KR101369934B1 - 저온 정화기를 사용하는 유체 정화 시스템 - Google Patents

저온 정화기를 사용하는 유체 정화 시스템 Download PDF

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Publication number
KR101369934B1
KR101369934B1 KR1020077011833A KR20077011833A KR101369934B1 KR 101369934 B1 KR101369934 B1 KR 101369934B1 KR 1020077011833 A KR1020077011833 A KR 1020077011833A KR 20077011833 A KR20077011833 A KR 20077011833A KR 101369934 B1 KR101369934 B1 KR 101369934B1
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temperature
fluid
purifier
matrix
matrix fluid
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Korean (ko)
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KR20070084549A (ko
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조셉 브이. 비닌스키
2세 로버트 토레스
버지니아 에이취. 홀딩
해럴드 스파이서
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매티슨 트라이-개스, 인크.
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/002—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by condensation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/10—Capture or disposal of greenhouse gases of nitrous oxide (N2O)

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Drying Of Gases (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
KR1020077011833A 2004-10-25 2005-10-19 저온 정화기를 사용하는 유체 정화 시스템 Expired - Fee Related KR101369934B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US62187104P 2004-10-25 2004-10-25
US60/621,871 2004-10-25
US11/252,200 2005-10-17
US11/252,200 US7314506B2 (en) 2004-10-25 2005-10-17 Fluid purification system with low temperature purifier
PCT/US2005/038222 WO2006057748A2 (en) 2004-10-25 2005-10-19 Fluid purification system with low temperature purifier

Related Child Applications (1)

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KR1020137008376A Division KR101369935B1 (ko) 2004-10-25 2005-10-19 저온 정화기를 사용하는 유체 정화 시스템

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KR20070084549A KR20070084549A (ko) 2007-08-24
KR101369934B1 true KR101369934B1 (ko) 2014-03-06

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KR1020137008376A Expired - Fee Related KR101369935B1 (ko) 2004-10-25 2005-10-19 저온 정화기를 사용하는 유체 정화 시스템

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US (1) US7314506B2 (enExample)
EP (1) EP1817095A4 (enExample)
JP (1) JP2008517744A (enExample)
KR (2) KR101369934B1 (enExample)
TW (1) TWI411462B (enExample)
WO (1) WO2006057748A2 (enExample)

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US7638058B2 (en) 2005-04-07 2009-12-29 Matheson Tri-Gas Fluid storage and purification method and system
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US7981810B1 (en) 2006-06-08 2011-07-19 Novellus Systems, Inc. Methods of depositing highly selective transparent ashable hardmask films
WO2008004278A1 (fr) 2006-07-04 2008-01-10 Toshiba Mitsubishi-Electric Industrial Systems Corporation Procédé et dispositif de concentration / dilution de gaz spécifique
US7981777B1 (en) 2007-02-22 2011-07-19 Novellus Systems, Inc. Methods of depositing stable and hermetic ashable hardmask films
US7915166B1 (en) 2007-02-22 2011-03-29 Novellus Systems, Inc. Diffusion barrier and etch stop films
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US20090060819A1 (en) * 2007-08-29 2009-03-05 Bill Jr Jon M Process for producing trichlorosilane
DE112008002299T5 (de) * 2007-08-29 2010-07-22 Dynamic Engineering, Inc., Sturgis Verfahren zur Herstellung von Trichlorsilan
US8962101B2 (en) 2007-08-31 2015-02-24 Novellus Systems, Inc. Methods and apparatus for plasma-based deposition
US20090068086A1 (en) * 2007-09-07 2009-03-12 Richard Allen Hogle Method and apparatus for the production of high purity tungsten hexafluoride
US20110014100A1 (en) * 2008-05-21 2011-01-20 Bara Jason E Carbon Sequestration Using Ionic Liquids
US20090291872A1 (en) * 2008-05-21 2009-11-26 The Regents Of The University Of Colorado Ionic Liquids and Methods For Using the Same
US7820556B2 (en) * 2008-06-04 2010-10-26 Novellus Systems, Inc. Method for purifying acetylene gas for use in semiconductor processes
US8435608B1 (en) * 2008-06-27 2013-05-07 Novellus Systems, Inc. Methods of depositing smooth and conformal ashable hard mask films
US8129577B2 (en) 2008-09-16 2012-03-06 Air Products And Chemicals, Inc. Process and system for providing acetylene
WO2010065880A2 (en) * 2008-12-05 2010-06-10 Matheson Tri-Gas, Inc. Acetylene process gas purification methods and systems
US7955990B2 (en) * 2008-12-12 2011-06-07 Novellus Systems, Inc. Method for improved thickness repeatability of PECVD deposited carbon films
US8563414B1 (en) 2010-04-23 2013-10-22 Novellus Systems, Inc. Methods for forming conductive carbon films by PECVD
DE102010061144A1 (de) * 2010-12-09 2012-06-14 Gsi Helmholtzzentrum Für Schwerionenforschung Gmbh Kühlfalle
ITMI20120676A1 (it) * 2012-04-24 2013-10-25 Getters Spa Metodo e dispositivo rigenerabile di purificazione a temperatura ambiente per monossido di diazoto
SG195494A1 (en) 2012-05-18 2013-12-30 Novellus Systems Inc Carbon deposition-etch-ash gap fill process
US10279959B2 (en) 2012-12-11 2019-05-07 Versum Materials Us, Llc Alkoxysilylamine compounds and applications thereof
US9362133B2 (en) 2012-12-14 2016-06-07 Lam Research Corporation Method for forming a mask by etching conformal film on patterned ashable hardmask
US9304396B2 (en) 2013-02-25 2016-04-05 Lam Research Corporation PECVD films for EUV lithography
US9320387B2 (en) 2013-09-30 2016-04-26 Lam Research Corporation Sulfur doped carbon hard masks
US9589799B2 (en) 2013-09-30 2017-03-07 Lam Research Corporation High selectivity and low stress carbon hardmask by pulsed low frequency RF power
JP6475943B2 (ja) * 2014-09-26 2019-02-27 大旺新洋株式会社 ガスの分離方法
CN104436992B (zh) * 2014-10-15 2016-08-17 北京氢璞创能科技有限公司 具有前置气体成份分离装置的变压吸附气体提纯器组件
JP6680611B2 (ja) * 2016-04-28 2020-04-15 大旺新洋株式会社 ガスの分離方法
US11027974B2 (en) 2016-11-08 2021-06-08 Matheson Tri-Gas, Inc. Removal of moisture from hydrazine
WO2020242863A1 (en) * 2019-05-24 2020-12-03 Entegris, Inc. Methods and systems for adsorbing organometallic vapor
WO2020243342A1 (en) 2019-05-29 2020-12-03 Lam Research Corporation High selectivity, low stress, and low hydrogen diamond-like carbon hardmasks by high power pulsed low frequency rf
KR102888630B1 (ko) 2019-08-30 2025-11-19 램 리써치 코포레이션 저압에서의 고밀도, 고모듈러스, 및 고경도 비정질 탄소 막들
KR102302551B1 (ko) * 2019-11-21 2021-09-15 이시동 불산의 정제 방법
KR102845376B1 (ko) * 2022-03-08 2025-08-12 크라이오에이치앤아이(주) 배기 가스 처리 장치
CN114570186B (zh) * 2022-03-18 2023-05-12 南京曙光精细化工有限公司 一种含硫硅烷偶联剂生产尾气的环保处理方法
KR20240169462A (ko) 2023-05-24 2024-12-03 한국핵융합에너지연구원 극저온 배관 불순물 포집장치
CN120242666B (zh) * 2025-06-04 2025-08-05 福建德尔科技股份有限公司 一种三氟化磷纯化设备

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US20040069144A1 (en) 2001-04-30 2004-04-15 Wegeng Robert S. Method and apparatus for thermal swing adsorption and thermally-enhanced pressure swing adsorption

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Also Published As

Publication number Publication date
EP1817095A4 (en) 2009-08-12
KR20070084549A (ko) 2007-08-24
HK1111373A1 (zh) 2008-08-08
WO2006057748A3 (en) 2006-07-13
EP1817095A2 (en) 2007-08-15
JP2008517744A (ja) 2008-05-29
KR101369935B1 (ko) 2014-03-06
TW200624154A (en) 2006-07-16
KR20130041380A (ko) 2013-04-24
WO2006057748A2 (en) 2006-06-01
US20060086247A1 (en) 2006-04-27
US7314506B2 (en) 2008-01-01
TWI411462B (zh) 2013-10-11

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