KR101346048B1 - 기판 검사 장치 - Google Patents

기판 검사 장치 Download PDF

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Publication number
KR101346048B1
KR101346048B1 KR1020070025525A KR20070025525A KR101346048B1 KR 101346048 B1 KR101346048 B1 KR 101346048B1 KR 1020070025525 A KR1020070025525 A KR 1020070025525A KR 20070025525 A KR20070025525 A KR 20070025525A KR 101346048 B1 KR101346048 B1 KR 101346048B1
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KR
South Korea
Prior art keywords
substrate
board
conveyance
inspection
conveying means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020070025525A
Other languages
English (en)
Korean (ko)
Other versions
KR20070094506A (ko
Inventor
마사루 마쓰모토
노부오 후지사키
Original Assignee
올림푸스 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 올림푸스 가부시키가이샤 filed Critical 올림푸스 가부시키가이샤
Publication of KR20070094506A publication Critical patent/KR20070094506A/ko
Application granted granted Critical
Publication of KR101346048B1 publication Critical patent/KR101346048B1/ko
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • H10P74/27—Structural arrangements therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/36—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations using air tracks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • H10P74/23—Testing or measuring during manufacture or treatment of wafers, substrates or devices characterised by multiple measurements, corrections, marking or sorting processes
    • H10P74/235—Testing or measuring during manufacture or treatment of wafers, substrates or devices characterised by multiple measurements, corrections, marking or sorting processes comprising optical enhancement of defects or not-directly-visible states
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020070025525A 2006-03-16 2007-03-15 기판 검사 장치 Expired - Fee Related KR101346048B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006072772A JP2007248291A (ja) 2006-03-16 2006-03-16 基板検査装置
JPJP-P-2006-00072772 2006-03-16

Publications (2)

Publication Number Publication Date
KR20070094506A KR20070094506A (ko) 2007-09-20
KR101346048B1 true KR101346048B1 (ko) 2013-12-31

Family

ID=38592757

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020070025525A Expired - Fee Related KR101346048B1 (ko) 2006-03-16 2007-03-15 기판 검사 장치

Country Status (4)

Country Link
JP (1) JP2007248291A (https=)
KR (1) KR101346048B1 (https=)
CN (1) CN101038260B (https=)
TW (1) TW200741197A (https=)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009085865A (ja) * 2007-10-02 2009-04-23 Olympus Corp 基板検査装置
TWI464390B (zh) * 2008-02-06 2014-12-11 尼康股份有限公司 Surface inspection device and surface inspection method
TWI381257B (zh) * 2008-07-07 2013-01-01 Race Ahead Technology Co Ltd 自動調整照明強度的基材檢測裝置及方法
CN101936916A (zh) * 2009-07-02 2011-01-05 法国圣-戈班玻璃公司 检测分离的低刚度的透明或半透明体的缺陷的设备和方法
KR101570169B1 (ko) 2014-05-09 2015-11-20 세메스 주식회사 광 배향막 형성 장치
TWI585395B (zh) * 2015-01-27 2017-06-01 政美應用股份有限公司 面板檢測裝置與方法
CN109860080A (zh) * 2018-12-28 2019-06-07 浙江中晶新能源有限公司 一种硅片的定位输送装置
CN111377143A (zh) * 2020-03-24 2020-07-07 杭州酿蜜科技有限公司 一种用于超薄玻璃针对运输的包装设备
CN112192301B (zh) * 2020-10-16 2025-07-04 江苏立导科技有限公司 角度纠偏装置
CN112595722B (zh) * 2021-03-02 2021-06-08 苏州天准科技股份有限公司 一种分段式气浮平台、平台模组和检测设备
TWI870602B (zh) * 2021-06-24 2025-01-21 由田新技股份有限公司 氣浮式輸送平台及其檢測系統
KR102729416B1 (ko) * 2021-12-17 2024-11-13 세메스 주식회사 기판 처리 장치 및 방법
CN119044184B (zh) * 2024-09-06 2025-10-24 马鞍山钢铁股份有限公司 一种龙门架式钢卷端面视觉检测系统及控制方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004345744A (ja) 2003-05-20 2004-12-09 Hitachi Zosen Corp 空気浮上装置および空気浮上式搬送装置
JP2005528586A (ja) * 2001-12-27 2005-09-22 オーボテック リミテッド 浮揚物品搬送システム及び搬送方法
KR20090015792A (ko) * 2007-08-09 2009-02-12 후지쯔 가부시끼가이샤 연마 장치, 기판 및 전자기기의 제조 방법

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE756333A (fr) * 1969-09-19 1971-03-18 Pilkington Brothers Ltd Perfectionnements relatifs au transport de feuilles de verre
KR100582344B1 (ko) * 2003-12-09 2006-05-22 삼성코닝정밀유리 주식회사 유리기판의 검사장치

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005528586A (ja) * 2001-12-27 2005-09-22 オーボテック リミテッド 浮揚物品搬送システム及び搬送方法
JP2004345744A (ja) 2003-05-20 2004-12-09 Hitachi Zosen Corp 空気浮上装置および空気浮上式搬送装置
KR20090015792A (ko) * 2007-08-09 2009-02-12 후지쯔 가부시끼가이샤 연마 장치, 기판 및 전자기기의 제조 방법

Also Published As

Publication number Publication date
CN101038260A (zh) 2007-09-19
JP2007248291A (ja) 2007-09-27
KR20070094506A (ko) 2007-09-20
CN101038260B (zh) 2011-04-20
TW200741197A (en) 2007-11-01

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