KR101348482B1 - 엑시머 램프 - Google Patents

엑시머 램프 Download PDF

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Publication number
KR101348482B1
KR101348482B1 KR1020100011943A KR20100011943A KR101348482B1 KR 101348482 B1 KR101348482 B1 KR 101348482B1 KR 1020100011943 A KR1020100011943 A KR 1020100011943A KR 20100011943 A KR20100011943 A KR 20100011943A KR 101348482 B1 KR101348482 B1 KR 101348482B1
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KR
South Korea
Prior art keywords
tube
excimer lamp
electrode
film
discharge
Prior art date
Application number
KR1020100011943A
Other languages
English (en)
Korean (ko)
Other versions
KR20100105364A (ko
Inventor
신이치로 노자키
유키히로 모리모토
Original Assignee
우시오덴키 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 우시오덴키 가부시키가이샤 filed Critical 우시오덴키 가부시키가이샤
Publication of KR20100105364A publication Critical patent/KR20100105364A/ko
Application granted granted Critical
Publication of KR101348482B1 publication Critical patent/KR101348482B1/ko

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  • Vessels And Coating Films For Discharge Lamps (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Manufacturing & Machinery (AREA)
KR1020100011943A 2009-03-16 2010-02-09 엑시머 램프 KR101348482B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009063144A JP5223741B2 (ja) 2009-03-16 2009-03-16 エキシマランプ
JPJP-P-2009-063144 2009-03-16

Publications (2)

Publication Number Publication Date
KR20100105364A KR20100105364A (ko) 2010-09-29
KR101348482B1 true KR101348482B1 (ko) 2014-01-06

Family

ID=42744143

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020100011943A KR101348482B1 (ko) 2009-03-16 2010-02-09 엑시머 램프

Country Status (4)

Country Link
JP (1) JP5223741B2 (zh)
KR (1) KR101348482B1 (zh)
CN (1) CN101840838B (zh)
TW (1) TWI427670B (zh)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5397455B2 (ja) * 2011-11-22 2014-01-22 ウシオ電機株式会社 希ガス蛍光ランプ
JP6202332B2 (ja) * 2013-03-28 2017-09-27 株式会社Ｇｓユアサ 紫外線ランプ
WO2016147874A1 (ja) * 2015-03-19 2016-09-22 ウシオ電機株式会社 樹脂製チューブの接合方法
JP7107108B2 (ja) * 2018-08-31 2022-07-27 東芝ライテック株式会社 紫外線照射ユニット、紫外線照射装置およびバリア放電ランプ
JP7185521B2 (ja) * 2018-12-26 2022-12-07 株式会社オーク製作所 放電ランプ
TWI757575B (zh) * 2019-01-23 2022-03-11 崇翌科技股份有限公司 準分子燈及準分子燈的製造方法
CN111508816B (zh) * 2019-01-30 2023-06-06 崇翌科技股份有限公司 准分子灯及准分子灯的制造方法
KR102229631B1 (ko) * 2019-05-13 2021-03-18 주식회사 원익큐엔씨 임플란트 표면개질 처리용 자외선 램프
TWI747073B (zh) * 2019-11-01 2021-11-21 崇翌科技股份有限公司 準分子燈
US20240011960A1 (en) * 2020-08-20 2024-01-11 Shimadzu Corporation Inspection apparatus

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10223181A (ja) * 1997-02-07 1998-08-21 Stanley Electric Co Ltd 蛍光ランプ
JP2002093377A (ja) * 2000-09-19 2002-03-29 Ushio Inc 誘電体バリア放電ランプ装置
JP2006269189A (ja) 2005-03-23 2006-10-05 Md Komu:Kk 長尺エキシマランプユニット
JP2008506230A (ja) 2004-07-09 2008-02-28 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 反射器を備えるｕｖｃ／ｖｕｖ誘電体バリア放電ランプ

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3087566B2 (ja) * 1994-03-30 2000-09-11 ウシオ電機株式会社 誘電体バリア放電蛍光ランプ
JP4461707B2 (ja) * 2003-05-06 2010-05-12 ウシオ電機株式会社 エキシマランプ
JP4396415B2 (ja) * 2004-06-24 2010-01-13 ウシオ電機株式会社 光照射装置
JP4305298B2 (ja) * 2004-06-28 2009-07-29 ウシオ電機株式会社 エキシマランプ
TWM289462U (en) * 2005-06-10 2006-04-11 Fu-Kuo Huang After glow lighting film having UV filtering and explosion-proof
JP4749797B2 (ja) * 2005-08-10 2011-08-17 株式会社オーク製作所 エキシマランプ
TWI322999B (en) * 2006-06-30 2010-04-01 Suk Yue Ka A cold electron ultraviolet lamp
TWI402882B (zh) * 2007-03-14 2013-07-21 Jenn Wei Mii 發光元件

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10223181A (ja) * 1997-02-07 1998-08-21 Stanley Electric Co Ltd 蛍光ランプ
JP2002093377A (ja) * 2000-09-19 2002-03-29 Ushio Inc 誘電体バリア放電ランプ装置
JP2008506230A (ja) 2004-07-09 2008-02-28 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 反射器を備えるｕｖｃ／ｖｕｖ誘電体バリア放電ランプ
JP2006269189A (ja) 2005-03-23 2006-10-05 Md Komu:Kk 長尺エキシマランプユニット

Also Published As

Publication number Publication date
TWI427670B (zh) 2014-02-21
CN101840838B (zh) 2014-03-12
TW201118917A (en) 2011-06-01
CN101840838A (zh) 2010-09-22
JP2010218833A (ja) 2010-09-30
JP5223741B2 (ja) 2013-06-26
KR20100105364A (ko) 2010-09-29

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