KR101348672B1 - 미립자 물질을 증발시키고 이를 표면상에 응축시켜 층을 형성시키는 방법 - Google Patents

미립자 물질을 증발시키고 이를 표면상에 응축시켜 층을 형성시키는 방법 Download PDF

Info

Publication number
KR101348672B1
KR101348672B1 KR1020127010306A KR20127010306A KR101348672B1 KR 101348672 B1 KR101348672 B1 KR 101348672B1 KR 1020127010306 A KR1020127010306 A KR 1020127010306A KR 20127010306 A KR20127010306 A KR 20127010306A KR 101348672 B1 KR101348672 B1 KR 101348672B1
Authority
KR
South Korea
Prior art keywords
particulate material
organic
vessel
auger
organic particulate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
KR1020127010306A
Other languages
English (en)
Korean (ko)
Other versions
KR20120059628A (ko
Inventor
마이클 롱
제레미 매튜 그레이스
브루스 에드워드 코페
Original Assignee
글로벌 오엘이디 테크놀러지 엘엘씨
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/945,940 external-priority patent/US7288285B2/en
Application filed by 글로벌 오엘이디 테크놀러지 엘엘씨 filed Critical 글로벌 오엘이디 테크놀러지 엘엘씨
Publication of KR20120059628A publication Critical patent/KR20120059628A/ko
Application granted granted Critical
Publication of KR101348672B1 publication Critical patent/KR101348672B1/ko
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)
  • Electroluminescent Light Sources (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Chemical Vapour Deposition (AREA)
KR1020127010306A 2004-09-21 2005-09-16 미립자 물질을 증발시키고 이를 표면상에 응축시켜 층을 형성시키는 방법 Expired - Lifetime KR101348672B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US10/945,940 US7288285B2 (en) 2004-09-21 2004-09-21 Delivering organic powder to a vaporization zone
US10/945,940 2004-09-21
US11/134,654 2005-05-20
US11/134,654 US7501152B2 (en) 2004-09-21 2005-05-20 Delivering particulate material to a vaporization zone
PCT/US2005/033132 WO2006034019A2 (en) 2004-09-21 2005-09-16 Delivering particulate material to a vaporization zone

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
KR1020077006394A Division KR20070053286A (ko) 2004-09-21 2005-09-16 미립자 물질의 증발 대역으로의 전달

Publications (2)

Publication Number Publication Date
KR20120059628A KR20120059628A (ko) 2012-06-08
KR101348672B1 true KR101348672B1 (ko) 2014-01-08

Family

ID=35759153

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020127010306A Expired - Lifetime KR101348672B1 (ko) 2004-09-21 2005-09-16 미립자 물질을 증발시키고 이를 표면상에 응축시켜 층을 형성시키는 방법
KR1020077006394A Ceased KR20070053286A (ko) 2004-09-21 2005-09-16 미립자 물질의 증발 대역으로의 전달

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020077006394A Ceased KR20070053286A (ko) 2004-09-21 2005-09-16 미립자 물질의 증발 대역으로의 전달

Country Status (5)

Country Link
US (1) US7501152B2 (https=)
EP (2) EP2239352B1 (https=)
JP (2) JP2008513964A (https=)
KR (2) KR101348672B1 (https=)
WO (1) WO2006034019A2 (https=)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7501151B2 (en) * 2004-09-21 2009-03-10 Eastman Kodak Company Delivering particulate material to a vaporization zone
US20060099344A1 (en) * 2004-11-09 2006-05-11 Eastman Kodak Company Controlling the vaporization of organic material
US7213347B2 (en) * 2005-05-03 2007-05-08 Eastman Kodak Company Metering material to promote rapid vaporization
US7993459B2 (en) * 2005-10-24 2011-08-09 Global Oled Technology Llc Delivering particulate material to a vaporization zone
CN101356296B (zh) * 2006-05-19 2011-03-30 株式会社爱发科 有机蒸镀材料用蒸镀装置、有机薄膜的制造方法
US20080254217A1 (en) * 2007-04-16 2008-10-16 Boroson Michael L Fine control of vaporized organic material
JP5201932B2 (ja) * 2007-09-10 2013-06-05 株式会社アルバック 供給装置、及び有機蒸着装置
JP4974877B2 (ja) * 2007-12-28 2012-07-11 株式会社アルバック 成膜源、成膜装置
JP4996452B2 (ja) * 2007-12-28 2012-08-08 株式会社アルバック 成膜源、成膜装置
US7883583B2 (en) * 2008-01-08 2011-02-08 Global Oled Technology Llc Vaporization apparatus with precise powder metering
US8048230B2 (en) * 2008-11-14 2011-11-01 Global Oled Technology Llc Metering and vaporizing particulate material
US8062427B2 (en) * 2008-11-14 2011-11-22 Global Oled Technology Llc Particulate material metering and vaporization
US7972443B2 (en) * 2008-11-14 2011-07-05 Global Oled Technology Llc Metering of particulate material and vaporization thereof
US20100206234A1 (en) * 2009-02-17 2010-08-19 Michael Long Simplified powder feeding and vaporization apparatus
CN101525743B (zh) * 2009-04-23 2011-06-15 浙江嘉远格隆能源股份有限公司 一种采用近空间升华技术在衬底沉积形成半导体薄膜的方法和装置
JP4974036B2 (ja) * 2009-11-19 2012-07-11 株式会社ジャパンディスプレイセントラル 有機ｅｌ装置の製造方法
DE102011051263B4 (de) 2011-06-22 2022-08-11 Aixtron Se Vorrichtung zur Aerosolerzeugung und Abscheiden einer lichtemittierenden Schicht
DE102011051261A1 (de) 2011-06-22 2012-12-27 Aixtron Se Verfahren und Vorrichtung zum Abscheiden von OLEDs insbesondere Verdampfungsvorrichtung dazu
DE102011051260A1 (de) 2011-06-22 2012-12-27 Aixtron Se Verfahren und Vorrichtung zum Abscheiden von OLEDs
DE102011051931A1 (de) 2011-07-19 2013-01-24 Aixtron Se Vorrichtung und Verfahren zum Bestimmen des Dampfdrucks eines in einem Trägergasstrom verdampften Ausgangsstoffes
KR101450598B1 (ko) * 2012-01-04 2014-10-15 에스엔유 프리시젼 주식회사 연속박막증착장치
DE102020103822A1 (de) 2020-02-13 2021-08-19 Apeva Se Vorrichtung zum Verdampfen eines organischen Pulvers
DE102020116271A1 (de) 2020-06-19 2021-12-23 Apeva Se Vorrichtung und Verfahren zum Verdampfen eines organischen Pulvers
CN112359323B (zh) * 2020-10-28 2021-07-23 广西贝驰汽车科技有限公司 一种金属薄板表面处理用连续式真空镀膜装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06158279A (ja) * 1992-09-02 1994-06-07 Hoechst Ag 薄層の化学物質気相蒸着のための方法および装置
JPH06322521A (ja) * 1993-05-13 1994-11-22 Toyobo Co Ltd 連続蒸着方法およびその装置
JPH0995775A (ja) * 1995-10-02 1997-04-08 Chugai Ro Co Ltd 連続真空蒸着装置のるつぼ機構

Family Cites Families (58)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB502576A (en) 1937-10-14 1939-03-21 Daniel Gardner Improvements in or relating to electric furnaces
US2447789A (en) * 1945-03-23 1948-08-24 Polaroid Corp Evaporating crucible for coating apparatus
NL250330A (https=) 1959-04-09
US3386853A (en) * 1965-12-28 1968-06-04 Paul E. Oberg Spiral vacuum deposition apparatus and method
US3567450A (en) 1968-02-20 1971-03-02 Eastman Kodak Co Photoconductive elements containing substituted triarylamine photoconductors
US3658520A (en) 1968-02-20 1972-04-25 Eastman Kodak Co Photoconductive elements containing as photoconductors triarylamines substituted by active hydrogen-containing groups
JPS5651570A (en) * 1979-09-29 1981-05-09 Clarion Co Ltd Vapor depositing method
US4356429A (en) 1980-07-17 1982-10-26 Eastman Kodak Company Organic electroluminescent cell
JPS57164978A (en) * 1981-04-02 1982-10-09 Mitsubishi Heavy Ind Ltd Wire rod for vapor deposition
US4539507A (en) 1983-03-25 1985-09-03 Eastman Kodak Company Organic electroluminescent devices having improved power conversion efficiencies
DE3518323A1 (de) 1985-05-22 1986-11-27 SEVAR Entsorgungsanlagen GmbH, 8590 Marktredwitz Verfahren und vorrichtung zum trocknen von klaerschlamm
US4885221A (en) 1986-12-06 1989-12-05 Kabushiki Kaisha Toshiba Electrophotography apparatus and electrophtographic process for developing positive image from positive or negative film
US4720432A (en) 1987-02-11 1988-01-19 Eastman Kodak Company Electroluminescent device with organic luminescent medium
US4885211A (en) * 1987-02-11 1989-12-05 Eastman Kodak Company Electroluminescent device with improved cathode
US4769292A (en) * 1987-03-02 1988-09-06 Eastman Kodak Company Electroluminescent device with modified thin film luminescent zone
KR920003591B1 (ko) 1988-04-11 1992-05-04 미쯔비시주우고오교오 가부시기가이샤 연속진공증착장치
US5263267A (en) * 1989-03-20 1993-11-23 Judco Manufacturing, Inc. Method and apparatus for reducing volatile content of sewage sludge and other feed materials
US5059861A (en) 1990-07-26 1991-10-22 Eastman Kodak Company Organic electroluminescent device with stabilizing cathode capping layer
US5059862A (en) 1990-07-26 1991-10-22 Eastman Kodak Company Electroluminescent device with improved cathode
US5061569A (en) 1990-07-26 1991-10-29 Eastman Kodak Company Electroluminescent device with organic electroluminescent medium
US5150006A (en) 1991-08-01 1992-09-22 Eastman Kodak Company Blue emitting internal junction organic electroluminescent device (II)
US5151629A (en) 1991-08-01 1992-09-29 Eastman Kodak Company Blue emitting internal junction organic electroluminescent device (I)
US5141671A (en) 1991-08-01 1992-08-25 Eastman Kodak Company Mixed ligand 8-quinolinolato aluminum chelate luminophors
US5276380A (en) 1991-12-30 1994-01-04 Eastman Kodak Company Organic electroluminescent image display device
US5294870A (en) 1991-12-30 1994-03-15 Eastman Kodak Company Organic electroluminescent multicolor image display device
EP0579151B1 (en) 1992-07-13 1996-10-09 Eastman Kodak Company An internal junction organic electroluminescent device with a novel composition
US5405709A (en) 1993-09-13 1995-04-11 Eastman Kodak Company White light emitting internal junction organic electroluminescent device
JP3813217B2 (ja) 1995-03-13 2006-08-23 パイオニア株式会社 有機エレクトロルミネッセンスディスプレイパネルの製造方法
US5475144A (en) * 1994-06-08 1995-12-12 The University Of Delaware Catalyst and process for synthesis of ketenes from carboxylic acids
US5593788A (en) 1996-04-25 1997-01-14 Eastman Kodak Company Organic electroluminescent devices with high operational stability
US5683823A (en) 1996-01-26 1997-11-04 Eastman Kodak Company White light-emitting organic electroluminescent devices
US5677572A (en) 1996-07-29 1997-10-14 Eastman Kodak Company Bilayer electrode on a n-type semiconductor
US5776623A (en) 1996-07-29 1998-07-07 Eastman Kodak Company Transparent electron-injecting electrode for use in an electroluminescent device
US5645948A (en) 1996-08-20 1997-07-08 Eastman Kodak Company Blue organic electroluminescent devices
EP0891121B8 (en) 1996-12-28 2013-01-02 Futaba Corporation Organic electroluminescent elements
JP3189038B2 (ja) * 1997-01-14 2001-07-16 住友重機械工業株式会社 真空成膜装置の材料供給装置
US5935720A (en) 1997-04-07 1999-08-10 Eastman Kodak Company Red organic electroluminescent devices
US5928802A (en) 1997-05-16 1999-07-27 Eastman Kodak Company Efficient blue organic electroluminescent devices
US5755999A (en) 1997-05-16 1998-05-26 Eastman Kodak Company Blue luminescent materials for organic electroluminescent devices
GB9711237D0 (en) 1997-06-02 1997-07-23 Isis Innovation Organomettallic Complexes
JP3586551B2 (ja) * 1998-01-27 2004-11-10 松下電器産業株式会社 光記録媒体の製造方法及び製造装置
US5945163A (en) * 1998-02-19 1999-08-31 First Solar, Llc Apparatus and method for depositing a material on a substrate
US5935721A (en) 1998-03-20 1999-08-10 Eastman Kodak Company Organic electroluminescent elements for stable electroluminescent
US6140763A (en) 1998-07-28 2000-10-31 Eastman Kodak Company Interfacial electron-injecting layer formed from a doped cathode for organic light-emitting structure
JP2000068055A (ja) 1998-08-26 2000-03-03 Tdk Corp 有機ｅｌ素子用蒸発源、この有機ｅｌ素子用蒸発源を用いた有機ｅｌ素子の製造装置および製造方法
CN1213127C (zh) 1998-09-09 2005-08-03 出光兴产株式会社 有机电致发光器件与苯二胺衍生物
GB9820805D0 (en) 1998-09-25 1998-11-18 Isis Innovation Divalent lanthanide metal complexes
US6208075B1 (en) 1998-11-05 2001-03-27 Eastman Kodak Company Conductive fluorocarbon polymer and method of making same
US6361886B2 (en) 1998-12-09 2002-03-26 Eastman Kodak Company Electroluminescent device with improved hole transport layer
US6020078A (en) 1998-12-18 2000-02-01 Eastman Kodak Company Green organic electroluminescent devices
US6114088A (en) 1999-01-15 2000-09-05 3M Innovative Properties Company Thermal transfer element for forming multilayer devices
CN1226902C (zh) 1999-03-23 2005-11-09 南加利福尼亚大学 在有机发光装置中用作磷光掺杂剂的环金属化金属配合物
CN101312235B (zh) 1999-05-13 2010-06-09 普林斯顿大学理事会 基于电致磷光的极高效有机发光器件
JP3567851B2 (ja) * 2000-04-07 2004-09-22 株式会社デンソー 成膜装置
JP2003089865A (ja) * 2001-09-18 2003-03-28 Cluster Ion Beam Technology Kk 真空蒸着用蒸着材料収納容器及び真空蒸着装置、並びに真空蒸着装置への蒸着材料供給方法
JP2003293121A (ja) * 2002-04-05 2003-10-15 Cluster Ion Beam Technology Kk 蒸着材料供給手段を備えた蒸着用坩堝
JP2003321765A (ja) * 2002-04-30 2003-11-14 Sanyo Shinku Kogyo Kk 有機物の蒸着方法及びこの方法に用いられる蒸着装置ならびに蒸発源
US7501151B2 (en) * 2004-09-21 2009-03-10 Eastman Kodak Company Delivering particulate material to a vaporization zone

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06158279A (ja) * 1992-09-02 1994-06-07 Hoechst Ag 薄層の化学物質気相蒸着のための方法および装置
JPH06322521A (ja) * 1993-05-13 1994-11-22 Toyobo Co Ltd 連続蒸着方法およびその装置
JPH0995775A (ja) * 1995-10-02 1997-04-08 Chugai Ro Co Ltd 連続真空蒸着装置のるつぼ機構

Also Published As

Publication number Publication date
EP1794345A2 (en) 2007-06-13
US20060062920A1 (en) 2006-03-23
WO2006034019A2 (en) 2006-03-30
JP2008513964A (ja) 2008-05-01
KR20070053286A (ko) 2007-05-23
EP2239352A2 (en) 2010-10-13
JP2012229489A (ja) 2012-11-22
WO2006034019A3 (en) 2006-11-09
US7501152B2 (en) 2009-03-10
EP2239352A3 (en) 2011-06-08
EP2239352B1 (en) 2013-06-05
EP1794345B1 (en) 2015-11-18
JP5480332B2 (ja) 2014-04-23
KR20120059628A (ko) 2012-06-08

Similar Documents

Publication Publication Date Title
KR101348672B1 (ko) 미립자 물질을 증발시키고 이를 표면상에 응축시켜 층을 형성시키는 방법
US7288285B2 (en) Delivering organic powder to a vaporization zone
US7288286B2 (en) Delivering organic powder to a vaporization zone
KR101174296B1 (ko) 미립자 물질의 증발 소스로의 전달
JP5054020B2 (ja) シールされた補充容器を用いた堆積システム
EP2242868B1 (en) Vaporization apparatus with precise powder metering
US7993459B2 (en) Delivering particulate material to a vaporization zone

Legal Events

Date Code Title Description
A107 Divisional application of patent
A201 Request for examination
PA0104 Divisional application for international application

St.27 status event code: A-0-1-A10-A18-div-PA0104

St.27 status event code: A-0-1-A10-A16-div-PA0104

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

E601 Decision to refuse application
PE0601 Decision on rejection of patent

St.27 status event code: N-2-6-B10-B15-exm-PE0601

AMND Amendment
J201 Request for trial against refusal decision
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PJ0201 Trial against decision of rejection

St.27 status event code: A-3-3-V10-V11-apl-PJ0201

PB0901 Examination by re-examination before a trial

St.27 status event code: A-6-3-E10-E12-rex-PB0901

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

B701 Decision to grant
PB0701 Decision of registration after re-examination before a trial

St.27 status event code: A-3-4-F10-F13-rex-PB0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U12-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

FPAY Annual fee payment

Payment date: 20161129

Year of fee payment: 4

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

R18-X000 Changes to party contact information recorded

St.27 status event code: A-5-5-R10-R18-oth-X000

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 5

FPAY Annual fee payment

Payment date: 20181220

Year of fee payment: 6

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 6

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 7

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 8

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 9

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 10

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 11

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000

PC1801 Expiration of term

St.27 status event code: N-4-6-H10-H14-oth-PC1801

Not in force date: 20250917

Ip right cessation event data comment text: Termination Category : EXPIRATION_OF_DURATION