2012-09-05 ウシオ電機株式会社 エキシマランプ装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0794150A (ja) * 1993-07-30 1995-04-07 Toshiba Lighting & Technol Corp 希ガス放電灯およびこれを用いた表示装置
JPH11265688A (ja) * 1997-12-12 1999-09-28 Resonance Ltd 無電極ランプ
KR20040100998A (ko) * 2003-05-19 2004-12-02 우시오덴키 가부시키가이샤 엑시머 램프 발광 장치
KR20050025251A (ko) * 2003-09-04 2005-03-14 우시오덴키 가부시키가이샤 엑시머 램프

Also Published As

Publication number Publication date
JP2010218804A (ja) 2010-09-30
TWI449082B (zh) 2014-08-11
CN101840839B (zh) 2014-09-17
KR20100105362A (ko) 2010-09-29
JP5304354B2 (ja) 2013-10-02
TW201118916A (en) 2011-06-01
CN101840839A (zh) 2010-09-22

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